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Class 73/754 - Semiconductor


Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the electric circuit element is a
No. of patents: 431
Last issue date: 05/08/2012


1                      
NumberTitleIssue Date
8171801Micro-thermistor gas pressure sensor
An apparatus and method precisely measure gas pressure over a large dynamic range and with good immunity to temperature fluctuations, encompassing applications such as gas sensing, bolometer imaging and industrial process monitoring. The micro-thermistor gas pressur...
05/08/2012
8146439Sensor system and method for manufacturing a sensor system
A sensor system, in particular a pressure sensor system, having a substrate having a main extension plane, the substrate having at least one trench on a first side, and the trench being provided to produce a diaphragm area on a second side of the substrate diametric...
04/03/2012
8146438Pressure-sensitive adhesive sheet for testing
Disclosed is an adhesive sheet for inspection, which is obtained by arranging an adhesive layer on a base film. The base film and the adhesive layer are electrically conductive, and an electrically conductive path is formed between the base film and the adhesive lay...
04/03/2012
8132465Sensor element placement for package stress compensation
Circuits, methods, and systems that calibrate or account for packaging and related stress components in a pressure sensor. Further examples provide an improved sensor element or device. One example provides one or more sensing elements on the diaphragm and near the ...
03/13/2012
8127619Pressure sensor including switchable sensor elements
A semiconductor device includes a first sensor element in a first branch of a Wheatstone bridge and a second sensor element in a second branch of the Wheatstone bridge. The semiconductor device includes a first reference element in the first branch and a second refe...
03/06/2012
8127618Implantable micro-electromechanical system sensor
The disclosure relates in some aspects to an implantable pressure sensor and a method of measuring pressure. In some embodiments pressure may be measured through the use of an implantable lead incorporating one or more pressure sensors. In some aspects a pressure se...
03/06/2012
8069732Ultra-miniature multi-hole probes having high frequency, high temperature responses
Embodiments of an ultra miniature pressure probe are disclosed. The pressure probe can include a probe body, a plurality of transducer ports, and a plurality of transducers. The probe body can be a longitudinal tubular body having a front conical end. The transducer...
12/06/2011
8065919MEMS device and method for fabricating the same
A MEMS device includes: a substrate having a through hole; a first film provided on a top surface of the substrate with a bottom surface of the first film exposed in the through hole; a second film provided over the first film with an air gap interposed therebetween...
11/29/2011
8037771Electronic pressure-sensing device
An electronic pressure-sensing device 100 comprising a transistor 105 located on a substrate 110. The device also comprises a linker arm 115 that has a tip 120 which is configured to touch a contact region 125 of the substra...
10/18/2011
7926352Semiconductor pressure sensor and data processing device
For example, to adjust an offset of a pressure sensor, there are provided an external resistor RE and an internal resistor circuit that is connected to both ends of RE and formed in a semiconductor chip such as a processor. The internal resistor circuit includes N p...
04/19/2011
7926354Semiconductor pressure sensor and method of producing the same
A diaphragm made of a polysilicon film is provided above a first main surface of a silicon substrate. Four gauge resistors are provided on the top face of the diaphragm. A through hole for exposing the bottom face of the diaphragm is formed in the silicon substrate....
04/19/2011
7926353Pressure sensor including switchable sensor elements
A semiconductor device includes a first sensor element in a first branch of a Wheatstone bridge and a second sensor element in a second branch of the Wheatstone bridge. The semiconductor device includes a first reference element in the first branch and a second refe...
04/19/2011
7918138Wireless microelectromechanical systems (MEMS) pressure sensor with built-in calibration
A wireless microelectromechanical system (MEMS) pressure sensor with built in calibration. An actuator is coupled with a pressure sensing device to enable the pressure to be calibrated against the known pressure exerted by the actuator. The sensing component is conf...
04/05/2011
7900518Microfabricated implantable wireless pressure sensor for use in biomedical applications and pressure measurement and sensor implantation methods
A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sen...
03/08/2011
7900520Pressure sensor device
A semiconductor pressure sensor for a pressure sensor device has a pressure detection element which includes a membrane made of semiconductor material, particularly silicon. The sensor includes a support having a three-dimensional body passed through by a detection ...
03/08/2011
7900519Microfluidic measuring tool to measure through-silicon via depth
A tool to measure the depth of one or more through-silicon vias, the tool fabricated in silicon to include a microfluidic chamber that is positioned over the one or more through-silicon vias, further including a fluid actuation chamber to inject fluid into the micro...
03/08/2011
7861597High temperature transducer using SOI electronics
There is disclosed a high temperature pressure sensing system which includes a SOI Wheatstone bridge including piezoresistors. The bridge provides an output which is applied to an analog to digital converter also fabricated using SOI technology. The output of the an...
01/04/2011
7841241Surface acoustic wave (SAW) based pressure sensor
A SAW based pressure sensor having a base 2a with an aperture 3 formed therein and a substrate 4 mounted on the base so as to completely overlie the aperture. The substrate 4 is adhered to base 2a so as to form a flui...
11/30/2010
7832278Multi-chip package
Subject matter disclosed herein may relate to packaging for multi-chip semiconductor devices as may be used, for example, in tire pressure monitoring systems. ...
11/16/2010
7832279Semiconductor device including a pressure sensor
A semiconductor device includes a first cavity within a semiconductor substrate and a second cavity within the semiconductor substrate. The second cavity is open to an atmosphere and defines a first lamella between the first cavity and the second cavity. The semicon...
11/16/2010
7798008Pressure sensor module and method for manufacturing the same
For a pressure sensor module comprising a printed circuit board and a pressure cell, wherein the pressure cell has a measuring opening, and the pressure cell is encapsulated by injection molding compound in such a manner that the measuring opening is kept open, the ...
09/21/2010
7793550Sensor device including two sensors embedded in a mold material
A sensor device. One embodiment provides a first sensor having a first sensor surface. The first sensor surface is exposed to allow sensing of a first variable. A second sensor has a second sensor surface. The second sensor surface is sealed to inhibit sensing of th...
09/14/2010
7703329Pressure sensor
There is provided a pressure sensor having: a sensor chip (30) which detects a pressure; a base plate (20 (21, 22)) which supports the sensor chip (30); and a support diaphragm (50) which is bonded to the base plate (20 (...
04/27/2010
7647835Pressure sensor stress isolation pedestal
A pressure sensor stress isolation pedestal including a pressure sensor mounted in a housing with a circuit board. The sensor is bonded to a relatively tall pedestal. The height of the pedestal creates a stiff mounting structure that isolates the sensor from mechani...
01/19/2010
7647834Pressure sensor disconnect detection for a blood treatment device
A system is disclosed for detecting an electrical sensor, the system includes a sensor signal processing circuit further comprising an input port to receive a connector including the output signal lines of the sensor, a resistor connected to the output signal line o...
01/19/2010
7610812High accuracy, high temperature, redundant media protected differential transducers
A semiconductor chip for use in fabricating pressure transducers, including: a semiconductor wafer having a top and a bottom surface, a layer of an insulating material formed on the top surface, the bottom surface having at least two recesses of substantially equal ...
11/03/2009
7607355Semiconductor device
A semiconductor device is equipped with a semiconductor sensor chip for detecting pressure variations that is arranged inside of a hollow cavity of a housing, wherein an opening is formed in a prescribed region of the housing, which is not positioned opposite to the...
10/27/2009
7603908Semiconductor pressure sensor, manufacturing method thereof, and die for molding semiconductor pressure sensor
A semiconductor pressure sensor is provided with a semiconductor pressure sensor part that converts a pressure to an electrical signal, a sensor module in which said semiconductor pressure sensor part and a terminal of which part is extended to the outside are inser...
10/20/2009
7594440Highly sensitive piezoresistive element
A mechanical-to-electrical sensing structure has first and second movable blocks formed in a handle layer. A first hinge is coupled to the first and second movable blocks and configured to resist loads other than flexing of the first hinge. The first hinge is formed...
09/29/2009
7578196Integrated pressure sensor with double measuring scale and a high full-scale value
In a pressure sensor with double measuring scale: a monolithic body of semiconductor material has a first main surface, a bulk region and a sensitive portion upon which pressure acts; a cavity is formed in the monolithic body and is separated from the first main sur...
08/25/2009
7549344Pressure sensor package and electronic part
A pressure sensor package of the present invention includes a pressure sensor including a cavity disposed within a semiconductor substrate, wherein a region of the substrate above the cavity comprises a diaphragm section; a plurality of pressure-sensitive elements, ...
06/23/2009
7540198Semiconductor device
It is an object of the present invention to provide a small, yet high sensitivity semiconductor device. A semiconductor pressure sensor 1 includes an SOI substrate 2 on which a diaphragm 3 is formed and four piezo resistor elements R1 to ...
06/02/2009
7536917Pressure sensor
A pressure sensor comprises: a case body including a pressure introduction port; a sensor chip including a top surface, a bottom surface, a sensing member disposed on the top surface and a concave member disposed on the bottom surface; a ceramic substrate including ...
05/26/2009
7530276Semiconductor pressure sensor and manufacturing method thereof
This invention aims to realize reduction in size without impairing measurement accuracy or connection reliability in a semiconductor pressure sensor in which a glass substrate is adhered to a rear-surface side of a pressure-sensitive chip in which piezoresistive pre...
05/12/2009
7520173Interdigitated electrode for electronic device and electronic device using the same
Provided are an interdigitated electrode (IDE) for an electronic device, which includes a plurality of anodes and a plurality of cathodes arranged radially in an alternating fashion for electrical insulation from one another, and an electronic device using the same....
04/21/2009
7493823Pressure transducer with differential amplifier
A semiconductor-based pressure sensor adapted for enhanced operation with controls electronics includes a pressure transducer having an output formed on a silicon die and an amplifier having an input and an output and fabricated on the silicon die next to the pressu...
02/24/2009
7484418Ultra miniature multi-hole probes having high frequency response
A pressure probe includes a longitudinal tubular housing symmetrically disposed about a central axis and having an ultra miniature conical front end and an opened back end. A plurality of aperture ports having an opening are disposed about the front end. A plurality...
02/03/2009
7464603Sensor component with a cavity housing and a sensor chip and method for producing the same
A semiconductor sensor component including a housing with a cavity and a sensor chip and a method for producing the same are described herein. The housing includes an opening to the surroundings of the housing and the sensor chip includes a sensor region which faces...
12/16/2008
7451656Semiconductor device embedded with pressure sensor and manufacturing method thereof
The method for promoting the size reduction, the performance improvement and the reliability improvement of a semiconductor device embedded with pressure sensor is provided. In a semiconductor device embedded with pressure sensor, a part of an uppermost wiring is us...
11/18/2008
7448278Semiconductor piezoresistive sensor and operation method thereof
A semiconductor piezoresistive sensor, which is electrically connected with a circuit, includes a semiconductor base, at least one piezoresistive element and a conductive layer. The semiconductor base includes a diaphragm and a base. The base is disposed adjacent to...
11/11/2008
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