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Class 73/504.16 - Tuning fork


Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the inertial member comprises a pair
No. of patents: 344
Last issue date: 05/15/2012


1                  
NumberTitleIssue Date
8176781Multilayer piezoelectric thin film and method of manufacturing the same, angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present inventi...
05/15/2012
8127609Angular velocity sensing element
An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2 according to the present embodiment includes oscillation arms 22, ...
03/06/2012
8117916Electronic component and method for manufacturing the same
An electronic component is disclosed, and this component includes an element with an electrode section which is formed of upper electrode (74), lower electrode (72), piezoelectric unit (70) placed between upper electrode (74) and lower el...
02/21/2012
8087296Angular velocity sensor
An angular velocity sensor includes a substrate having an upper surface having a first recess provided therein, an electronic component mounted in the first recess, and a vibration element mounted onto the upper surface of the substrate. The first vibration element ...
01/03/2012
8065914Vibration gyro
A vibration gyro made of a single crystal piezoelectric material includes: a base; a plurality of resonating arms extending from the base; an excitation electrode formed on a surface of at least one of the plurality of resonating arms so as to vibrate at least the o...
11/29/2011
8061202Angular velocity sensor element
There is provided an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an element section thereof. An angular velocity sensor element 1 ac...
11/22/2011
8056414Angular velocity sensor and angular velocity sensing device
An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof is easily fixed, is provided. It includes a fixed portion fixed to t...
11/15/2011
7997135Angular velocity sensor
An angular velocity sensor includes a drive electrode section (26) for inputting a drive signal for driving a detecting element (21), a monitor electrode section (28) detecting the drive status of the detecting element (21) and outputting...
08/16/2011
7987715Angular speed sensor
An angular velocity sensor includes a vibrator vibrating, first and second differential circuits for outputting first and second difference signals, respectively, and a synchronous detector circuit for synchronously detecting the first and second difference signals....
08/02/2011
7975546Angular velocity sensor and angular velocity sensing device
An angular velocity sensor of a horizontally located type, which can easily remove the translational acceleration influence thereto from the lateral direction, is provided. It includes a fixed portion fixed to the surface of a sensor element supporting portion of a ...
07/12/2011
7946173Angular velocity sensor and process for producing the same
An angular velocity sensor has a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element. To rea...
05/24/2011
7913560Angular rate sensor and electronic device
An angular rate sensor includes a piezoelectric vibration device; and a detection section, wherein the piezoelectric vibration device includes a vibration section having a first support section, four (first-fourth) cantilever sections supported by the first support ...
03/29/2011
7900514Tuning-fork-type bimorph piezoelectric vibrator and vibrating gyroscope module including the vibrator
A tuning-fork-type bimorph piezoelectric vibrator includes two piezoelectric bodies that are bonded together and have opposite polarization directions. An intermediate metal layer is disposed between bonding surfaces of the piezoelectric bodies. A first slit is arra...
03/08/2011
7891245Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
The present invention particularly relates to an inertial force sensor used in various electronic equipment, for example, used for altitude control, navigation, or the like, of a mobile body such as an aircraft, an automobile, a robot, a watercraft and a vehicle in ...
02/22/2011
7870787Piezoelectric thin film and method of manufacturing the same, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present inventi...
01/18/2011
7805995Vibrating gyroscope
A vibrating gyroscope includes a tuning-fork vibrator having a base and legs. The vibrator is joined to a support plate by conductive adhesive members. The support plate includes an outer frame portion in which a joining portion is provided at a location near a long...
10/05/2010
7802473Angular velocity sensor
An angular velocity sensor includes a tuning-fork oscillator that includes a base portion, arm portions extending from the base portion, and a pair of driving electrodes that are provided to extend from the front face and the back face to a side face of at least one...
09/28/2010
7673511Vibration gyro
A vibration gyro having a high accuracy, no vibration leak, and high S/N. The width of a detection leg of a resonator used in the vibration gyro is less than ⅗ of the width of drive legs. The length of the detection leg is larger than the length of the driv...
03/09/2010
7673512Angular velocity sensor and electronic device
An angular velocity sensor includes a base portion, three arm portions that extend as one piece from the base portion to an approximately same direction, a piezoelectric film formed on one surface of each of the arm portions, drive electrodes for excitation formed o...
03/09/2010
7637159Vibration gyro and the process of producing the same
An inclination of an inclined surface formed by working a ridge of a resonator is set to be within a predetermined angular range, whereby a leakage of vibration in the out-of-plane direction is reduced, the leakage of vibration being generated according to the detun...
12/29/2009
7617728Tuning fork gyroscope
A gyroscope for detecting rotation about a gyro input axis, having a support structure, at least one mass flexibly coupled to the support structure such that it is capable of motion in two directions along a drive axis, the mass offset from the gyro output axis, one...
11/17/2009
7584661Tuning fork gyro sensor
A tuning fork gyro sensor includes a tuning fork vibrator and a casing. The tuning fork vibrator includes a pair of arms that extend parallel, a base that supports the pair of arms, and supporting members that are arranged on both faces of the base such that the sup...
09/08/2009
7533568Angular rate sensor for correcting a false distortion
An angular rate sensor includes an oscillator having a pair of arm portions extending parallel to each other, a stem portion continuously formed to the arm portions, a driving member for oscillating the arm portions in directions opposite to each other, and a distor...
05/19/2009
7478558Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer ...
01/20/2009
7441459Tuning-fork type transducer for angular-speed sensor, angular-speed sensor using the same transducer, and automotive vehicle using the same angular-speed sensor
The invention provides a tuning-fork type transducer for an angular-speed sensor which realizes a stable fork-driving, realizes downsizing of the angular-speed sensor, and is capable of executing control of a vehicle body with high degree of accuracy when being used...
10/28/2008
7426861Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor
A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode f...
09/23/2008
7412885Vibrating gyro element, support structure of vibrating gyro element, and gyro sensor
A vibrating gyro element includes in the same plane a base portion; a pair of vibrating arms for detection extended out of the base portion on both sides in a straight line shape; a pair of connecting arms extended-out from the base portion onto both sides in direct...
08/19/2008
7412886Angular speed measuring transducer
A transducer for measuring an angular velocity formed by a single piezoelectric tuning fork (21) that rotates at the angular velocity. The tuning fork has a detection leg (24) which has a cross-shaped section including two top lateral faces (33, 34
08/19/2008
7401495Activity monitoring
An activity monitor is provided that corrects for the effects of motion external to the entity being monitored. For example, the activity monitor can overcome the effects of vehicular travel. ...
07/22/2008
7401517Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement
A dual-axis tuning fork gyroscope includes four open-ended tuning forks arranged coplanarly in two opposite pairs, a first pair of open-ended tuning forks being arranged opposite one another along a first axis, a second pair of open-ended tuning forks being arranged...
07/22/2008
7394326Quartz oscillator manufacturing method and quartz oscillator
A method for manufacturing a quartz oscillator having a stable temperature drift characteristic attributed to the quartz oscillating piece and a quartz oscillator are disclosed. The method comprises a quartz crystal etching step S1 of processing a quar...
07/01/2008
7387025Angular velocity sensor
An angular velocity sensor is provided, which is capable of accurate failure diagnosis on a detecting portion despite of its simple configuration and small size without providing additional means on an oscillator separately from the driving portion and a detecting p...
06/17/2008
7370524Adaptive vibration control using synchronous demodulation with machine tool controller motor commutation
A control system and method for actively reducing vibration in a spindle housing caused by unbalance forces on a rotating spindle, by measuring the force-induced spindle-housing motion, determining control signals based on synchronous demodulation, and provide compe...
05/13/2008
7370530Package for MEMS devices
A package for packaging one or more MEMS devices is disclosed. A package in accordance with an illustrative embodiment of the present invention can include a packaging structure having a base section, a top section, and an interior cavity adapted to contain a number...
05/13/2008
7363815Angular velocity sensor
An angular velocity sensor is provided with an oscillator including a pair of drive arms, a base portion coupled to one end of each drive arm, and a flexible arm extending from the base portion in a direction opposite from the drive arms. This angular velocity senso...
04/29/2008
7360422Silicon inertial sensors formed using MEMS
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimension...
04/22/2008
7360346Purging system and purging method for the interior of a portable type hermetically sealed container
A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, ...
04/22/2008
7360423Resonating star gyroscope
Disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto. The angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell-type structure for rate sensing or measuring angle of rotation. The struc...
04/22/2008
7357025Micromachined apparatus with co-linear drive arrays
A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plu...
04/15/2008
7358722Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
An integrated three-dimensional magnetic or any field sensing device and a method to fabricate an integrated three-dimensional magnetic sensing device is presented. An integrated three-dimensional magnetic sensing device comprises an apparatus that defines at least ...
04/15/2008
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