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| Number | Title | Issue Date |
| 7357025 | Micromachined apparatus with co-linear drive arrays A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plu... | 04/15/2008 |
| 7347094 | Coupling apparatus for inertial sensors A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at le... | 03/25/2008 |
| 7287428 | Inertial sensor with a linear array of sensor elements An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair of sensor elements may be coupled so that the frames are allowed to mo... | 10/30/2007 |
| 7260991 | Rotation-rate sensor A micromechanical rotation-rate sensor includes a substrate, an anchoring device provided on the substrate, as well as a first spiral spring device and a second spiral spring device, the two spiral spring devices being provided next to one another in mirror symmetry... | 08/28/2007 |
| 7216539 | Micromachined apparatus with split vibratory masses Each of a number of resonator masses is split into two separate lobes or masses joined together by a short flexure. The short flexure allows the separate lobes or masses to rotate slightly as they resonate so as to substantially relieve longitudinal stresses in cert... | 05/15/2007 |
| 7204144 | Micromachined apparatus with drive/sensing fingers in coupling levers Resonator structures include a plurality of resonator masses interconnected by a plurality of levers so as to resonate in anti-phase with one another. The levers include a plurality of lever fingers interdigitated with corresponding fixed fingers affixed to an under... | 04/17/2007 |
| 7193492 | Monolithic MEMS device having a balanced cantilever plate A MEMS device fabricated from a single multi-layered wafer, which alleviates the alignment problem associated with a two-piece prior-art design. In one embodiment, the MEMS device has a stationary part and a movable part rotatably coupled to the stationary part. The... | 03/20/2007 |
| 7089792 | Micromachined apparatus utilizing box suspensions A micromachined gyroscope makes use of Coriolis acceleration to detect and measure rotation rate about a plane normal to the surface of a substrate. Specifically, various resonating structures are suspended within a frame. The resonating structures include phase and... | 08/15/2006 |
| 7040164 | Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope A sensor is fabricated with micron feature sizes capable of simultaneously measuring absolute angles of rotation and angular rotational rates. The measurements are made directly from the position and velocity of the device without the need for electronic integration... | 05/09/2006 |
| 7032451 | Micromachined sensor with quadrature suppression Quadrature suppression is provided by placing a resonator mass adjacent to a quadrature suppression electrode. The resonator mass is capable of moving substantially parallel to the quadrature suppression electrode and includes a notch formed adjacent to a portion of... | 04/25/2006 |
| 6912078 | Electrostatically actuated micro-electro-mechanical devices and method of manufacture One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other em... | 06/28/2005 |
| 6888662 | Micro-mechanical system employing electrostatic actuator and fabrication methods of same A vertical electrostatic actuator is based on a layered structure consisting of two conducting or semiconducting layers separated by an insulating layer and/or layered structure consisting of p-type and n-type layers separated by a pn-junction. The number of conduct... | 05/03/2005 |
| 6776041 | Micromechanical rotation rate sensor A micromechanical yaw rate sensor having: a substrate having an anchoring device provided on the substrate; and an annular flywheel that is connected, via a flexural spring system, with the anchoring device in such a way that the area of connection with the anchorin... | 08/17/2004 |
| 6665110 | Diagonal to rectangular pixel mapping for spatial light modulator A method of mapping diagonal rows and columns of two-dimensional grid elements to rectangular rows and columns of two-dimensional grid elements. The method is of particular use with a spatial light modulator in optical equalization application.... | 12/16/2003 |
| 6609037 | Gimbal pointing vector stabilization control system and method A hybrid stabilization system for isolating a pointing vector of a gimbal from the motion of a vehicle base is provided. The hybrid stabilization control system includes a rate feedback loop generating a rate feedback compensation value in response to a m... | 08/19/2003 |
| 6584840 | Angular velocity sensor A sensitive angular velocity sensor is provided without increasing an inter-electrode gap for inducing a torsional vibration. An angular velocity sensor which employs an electrostatic drive system for inducing drive vibration by using inter-electrode elec... | 07/01/2003 |
| 5915275 | Oscillating gyroscope An oscillatory gyroscope is described based on a three gimbal structure whose output is the rotary deflection of the middle gimbal. Closed loop operation is achieved by the oscillatory interaction between the outer and inner gimbals. The gyro is referred ... | 06/22/1999 |
| 5882532 | Fabrication of single-crystal silicon structures using sacrificial-layer wafer bonding A thin micromechanical device is fabricated in a way that is mechanically compatible with wafer handling for conventional-thickness wafers. A removable bonding layer bonds a fabrication wafer to a substantially conventional-thickness handle wafer to form ... | 03/16/1999 |
| 5712426 | Pendulous oscillating gyroscopic and accelerometer multisensor and amplitude oscillating gyroscope A pendulous oscillating gyroscope and accelerometer multisensor having an accelerometer input axis and a gyroscopic input axis, comprising: a fixed case; a servo driven member mounted to the case for sinusoidal oscillation about an accelerometer servo axi... | 01/27/1998 |
| 5691470 | Pendulous oscillating gyroscopic accelerometer A pendulous oscillating gyroscopic accelerometer, comprising: a fixed case; a servo driven member mounted to the case for oscillation about a servo axis; a torque summing member mounted to the servo driven member for rotation about an output axis transver... | 11/25/1997 |
| 5650568 | Gimballed vibrating wheel gyroscope having strain relief features A gimballed vibrating wheel gyroscope for detecting rotational rates in inertial space. The gyroscope includes a support oriented in a first plane and a wheel assembly disposed over the support parallel to the first plane. The wheel assembly is adapted fo... | 07/22/1997 |
| 5555765 | Gimballed vibrating wheel gyroscope A gimballed vibrating wheel gyroscope for detecting rotational rates in inertial space. The gyroscope includes a support oriented in a first plane and a wheel assembly disposed over the support parallel to the first plane. The wheel assembly is adapted fo... | 09/17/1996 |
| 5433123 | Measuring and transmitting system for position gyros A measuring and transmitting system of measuring signals for the deflection of an interior frame angle of a position gyro cardanically mounted in an exterior housing, in which the position gyro has an interior frame and an exterior frame, is provided with... | 07/18/1995 |
| 5331852 | Electromagnetic rebalanced micromechanical transducer A method and apparatus for electromagnetically rebalancing a micromechanical transducer via a plurality of current carrying electrodes disposed beneath or above the transducer interacting with a current carrying conductor disposed on the transducer. In a ... | 07/26/1994 |
| 4461176 | Miniature gyroscope A miniature rate-integrating gyroscope is shown to comprise: an electrical motor (whose rotor, when rotating, constitutes a gyroscopic mass) mounted in a single degree of motion gimbal within a cylindrical case; a motion sensor to determine any rotation o... | 07/24/1984 |
| 4445375 | Tuned coriolis angular rate measuring device A tuned coriolis, angular rate measuring device includes a substantially hollow, generally annular rotor driven by a high-speed, synchronous spin motor. The rotor is made unsymmetrical by mounting within the rotor near its periphey at least a pair of high... | 05/01/1984 |
| 4426889 | Molded inertial sensor Structural elements of an inertial sensor are fabricated from molded plastic materials. The structural elements are characterized by relatively, small cross-section areas, and further incorporate keys and keyways, as well as guide and alignment slots, mol... | 01/24/1984 |
| 4342226 | Turn indicator for ships or aircraft A turning indicator for indicating the turning direction and the turning speed of course changes of a ship or an aircraft, in which an electromotor is movably mounted between two supports of a carrier. An axle of the carrier is fixedly connected with the ... | 08/03/1982 |
| 4214482 | Inertial instrument Disclosed is apparatus and method for accurately determining the direction of true north or the change in drift of other gyroscopes. The apparatus comprises a single degree of freedom gyroscope driven by a permanent magnet electric motor. The gyroscope ro... | 07/29/1980 |
| 4161884 | Turn rate indicator of aircraft using gyroscope A turn rate indicator of an aircraft wherein the outer rotor of a Hall motor is used as a gyro rotor. A driving circuit for the gyro stator circuit is provided integrally with the gyro gimbal. The driving circuit is coupled to a connector affixed to the c... | 07/24/1979 |
| 4149418 | Turn rate indicator of aircraft with improved zero seeking characteristics A turn rate indicator for an aircraft includes magnetic substance pieces facing each other, one being rotatable integrally with a gimbal and the other being fixed to a body. Because of the attracting force generated between the magnetic substance pieces, ... | 04/17/1979 |
| 4016469 | Sensor including means for operating the sensor in rate measuring and stabilization modes A sensor including means for operating the sensor in angular rate measuring and stabilization or rate integrating modes. When operating in the rate measuring mode, a loop is closed through an amplifier and torquer to null the sensor and when operating in ... | 04/05/1977 |
| 4005608 | Electrically controlled rate integrating device A rate integrating device includes a torquer in open loop configuration for torquing the device to null and a load connected to the device in closed loop configuration for maintaining the device at null. The load loop includes electrical means whereby the... | 02/01/1977 |
