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| Number | Title | Issue Date |
| 8186219 | Method of determining a speed of rotation of an axially symmetrical vibrating sensor, and a corresponding inertial device A method and device of determining a speed of rotation of an axially symmetrical vibrating sensor. The sensor has a vibrating member associated with control electrodes and with detection electrodes for generating a vibration presenting an elastic line possessing per... | 05/29/2012 |
| 8109145 | Micro hemispheric resonator gyro One embodiment is a micro hemispheric resonator gyro having: a plurality of pickoff and forcer electrodes; a hemispheric resonator; a guard ring having first and second opposed sides, the guard ring containing the plurality of pickoff and forcer electrodes, and the ... | 02/07/2012 |
| 8079259 | MEMS gyroscope with output oscillation about the normal to the plane A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar outer member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis tha... | 12/20/2011 |
| 8056413 | Sensor and sensing method utilizing symmetrical differential readout A sensor and sensing method capable of full-differential symmetry to minimize bias drift and improve stability of the sensor output. The sensor includes a sensing element, sense electrodes capacitively coupled to the sensing element to generate capacitive outputs th... | 11/15/2011 |
| 8011246 | Apparatus and method for self-calibration of coriolis vibratory gyroscope A control component of an apparatus in one example is configured to signal a plurality of electrodes arranged in at least first, second, third, and fourth radial electrode groups along first, second, third, and fourth axes at approximately 0, 45, 90, and 135 degrees... | 09/06/2011 |
| 8011245 | Sensing element of coriolis force gyroscope A gyroscope includes a ring-shaped resonator mounted in a housing, and a bottom plate attached to the resonator. A plurality of openings arranged substantially circumferentially on the bottom plate, and a plurality of grooves between the openings. A plurality of pie... | 09/06/2011 |
| 7992438 | Multiaxial gyroscope The present invention relates to a multiaxial gyroscope, which comprises a vibration-sensing device, a plurality of elastic connecting parts, a first substrate, and a plurality of electrodes. The first ends of the elastic connecting parts are adapted on the peripher... | 08/09/2011 |
| 7987714 | Disc resonator gyroscope with improved frequency coincidence and method of manufacture A disc resonator gyroscope (DRG) and method of manufacture. The DRG has a surrounding pattern of bond metal having a symmetry related to the symmetry of a resonator device wafer that enables more even dissipation of heat from a resonator device wafer of the DRG duri... | 08/02/2011 |
| 7958781 | Vibrating structure gyroscope A gyroscope structure 41 includes ring structure 42 supported from a central hub 43 by eight compliant support legs 44a to 44h. Primary drive transducers 45a and 45b and secondary drive tra... | 06/14/2011 |
| 7908922 | Silicon integrated angular rate sensor A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on th... | 03/22/2011 |
| 7861589 | Ring body and supporting structure of vibratile gyroscope The invention is to provide a ring body and supporting structure of a vibratile gyroscope. The ring body is a thin sheet ring body having a height. The supporting structure is provided for supporting the ring body. The supporting structure is located on two opposing... | 01/04/2011 |
| 7793541 | Planar resonator gyroscope central die attachment Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. A gyroscope die may be attached to its package substrate on a central disc area that is inboard of its embedded electrodes. This configuration eliminates co... | 09/14/2010 |
| 7726188 | Scale factor measurement for mems gyroscopes and accelerometers An inertial instrument such as an accelerometer or gyroscope having scale factor functionality, and that lies generally in a plane. The gyro detects rotation rate about a gyro input axis. The gyroscope has a substrate, a generally planar scale factor gimbal flexibly... | 06/01/2010 |
| 7637157 | Stemless hemispherical resonator gyroscope A vibrational gyroscope includes a piezoelectric ring having a central opening, and a hemispherical resonator having a central opening and mounted over the opening of the central opening of the piezoelectric ring. A plurality of electrodes delivers a voltage to the ... | 12/29/2009 |
| 7637156 | Angular velocity sensor with vibrator having ring portion and electrodes positioned inside and outside the ring portion A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a rin... | 12/29/2009 |
| 7628069 | Closed loop scale factor estimation A closed loop scale factor estimator of an apparatus in one example is configured to compare a measured flex angle of a hemispherical resonator gyroscope (HRG) with a demodulation angle signal to estimate a force-to-rebalance (FTR) scale factor for the HRG, wherein ... | 12/08/2009 |
| 7621184 | Method of determining a speed of rotation of an axially symmetrical vibrating sensor, and a corresponding inertial device The method of determining the speed of rotation of an axially symmetrical vibrating sensor of order 2. The method includes: performing a first evaluation of the speed of rotation while a vibration generated by the vibrating sensor lies in a first posit... | 11/24/2009 |
| 7617727 | Vibrating inertial rate sensor utilizing split or skewed operational elements A vibrating inertial rate sensor has operational elements that define axes that are rotationally offset or “skewed” from a node or anti-node reference axis. The skew may be relative to separate node or anti-node reference axes, or take the form of an element tha... | 11/17/2009 |
| 7607350 | Circuit board mounting for temperature stress reduction A circuit board mounting system in one example comprises an improved mounting system for a circuit board disposed between housing elements, wherein the improvement comprises a plurality of slots formed in the circuit board and a plurality of bushings disposed within... | 10/27/2009 |
| 7549334 | Small angle bias measurement mechanism for MEMS instruments A system and method for separating bias instability of MEMS inertial instruments such as gyroscopes or accelerometers from the instrument signal, in which the inertial measurement instrument has an input axis and an output signal, and the bias instability has a freq... | 06/23/2009 |
| 7526957 | Vibrating inertial rate sensor utilizing skewed drive or sense elements A vibrating inertial rate sensor has sense elements that operate on axes that are rotationally skewed from a node reference axis, enabling both a rate sense and a drive sense determination. Alternatively, the skew may be applied to rotationally offset the drive elem... | 05/05/2009 |
| 7513156 | Coriolis force gyroscope with high sensitivity A gyroscope includes a substantially cylindrical resonator mounted in a housing, and a bottom plate attached to the resonator. A plurality of openings are arranged circumferentially and equiangularly on the bottom plate. A plurality of piezoelectric elements arrange... | 04/07/2009 |
| 7437253 | Parametrically disciplined operation of a vibratory gyroscope Parametrically disciplined operation of a symmetric nearly degenerate mode vibratory gyroscope is disclosed. A parametrically-disciplined inertial wave gyroscope having a natural oscillation frequency in the neighborhood of a sub-harmonic of an external stable clock... | 10/14/2008 |
| 7434465 | Ring resonator gyroscope with cylindrical ring suspension A ring resonator gyro comprises a cylindrical ring suspension. The cylindrical ring suspension supports a cylindrical ring resonator. The cylindrical ring resonator is coupled with an outer perimeter of the ring suspension. ... | 10/14/2008 |
| 7426860 | Ring resonator gyro with folded cylinder suspension A ring resonator gyro comprises a folded cylinder suspension that supports a cylindrical ring resonator. The folded cylinder suspension comprises an inner cylinder, an outer cylinder, and an annulus. The inner cylinder, the outer cylinder, and the annulus are concen... | 09/23/2008 |
| 7406867 | G2-Gyroscope: MEMS gyroscope with output oscillation about the normal to the plane A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar support member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis t... | 08/05/2008 |
| 7404325 | Micro-machined vibrating structure and associated micro-gyroscope The invention relates to a micro-machined, vibrating structure (4), comprising a fixing end (5), connected to a fixed support (6) and a hollow shell, preferably in a cylindrical form with a lateral wall (7), forming a vibrating wall (7... | 07/29/2008 |
| 7401397 | Method of producing an inertial sensor The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is... | 07/22/2008 |
| 7360423 | Resonating star gyroscope Disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto. The angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell-type structure for rate sensing or measuring angle of rotation. The struc... | 04/22/2008 |
| 7347095 | Integral resonator gyroscope The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined... | 03/25/2008 |
| 7318347 | Hemispherical resonator gyro control Embodiments of the present system encompass: a hemispherical resonator gyro (HRG); digital control loop algorithms which operate in two, distinct modes, Force to Rebalance (FTR) and Whole Angle (WA); and a closed-loop slewing-voltage phase control that reduces quadr... | 01/15/2008 |
| 7302848 | Force compensated comb drive A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the... | 12/04/2007 |
| 7296468 | Digital coriolis gyroscope Apparatus, systems, and methods to control the frequency of a plurality of gyroscopes are disclosed. The gyroscopes are configured such that each individual gyroscope operates independently of one another and at the same pre-determined frequency. To accomplish this,... | 11/20/2007 |
| 7281426 | Stemless hemispherical resonator gyroscope A vibrational gyroscope includes a piezoelectric ring having a central opening, and a hemispherical resonator having a central opening and mounted over the opening of the central opening of the piezoelectric ring. A plurality of electrodes delivers a voltage to the ... | 10/16/2007 |
| 7281425 | Coriolis force gyroscope with high sensitivity A gyroscope includes a substantially cylindrical resonator mounted in a housing, and a bottom plate attached to the resonator. A plurality of openings are arranged circumferentially and equiangularly on the bottom plate. A plurality of piezoelectric elements arrange... | 10/16/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7250112 | Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame is provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions alon... | 07/31/2007 |
| 7222532 | Package for electro-mechanical systems A packaging system in one example comprises an improved mechanical packaging system for a circuit board disposed between housing elements, the improvement comprising an upper housing member having a centrally disposed opening provided therethrough, a unitary electro... | 05/29/2007 |
| 7222513 | Method of compensating anisotropy in a vibrating-bell inertial rotation sensor The method serves to compensates anisotropy in an inertial rotation sensor comprising a metallized vibrating bell (1) having a bias voltage applied thereto, the vibrating bell (1) having an edge (7) electrodes (5.1, 5.2), and the method c... | 05/29/2007 |
| 7218193 | MEMS-based inertial switch In one embodiment, an inertial switch of the invention includes a MEMS device manufactured using a layered wafer. The MEMS device has a movable electrode supported on a substrate layer of the wafer and a stationary electrode attached to that substrate layer. The mov... | 05/15/2007 |
