| Patent No. | Patent Title: |
| 8189174 | Lithographic apparatus provided with a swap bridge |
| 8189172 | Lithographic apparatus and method |
| 8189175 | Immersion lithography apparatus and tank thereof |
| 8184262 | Pulse to pulse energy equalization of light beam intensity |
| 8184261 | Exposure apparatus |
| 8174668 | Exposure apparatus and method for producing device |
| 8174677 | Illumination optical system for microlithography |
| 8174681 | Calibration of lithographic process models |
| 8174675 | Measuring apparatus, optical system manufacturing method, exposur... |
| 8174676 | Method for correcting a lithography projection objective, and suc... |
| 8174669 | Liquid immersion optical tool, method for cleaning liquid immersi... |
| 8174680 | Substrate handler, lithographic apparatus and device manufacturin... |
| 8169592 | Exposure apparatus and method for producing device |
| 8169595 | Optical apparatus and method for modifying the imaging behavior o... |
| 8169594 | Illumination system of a microlithographic projection exposure ap... |
| 8169591 | Exposure apparatus, exposure method, and method for producing dev... |
| 8164737 | Lithographic apparatus having an active damping subassembly |
| 8164754 | Immersion exposure apparatus and device manufacturing method |
| 8164741 | Lithographic apparatus and device manufacturing method |
| 8164735 | Regulating device, exposure apparatus and device manufacturing me... |
| 8164738 | Illumination optical system, exposure apparatus, and device manuf... |
| 8159647 | Lithographic apparatus and device manufacturing method |
| 8154709 | Method of placing a substrate, method of transferring a substrate... |
| 8154707 | Illumination optical system and exposure apparatus having the sam... |
| 8149382 | Surface position detection apparatus, exposure apparatus, and exp... |
| 8149387 | Method of placing a substrate, method of transferring a substrate... |
| 8149385 | Alignment unit and exposure apparatus |
| 8149381 | Optical element and exposure apparatus |
| 8144308 | Spatial light modulation unit, illumination optical apparatus, ex... |
| 8144306 | Reverse flow gas gauge proximity sensor |
| 8144310 | Positioning system, lithographic apparatus and device manufacturi... |
| 8139202 | Apparatus and a method for illuminating a light-sensitive medium |
| 8134687 | Illumination system of a microlithographic exposure apparatus |
| 8134686 | Immersion exposure apparatus and device manufacturing method |
| 8134688 | Movable body drive method and movable body drive system, pattern ... |
| 8134682 | Exposure apparatus and method for producing device |
| 8134685 | Liquid recovery system, immersion exposure apparatus, immersion e... |
| 8134257 | Lithographic apparatus having a lorentz actuator with a composite... |
| 8134689 | Dual stage positioning and switching system |
| 8130366 | Method for coarse wafer alignment in a lithographic apparatus |
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