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Class 73/504.12 - Vibratory mass


Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the inertial member is caused to
No. of patents: 763
Last issue date: 05/29/2012


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NumberTitleIssue Date
8186218Physical quantity measuring apparatus and electronic device
A physical quantity measuring apparatus includes an oscillation drive circuit that forms an oscillation loop together with a physical quantity transducer and excites a drive oscillation of the physical quantity transducer, and a detection circuit that detects an ana...
05/29/2012
8176779Vibrating micro-mechanical sensor of angular velocity
Embodiments of the invention relate to measuring devices used in measuring angular velocity and, more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to an embodiment of the invention is adapted to measu...
05/15/2012
8166815Angular velocity sensor element
An angular velocity sensor element is provided which is capable of preventing even transmission of sudden externally-applied vibration to an element portion by absorbing the vibration. An angular velocity sensor element 2 according to the present embodiment h...
05/01/2012
8166816Bulk acoustic wave gyroscope
Capacitive bulk acoustic wave x, y and z-axes gyroscopes implemented on (100) and (111) silicon substrates are disclosed. Exemplary gyroscopes comprise a handle substrate, a bulk acoustic wave resonator element supported by the handle substrate, and a plurality of e...
05/01/2012
8156805MEMS inertial sensor with frequency control and method
An inertial sensor has a transducer with a sense resonator. The sense resonator is oscillated. A signal responsive to the oscillation is provided. A first baseband signal and a second baseband signal are provided responsive to the signal responsive to the oscillatio...
04/17/2012
8151641Mode-matching apparatus and method for micromachined inertial sensors
A mode matching servo for an inertial sensor having a resonator and an accelerometer provides a test signal at a frequency higher than a predetermined inertial sensor response frequency and lower than an accelerometer resonance mode frequency so as to induce acceler...
04/10/2012
8146424Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
The present invention generally relates to systems and methods for an inertial sensor suspension that minimizes proof mass rotation and translation. The system contains a microelectromechanical sensor (MEMS) device for measuring rotation along an input rotation axis...
04/03/2012
8141425Angular rate detection apparatus providing stable output
Disclosed is an angular rate detection apparatus which provides a stable output with high detection accuracy regardless of a fluctuation of a reference voltage accompanying a fluctuation of a power supply voltage. The angular rate detection apparatus includes at lea...
03/27/2012
8141424Low inertia frame for detecting coriolis acceleration
A sensing frame that moves in response to torque generated by the Coriolis acceleration on a drive subsystem is disclosed. The sensing frame include a first rail. The first rail is constrained to move along the first axis parallel to the first rail. The frame includ...
03/27/2012
8136398Vibration gyro sensor, control circuit, and electronic apparatus
Provided is a vibration gyro sensor including: a vibration element including a piezoelectric element group which has a first side provided with a drive electrode and a detection electrode and a second side opposed to the first side and provided with a common electro...
03/20/2012
8127607Angular velocity sensor interface circuit and angular velocity detection apparatus
An angular velocity detection apparatus includes an angular velocity detection signal amplifier circuit which amplifies an angular velocity detection signal Vo output from an angular velocity sensor, and an offset control circuit which controls an offset so as to be...
03/06/2012
8127608Detection device, gyrosensor, and electronic instrument
A detection device includes a driver circuit and a detection circuit. The detection circuit includes an amplifier circuit which amplifies an output signal from a vibrator, a sensitivity adjustment circuit which performs sensitivity adjustment by variably controlling...
03/06/2012
8122766Inertia force sensor
Inertial force sensor includes detecting element that detects inertial force. Detecting element includes: two first orthogonal arms each having first arm and second arm that are connected to each other in a substantially orthogonal direction; support portion that su...
02/28/2012
8117914Inertia force sensor and composite sensor for detecting inertia force
An inertia force sensor includes a detection element having an acceleration detection section (1). This detection element (1) has: two orthogonal arms obtained by connecting first arms (8) to second arms (10) so as to be orthogonal to eac...
02/21/2012
8117913Angular velocity sensor
Disclosed is an angular velocity sensor for achieving downsizing of a variety of electronic devices. For this purpose, the angular velocity sensor has a subtracter for outputting a first differential signal based on two sensor signals output from a first sensing ele...
02/21/2012
8113051Angular velocity measuring device
An oscillator is oscillated at a predetermined oscillation frequency. A detecting unit exerts Coriolis force on the oscillator. A repetitive control system applies an external force to the oscillator so as to cancel out the Coriolis force to achieve an angular veloc...
02/14/2012
8109144Inertia sensor
A multi-axis accelerometer or a multi-axis angular rate sensor which can be made by an easy process and the size of which can be greatly reduced is provided. An inertia sensor has a substrate, a flat proofmass formed on the substrate and a stacked structure includin...
02/07/2012
8104343Vibrating micromechanical sensor of angular velocity
The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of ...
01/31/2012
8104344Angular velocity sensor utilizing coriolis force
Beams 70a, 70b, 70c and, 70d of an angular velocity sensor 100 is provided with a folded type beam 73 that has a spring constant which is smaller along the excitation direction (x-axis direction) ...
01/31/2012
8100011Piezoelectric device, oscillation type gyro sensor, electronic device, and method of manufacturing piezoelectric device
A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes det...
01/24/2012
8096181Inertial sensor
An inertial sensor includes a drive structure 11 which performs one reference oscillation in an XY plane, and force detecting structures 12 (12-1 to 12-4) which each have a plurality of detection axes and which are arranged ...
01/17/2012
8096180Inertial sensor
Techniques capable of suppressing fixation between a movable electrode and a fixed electrode in an inertial sensor and preventing the inertial sensor from malfunctioning are provided. The movable electrode, the fixed electrode provided so as to face the movable elec...
01/17/2012
8087295Dual-axis resonator gyroscope
The present invention discloses an improved planar, dual-axis, resonator gyroscope with mechanical coupling of adjacent vibrating members. The primary-mode flexible hinges include a tangential torsion element that largely decouples the out-of-plane resonant frequenc...
01/03/2012
8082789Matched multiplier circuit having reduced phase shift for use in MEMS sensing applications
Apparatus and methods are provided for multiplier circuits having reduced phase shift. A multiplier circuit comprises an input node for an input signal and an output node for an output signal. A first multiplier is coupled to the input node and has a first multiplie...
12/27/2011
8074517Inertia force sensor
When detecting an angular rate in a detecting element (1), when an angular rate occurs, it is detected on the basis of a first sum by adding output values issued from upper electrode of second sensing electrode part (19b) and upper electrode of ...
12/13/2011
8069726X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor...
12/06/2011
8061201Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
Disclosed are methods and a sensor architecture that utilizes the residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching, i.e., ˜0 Hz split between the drive and sense mode frequencies, and to electronically control sensor bandwidth....
11/22/2011
8042396Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes
A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an ...
10/25/2011
8042395Method for operating a vibrating gyroscope and sensor arrangement
A method for operating a vibrating gyroscope, wherein the vibrating gyroscope is used as a resonator and forms part of at least one control circuit that excites the vibration gyroscope by feeding an excitation signal with its natural frequency. An output signal can ...
10/25/2011
8037758Angular velocity detection apparatus
An angular velocity detection apparatus includes: a sensor unit having first and second detection axes serving as angular velocity detection axes, the first and second detection axes intersecting each other; a sensor output correction circuit for making at least one...
10/18/2011
8037757Parametric amplification of a MEMS gyroscope by capacitance modulation
Parametric amplification of the output of a MEMS gyroscope is achieved by modulating the sense capacitance, or an auxiliary capacitance having an applied DC voltage. The capacitance modulation is produced by the driven motion of the gyroscope mechanism, so the pump ...
10/18/2011
8037756Microelectromechanical gyroscope with open loop reading device and control method
A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation ...
10/18/2011
8033171Detection apparatus, detection method, and electronic apparatus
A detection apparatus is provided which includes a cantilever vibration gyro including a piezoelectric element having a first side provided with a drive electrode and a pair of detection electrodes sandwiching the drive electrode with predetermined gaps therebetween...
10/11/2011
8028579Vibration body for angular speed sensor
A vibration body for angular speed sensor has a vibrator that includes vibration pieces, a supporting part for supporting the vibration pieces, and a mounting substrate for mounting the vibrator. The mounting substrate has a seat part for fixing the supporting part ...
10/04/2011
RE42731High Q angular rate sensing gyroscope
A structure and arrangement for improving the accuracy and efficiency of an angular rate sensing gyroscope is herein disclosed. Voltage pick-off conductors are applied to an area of the surface of a resonating element of an angular rate sensing gyroscope that is sub...
09/27/2011
8020441Dual mode sensing for vibratory gyroscope
An angular rate sensor is disclosed. The angular rate sensor comprises a substrate and a drive subsystem partially supported by a substrate. The drive subsystem includes at least one spring, at least one anchor, and at least one mass; the at least one mass of the dr...
09/20/2011
8015874Inertia force sensor
An inertial force sensor is provided in which each of switches is connected in parallel with each of resistors of low-pass filter and high-pass filter, respectively, and capacitor of high-pass filter can be boost charged by making switches on without mediate resisto...
09/13/2011
8011244Microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses
A microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses. The microsystem is achieved in a flat substrate. The oscillating masses are connected to the substrate by suspension springs. The oscillating...
09/06/2011
8001840Oscillation type gyro sensor, control circuit, electronic apparatus, and method of manufacturing an oscillation type gyro sensor
There is provided an oscillation type gyro sensor including an oscillation gyro device, an oscillation circuit, a controller, and an impedance conversion circuit. The oscillation gyro device includes a piezoelectric device including a drive electrode and a detection...
08/23/2011
7997134Measurement by gyroscopic system
A gyroscopic system is disclosed comprising at least a vibrating gyroscope, as a first mechanism of angle measurement, designed to provide a first measurement of angle values according to a measurement axis; and a second mechanism of angle measurement, designed to p...
08/16/2011
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