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| Number | Title | Issue Date |
| 7429732 | Scanning probe microscopy method and apparatus utilizing sample pitch The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) to perform sample measurements using a survey scan that is less than five lines, and more preferably two lines, to accurately locate a field of features o... | 09/30/2008 |
| 7420106 | Scanning probe characterization of surfaces Characterizing dielectric surfaces by detecting electron tunneling. An apparatus includes an atomic force probe. A mechanical actuator is connected to the atomic force probe. A mechanical modulator is connected to the mechanical actuator. The mechanical modulator mo... | 09/02/2008 |
| 7414250 | Cryogenic variable temperature vacuum scanning tunneling microscope A cryogenic variable temperature scanning tunneling microscope of novel design and component configuration, for use in conjunction with a variety of low temperature methodologies. ... | 08/19/2008 |
| 7279046 | Method and apparatus for aligning patterns on a substrate A system and method for aligning prior patterning positions formed by a first SPM tip with a second SPM tip in combination with an SPM system includes identifying first location information that includes a location of the first SPM tip and a sample reference locatio... | 10/09/2007 |
| 6620563 | Lithography method for forming semiconductor devices on a wafer utilizing atomic force microscopy A semiconductor device on a wafer is formed by lithography with the following steps of: coating (13) a lithography resist onto said wafer in a coating means (5), exposing (14) said wafer to an irradiation through a reticle in an exposure tool (4), stabili... | 09/16/2003 |
