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| 7130058 | System and method for determining coordinates on three-dimensiona... |
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| 7075660 | Multi-beam probe with adjustable beam angle |
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| 7064840 | Optical sampling system for simultaneously monitoring intensity m... |
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| 7061618 | Integrated spectroscopy system |
| 7061619 | Chemical substance measuring apparatus using optical waveguides |
| 7057735 | Method for measuring the optical and physical thickness of optica... |
| 7050171 | Single-exposure interferometer with no moving parts |
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| 7034948 | Displacement pickup |
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| 7027164 | Speckle reduction method and system for EUV interferometry |
| 7027161 | Adaptive optical system with self-referencing contrast control |
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