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| Number | Title | Issue Date |
| 7227130 | Method for providing barrier fields at the entrance and exit end of a mass spectrometer A mass spectrometer and a method of operating same is provided. The mass spectrometer has an elongated rod set. The rod set has an entrance end and an exit end. An RF drive voltage is applied to the rod set to radially confine a first group of ions and a second grou... | 06/05/2007 |
| 7126139 | Device and method of positionally accurate implantation of individual particles in a substrate surface A device and a method for positionally accurate implantation of individual particles in a substrate surface (1a) are described. A diaphragm for a particle beam to be directed onto the substrate surface (1a) and a detector provided thereon... | 10/24/2006 |
| 7115859 | Time- of flight mass spectrometers for improving resolution and mass employing an impulse extraction ion source A miniature time-of-flight mass spectrometer (TOF-MS) and method for increasing the collection efficiency of laser-desorbed ions in a miniature time-of-flight mass spectrometer (TOF-MS) is provided. The method provides a laser pulse generated by an ionization extrac... | 10/03/2006 |
| 7112784 | Method of mass spectrometry and a mass spectrometer A method of mass spectrometry is disclosed wherein a gas collision cell is repeatedly switched between a fragmentation and a non-fragmentation mode. Parent ions from a first sample are passed through the collision cell and parent ion mass spectra and fragmentation i... | 09/26/2006 |
| 7091505 | Collector with fastening devices for fastening mirror shells There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by ... | 08/15/2006 |
| 7078711 | Matching dose and energy of multiple ion implanters A method that is sensitive to lattice damage (also called “primary method”) is combined with an additional method that independently measures one of two parameters to which the primary method is sensitive namely dose and energy. In some embodiments, the addition... | 07/18/2006 |
| 7078690 | Monitoring of contact hole production A method for production testing includes receiving a wafer including a semiconductor substrate and a non-conducting layer formed over the substrate, following etching of contact openings through the non-conducting layer to the substrate, the contact openings includi... | 07/18/2006 |
| 7071463 | Calibration method In its most general terms the invention compensates for the effect of the mass offset in the prior art calibration method. This can be achieved either by correcting for the offset or assigning mass to the peaks in such a way that the offset is avoided. Accordingly i... | 07/04/2006 |
| 7067831 | Pulsed solar simulator with improved homogeneity Solar simulator that includes a pulsed radiation source for generating electromagnetic radiation, and at least one mirror element is arranged in a region of the radiation source. The at least one mirror element is structured and arranged to reflect components of rad... | 06/27/2006 |
| 7064319 | Mass spectrometer A mass spectrometer according to the present invention has an ionization source for generating ions; an ion trap for accumulating the ions; a time-of-flight mass spectrometer for performing mass spectrometry analysis on the ions by use of a flight time; a collision ... | 06/20/2006 |
| 7062111 | Optical communication module with one or more photonic integrated circuit (PIC) chips and an external booster optical amplifier for photonic integrated circuits (PICs) A C- and/or L-band booster optical amplifier is utilized at the output of a semiconductor transmitter photonic integrated circuit (TxPIC) chip or the optical combined outputs of multiple semiconductor transmitter photonic integrated circuit (TxPIC) chips employed in... | 06/13/2006 |
| 7060973 | Multi-anode detector with increased dynamic range for time-of-flight mass spectrometers with counting data acquisition A new detection scheme for time-of-flight mass spectrometers is disclosed. This detection scheme allows extending the dynamic range of spectrometers operating with a counting technique (TDC). The extended dynamic range is achieved by constructing a multiple anode de... | 06/13/2006 |
| 7060972 | Triple quadrupole mass spectrometer with capability to perform multiple mass analysis steps A method of analyzing a substance comprises ionizing the substance to form a string of ions. The ions are then subject to a first mass analysis step. In one embodiment, the ions are accelerated into a collision cell in known manner to form primary fragment ions. The... | 06/13/2006 |
| 7049613 | Particle beam irradiation system and method of adjusting irradiation field forming apparatus A particle therapy system, as one example of a particle beam irradiation system, comprises a charged particle beam generator and an irradiation field forming apparatus. An ion beam from the charged particle beam generator is irradiated to a diseased part in the body... | 05/23/2006 |
| 7049581 | Analysis of data from a mass spectrometer A programmed computer analyzes data from a mass spectrometer. A spectrum corresponding to an unknown sample is perturbed in various ways, and each perturbed spectrum is compared with the spectrum of a known or reference substance. The perturbed spectrum having the h... | 05/23/2006 |
| 7045783 | Device and method for object illumination and imaging using light pulses A reduced glare imaging system for motor vehicles which includes at least one light source capable of modulation. The system also includes a synchronization system which has structure for obtaining a time reference, and a trigger for modulating emissions from the li... | 05/16/2006 |
| 7041976 | Automated focusing of electron image One embodiment disclosed relates to a method for automated focusing of an electron image. An EF cut-off voltage is determined. In compensation for a change in the EF cut-off voltage, a focusing condition is adjusted. Adjusting the focusing condition may comprise, fo... | 05/09/2006 |
| 7038201 | Method and apparatus for determining electrical contact wear A fluorescent trace material is provided within at least a portion of an electrical contact or interrupter assembly component, or a cavity defined therein. At least a portion of the fluorescent trace material is exposed or released from the electrical contact or int... | 05/02/2006 |
| 7038224 | Contact opening metrology A method for process monitoring includes receiving a sample having a first layer that is at least partially conductive and a second layer formed over the first layer, following production of contact openings in the second layer by an etch process, the contact openin... | 05/02/2006 |
| 7038217 | Method and apparatus for generation of molecular beam Here is disclosed a method for generation of a molecular beam from a sample solution, comprising steps of operating a spray-in device to introduce the sample solution in atomized state into a spray chamber, impinging a suitable gas on the sample solution in atomized... | 05/02/2006 |
| 7038219 | Sterilization of packages and their contents using light An apparatus, and related methods for sterilizing microorganisms in a container, the apparatus consists of the container including a blister formed therein and a backing material that together with the blister form a cavity in which is contained a contact lens and a... | 05/02/2006 |
| 7034287 | Mass spectrometer and method of use Disclosed is a mass spectrometer combining an ion trap and a TOFMS non-coaxially, wherein ion trapping efficiency, mass resolution, and CID efficiency can be maximized. The present invention relates to the mass spectrometer combining the ion trap and the TOFMS non-c... | 04/25/2006 |
| 7033742 | Method of photothermographic imaging for transmission electron microscopy The present invention is directed to a method of forming a positive image in a photothermographic film exposed by electrons in a transmission electron microscope to form a latent image in the film. The photothermographic film has at least one imaging layer comprisin... | 04/25/2006 |
| 7034314 | Projection apparatus for projecting a pattern formed on a mask onto a substrate and a control method for a projection apparatus A projection apparatus includes a charged particle beam source, a reduction lens, a charged particle shaping aperture having an arcuate opening, a collimator lens, and first and second projection lenses. A charged particle beam emerging from the charged particle bea... | 04/25/2006 |
| 7031573 | Fiber optic devices having volume Bragg grating elements Fiber optic devices including volume Bragg grating (VBG) elements are disclosed. A fiber optic device may include one or more optical inputs, one or more VBG elements, and one or more optical receivers. Methods for manufacturing VBG elements and for controlling filt... | 04/18/2006 |
| 7030394 | Charged particle beam apparatus and automatic astigmatism adjustment method According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capa... | 04/18/2006 |
| 7030373 | MALDI plate construction with grid A MALDI plate construction is provided to support a sample in a manner to effect mass spectrometry of the sample. The plate construction comprises a sample receiving surface, a plate holder for retaining the sample receiving surface and an electrically conductive gr... | 04/18/2006 |
| 7026629 | Lithographic apparatus and device manufacturing method A lithographic apparatus includes a first space containing a plasma source and also containing a source gas which may have a high absorption of radiation at the wavelength of the projection beam of the apparatus, this gas being restricted from entering the remainder... | 04/11/2006 |
| 7022988 | Method and apparatus for measuring physical properties of micro region A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and ir... | 04/04/2006 |
| 7022981 | Mass analysis apparatus and method for mass analysis A mass analysis apparatus comprising a first ion source which ionizes a sample and produces sample ions, a second ion source which produces reactant ions having a polarity opposite to the polarity of the sample ions, and a mass spectrometer, wherein said second ion ... | 04/04/2006 |
| 7023953 | Illumination system and exposure apparatus and method An optical apparatus and method guide EUV radiation to a predetermined surface. A radiation source supplies EUV radiation having a certain dispersion angle. An illumination optical system having a reflective integrator forms a secondary radiation source having a pre... | 04/04/2006 |
| 7019291 | NOx monitor using differential mobility spectrometry System for detection and analysis of gas samples in fieldable real-time Differential Mobility Spectrometry (DMS) chemical sensor system which uses non-radioactive ion source for monitoring and detecting NOx emissions; provides reliable methods for detecting and moni... | 03/28/2006 |
| 7019289 | Ion trap mass spectrometry An ion trap comprises a three-dimensional, rotationally symmetric ring electrode and two cap electrodes with hyperbolic surfaces facing toward the inside of the ion trap, each of the two cap electrodes being further composed of a first hyperbolic cone electrode and ... | 03/28/2006 |
| 7019290 | System and method for modifying the fringing fields of a radio frequency multipole A system and method are described for producing a modifiable fringing field in a multipole instrument, such as a mass spectrometer or an ion guide. The system includes a conductor arrangement having a first pole pair, a second pole pair and an end device for allowin... | 03/28/2006 |
| 7015469 | Electron holography method An inline electron holograph method for observing a specimen with a transmission electron microscope having an electron gun, a collimating lens system, two spaced objective lenses, a biprism, and an imaging means comprises the steps of: with the first objective lens... | 03/21/2006 |
| 7015464 | Apparatus for detecting chemical substances and method therefor An apparatus for detecting chemical substances which is high in sensitivity and selectivity is provided. An organic acid or an organic acid salt is used to generate an organic acid gas from an organic acid gas generator to be mixed with a sample gas for introduction... | 03/21/2006 |
| 7012253 | Transmission electron microscope and three-dimensional observing method An electron beam is emitted from an electron beam source, and deflected at different directions with a deflection plate to form a first electron beam E1 and a second electron beam E2. The first electron beam E1 is incident onto a given portion o... | 03/14/2006 |
| 7009193 | Utilization of an ion gauge in the process chamber of a semiconductor ion implanter A device to implant impurities into a semiconductor wafer has a process chamber having a wall, a pressure compensation unit, a disk to support a plurality of semiconductor wafers within the process chamber. The disk has a radially extending slot arranged among the w... | 03/07/2006 |
| 7005658 | Charged particle beam exposure apparatus and method A multi-charged-particle beam drawing apparatus and method that can correct a change in positional relationship, caused by the Coulomb effect, among charged particle beams are provided. The focal lengths of two electron lenses (21, 22) that form a condenser l... | 02/28/2006 |
| 6998610 | Methods and apparatus for switching ion trap to operate between three-dimensional and two-dimensional mode An ion trap comprises a three-dimensional rotationally symmetric ring electrode and two cap electrodes, the ring electrode is divided, in parallel to its central axis, into a plurality of even number, equal or larger than four, of component electrodes. The component... | 02/14/2006 |
