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| 6716082 | Pinwheel |
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| 6110025 | Containment ring for substrate carrier apparatus |
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| 6074286 | Wafer processing apparatus and method of processing a wafer utili... |
| 6074288 | Modified carrier films to produce more uniformly polished substra... |
| 6062957 | Dry abrasive blasting head having rotating nozzles |
| 6062963 | Retainer ring design for polishing head of chemical-mechanical po... |
| 6053803 | Apparatus and method for generating a pressurized fluid stream ha... |
| 6045437 | Method and apparatus for polishing a hard disk substrate |
| 6033294 | Turntable of nylon fiber grinding wheel |
| 6027398 | Wafer polishing apparatus |
| 6024634 | Grinding product and method of making same |
| 6024631 | Method and apparatus to hold integrated circuit chips onto a chuc... |
| 6014965 | Apparatus for recognizing the shape of a semiconductor wafer |
| 6015337 | Polishing apparatus |
| 6012969 | Abrasive member for very high return loss optical connector ferru... |
| 5997392 | Slurry injection technique for chemical-mechanical polishing |
| 5997386 | Automated deburring assembly |
| 5992404 | Process and device for clearing out joints in masonry |
| 5989102 | Apparatus for facetting ophthalmic lenses |
| 5989104 | Workpiece carrier with monopiece pressure plate and low gimbal po... |
| 5989107 | Method for polishing workpieces and apparatus therefor |
| 5989109 | Seal protecting method for use with spiral-flow barrel finishing ... |
| 5989113 | Tool for mechanical surface treatment |
| 5984764 | Method of dressing an abrasive cloth and apparatus therefor |
| 5980369 | Level flying burnishing head with circular burnishing pads |
| 5975992 | Method and apparatus for edge finishing glass |
| 5975994 | Method and apparatus for selectively conditioning a polished pad ... |
| 5971841 | Flexible, open-pored cleaning body |
| 5971838 | Rail-scraper devices and installations |
| 5967885 | Method of manufacturing an integrated circuit using chemical mech... |
| 5967880 | Method and apparatus for ultrasonically texturing ABS of magnetic... |
| 5964643 | Apparatus and method for in-situ monitoring of chemical mechanica... |
| 5964652 | Apparatus for the chemical-mechanical polishing of wafers |
| 5964644 | Abrasive jet stream polishing |
| 5964648 | Chipper knife grinding method and apparatus |
| 5957757 | Conditioning CMP polishing pad using a high pressure fluid |
| 5957764 | Modular wafer polishing apparatus and method |
| 5957759 | Slurry distribution system that continuously circulates slurry th... |
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