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| Number | Title | Issue Date |
| 8136399 | Angular rate sensor with vibrator An angular rate sensor includes: a substrate; and a vibrator having a beam part supported in a state of floating from the substrate and a pair of supports formed on the substrate and provided at both ends of the beam part for supporting the beam part. The vibrator i... | 03/20/2012 |
| 8117915 | GRA MEMS accelerometer A planar MEMS accelerometer that detects acceleration along an input axis that is orthogonal to the plane. There are spaced bonding pads coupled to a substrate. A generally planar Servo Member (SM) is flexibly coupled to the bonding pads by servo member flexures suc... | 02/21/2012 |
| 8082790 | Solid-state inertial sensor on chip Monolithic solid-state inertial sensor. The sensor detects rotation rate about three orthogonal axes and includes a micromachined monolithic piezoelectric crystalline structure including an equal number of vibratory drive and detection tines on each side of an axis ... | 12/27/2011 |
| 7934422 | Angular velocity sensor and angular velocity sensing device Provided is a horizontally located sensitive angular velocity sensor capable of easily eliminating influence of acceleration in a lateral direction and whose fixed section is easily fixed. The angular velocity sensor includes a pair of fixed sections fixed on a top ... | 05/03/2011 |
| 7437933 | Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof Micro-electro-mechanical structure formed by a substrate of semiconductor material and a suspended mass extending above the substrate and separated therefrom by an air gap. An insulating region of a first electrically insulating material extends through the suspende... | 10/21/2008 |
| 7401516 | Vibration gyro sensor element with cantilever vibrator extending from substrate and positioned within opening in substrate A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive elect... | 07/22/2008 |
| 7370530 | Package for MEMS devices A package for packaging one or more MEMS devices is disclosed. A package in accordance with an illustrative embodiment of the present invention can include a packaging structure having a base section, a top section, and an interior cavity adapted to contain a number... | 05/13/2008 |
| 7341222 | Micro-unmanned aerodynamic vehicle A MEMS-based micro-unmanned vehicle includes at least a pair of wings having leading wing beams and trailing wing beams, at least two actuators, a leading actuator beam coupled to the leading wing beams, a trailing actuator beam coupled to the trailing wing beams, a... | 03/11/2008 |
| 7325452 | Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrati... | 02/05/2008 |
| 7282834 | Micro electrical mechanical system (MEMS) tuning using focused ion beams A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plura... | 10/16/2007 |
| 7275434 | Micromechanical component In order to implement two different sensitivities simultaneously in one component, in particular in an acceleration sensor having a substrate, at least one spring device, and at least one seismic mass, it is proposed that the spring device be designed for an intrins... | 10/02/2007 |
| 7266998 | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance. ... | 09/11/2007 |
| 7263884 | Vibration type gyrosensor device Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal sil... | 09/04/2007 |
| 7246524 | MEMS fluidic actuator The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a s... | 07/24/2007 |
| 7246520 | Transducer, electronic equipment, and method of adjusting frequency of transducer To provide a transducer that can detect the rotation of the transducer with high degree of accuracy, a transducer includes a pair of oscillating reeds extending in the Y-direction to generate a first oscillation to generate a Coriolis force corresponding to the rota... | 07/24/2007 |
| 7232700 | Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching t... | 06/19/2007 |
| 7225101 | Electronic device, signal compensation device and signal compensation method An electronic device that prevents a failure caused by a temperature drift of an angular velocity sensor, and a signal compensation system and a signal compensation method for compensating for the temperature drift are provided. The present invention provides a mech... | 05/29/2007 |
| 7202100 | Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching t... | 04/10/2007 |
| 7197930 | Gyro sensor The gyro sensor uses a clock signal as a timing signal or synchronous signal for reading various data stored in a built-in memory for its yaw rate sensing operation. The gyro sensor is configured to use, as such a clock signal, the self-excited oscillation signal be... | 04/03/2007 |
| 7194376 | Circuit and method of processing multiple-axis sensor output signals A dual-axis accelerometer and processing circuit are provided. The accelerometer has a plurality of fixed electrodes supported on a substrate and fixed capacitive plates arranged in first and second sensing axes. An inertial mass is suspended over a cavity and inclu... | 03/20/2007 |
| 7188525 | Angular velocity sensor An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness ... | 03/13/2007 |
| 7176604 | Piezoelectric device and method of manufacturing the device A piezoelectric device includes a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and an upper electrode layer on the piezoelectric layer. The piezoelectric layer has a base... | 02/13/2007 |
| 7127945 | Angular velocity sensor An angular velocity sensor comprises a receiving member receiving therein a case containing a vibration element and an IC, and having a hole usable in soldering one end of a terminal strip to a case electrode, whereby, after this soldering operation, a condition of ... | 10/31/2006 |
| 7112911 | Vibrational power generation device vibrator Unnecessary moment in a vibrator is remarkably reduced and the power generation efficiency in capacitance-type vibrational power generation is remarkably improved. A vibrator provided in a variable-capacitance type vibrator has a structure in that one ends of oscill... | 09/26/2006 |
| 7107842 | Angular rate sensor using micro electromechanical haltere An angular rate sensing system suitable for a micromechanical flying insect (MFI) device. The system includes a rod, or haltere, that is moved in a plane by a piezoelectric actuator. Bending of the haltere due to angular movement of a body onto which the haltere is ... | 09/19/2006 |
| 7100444 | Isolated resonator gyroscope The present invention discloses a resonator gyroscope comprising a resonator including two bodies, each with a center of mass and transverse inertia symmetry about an axis that are substantially coincident and each supported by one or more elastic elements and where... | 09/05/2006 |
| 7083740 | Method for manufacturing resonant device A piezoelectric member and an electrode are formed over a silicon substrate. The piezoelectric member and the electrode are patterned by photolithography. The silicon substrate is etched to form a body. A protective film is formed on at least one surface of the body... | 08/01/2006 |
| 7028005 | Methods and systems for finding value and reducing risk A method of valuation of large groups of assets by a partial full underwriting, partial sample underwriting and inferred valuation of the remainder using an iterative and adaptive statistical evaluation of all assets and statistical inferences drawn from the evaluat... | 04/11/2006 |
| 6941810 | Angular velocity sensor An angular velocity sensor for detecting an angular velocity component includes an oscillator having mass, a sensor casing for accommodating the oscillator therewithin, a flexible member for connecting the oscillator to the sensor casing so that the oscillator can b... | 09/13/2005 |
| 6922118 | Micro electrical mechanical system (MEMS) tuning using focused ion beams A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plura... | 07/26/2005 |
| 6918297 | Miniature 3-dimensional package for MEMS sensors An apparatus for mechanically mounting one or more Micro Electro-Mechanical System (MEMS) sensors on a stable, structurally sound base, the base being a generally cubical block formed in a ceramic substrate having a plurality of substantially planar and mutually ort... | 07/19/2005 |
| 6838806 | Vibratory in-plane tunneling gyroscope A gyroscope comprising: a proof mass; a frame supporting the proof mass; a connection arrangement connecting the proof mass and the frame, the connection arrangement having a first stiffness in a first direction and a second stiffness in a second direction substanti... | 01/04/2005 |
| 6834247 | Off-set elimination system for a vibrating gyroscope A gyroscope that may include various sources of error, with those sources of error each being dependent upon a different parameter, is associated with a simulation or “model” of the gyroscope which is typically a computer simulation. The computer simulation is p... | 12/21/2004 |
| 6813937 | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance. ... | 11/09/2004 |
| 6739192 | Angular velocity sensor An angular velocity sensor structured so as to reduce the application of external vibrations to tuning fork as described below. Supporting plate having plate having placement part for placing first rubber body over the top face thereof is placed above the top face o... | 05/25/2004 |
| 6613601 | Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element m... | 09/02/2003 |
| 6561028 | Mechanical resonator for a rotation sensor Resonator which can be produced by micromachining and has a mass part (DF1, DF2, V1, V2) which is fixed by means of a resilient suspension (FA) to an anchoring point (AN) in such a way that it can perform rotary oscillations in its plane, in which, in the... | 05/13/2003 |
| 6550331 | Semiconductor mechanical sensor A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the... | 04/22/2003 |
| 6457360 | High-precision integrated semiconductor peizoresistive detector devices and methods using the same An integrated semiconductor MEMS detector device includes a piezo-resistive detector located at a fixed end of a cantilever, a bi-layer resonance actuator including two thin layer materials having different thermal expansion coefficients, wherein one of t... | 10/01/2002 |
| 6427518 | Apparatus for ascertaining a rotation rate and for performing a self-test An apparatus for determining a rotation rate has an oscillatory body 11 on which a plurality of electromechanical converters A, A', B, B', C, C', D, D' are mounted. At least a first converter A, A' is caused to oscillate mechanically by an electric driver... | 08/06/2002 |
