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| Number | Title | Issue Date |
| 7918139 | Pirani vacuum gauge A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire... | 04/05/2011 |
| 7694574 | Pirani vacuum gauge A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire... | 04/13/2010 |
| 7607356 | Pirani vacuum gauge A Pirani vacuum gauge in which dependency of temperature of a filament on variation of gas pressure is raised and the gas pressure can be measured with high accuracy. The Pirani vacuum gauge includes a cylindrical body 2 in which the interior communicates wit... | 10/27/2009 |
| 7367235 | Thermal expansion compensated pressure sensor A pressure sensor (30) for environments with wide ranging temperatures such as vehicle tires. The sensor has a conductive sensor membrane (53) exposed to the fluid pressure to be sensed, and a similarly conductive reference membrane subject to a predet... | 05/06/2008 |
| 7360439 | Sample resistance measurement device In a circuit, as the bridge resistance of one side of a Wheatstone bridge circuit, a distortion gauge (fixed reference resistance) of which variation caused by environmental conditions is suppressed and a sample having a resistance component ΔR varied by the enviro... | 04/22/2008 |
| 7331237 | Technique for improving Pirani gauge temperature compensation over its full pressure range A method and apparatus are provided for achieving nearly perfect temperature compensation of a heat-loss vacuum gauge over its full pressure range. A voltage is measured across a sensor leg, a sensor leg and a temperature compensating leg connected together in serie... | 02/19/2008 |
| 7322248 | Pressure gauge for organic materials A vacuum gauge of the Pirani type for measuring the pressure of vaporized organic or inorganic material used in forming a layer of a device, comprising: an extended filament having a thickness of 5 microns or less and having a temperature coefficient of resistance g... | 01/29/2008 |
| 7309865 | Electronic device having infrared sensing elements An electronic device according to the present invention includes: a cavity, which is surrounded with a cavity wall portion and which has a reduced pressure; a gettering thin film, which is arranged in the cavity and has the function of adsorbing a surrounding substa... | 12/18/2007 |
| 7281423 | Characteristics adjusting apparatus of physical quantity sensing device and a thermal type air flow measuring instrument, and associated adjusting method The output characteristics of the sensing device or the control quantity of the sensing element can be adjusted by extracting an adjusting terminal in addition to a power source terminal, a ground terminal, an output terminal and the like outside a housing containin... | 10/16/2007 |
| 7278322 | Semiconductor based pressure sensor The present invention provides a pressure sensor. The pressure sensor comprises a substrate with several support structures attached to the substrate. The pressure sensor further includes a strut structure integrated with a heating element. The strut structure is en... | 10/09/2007 |
| 7230315 | Integrated chemical microreactor with large area channels and manufacturing process thereof The microreactor has a body of semiconductor material; a large area buried channel extending in the body and having walls; a coating layer of insulating material coating the walls of the channel; a diaphragm extending on top of the body and upwardly closing the chan... | 06/12/2007 |
| 7201049 | Pulsed thermistor sensor A thermistor is pulsed with energy, and a time constant of decay of temperature is calculated based on measured resistance of the thermistor over a number of known intervals. The time constant is representative of the mass air flow. The ambient air temperature may b... | 04/10/2007 |
| 7168312 | Heating resistor type air flow meter In a heating resistor type air flow meter, a temperature characteristic of an air flow rate signal whose output value varies with temperature of the air flow meter circuitry is compensated by the temperature characteristic compensation circuit. The compensation circ... | 01/30/2007 |
| 7165441 | Sensor module having a sensor element surrounded by a heating element A sensor module having a heating structure and a sensor element is described. The heating structure surrounds the sensor element so that heat dissipation through a frame is largely prevented. This yields a greater measuring accuracy of the sensor module. In particul... | 01/23/2007 |
| 7165458 | Vacuum gauge A thermal conductivity type pressure gauge comprises a gauge head (2) being rotatably mountable in a vessel whose environmental pressure is to be measured and an elongate electrical filament (6) mounted in the gauge head, the gauge head (2) havi... | 01/23/2007 |
| 7089804 | Method for thermal flow measurement with non constant heating pulses The invention relates to a process and a device for thermal measuring the flow rate (v) of a fluid (3). In conventional thermal sensors the heating power P is supplied in the form of rectangular pulses. According to the invention, the sensor means (1 | 08/15/2006 |
| 7051418 | Method of measuring weak gas flows Firstly, a supporting frame is produced, whose opening is spanned by an auxiliary layer flush on one side. Following the production of microstructures, flat parts or membranes on the common plane defined by the auxiliary layer and the supporting frame, the auxiliary... | 05/30/2006 |
| 6992367 | Process for forming a buried cavity in a semiconductor material wafer and a buried cavity The process comprises the steps of forming, on top of a semiconductor material wafer, a holed mask having a lattice structure and comprising a plurality of openings each having a substantially square shape and a side with an inclination of 45° with respect to the f... | 01/31/2006 |
| 6945119 | Apparatus and methods for heat loss pressure measurement A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and is exposed to a substantially matching environment... | 09/20/2005 |
| 6938493 | Apparatus and methods for heat loss pressure measurement A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and is exposed to a substantially matching environment... | 09/06/2005 |
| 6930521 | Circuit for controlling the performance of an integrated circuit A system and method for utilizing a feedback-based delay stabilization and power optimization circuit. One embodiment of the present invention is directed to an electronic circuit comprising an indicator operable to generate an indicator signal that is proportional ... | 08/16/2005 |
| 6908864 | Pressure control method and processing device First and second pressure sensors 132 and 134 that perform pressure detection over different pressure detection ranges from each other detect the pressure within a process chamber 102 of an etching device 100. A pressure controller 144... | 06/21/2005 |
| 6901808 | Capacitive manometer having reduced process drift A capacitive manometer includes a flow passage through which gas can enter the manometer, a deflectable diaphragm, and a filter arranged in the flow passage. The filter is capable of removing condensable vapors from the gas so that the condensable vapors do not reac... | 06/07/2005 |
| 6865952 | Apparatus and methods for heat loss pressure measurement A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and is exposed to a substantially matching environment... | 03/15/2005 |
| 6799468 | Apparatus and methods for heat loss pressure measurement A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and has temperature response and physical characterist... | 10/05/2004 |
| 6658941 | Apparatus and methods for heat loss pressure measurement A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and has temperature response and physical c... | 12/09/2003 |
| 6619131 | Combination pressure sensor with capacitive and thermal elements A pressure sensor has a baseplate and a support plate with a membrane. Layers on the membrane and the support plate are connected to a circuit for capacitively measuring pressure to generate a first pressure signal. A thermal conductivity measuring elemen... | 09/16/2003 |
| 6553841 | Pressure transducer assembly A pressure transducer assembly includes a transducer member supporting a transducer element for measuring pressure within an environment. The transducer member has a sealing surface surrounding the transducer element. A housing having an integral resilien... | 04/29/2003 |
| 6474171 | Vacuum gauge A vacuum gauge of the cold cathode type has a gauge head which includes a cathode discharge cell and an anode a portion of which is located within the cathode discharge cell. An electrically operated ignition device is located adjacent the cathode dischar... | 11/05/2002 |
| 6474172 | Method for measuring the gas pressure in a container, and devices for its application Two resistance elements (3, 6) are used for eliminating the influence of wall temperature on the gas pressure in a vessel, determined by a Pirani manometer. The first resistance element (3) is present in a first branch of a Wheatstone bridge (1), and the ... | 11/05/2002 |
| 6382031 | Foil manometer A pressure gauge device that is operated as a thermal conduction manometer contains a measuring resistor (131) that is arranged in layer form on a self-supporting carrier foil and is in defined thermal contact with a gas whose pressure is to be measured. ... | 05/07/2002 |
| 6227056 | Methods of pressure measurement An improved Pirani gauge has a small-diameter wire sensing element, coplanar with a small-diameter wire compensating element, with two parallel flat thermally conductive plates spaced from the sensing and compensating elements. The sensing and compensatin... | 05/08/2001 |
| 6023979 | Apparatus and methods for heat loss pressure measurement An improved Pirani gauge has a small-diameter wire sensing element, coplanar with a small-diameter wire compensating element, with two parallel flat thermally conductive plates spaced from the sensing and compensating elements. The sensing and compensatin... | 02/15/2000 |
| 6016102 | Pressure sensor housing An apparatus (10) allows atmospheric pressure into an environmentally sealed enclosure for creating an equilibrium that allows a sensor (28) make a proper measurement. A slot or opening (26) in the cover (14) exposes outside atmospheric air to a restricte... | 01/18/2000 |
| 5962791 | Pirani+capacitive sensor In order to cover a large measuring range extending from about 10-6 mbar to about 10 bar, a simple, compact and economically producible pressure sensor (3) arranged in a protective tube (1) has, on a support plate (5), a ceramic membrane (6) wh... | 10/05/1999 |
| 5693888 | Heat conductance vacuum gauge with measuring cell, measuring instrument and connecting cable The invention relates to a process for operating a controlled heat conductance vacuum gauge with a measuring cell (18) comprising a Wheatstone bridge (1) with supply voltage (12, 13) and measurement voltage terminals (14, 15), a power supply and measuring... | 12/02/1997 |
| 5633465 | Pirani pressure sensor The invention is a method and apparatus for a pirani pressure sensor. The apparatus consists of a current supply and current receiving means affixed to a substrate. Bridging the current supply means and current receiving means is an electrically conductiv... | 05/27/1997 |
| 5608168 | Temperature compensation in a regulated heat conduction vacuum gauge The invention relates to a process for operating a regulated heat conduction vacuum gauge with a Wheatstone bridge (1) powered by a controllable supply voltage and a gauge filament (6) and a resistance (9) as two of its components among others, designed t... | 03/04/1997 |
| 5597957 | Microvacuum sensor having an expanded sensitivity range A microvacuum sensor has an expanded sensitivity range, wherein a thin membrane having poor thermal conductivity is freely suspended on a semiconductor single-crystal. A thin metallic heating layer, preferably of aluminum, is arranged on the membrane. The... | 01/28/1997 |
| 5583297 | Process for evaluating the output signals of two pressure sensors and a pressure measuring arrangement with two pressure measuring sensors and a pressure measuring head Particularly for the combination of cold-cathode ionization sensors and Pirani sensors, for obtaining a one-to-one measuring range which is significantly expanded compared to the measuring ranges of the respective sensor types, a weighting technique is pr... | 12/10/1996 |
