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| Number | Title | Issue Date |
| 5796488 | Optical target alignment and technique The invention resides in a method of measuring position and angle comprising the steps of providing a tooling telescope, a transparent target surface and an alignment target having a light reflecting face confronting the telescope. The light reflecting fa... | 08/18/1998 |
| 5760891 | Wound web roll sidewall quality measurement Method and apparatus for measuring the quality of the planar end surface of a wound roll comprising: optically projecting a line of light onto the planar end surface of the wound roll to generate and reflect an image of the line of light; focusing the ref... | 06/02/1998 |
| 5757481 | Method for testing a turbidity sensor A method is provided to test turbidity sensors using a solid block that is particularly formulated to have a predetermined turbidity value. The solid block, which is partially transparent, is made by mixing calcium carbonate with a clear acrylic. A plural... | 05/26/1998 |
| 5754299 | Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus The present invention relates to inspection apparatus and method in which, based on images under a plurality of focus conditions formed by way of an optical system to be inspected, namely, using images under a plurality of defocal conditions, tendency in ... | 05/19/1998 |
| 5736819 | Parallel-tuned electronic ballast with special output voltage waveform Power to a self-oscillating inverter ballast is supplied from a DC voltage source through an inductor means having two separate windings on a common magnetic core--with one winding being positioned in each leg of the power supply. The inverter is loaded b... | 04/07/1998 |
| 5715064 | Step and repeat apparatus having enhanced accuracy and increased throughput A multi-station Step and Repeat Apparatus (Stepper) for imaging semiconductor wafers. The stepper has at least 2 stations, at least one of which is for imaging. The second station may be used for image field characterization, or image defect correction, o... | 02/03/1998 |
| 5682225 | Ladar intensity image correction for laser output variations A method and apparatus for generating sharper and more accurate LADAR intensity images is disclosed. The LADAR system includes an optical transmitter and receiver that generates and scans a laser beam in a target field. A backscatter detector senses the m... | 10/28/1997 |
| 5682242 | Method and apparatus for determining a location on a surface of an object A method is proposed for determining a location on an object and for positioning an object, such as a silicon wafer, which has an array of generally perpendicular grid lines on its surface and a plurality of directional features. The method determines the... | 10/28/1997 |
| 5679968 | Transistor having reduced hot carrier implantation A transistor having reduced hot carrier implantation is disclosed which is formed on an outer surface (12) of a semiconductor substrate (10). The transistor comprises a source region (22) and a drain region (24) which define there between a channel region... | 10/21/1997 |
| 5675407 | Color ranging method for high speed low-cost three dimensional surface profile measurement The target of the present invention is to provide an automatic high speed, low-cost, multi-mode three-dimensional(3D) surface profile measurement method. This method exploits the projected energy with a known spatially distributed wavelength spectrum on t... | 10/07/1997 |
| 5668443 | Display fluorescent lamp and display device A display fluorescent lamp comprises; a dielectric cylindrical container having a large-diameter portion in which rare gas is sealed and a small-diameter portion which is almost coaxially connected with the large-diameter portion at one end of the large-d... | 09/16/1997 |
| 5666029 | Fluorescent emergency ballast self test circuit A lighting system composed of: an AC ballast for delivering AC power from an AC power source to a lamp; an emergency power supply for delivering AC power to the lamp when the AC power source fails; and a switch for disconnecting the AC ballast from the AC... | 09/09/1997 |
| 5659393 | Method of and device for measuring the refractive index of wafers of vitreous material A light beam is sent onto a wafer, at different angles of incidence, thus giving rise to fluctuations in the transmittance of the wafer, as the angle of incidence varies, because of interference due to multiple reflections of the beam inside the wafer. Th... | 08/19/1997 |
| 5654609 | Gas discharge lamp and power distribution system therefor Fluorescent type lamps are arranged to have high frequency power derived from standard, commercial A.C. sources either directly or from power levels distributed from a master ballast. When the master ballast is employed, it functions as an interface betwe... | 08/05/1997 |
| 5652657 | Inspection system for original with pellicle An inspection system inspecting an original with a pellicle, which system includes a light source for providing a light beam, a first detecting device for receiving light produced as a result of passage of the light beam through the pellicle, a second det... | 07/29/1997 |
| 5650854 | Method of checking defects in patterns formed on photo masks Disclosed is a patten defect checking method which is affected neither by the presence of a correction pattern or an auxiliary pattern nor by the waveguide effect and which makes it always possible to reliably detect any defect in a pattern formed on a ph... | 07/22/1997 |
| 5650851 | Speckle interference method for remote thickness measurement of a sheet and layer and an apparatus therefor A method and an apparatus are disclosed for remotely determining the thickness of a transparent or semi-transparent suspended sheet or solid or liquid layer, e.g. ice, on a solid surface which is either light-absorbent or highly reflective. The invention ... | 07/22/1997 |
| 5648854 | Alignment system with large area search for wafer edge and global marks A prealignment and global alignment system in a semiconductor wafer lithography system includes reflected light microscopes which form images of a wafer near a wafer loading position. The reflected light microscopes are mounted on the perimeter of a main ... | 07/15/1997 |
| 5648701 | Electrode designs for high pressure magnetically assisted inductively coupled plasmas A plasma system is disclosed comprising a vessel suitable for containing a plasma at a pressure of at least about 100 mtorr, a plasma gas in the vessel at a pressure of at least 100 mtorr, an antenna with a substantially planar face positioned adjacent a ... | 07/15/1997 |
| 5646484 | High reliability incandescent portable illumination system A high reliability portable incandescent illumination system for use in applications which require a reliable, high output light source such as heliport markers, runway lights, warning lights, road hazard and obstruction lights. The required elements of t... | 07/08/1997 |
| 5646724 | Threaded parts inspection device An opto-electronic, threaded parts inspection device. The device includes a source for generating a thin, planar beam of collimated light which is disposed on one side of a parts carrier. The laser light beam is rotatable about two axes, normal to one ano... | 07/08/1997 |
| 5646729 | Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer A single-channel gas concentration measurement method and apparatus. According to the method, a radiant source is employed to generate a measuring signal, the measuring signal is subsequently directed to a measurement object containing a gas mixture to be... | 07/08/1997 |
| 5646730 | Relative movement detecting apparatus using a detector positioned in a region of natural interference The apparatus disclosed herein employs a grating (13) which concentrates light at a preselected wavelength into the positive (33) and negative (35) first orders while minimizing the zeroth order (31). The grating (13) is illuminated with monochromatic lig... | 07/08/1997 |
| 5644392 | Scanning system for lumber A scanning system for wood products to detect grain defects and product geometry simultaneously. Multiple scanner sets cast parallel beams of light at an angle of incidence in a plane that is normal to the surface of the wood product. Scanner sets are pro... | 07/01/1997 |
| 5644393 | Extraneous substance inspection method and apparatus In the present invention, an extraneous substance inspection optical system having an extraneous inspection area of a predetermined scanning width in subscanning direction of a matter to be inspected is positioned in such a manner that the extraneous subs... | 07/01/1997 |
| 5644388 | Imaging flow cytometer nearly simultaneously capturing a plurality of images A sample liquid containing particles are caused to flow through a transparent flow cell. An image capturing device is used to capture different images for a single particle existing in an image capturing area of the flow cell. The image capturing device f... | 07/01/1997 |
| 5644398 | Hole burning effect measurement system A hole burning measurement system realizes accurate analysis of a photochemical hole burning effect in an optical device. The hole burning measurement system includes, a light source for generating a coherent light beam, a first beam splitter for splittin... | 07/01/1997 |
| 5642194 | White light velocity interferometer The invention is a technique that allows the use of broadband and incoherent illumination. Although denoted white light velocimetry, this principle can be applied to any wave phenomenon. For the first time, powerful, compact or inexpensive sources can be ... | 06/24/1997 |
| 5642195 | Dispersion interferometer using orthogonally polarized waves The invention relates to dispersion interferometers for measuring a dispersion portion of the refractive index of an investigated medium by an interferometric method and can be used in the optical industry and in the composition of diagnostic complexes of... | 06/24/1997 |
| 5640243 | Position detection method An image in which a feature corresponding to a reference mark formed at a predetermined position in an exposure apparatus is formed at a predetermined position in an arbitrary area is stored as a reference image, and a reference image including an image c... | 06/17/1997 |
| 5638169 | Method and apparatus for centering optical lens mount An apparatus for turning the external circumference of an optical lens mount, a collimator is optically aligned with the turning axis (y-y). A fixture is mounted on the apparatus to accommodate the lens assembly. The fixture provides a translatory adjustm... | 06/10/1997 |
| 5638177 | Laser interferometer for measuring object displacement over large distances A laser interferometer, used for measuring displacement over long distances (e.g. 100 meters) includes an integral laser/detector unit 10, which emits a beam 12 of laser light. The fraction of the beam 12B which passes undiverted through a beam splitter 1... | 06/10/1997 |
| 5638167 | Method of measuring the light amount of a display picture element, display screen inspecting method and display screen inspecting apparatus A display screen inspecting method wherein, a plurality of display picture elements are selected, as markers, from a display screen and light receiving picture elements corresponding to the display picture elements are selected. The light amounts of the d... | 06/10/1997 |
| 5638179 | Method for measuring amount of bend of moving mirror Test reticle patterns (reticle pattern images) are transferred by exposure onto an unexposed wafer in a plurality of rows parallel to a predetermined direction, and a rotation angle of each reticle pattern image is obtained from an amount of positional di... | 06/10/1997 |
| 5637873 | Directional reflectometer for measuring optical bidirectional reflectance The present invention is a directional reflectometer that measures the optical bidirectional reflectance distribution function [BRDF] of a surface in situ on a finished article, e.g. a vehicle, to provide information on its surface emissivity. The light w... | 06/10/1997 |
| 5638174 | Fluid sensing apparatus with a rotatable member utilizing different length light pipes for alternately transmitting a light beam A apparatus for sensing flow and/or other characteristics of a fluid, including an emitter adapted to project a light beam, a detector adapted to transmit a signal in response to receiving the light beam and a rotatable member for transmitting the beam of... | 06/10/1997 |
| 5636025 | System for optically measuring the surface contour of a part using more fringe techniques An optical measuring system comprises an illumination arrangement including a light source, grating, and lens, and an image acquisition arrangement, including a lens, grating, and camera. A mechanical translation device moves the grating in a plane parall... | 06/03/1997 |
| 5636026 | Method and system for contactless measurement of railroad wheel characteristics All critical wheel wear measurements on a static or in-motion train wheel are taken using a non-contact method/system. The train wheel is measured using a modulated point beam of energy impinging the wheel surface from an orthogonal direction, moving the ... | 06/03/1997 |
| 5636020 | Zone analysis system and method for optimizing the performance of an inspection system for determining disparity between two surfaces A zone analysis system and method (211) optimize speed and minimize adverse effects resulting from noise in an inspection system (90) for measuring disparity between two surfaces. In particular, the zone analysis system and method (211) can be implemented... | 06/03/1997 |
| 5636019 | Air-in-water indicator A method and apparatus are provided that indicate the amount of gas such as air in a clear liquid such as water. The apparatus includes a transparent pipe (60), an input coupling (16) at a first end of the transparent pipe, and a shutoff valve (20) at the... | 06/03/1997 |
