| Patent No. | Patent Title: |
| 7439499 | Multiple electrospray probe interface for mass spectrometry |
| 7417223 | Method, system and computer software product for specific identif... |
| 7417235 | Particle detector for secondary ions and direct and or indirect s... |
| 7417241 | Ion implantation method and method for manufacturing semiconducto... |
| 7414242 | Ion mobility spectrometry method and apparatus |
| 7411192 | Focused ion beam apparatus and focused ion beam irradiation metho... |
| 7408154 | Scanning electron microscope, method for measuring a dimension of... |
| 7405407 | Ion beam therapy system and its couch positioning method |
| 7405397 | Laser desorption ion source with ion guide coupling for ion mass ... |
| 7405417 | Lithographic apparatus having a monitoring device for detecting c... |
| 7402799 | MEMS mass spectrometer |
| 7402821 | Application of digital frequency and phase synthesis for control ... |
| 7402800 | Method and device for the continuous determination of damage to s... |
| 7402736 | Method of fabricating a probe having a field effect transistor ch... |
| 7402798 | Apparatus and method for controlling an electrostatically induced... |
| 7399961 | High throughput ion source with multiple ion sprayers and ion len... |
| 7397044 | Imaging mode for linear accelerators |
| 7397054 | Particle beam therapy system and control system for particle beam... |
| 7394080 | Mask superposition for multiple exposures |
| 7394070 | Method and apparatus for inspecting patterns |
| 7391034 | Electron imaging beam with reduced space charge defocusing |
| 7391039 | Semiconductor processing method and system |
| 7388194 | Method and system for high-throughput quantitation using laser de... |
| 7385183 | Substrate processing apparatus using neutralized beam and method ... |
| 7385197 | Electron beam apparatus and a device manufacturing method using t... |
| 7378652 | Nebulizer with plasma source |
| 7375327 | Method and device for measuring quantity of wear |
| 7375329 | Scanning electron microscope |
| 7372051 | Electric charged particle beam microscopy, electric charged parti... |
| 7368713 | Method and apparatus for inspecting semiconductor device |
| 7368728 | Ionization source for mass spectrometry analysis |
| 7365325 | Method and apparatus for observing a specimen |
| 7365306 | Standard member for length measurement, method for producing the ... |
| 7365324 | Testing apparatus using charged particles and device manufacturin... |
| 7355186 | Charged particle beam device with cleaning unit and method of ope... |
| 7351971 | Charged-particle beam instrument and method of detection |
| 7350404 | Scanning type probe microscope and probe moving control method th... |
| 7345291 | Device for irradiation therapy with charged particles |
| 7342224 | Obtaining tandem mass spectrometry data for multiple parent ions ... |
| 7339164 | Systems and methods for ion mobility control |
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