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| Number | Title | Issue Date |
| 8006557 | Multi-axis sensor A method and apparatus for sensing accelerations directed along multiple directions are provided. An embodiment comprises a sensor array comprising two sensor pairs, each of which provides an output signal based on acceleration along two orthogonal directions. The s... | 08/30/2011 |
| 7770452 | Semiconductor sensor and manufacturing method therefor A semiconductor sensor is disclosed that includes a semiconductor substrate, a sensing portion provided on the semiconductor substrate, and a pad in electrical communication with the sensing portion and provided on the semiconductor substrate. The semiconductor sens... | 08/10/2010 |
| 7673513 | Non-contact shock sensor The invention relates to a sensor device for monitoring accelerations to which an object is subjected. In order to detect whether a value has exceeded or is below a threshold for the acceleration to which objects have been subjected in the past, i.e. without having ... | 03/09/2010 |
| 7516659 | Inertial force sensor A sensor having a mass that moves relative to a structure is disclosed. A spring mechanism applies a restoring force to the mass when the mass moves from an equilibrium position with respect to the structure. A first code scale is attached to the mass and viewed by ... | 04/14/2009 |
| 7434466 | Gyro sensor The electrostatically-driven/capacitance-detection type gyro sensor has a sensing element including a movable part, the sensitivity of the sensing element and accordingly the sensitivity of a sensor output signal thereof being kept unchanged by controlling the ampli... | 10/14/2008 |
| 7430915 | Vibration sensor A vibration sensor capable of preventing a diaphragm electrode from being damaged without lowering sensitivity as well as realizing a satisfactory assembling process. The vibration sensor includes a fixed electrode 1, and a diaphragm electrode 3 having... | 10/07/2008 |
| 7428841 | Acceleration sensor and inclination-detecting method In an acceleration sensor detecting inclined displacement of a predetermined article from a basic position, the acceleration sensor (10) includes a sensor chip having a detection plane including one detection axis or two crossing detection axes detecting the ... | 09/30/2008 |
| 7416150 | Overmolded inertia sensor mass for a seat belt retractor A seat belt retractor (10) has an actuator (14) for unlocking and locking the seat belt retractor (10) An inertial sensor (18) detects changes in vehicle acceleration and interacts with the actuator (14) to lock and unlock the seat... | 08/26/2008 |
| 7412887 | Multiple axis acceleration sensor One or more fixed sensing electrodes are employed to sense movement of a mass both within the plane of the mass/electrodes and along an axis normal to that plane. In order to measure movement of the mass along the axis normal to the plane, a reference capacitance is... | 08/19/2008 |
| 7392685 | Accelerometer having adjustable damping An apparatus and method for an accelerometer mechanism having a proof mass that is suspended for out-of-plane motion between first and second damping plates, wherein at least one of the first and second damping plates is movable between first and second positions re... | 07/01/2008 |
| 7373821 | Semiconductor sensor and manufacturing method therefor A semiconductor sensor is disclosed that includes a semiconductor substrate, a sensing portion provided on the semiconductor substrate, and a pad in electrical communication with the sensing portion and provided on the semiconductor substrate. The semiconductor sens... | 05/20/2008 |
| 7368312 | MEMS sensor suite on a chip The MEMS Sensor Suite on a Chip provides the capability, monolithically integrated onto one MEMS chip, to sense temperature, humidity, and two axes of acceleration. The device incorporates a MEMS accelerometer, a MEMS humidity sensor, and a MEMS temperature sensor o... | 05/06/2008 |
| 7363816 | Inertial sensor In an inertial sensor, a mass is supported by a number of mass support structures positioned within an inner periphery of the mass. The mass support structures are affixed to a substrate by at least one anchor positioned proximate to the mass' center of mass. A numb... | 04/29/2008 |
| 7360425 | Compensated composite structure A method for constructing a compensated composite structure, including a support tube coupled to a flexure plate and enclosing a capacitor plate, includes selecting a material for the support tube whereby the coefficient of expansion is larger than that of the mater... | 04/22/2008 |
| 7361524 | Method of manufacturing floating structure A method of manufacturing a floating structure capable of providing increased device yield. The method includes: a) forming an insulation film, a predetermined area of which is removed, between a first substrate and a second substrate; and b) forming a floating stru... | 04/22/2008 |
| 7361523 | Three-axis accelerometer The invention comprises a method of fabricating a three-axis accelerometer. A first wafer having a first and a second major surface provided with etching at least two cavities in the first major surface of the first wafer and patterning metal onto the first major su... | 04/22/2008 |
| 7347096 | Digital accelerometer A force-balance accelerometer having a pick-off coil responsive to displacement of a seismic mass from a balance position for providing an output corresponding to the displacement, includes a digital signal processor including tow pulse width modulation generators f... | 03/25/2008 |
| 7339265 | Capacitance type semiconductor sensor In a capacitance type semiconductor dynamic quantity sensor, a sensor chip and a circuit are connected to each other through adhesive film having an elasticity of 200 MPa or less to reduce the temperature characteristic. Four bonding wires for connecting the sensor ... | 03/04/2008 |
| 7328615 | Method and apparatus for detecting free fall of electronic device A method and apparatus for detecting a free fall of an electronic device. The method includes: sensing a falling acceleration of the electronic device using an acceleration sensor; determining whether the sensed falling acceleration is less than a predetermined thre... | 02/12/2008 |
| 7322239 | Semiconductor device and manufacturing method thereof A semiconductor device includes a lead frame. The lead frame has a chip mounting section and a plurality of leads. The chip mounting section has a base section, an insulation film covering the base section, a plurality of inter-connect sections, and a chip mounting ... | 01/29/2008 |
| 7312553 | Micromechanical component and method for producing same A micromechanical component and a method for producing the component are provided. The micromechanical component includes a substrate and a micromechanical functional layer of a first material provided over the substrate. The functional layer has a first and second ... | 12/25/2007 |
| 7299696 | Acceleration sensor chip package An acceleration sensor chip package includes an acceleration sensor chip formed of a frame portion with an opening portion, a movable structure, a detection element, and an electrode pad. The movable structure has a beam portion and a movable portion supported on th... | 11/27/2007 |
| 7295184 | Computer input device A computer input device includes a magnetized fluid and an inertial body within the magnetized fluid. A signal converter provides angular acceleration information based on behavior of the inertial body. The computer input device can be attached to a Virtual Reality ... | 11/13/2007 |
| 7293460 | Multiple-axis linear accelerometer A three-axis accelerometer is provided for sensing acceleration in three orthogonal axes. The accelerometer includes a support substrate, fixed electrodes having fixed capacitive plates fixed to the support substrate, and a movable inertial mass having movable capac... | 11/13/2007 |
| 7295493 | Pressure tolerant fiber optic hydrophone An interferometric hydrophone is disclosed that comprises a first mandrel defining an interior that is open to surrounding fluid. A sensing optical fiber is wound upon the first mandrel. A second mandrel is positioned in surrounding relationship with respect to the ... | 11/13/2007 |
| 7295871 | ECG signal processor and method Chest compressions are measured and prompted to facilitate the effective administration of CPR. A displacement detector determines a displacement indicative signal indicative of the displacement of the CPR recipient's chest toward the recipient's spine. A signaling ... | 11/13/2007 |
| 7282697 | High sensitivity fibre optic vibration sensing device A vibration sensing device, an acceleration sensing system and a method of manufacturing a vibration sensing device wherein the vibration sensing device comprises a flexible disk that is mounted symmetrically about a radial plane and has a mass located on the disk s... | 10/16/2007 |
| 7275432 | Acceleration sensor and method of manufacturing acceleration sensor An acceleration sensor includes a semiconductor substrate, a sensing element formed on the semiconductor substrate, a bonding frame made of polysilicon which is formed on the semiconductor substrate and surrounds the sensing element, and a glass cap which is bonded ... | 10/02/2007 |
| 7271945 | Methods and apparatus for actuating displays The invention relates to mechanical actuators for forming images on a display. The actuators include two mechanically compliant electrodes. ... | 09/18/2007 |
| 7267007 | Acceleration sensing device An acceleration sensing device includes a movable sensing member, a frame member and a supporting member. The supporting member is coupled between the movable sensing member and the frame member so as to support the movable sensing member. The acceleration sensing d... | 09/11/2007 |
| 7265936 | Algorithm for DSA/microactuator total loop gain calibration A hard disk drive that includes a voice coil motor and a micro-actuator. The disk drive includes a servo with a voice coil motor loop, a micro-actuator loop and an overall loop. The servo is calibrated by first calibrating the voice coil motor loop, then calibrating... | 09/04/2007 |
| 7258012 | Integrated monolithic tri-axial micromachined accelerometer A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the... | 08/21/2007 |
| 7248975 | Real time monitoring of particulate contamination in a wafer processing chamber An apparatus and method for use is described which permits real time monitoring of build-up of particulate contamination in a wafer processing chamber. The apparatus is capable of monitoring particle build up in regions of a processing chamber which are not accessib... | 07/24/2007 |
| 7232701 | Microelectromechanical (MEM) device with a protective cap that functions as a motion stop A microelectromechanical (MEM) device includes a substrate, a structure, a travel stop, and a protective cap. The substrate has a surface, and the structure is coupled to, and movably suspended above, the substrate surface. The structure has at least an outer surfac... | 06/19/2007 |
| 7228739 | Precision flexure plate A precision flexure plate includes a flat disk positioned between two capacitor plates and supported by S-shaped beams. Deflection of the disk due to gravitational loads and resulting capacitance change is used to measure the accelerations in the direction perpendic... | 06/12/2007 |
| 7218193 | MEMS-based inertial switch In one embodiment, an inertial switch of the invention includes a MEMS device manufactured using a layered wafer. The MEMS device has a movable electrode supported on a substrate layer of the wafer and a stationary electrode attached to that substrate layer. The mov... | 05/15/2007 |
| 7210352 | MEMS teeter-totter apparatus with curved beam and method of manufacture A teeter-totter apparatus uses a curved beam to generate a differential output which may be indicative of an acceleration applied to the apparatus. The curved-beam teeter-totter apparatus can be combined with an x-axis and y-axis accelerometer, to produce a tri-axis... | 05/01/2007 |
| 7211998 | Acceleration sensing apparatus A collision sensing apparatus includes an acceleration sensor, first and second connector terminals, reference connector terminals and leads. The acceleration sensor is shaped into a square form. First and second contacts are provided in two diagonally opposed corne... | 05/01/2007 |
| 7194905 | Acceleration sensor A three-axis acceleration sensor having a simple construction is provided for improving shock resistance without lowering sensor sensitivity. An acceleration sensor for detecting acceleration in three orthogonal directions comprises an electrode substrate pai... | 03/27/2007 |
| 7196404 | Motion detector and method of producing the same A method of producing an electronic device electrically and mechanically couples an integrated circuit to a leadframe to produce an intermediate assembly. At least a portion of the intermediate assembly then is encapsulated with a molten encapsulating material. Afte... | 03/27/2007 |
