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| 8174673 | Method for wafer alignment |
| 8134684 | Immersion lithography using hafnium-based nanoparticles |
| 8054449 | Enhancing the image contrast of a high resolution exposure tool |
| 8041008 | Diagnostic delivery service |
| 8035797 | Projection exposure apparatus, cleaning and maintenance methods o... |
| 8031838 | Diagnostic delivery service |
| 8031329 | Overlay mark, and fabrication and application of the same |
| 8031835 | Method and system for translational digital tomosynthesis mammogr... |
| 8031831 | Voltage and or current modulation in dual energy computed tomogra... |
| 8027428 | CT system and method for phase-contrast and absorption imaging |
| 8027021 | Measuring apparatus and method, processing apparatus and method, ... |
| 8027018 | Method and device for producing exposed structures |
| 8027019 | Lithographic apparatus and device manufacturing method |
| 8023620 | X-ray arrangement with a converter and associated X-ray method |
| 8023104 | Microlithographic projection exposure apparatus |
| 8023619 | Adaptive scanning in an imaging system |
| 8023100 | Exposure apparatus, supply method and recovery method, exposure m... |
| 8023101 | Lithographic apparatus and device manufacturing method |
| 8018574 | Lithographic apparatus, radiation system and device manufacturing... |
| 8014489 | Radiographic imaging apparatus and method for controlling the sam... |
| 8014493 | Method and devices for assessing the threat status of an article ... |
| 8013976 | Exposure apparatus, exposure method, and device fabrication metho... |
| 8013977 | Lithographic apparatus, radiation sensor and method of manufactur... |
| 8009795 | Image processing apparatus and X-ray computer tomography apparatu... |
| 8009269 | Optimal rasterization for maskless lithography |
| 8009271 | Projection optical system, exposure apparatus, exposure system, a... |
| 8009799 | Tray for use in assessing the threat status of an article at a se... |
| 8009793 | Method for imaging plaque using dual energy CT |
| 8009800 | Tray for assessing the threat status of an article at a security ... |
| 8009272 | Method and device for image measurement, exposure apparatus, subs... |
| 8005183 | Computed tomography device with active adaptation of the measurin... |
| 8005184 | Ultra low radiation dose X-ray CT scanner |
| 8004650 | Exposure apparatus and device manufacturing method |
| 8000446 | X-ray examination apparatus |
| 7999912 | Lithographic apparatus and sensor calibration method |
| 8000435 | Method and system for error compensation |
| 8000434 | Energy spectrum reconstruction |
| 8000433 | Method of creating images in computed tomography (CT), and CT dev... |
| 7995185 | Systems and methods for thermally-induced aberration correction i... |
| 7995702 | System and method of data interpolation in fast kVp switching dua... |