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| 8142674 | Plasma processing apparatus and plasma processing method |
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| 8119528 | Nanoscale electrodes for phase change memory devices |
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| 8083958 | Patterning method using a combination of photolithography and cop... |
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| 8039400 | Reducing contamination of semiconductor substrates during BEOL pr... |
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| 8021563 | Etch depth determination for SGT technology |
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