Class 73/727 - Piezoresistive

Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the element is made of a semiconductor
No. of patents: 542
Last issue date: 05/01/2012

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Number	Title	Issue Date
8166827	MEMS device and method for manufacturing the same A MEMS device, including: a substrate having a first principal plane and a second principal plane opposite to the first principal plane; a through hole formed in the substrate; and a vibrating film formed over the first principal plane so as to cover the through hol...	05/01/2012
8146436	Silicon sensing structure to detect through-plane motion in a plane of material with thermal expansion substantially different from that of silicon A pressure transducer is provided that has a transducer body with a rim, a diaphragm that deflects in response to pressure and a sensor bonded to the diaphragm at the rim and at a center of the diaphragm. The sensor detects deflection of the metal diaphragm. The sen...	04/03/2012
8146437	Diaphragm structure and MEMS device A diaphragm structure for a MEMS device includes a through-hole formed so as to penetrate from an upper surface to a bottom surface of a substrate; and a vibrating electrode film formed on the upper surface of the substrate so as to cover the through-hole. An openin...	04/03/2012
8104356	Pressure sensing device package and manufacturing method thereof A pressure sensing device package including a circuit substrate, a pressure sensing device, a molding compound, and a flexible protection layer is provided. The circuit substrate has an opening. The pressure sensing device is flip chip bonded to the circuit substrat...	01/31/2012
8069730	Pressure transducer structures suitable for curved surfaces A novel flexible transducer structure is suitable for attaching to curved surface such as the leading edge of an aircraft wing. The structure comprises a thin flexible sheet of an insulating material with a leadless transducer secured to the sheet. The sheet is then...	12/06/2011
8024977	Pressure sensor having a high full-scale value with package thereof A pressure sensor including a pressure-sensor element having a monolithic body of semiconductor material, and a first main face and a second main face acting on which is a stress resulting from a pressure, the value of which is to be determined; and a package enclos...	09/27/2011
8024978	Media isolated pressure transducer having boss comprising single metal diaphragm A pressure sensor for sensing a pressure of a fluid includes a monolithic metal including substrate having a substantially planar top side, wherein the metallic comprising substrate includes s a relatively thick boss near a center of the substrate and a thinned sens...	09/27/2011
7882744	Flat planner pressure transducer There is disclosed flat planar pressure transducer which comprises a planar insulative substrate of a rectangular configuration. Disposed on the substrate is an array of conductive areas which extend from a contact terminal area of said substrate to an end of the su...	02/08/2011
7849749	Pressure sensor module A pressure sensor module of the invention includes a pressure sensor and a laminar substrate. Electrodes are arranged in the vicinity of a diaphragm portion of the pressure sensor. In the laminar substrate, a plurality of substrates are laminated, and the laminar su...	12/14/2010
7845236	Resistive contact sensors for large blade and airfoil pressure and flow separation measurements A fluid dynamic polymer-based contact sensor measures ambient pressure based on the resistivity changes across the sensor under different ambient pressures. The pressure sensor may applied to airfoil structures such as wind turbine blades without impacting the blade...	12/07/2010
7775119	Media-compatible electrically isolated pressure sensor for high temperature applications A pressure sensor is described with sensing elements electrically and physically isolated from a pressurized medium. An absolute pressure sensor has a reference cavity, which can be at a vacuum or zero pressure, enclosing the sensing elements. The reference cavity i...	08/17/2010
7743663	Sensor Unit The invention relates to a sensor unit for measuring a measurable variable, especially in an aggressive medium. Said sensor unit comprises a sensor which is disposed in a sensor casing and is provided with a sensor zone located on a base. In order to detect the meas...	06/29/2010
7685881	Sensor element and sensor assembly provided with a casing A sensor element having a sensitive sensor portion on an upper side of a substrate layer. The upper side of the substrate layer is provided with a recess on the periphery of the sensitive sensor portion. The recess provides mechanical isolation or decoupling of the ...	03/30/2010
7584666	Pressure sensor for measuring blood pressure and method of fabricating the same A pressure sensor includes at least one cantilever formed on an upper surface of a silicon substrate, a piezoresistor formed on a fixed end of the cantilever, and a metal wire and an electrode pad connected to both ends of the piezoresistor, wherein a stopper that l...	09/08/2009
7543502	Compact pressure-sensing device The invention is a compact sensing device that is capable of measuring the conditions (e,g, pressure, temperature) inside a cylinder of an internal combustion engine. The invention is also a cost-effective method of fabricating the sensing device. The sensing device...	06/09/2009
7458271	Fluid sensor A fluid sensor is provided for determining a fluid characteristic, having an electronic sensor element that has an active surface for determining the fluid characteristic, having a mounting plate associated with the sensor element, and having a filter device associa...	12/02/2008
7451655	High temperature pressure sensing system A high temperature pressure sensing system (transducer) including: a pressure sensing piezoresistive sensor formed by a silicon-on-insulator (SOI) process; a SOI amplifier circuit operatively coupled to the piezoresistive sensor; a SOI gain controller circuit includ...	11/18/2008
7440861	Concept of compensating for piezo influences on integrated circuitry The inventive circuitry on a semiconductor chip includes a first functional element having a first electronic functional-element parameter that exhibits a dependence relating to the mechanical stress present in the semiconductor circuit chip in accordance with a fir...	10/21/2008
7437260	Concept of compensating for piezo influences on integrated circuitry A semiconductor chip includes a first functional element having a first electronic functional-element parameter exhibiting a dependence relating to the mechanical stress present in the semiconductor circuit chip, and being configured to provide a first output signal...	10/14/2008
7430918	Amplified flow through pressure sensor A MEMS based pressure sensor for flow measurements includes a pressure sense die located between a media seal and a conductive seal. Such a system includes a pressure sense die located between a media seal and a conductive seal. A sensing diaphragm is generally asso...	10/07/2008
7430920	Apparatus for measuring a mechanical quantity An apparatus structure and measurement method are provided to retain high precision and high reliability of a semiconductor mechanical quantity measuring apparatus which senses a mechanical quantity and transmits measured information wirelessly. As to a silicon subs...	10/07/2008
7398693	Adaptive control method for rapid thermal processing of a substrate The present invention generally relates to methods for the rapid thermal processing (RTP) of a substrate. Embodiments of the invention include controlling a thermal process using either a real-time adaptive control algorithm or by using a control algorithm that is s...	07/15/2008
7392687	Method of calibrating zero offset of a pressure sensor A piezoresistive pressure sensor test sample is first provided, and a zero offset of the piezoresistive pressure sensor test sample is measured. Subsequently, a stress deviation corresponding to the zero offset is calculated. Thereafter, at least a piezoresistive pr...	07/01/2008
7392710	Flow meter probe with force sensors The flow meter probe with force sensors has the body of a frustum of a regular pyramid with a force sensor disposed upon each face. The force sensors are mounted in bores defined in the probe body and include a pin that may be displaced in the bore to exert pressure...	07/01/2008
7360439	Sample resistance measurement device In a circuit, as the bridge resistance of one side of a Wheatstone bridge circuit, a distortion gauge (fixed reference resistance) of which variation caused by environmental conditions is suppressed and a sample having a resistance component ΔR varied by the enviro...	04/22/2008
7347099	Pressure transducer with external heater An improved pressure transducer is disclosed. The transducer includes a connector, an enclosure, a sensor portion, and an external heater disposed to heat the sensor portion. In some aspects, the sensor portion includes a sensor constructed from a brittle material a...	03/25/2008
7343808	Line pressure compensated differential pressure transducer assembly A pressure transducer apparatus including: first and second pluralities of piezoresistors each coupled in Wheatstone bridge configurations, wherein the bridges are coupled together to provide a first output being indicative of a differential pressure; and, a third p...	03/18/2008
7340960	Miniature sensor A strain sensing apparatus including a deformable substrate is presented. The deformable substrate is configured to detect a strain of the body that can be coupled to the deformable substrate. Sometimes, the deformable substrate is a flexible substrate having an upp...	03/11/2008
7342263	Circuit device A circuit device is provided which can be manufactured at reduced costs and which is highly reliable. The circuit device includes a Sensor area formed on part of a semiconductor substrate, a circuit area formed around the sensor area on the semiconductor substrate t...	03/11/2008
7337675	Method for measuring average velocity pressure and system thereof A method for measuring average velocity pressure of a stack comprises the following steps. First, a total pressure measuring device is provided. The total pressure measuring device then measures the total pressure at a first location in the stack. Next, physical par...	03/04/2008
7331102	Apparatus for detecting an amount of strain and method for manufacturing same An apparatus for detecting an amount of strain comprises a strain generating part, an electrical insulating layer and sensing elements. The strain generating part is a member to which strain is to be applied. The electrical insulating layer is formed on the strain g...	02/19/2008
7331236	Pressure sensor A sensor and insertion assembly 2 is used for intravascular measurement of pressure in a living body. The assembly includes, a sensor chip 6 having a substrate body 8 with a recess covered by a pressure sensitive film 10 thereby forming a...	02/19/2008
7318351	Pressure sensor A pressure sensor is constructed of a plastic package. The plastic package incorporates in the same material a sensing diaphragm including tensile and compression regions. Deposited on the diaphragm are metal electrodes and a polymer film having piezoresistive prope...	01/15/2008
7317199	Circuit device To provide a circuit device suitable for incorporating a semiconductor element emitting or receiving short-wavelength light. The circuit device includes a casing, a semiconductor element, and a cover portion. The casing has an opening on the top face thereof. The se...	01/08/2008
7313969	Pressure sensor In a pressure sensor which has a metal housing 12 containing a sensor chip 11 and a joint housing 14 and in which an insulating member 15 is arranged to electrically insulate both of the metal housing 12 and the joint housing 14...	01/01/2008
7300854	Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method A method of producing a semiconductor component, e.g., a multilayer semiconductor component, and a semiconductor component produced by this method, where the semiconductor component has, e.g., a mobile mass, i.e., an oscillator structure. A method easily and ...	11/27/2007
7293466	Bolt with function of measuring strain A bolt with a function of measuring strain, comprising a Wheatstone bridge circuit comprising a strain sensor and a dummy resistor, a translate circuit that amplifies a signal from the Wheatstone bridge circuit to convert the same into a digital signal, a transmitti...	11/13/2007
7290433	Method and device for checking a sensor In an industrial installation equipped with a sensor, a method is provided for checking the sensor and providing a measurement sequence associated with the sensor. Monitoring occurs for a thermodynamic parameter of a monitored fluid circulating in the industrial ins...	11/06/2007
7290441	Micro slit viscometer with monolithically integrated pressure sensors An improved micro slit viscometer includes a combined micrometer depth rectangular slit flow channel with monolithically integrated multiple pressure sensors in the flow channels and a pumping system that injects a test sample to the channel at a desired flow rate. ...	11/06/2007
7287433	Pressure sensor A pressure sensor for detecting a pressure and for outputting a signal based on the piezoresistance effect includes a substrate having a sensor chip on one side in a thin portion and a concave portion on another side, a piezo-resistor in the sensor chip, a pedestal ...	10/30/2007

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Class 73/727 - Piezoresistive