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| Number | Title | Issue Date |
| 8316710 | Physical quantity measuring apparatus The physical quantity measuring apparatus includes a first function of generating voltage used for position-controlling a movable body, a second function of detecting a position of the movable body during a position detecting period, a third function of calculating ... | 11/27/2012 |
| 7810394 | Integrated sensor and circuitry A micromachined sensor having a capacitive sensing structure. The sensor includes a first substrate with first and second conductive layers separated by a buried insulator layer, and a member defined by the first and second conductive layers and the buried insulator... | 10/12/2010 |
| 7797998 | Accelerometer with reduced extraneous vibrations owing to improved electrode shape The invention relates to an accelerometer comprising a moving mass (5) and a fixed part (2), which uses variations in capacitance (3, 4) in order to detect the movement of the mass (5). The inventive accelerometer comprises a first series... | 09/21/2010 |
| RE41213 | Dynamic amount sensor and process for the production thereof A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on t... | 04/13/2010 |
| 7665361 | Method and apparatus for closed loop offset cancellation An apparatus (100, 200) and method (300) for sensing acceleration are provided. The method includes producing (305) a first signal in response to an acceleration sensed by a transducer, producing (310) a second signal based on the first s... | 02/23/2010 |
| RE41047 | Acceleration sensor and process for the production thereof A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on t... | 12/22/2009 |
| 7614300 | System and method for mitigating errors in electrostatic force balanced instrument System and method for mitigating errors in electrostatic force balanced instrument is provided. The system and method mitigate errors in measurement readings caused by charge buildup in force balanced instruments that employ charge pulses to generate an electrostati... | 11/10/2009 |
| 7597002 | Diamagnetic levitation system The invention concerns an inertial sensor or an actuator based on diamagnetic levitation, said inertial sensor or actuator comprising support means serving as main support body for an inertial sensor or for an actuator, a two dimensional array of permanent magnets a... | 10/06/2009 |
| 7578189 | Three-axis accelerometers Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive an... | 08/25/2009 |
| 7552638 | Accelerometer with reduced extraneous vibrations owing to improved return movement An accelerometer uses variations in capacitance to detect and measure the movement of a moving mass in relation to a fixed part. The accelerometer comprises a first series of electrodes, which are solidly connected to the mass and which are interdigitated with a sec... | 06/30/2009 |
| 7552637 | Torque driving circuit A torque driver that includes a regulator circuit for mitigating zero-g discontinuity effects and deadbanding is presented. An accelerometer may comprise the torque driver and the torque driver may be arranged to receive a control signal from a control circuit that ... | 06/30/2009 |
| 7481111 | Micro-electro-mechanical sensor with force feedback loop A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the ... | 01/27/2009 |
| 7461553 | Self-calibrating oversampling electromechanical modulator and self-calibration method An oversampling electromechanical modulator, including a micro-electromechanical sensor which has a first sensing capacitance and a second sensing capacitance and supplies an analog quantity correlated to the first sensing capacitance and to the second sensing capac... | 12/09/2008 |
| 7451647 | MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state ... | 11/18/2008 |
| RE40561 | Acceleration sensor and process for the production thereof A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on t... | 11/04/2008 |
| RE40347 | Acceleration sensor and process for the production thereof A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on t... | 06/03/2008 |
| 7368923 | Time interval trimmed differential capacitance sensor An apparatus and method for operation of a differential capacitance transducer, including generating substantially opposing polarity excitation drive signals by operation of a pair of drive signal generators, applying the excitation drive signals to a pair of sense ... | 05/06/2008 |
| 7357017 | Wafer level capped sensor A sensor has a die (with a working portion), a cap coupled with the die to at least partially cover the working portion, and a conductive pathway extending through the cap to the working portion. The pathway provides an electrical interface to the working portion. | 04/15/2008 |
| 7355782 | Systems and methods of controlling micro-electromechanical devices An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provid... | 04/08/2008 |
| 7355318 | Micromachined device utilizing electrostatic comb drives to filter mechanical vibrations A micromachined device for filtering mechanical vibrations caused by an external disturbance is disclosed. The device can include a first electrostatic vertical comb drive assembly having a first array of stationary elements and a second array of movable elements co... | 04/08/2008 |
| 7347096 | Digital accelerometer A force-balance accelerometer having a pick-off coil responsive to displacement of a seismic mass from a balance position for providing an output corresponding to the displacement, includes a digital signal processor including tow pulse width modulation generators f... | 03/25/2008 |
| 7337669 | Inertial sensor and combined sensor therewith An inertial sensor is provided which includes a self-diagnosis circuit which applies an AC-bias signal voltage ahead of a synchronous demodulator, and thereby, supplies a diagnostic signal for detecting an abnormality in at least one of a detecting element and a det... | 03/04/2008 |
| 7337668 | Accelerometer in closed loop with error detection An accelerometric measurement device with a return loop including accelerometer, a corrector generating a signal for correction of the position of the accelerometer, a closed return loop to apply this correction signal to the accelerometer, a detector to detect an e... | 03/04/2008 |
| 7334474 | Force balanced instrument system and method for mitigating errors A force balanced instrument system and method for mitigating errors is provided. The system and method mitigate errors in measurement readings caused by charge buildup in force balanced instruments that employ charge pulses to generate an electrostatic force to null... | 02/26/2008 |
| 7333400 | Regulated low power control system for electrostatic actuators The invention concerns a control system for a servomechanism comprising a control member that can move between first and second positions defining a variable electric quantity respectively between a minimum quantity and a maximum quantity, characterized in that the ... | 02/19/2008 |
| 7320896 | Infrared radiation detector Electronic devices are disclosed that may be used for infrared radiation detection. An example electronic device includes a substrate, a transistor included in the substrate and a silicon-germanium (Si—Ge) structural layer coupled with the transistor. The structur... | 01/22/2008 |
| 7305880 | Resonant micro-electro-mechanical system with analog driving A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to the mass for maintaining the mass in oscillation at a resonance freque... | 12/11/2007 |
| 7305883 | Chemical micromachined microsensors The present invention provides sensors based on micromachined ultrasonic transducer technology. The sensors preferably include a plurality of sensor elements, but may include only one sensor element. Arrays of sensors are also provided. Sensor elements include a fun... | 12/11/2007 |
| 7305594 | Integrated circuit in a maximum input/output configuration A memory includes input/output paths and electrical leads. Each of the input/output paths are coupled to separate electrical leads. The memory is configured to operate in a test architecture and an operating architecture. In the test architecture, logic enables a gr... | 12/04/2007 |
| 7284432 | Acceleration sensitive switch An acceleration sensitive switch arrangement (208) includes an acceleration sensitive variable capacitor (200), a detection circuit (202) for detecting a capacitance value of the variable capacitor (200), and a switching circuit (204 | 10/23/2007 |
| 7279761 | Post-release capacitance enhancement in micromachined devices and a method of performing the same A MEMS device which utilizes a capacitive sensor or actuator is enhancement by initially fabricating the capacitive assembly which comprises the sensor or actuator as two sets of interdigitated fingers in a noninterdigitated configuration. One of the two sets of fin... | 10/09/2007 |
| 7280436 | Miniature acoustic detector based on electron surface tunneling An electronic surface tunneling acoustic detector or microphone with very high sensitivity is disclosed. A tunneling tip is mounted on a rigid perforated suspension plate, along with control electrodes, which are used to move a conductive membrane suspended above th... | 10/09/2007 |
| 7275424 | Wafer level capped sensor A sensor has a die (with a working portion), a cap coupled with the die to at least partially cover the working portion, and a conductive pathway extending through the cap to the working portion. The pathway provides an electrical interface to the working portion. | 10/02/2007 |
| 7275433 | Micro-electro-mechanical sensor with force feedback loop A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the ... | 10/02/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7258012 | Integrated monolithic tri-axial micromachined accelerometer A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the... | 08/21/2007 |
| 7243542 | Closed loop analog gyro rate sensor The present invention provides an apparatus and method for measuring the angular rotation of a moving body. The apparatus comprises an upper sensor layer, a lower handle layer substantially parallel to the sensor layer, at least one dither frame formed of the upper ... | 07/17/2007 |
| 7228739 | Precision flexure plate A precision flexure plate includes a flat disk positioned between two capacitor plates and supported by S-shaped beams. Deflection of the disk due to gravitational loads and resulting capacitance change is used to measure the accelerations in the direction perpendic... | 06/12/2007 |
| 7225674 | Self-stabilizing, floating microelectromechanical device The present invention relates to MicroElectroMechanical Systems (MEMS), devices and applications thereof in which a proof mass is caused to levitate by electrostatic repulsion. Configurations of electrodes are described that result in self-stabilized floating of the... | 06/05/2007 |
| 7207423 | Acceleration sensor for motor vehicles An acceleration sensing unit (1) includes an acceleration sensor element (4), wherein said sensing unit (1) emits an electric signal at a signal output (k3, k4), the sensing unit (1) is electrically active and supplied with ... | 04/24/2007 |
