| Patent No. | Patent Title: |
| 6417106 | Underlayer liner for copper damascene in low k dielectric |
| 6391780 | Method to prevent copper CMP dishing |
| 6379981 | Methods incorporating detectable atoms into etching processes |
| 6344364 | Etching methods |
| 6331488 | Planarization process for semiconductor substrates |
| 6323046 | Method and apparatus for endpointing a chemical-mechanical planar... |
| 6323135 | Method of forming reliable capped copper interconnects/with high ... |
| 6318384 | Self cleaning method of forming deep trenches in silicon substrat... |
| 6319420 | Method and apparatus for electrically endpointing a chemical-mech... |
| 6316366 | Method of polishing using multi-oxidizer slurry |
| 6313040 | Process for the definition of openings in a dielectric layer |
| 6309560 | Chemical mechanical polishing slurry useful for copper substrates |
| 6299724 | Direct vapor delivery of enabling chemical for enhanced HF etch p... |
| 6291354 | Method of fabricating a semiconductive device |
| 6287978 | Method of etching a substrate |
| 6287972 | System and method for residue entrapment utilizing a polish and s... |
| 6284309 | Method of producing copper surfaces for improved bonding, composi... |
| 6283131 | In-situ strip process for polysilicon etching in deep sub-micron ... |
| 6280924 | Planarization method using fluid composition including chelating ... |
| 6281131 | Methods of forming electrical contacts |
| 6277236 | Light sensitive chemical-mechanical polishing apparatus and metho... |
| 6270929 | Damascene T-gate using a relacs flow |
| 6271147 | Methods of forming trench isolation regions using spin-on materia... |
| 6271078 | Simplifying conductive plate/via isolation |
| 6267909 | Planarization composition for removing metal films |
| 6265320 | Method of minimizing reactive ion etch damage of organic insulati... |
| 6261968 | Method of forming a self-aligned contact hole on a semiconductor ... |
| 6261967 | Easy to remove hard mask layer for semiconductor device fabricati... |
| 6261963 | Reverse electroplating of barrier metal layer to improve electrom... |
| 6258728 | Plasma etching methods |
| 6254719 | Method for controlled removal of material from a solid surface |
| 6254794 | Etching solution for etching porous silicon, etching method using... |
| 6255226 | Optimized metal etch process to enable the use of aluminum plugs |
| 6254796 | Selective etching of silicate |
| 6255225 | Method of forming a resist pattern, a method of manufacturing sem... |
| 6251542 | Semiconductor wafer etching method |
| 6251784 | Real-time control of chemical-mechanical polishing processing by ... |
| 6248675 | Fabrication of field effect transistors having dual gates with ga... |
| 6240933 | Methods for cleaning semiconductor surfaces |
| 6239036 | Apparatus and method for plasma etching |
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