| Patent No. | Patent Title: |
| 6974951 | Automated in-process ratio mass spectrometry |
| 6825482 | Ion implantation system for manufacturing semiconductor device |
| 6765220 | Infrared scene generator using fluorescent conversion material |
| 6720556 | Electron spectroscopy employing controlled surface charging |
| 6713759 | Apparatus and method for secondary electron emission microscope |
| 6700118 | Thermal drift compensation to mass calibration in time-of-flight ... |
| 6690022 | Ion beam incidence angle and beam divergence monitor |
| 6686601 | Ion sources for ion implantation apparatus |
| 6683304 | Method for a plan-view transmission electron microscopy sample pr... |
| 6680474 | Semiconductor calibration wafer with no charge effect |
| 6680477 | High spatial resolution matrix assisted laser desorption/ionizati... |
| 6677587 | Electron beam apparatus, and inspection instrument and inspection... |
| 6677583 | Liquid chromatograph/mass spectrometer |
| 6669121 | Holder support device |
| 6661018 | Shroud nozzle for gas jet control in an extreme ultraviolet light... |
| 6657208 | Method of forming optical images, mask for use in this method, me... |
| 6657209 | Method and system for determining pressure compensation factors i... |
| 6653641 | Bulk material irradiation system and method |
| 6653639 | Chuck for mounting reticle to a reticle stage |
| 6646275 | Charged particle beam exposure system and method |
| 6646258 | Concave electrode ion pipe |
| 6646261 | SEM provided with a secondary electron detector having a central ... |
| 6635868 | Mass spectrometry apparatus |
| 6635892 | Compact integrated infrared scene projector |
| 6630678 | Ultraviolet air purifying apparatus |
| 6630665 | Device and method preventing ion source gases from entering ... |
| 6630679 | Sample changer for transferring radioactive samples between a hot... |
| 6628503 | Gas cooled electrostatic pin chuck for vacuum applications |
| 6627903 | Methods and devices for calibrating a charged-particle-beam ... |
| 6627901 | Apparatus and method for distribution of dopant gases or vapors i... |
| 6624429 | Lithographic patterning of curved substrates |
| 6624426 | Split magnetic lens for controlling a charged particle beam |
| 6624411 | Method of producing a broad-band signal for an ion trap mass spec... |
| 6624408 | Method for library searches and extraction of structural informat... |
| 6621081 | Method of pole tip sample preparation using FIB |
| 6621087 | Cold light UV irradiation device |
| 6617600 | Radiation shield device and method |
| 6614018 | Process and apparatus for continuous-feed all-isotope separation ... |
| 6614026 | Charged particle beam column |
| 6614024 | Infra-red wireless receiver with novel shielding and IR front end... |
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