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| Number | Title | Issue Date |
| 8104355 | Thermal humidity sensor A measurement element includes a semiconductor substrate with electrical insulating film formed thereon. A resistor formed on the electrical insulating film constitutes a heater; and a cavity is formed by removing a portion of the semiconductor substrate that corres... | 01/31/2012 |
| 7987727 | Semiconductor pressure sensor and fabrication method thereof A semiconductor pressure sensor is provided that includes a diaphragm, a resistive element arranged at an upper portion of the diaphragm, an insulating film arranged on an upper face of the resistive element and an upper face of the diaphragm, a via that penetrates ... | 08/02/2011 |
| 7762141 | Pressure sensor and manufacturing method thereof A pressure sensor for a pressure medium includes: a sensor chip including a semiconductor substrate, a diaphragm in the substrate and a gauge resistor on the diaphragm; a protection cap covering the diaphragm; a case for accommodating the chip, introducing the press... | 07/27/2010 |
| 7624644 | Semiconductor pressure sensor and method for manufacturing semiconductor pressure sensor A semiconductor pressure sensor includes a diaphragm; a resistor provided on a top surface of the diaphragm; an insulating film formed on the diaphragm and the resistor having a penetrating part exposing a top surface of the resistor; and a wiring pattern formed fro... | 12/01/2009 |
| 7373832 | Miniaturized membrane and shell for a pressure measuring sensor Membrane (24) of a shell (20) of a pressure sensor, having an upper and lower chamber (34, 23), wherein the membrane is made by a support wall (36) and a cap (41) having an upper and lower sheets (31, 32), the support wall h... | 05/20/2008 |
| 7360430 | High impedance thin film for strain gauge applications A resistive thin film (1) made of grains (3) of conductive material having an average size, in a dielectric medium (2) is characterized by the total thickness of the film (1) being between 3 and ten times the average size of the grains ( | 04/22/2008 |
| 7316164 | Pressure detection device and manufacturing method of the same A pressure detection device includes a sensing part that is provided at one end portion of the housing to output an electrical signal responsive to an applied pressure, a circuit part that is provided at an other end portion of the housing to process the signal from... | 01/08/2008 |
| 7284435 | Pressure sensor A pressure sensor for detecting a pressure of a pressure medium includes a casing having an element locating portion, a pressure detection element located in the element locating portion of the casing, and a gel member filled in the element locating portion to seal ... | 10/23/2007 |
| 7284438 | Method and system of providing power to a pressure and temperature sensing element A method and system of providing power to a pressure and temperature sensing element is provided. Polarity switching is added to a current source for a sensor, which includes one piezo-resistive sensing element configured as a single implant square located at an edg... | 10/23/2007 |
| 7263895 | Strain detector and method of manufacturing the same A fluid pressure sensor (1) for measuring the pressure of a fluid comprises a diaphragm portion (12) which is a strain generating body, a silicon oxide film (21) as an insulating film, and a strain gauge (20) made of crystalline silicon, ... | 09/04/2007 |
| 7249516 | Method of operating a resistive heat-loss pressure sensor In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is pla... | 07/31/2007 |
| 7240558 | Pressure sensor A pressure sensor for sensing a pressure level of a pressurized medium. The pressure sensor includes a housing that has a high pressure side, a low pressure side and an aperture. A substrate is located in the aperture. The substrate has a pair of ends and a center p... | 07/10/2007 |
| 7239246 | System and method for detecting water leakage A 3D liquid detection sensor, liquid-sensitive building material, and liquid detection systems have been provided. The 3D sensor comprises a 3D liquid detection field and an electrical connector to supply a resistance measurement responsive to liquid in the detectio... | 07/03/2007 |
| 7171857 | Pressure transducer One aspect is a pressure transducer package comprising a housing, a diaphragm, a support disposed in the housing and a sensing element disposed in the housing between the diaphragm and the support so that the pressure from the environment acts on the diaphragm to co... | 02/06/2007 |
| 7168325 | Gas pressure sensor A gas pressure sensor 100 is disclosed as including a housing 10 to which a pressure is adapted to be introduced, a stem 20 communicating with the housing to admit the pressure thereto and having a diaphragm 22 deformable in response to t... | 01/30/2007 |
| 7161460 | Switching element provided with a foil construction A switching element provided with a foil construction includes a first supporting foil and a second supporting foil that are kept at a distance from one another via a spacer. The spacer has a recess in at least one active area of the switching element. A contact arr... | 01/09/2007 |
| 7143650 | Pressure sensor This invention relates to a pressure sensor comprising a diaphragm and at least one measuring element, which is situated on the diaphragm while serving to measure a deflection of the diaphragm. A holding element is placed on at least one surface of the diaphragm in ... | 12/05/2006 |
| 7124642 | Dual gauge with dual calibration system and method A dual gauge system determines pressures of two separately contained gases by use of two separate pointer—Bourdon tube sections within the dual gauge. The Bourdon tube of a first one of the sections is gaseously coupled to a first one of the contained gases to det... | 10/24/2006 |
| 7064650 | Foil-type switching element A foil-type switching element comprises a first carrier foil having a first electrode arrangement applied thereon and a second carrier foil having a second electrode arrangement applied thereon, said first and second carrier foils being arranged at a certain distanc... | 06/20/2006 |
| 6925885 | Pressure sensor A pressure sensor includes a sensor element, and a resin package member that holds the sensor element. The sensor element is constructed by a semiconductor, and is capable of externally outputting an electric signal in accordance with strain generated when force is ... | 08/09/2005 |
| 6923068 | Pressure transducer One aspect is a pressure transducer package comprising a housing, a diaphragm, a support disposed in the housing and a sensing element disposed in the housing between the diaphragm and the support so that the pressure from the environment acts on the diaphragm to co... | 08/02/2005 |
| 6871546 | Pressure sensor module with sensor cell and adapter In a pressure sensor module according to the prior art, which is intended for detecting the pressure of a corrosive medium, the conventional sensor cell with a pressure sensor chip is modified in order to protect it from corrosion, which results in a large volume fo... | 03/29/2005 |
| 6860153 | Gas pressure sensor based on short-distance heat conduction and method for fabricating same A thermal pressure sensor monitors pressure by measuring effects caused by variations of thermal conductivity between a member and a substrate to which the member is adhered by stiction. The interface between the member and the substrate behaves as an extremely narr... | 03/01/2005 |
| 6799468 | Apparatus and methods for heat loss pressure measurement A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and has temperature response and physical characterist... | 10/05/2004 |
| 6732589 | Pressure sensor, a method for manufacturing a pressure sensor and a combustion engine having a pressure sensor A pressure sensor includes a housing, an interior chamber of which is sealed by a diaphragm, and a flexible measuring element, which is positioned separately. In addition, the pressure sensor includes a transmission element, which is formed as a chip and is used to ... | 05/11/2004 |
| 6692983 | Method of forming a color filter on a substrate having pixel driving elements A method of forming a color filter on a substrate having pixel driving elements. A substrate having a plurality of light-transmitting areas and active areas is provided. A pixel driving element is formed on the substrate in each active area, wherein an in... | 02/17/2004 |
| 6658941 | Apparatus and methods for heat loss pressure measurement A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and has temperature response and physical c... | 12/09/2003 |
| 6643976 | Pressure sensor device A pressure sensor device is described that has a diaphragm acted upon by a working medium, on a first side, and a sensor chip, which is disposed on a second side of the diaphragm that is remote from the working medium. There is formed in the sensor chip a... | 11/11/2003 |
| 6543292 | Piezoresistive air pressure sensor A method of manufacturing an air pressure sensor is disclosed. A plurality of sensor circuitry modules are formed on a first side of a silicon wafer. A plurality of cavities on a second side of the silicon wafer are formed. Each of the plurality of caviti... | 04/08/2003 |
| 6370959 | Fuel pressure sensor A fuel pressure sensor 12 which receives air 62 from an intake manifold 58 and fuel 15 from a fuel rail 14 and which uses the received air 62 and fuel 15 to measure the fuel pressure within the fuel rail 14. The fuel pressure sensor 12 further including a... | 04/16/2002 |
| 6255609 | High pressure resistant, low pressure actuating sensors Sensors for mounting in fluid chambers respond electrically to low pressures in the fluid, while resisting damage or leakage at high pressures. A flexible diaphragm, mounted at one end of a housing, is sandwiched between first and second annuli, leaving a... | 07/03/2001 |
| 6066882 | Semiconductor pressure detecting device A semiconductor pressure detecting device which effectively reduces stress that occurs on a base member due to welding between cap and the base member or any external load. The semiconductor pressure detecting device includes a semiconductor sensor elemen... | 05/23/2000 |
| 6050146 | Pressure detection apparatus To obtain a pressure detection apparatus capable of changing output characteristics in a large area and changing a received pressure range without largely changing the apparatus in design. The apparatus comprises a pressure sensor including a pressure det... | 04/18/2000 |
| 6044717 | Pressure and force profile sensor and method for detecting pressure A pressure sensor is provided which can detect the presence, absence or magnitude of pressure, as well as a pressure profile. The pressure sensor includes a sensor membrane and a sensor device. The sensor membrane is flexible and may be constructed of a c... | 04/04/2000 |
| 6032536 | Pressure sensor and method for detecting pressure A pressure sensor is provided which can detect the presence, absence or magnitude of pressure. The pressure sensor includes a sensor membrane and a sensor device. The sensor membrane is flexible and may be constructed of a conductive material or may inclu... | 03/07/2000 |
| 6016705 | Pressure sensor with pivoting lever A pressure sensor has a movable diaphragm stretched directly between the annular pressing surfaces of two housing parts, and an electrical measuring device. In an area that is located radially outward as viewed from the pressing surfaces, the diaphragm ha... | 01/25/2000 |
| 5948990 | Pressure-sensitive resistor The present invention relates to a pressure-sensitive resistor in which the resistance between two electrode patterns varies in response to applied pressure, wherein the desired pressure-sensitive characteristics of the resistor can be readily achieved by... | 09/07/1999 |
| 5900554 | Pressure sensor When a compressed air is led into a reference pressure chamber along with a boundary between a resin housing and a terminal, such compressed air may cause a wire breaking. A barrier wall for blocking the compressed air from penetrating toward the wire is ... | 05/04/1999 |
| 5756899 | Integrated sensor The first glass substrate having the first pressure admitting entrance for leading the pressure of fluid to be measured, is arranged at a side of a diaphragm of a pressure sensor, for measuring differential pressure. The second glass substrate is arranged... | 05/26/1998 |
| 5483835 | Oil pressure sender unit with reinforced diaphragm An oil pressure sender unit is disclosed which employs a two-part housing with a reinforced rubber diaphragm disposed between the two housing parts in order to isolate a pressurized oil cavity from a dry circuit cavity which contains the electrical compon... | 01/16/1996 |
