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| Number | Title | Issue Date |
| 7997133 | Temperature compensating sensor An acceleration sensor for measuring an acceleration comprises a housing including a measuring-plate, which has a first surface. The measuring plate has a second surface in parallel with and opposite to the first surface. A post is bonded via a post-bonding-face to ... | 08/16/2011 |
| 7735368 | Acceleration sensor An acceleration sensor of the present invention is a heat sensing type acceleration sensor, and includes a heating chip formed with a heating element on a surface thereof, and a sensor chip formed with a thermocouple element on a surface thereof and disposed so that... | 06/15/2010 |
| 7603902 | Temperature compensation circuit, trimming circuit, and acceleration detector A temperature compensation circuit having satisfactory linearity, a trimming circuit including a plurality of temperature gradients, and an acceleration detector having a wide applicable temperature range. A plurality of resistor elements R1 to R4, R | 10/20/2009 |
| 7377166 | Sensor signal processing system and detector A detector is made up of a semiconductor integrated circuit in a part, and the semiconductor integrated circuit includes a driving circuit, an AC amplifier, a detection circuit and an amplifier circuit. An input resistor that is connected to input terminals of an op... | 05/27/2008 |
| 7373266 | Sensor calibration using selectively disconnected temperature Calibration of a sensor circuit that includes a sensor, a temperature measurement circuit and a signal processing path. The sensor senses a physical parameter to be measured and generates an electrical sensor output signal representing the physical parameter. The te... | 05/13/2008 |
| 7358580 | Sacrificial layer technique to make gaps in MEMS applications A method comprising over an area of a substrate, forming a plurality of three dimensional first structures; following forming the first structures, conformally introducing a sacrificial material over the area of the substrate; introducing a second structural materia... | 04/15/2008 |
| 7331229 | Magnetic null accelerometer An accelerometer system includes a capacitor plate fixed within a housing and a flexure plate positioned substantially parallel to the capacitor plate a distance therefrom. The distance varies in response to acceleration forces acting upon the flexure plate such tha... | 02/19/2008 |
| 7328518 | Surface roughness/contour shape measuring apparatus The present invention provides a surface roughness/contour shape measuring apparatus that can move a probe relative to a workpiece within an orthogonal X-Y plane while employing a relatively inexpensive construction. In the surface roughness/contour shape measuring ... | 02/12/2008 |
| 7302848 | Force compensated comb drive A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the... | 12/04/2007 |
| 7292000 | Angular velocity measuring device and leg-moving robot An angular velocity measuring device (1) includes a first sensor (2) (vibration gyro) and a second sensor (3) (gas rate gyro). The detection output of the first sensor (2) is inputted to a high pass filter (4). Output of the filter... | 11/06/2007 |
| 7284431 | Geophone An improved system for sensing ground motion is provided. The system generally comprises a shell and a case within the shell and connected by a suspension. The mass of the case is greater than the mass of the shell. An electrode within the shell detects relative mot... | 10/23/2007 |
| 7265790 | System and method for setting an image capture device to an operational mode In an embodiment, a method sets an image capture device to one of a plurality of available operational modes for the image capture device. The method comprises determining an angle of pitch orientation of the image capture device, and setting the image capture devic... | 09/04/2007 |
| 7260989 | Sensor signal processing system and detector A detector is made up of a semiconductor integrated circuit in a part, and the semiconductor integrated circuit includes a driving circuit, an AC amplifier, a detection circuit and an amplifier circuit. An input resistor that is connected to input terminals of an op... | 08/28/2007 |
| 7252008 | Micromechanical piezoresistive pressure sensor device A micromechanical piezoresistive pressure sensor device having a sensor substrate, in which an essentially rectangular diaphragm region is provided; a piezoresistive resistance device having at least one piezoresistive resistor strip, which runs parallel to the long... | 08/07/2007 |
| 7248128 | Reference oscillator frequency stabilization Method for stabilizing the frequency of a MEMS (Micro Electro Mechanical Systems) reference oscillator, and a MEMS reference oscillator, wherein the method comprises following steps: using two or more MEMS components, wherein each MEMS component is characterized by ... | 07/24/2007 |
| 7201221 | Wellbores utilizing fiber optic-based sensors and operating devices This invention provides a method for controlling production operations using fiber optic devices. An optical fiber carrying fiber-optic sensors is deployed downhole to provide information about downhole conditions. Parameters related to the chemicals being used for ... | 04/10/2007 |
| 7191654 | Methods and systems for adjusting magnetic return path with minimized reluctance Accelerometers having higher concentration of flux closer to the proof mass. The invention includes a proof mass, an excitation ring, a magnet, a pole piece, and a coil. The excitation ring includes a ring unit and a base unit that are attached and the ring unit or ... | 03/20/2007 |
| 7168321 | Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer,... | 01/30/2007 |
| 7155974 | Inertia sensor unit An inertia sensor unit having a detecting element, a signal processor being constituted as an element separate from the detecting element, for at least amplifying signals output from the detecting element, and an inertia sensor mounted to a detection object for dete... | 01/02/2007 |
| 7152473 | Integrated and multi-axis sensor assembly and packaging A sensor apparatus (104) includes a plural different spatial direction axis of sensitivity positioned sensor package containing sensor module (305) supported by a planar surface (345) within a cavity (340) of a housing (205) couple... | 12/26/2006 |
| 7131315 | Methods and apparatus for reducing vibration rectification errors in closed-loop accelerometers Systems and methods for minimizing vibration rectification error (VRE) for a closed-loop accelerometer. In one embodiment, the method includes applying a known vibration signal to the closed-loop accelerometer along a first axis and adjusting a feedback gain setting... | 11/07/2006 |
| 7122151 | Membrane apparatus with enhanced mass transfer, heat transfer and pumping capabilities via active mixing A combination mass transfer and pump apparatus, which in a single step actively mixes a first mass and a second mass and simultaneously pumps one of the first mass and the second mass through the apparatus. The combination mass transfer and pump apparatus substantia... | 10/17/2006 |
| 7096717 | Control device of gas sensor When the ignition switch of a vehicle is turned OFF, a purging process for increasing the flow of an off-gas fluidizing in each of the outlet side pipings of a fuel cell and discharging water remaining in a fuel cell system to an outside is started to be executed, a... | 08/29/2006 |
| 7098844 | Acceleration detector with integral vehicle parameter display using a vehicle interface Calibration of an acceleration detector is initiated by a user depressable button such as a button indicating a vehicle is at rest and/or by the detector reading an OBDII vehicle communication protocol to determine the condition of the vehicle. Calibration permits m... | 08/29/2006 |
| 7077007 | Deep reactive ion etching process and microelectromechanical devices formed thereby A process for forming a microelectromechanical system (MEMS) device by a deep reactive ion etching (DRIE) process during which a substrate overlying a cavity is etched to form trenches that breach the cavity to delineate suspended structures. A first general feature... | 07/18/2006 |
| 7073380 | Pyramid socket suspension An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complem... | 07/11/2006 |
| 7069783 | Angular velocity sensor The angular velocity sensor for detecting an angular velocity for detecting movement amounts and for controlling postures of vehicles, airplanes, cameras, and the like. The angular velocity sensor is provided with a piezoelectric vibrator, a temperature compensation... | 07/04/2006 |
| 7067027 | Method of making an electro-mechanical roll Method of making an electro-mechanical roll such as a bias transfer roll for use in an electrostatographic apparatus such as a printing or copying apparatus comprising a conductive core having a segmented layer of compressible material positioned in a tandem relatio... | 06/27/2006 |
| 7040390 | Wellbores utilizing fiber optic-based sensors and operating devices This invention provides a method for controlling production operations using fiber optic devices. An optical fiber carrying fiber-optic sensors is deployed downhole to provide information about downhole conditions. Parameters related to the chemicals being used for ... | 05/09/2006 |
| 7033071 | Method and apparatus for correcting sensor signal in temperature A slope correction signal setting unit is configured to output selectively one of a plurality of direct current signals according to the sensed temperature parameter signal. Levels of the plurality of direct current signals are determined to correspond to the predet... | 04/25/2006 |
| 7002225 | Compliant component for supporting electrical interface component An apparatus in one example includes a compliant component for supporting an electrical interface component that serves to electrically and mechanically couple a die with a separate layer. In one example, the compliant component, upon relative movement between the d... | 02/21/2006 |
| 6973837 | Temperature compensated strain sensing apparatus A strain sensing apparatus for use in the presence of thermal gradients has a strain gauge and resistance temperature gauge in a planar assembly bonded to, deposited on or diffused or implanted in a substrate surface. The apparatus can sense strain and temperature i... | 12/13/2005 |
| 6955085 | Optical accelerometer or displacement device using a flexure system Disclosed herein is an accelerometer and/or displacement device that uses a mass coupled to a rhomboidal flexure to provide compression to an optical sensing element preferably having a fiber Bragg grating (FBG). The transducer includes a precompressed optical senso... | 10/18/2005 |
| 6948368 | Vibrating sensor with thermal shield The vibrating sensor includes a cell fixed in a housing, the cell including a support member and a vibrating member connected to the support member, together with a thermal masking element extending between the vibrating member and a wall of the housing. ... | 09/27/2005 |
| 6941809 | Method for temperature-compensated accelerometer measurement, with at least a device comprising two vibrating resonators The invention concerns a temperature-compensated accelerator measurement using two vibrating resonators whereof the frequencies (f1, f2) are measured, then used for determining (18, 19) the most probable temperature value (T) based on th... | 09/13/2005 |
| 6934665 | Electronic sensor with signal conditioning A method for extracting components from signals in an electronic sensor (50) having a sensing element (52). The sensing element (52) generates a first signal (60) and a second signal (62). The method comprises the steps of: receivi... | 08/23/2005 |
| 6928875 | Dual microwave cavity accelerometer A system and method for compensating for gradients in a dual cavity device such as but not limited to an accelerometer. A first source drives a first cavity at least two different modes, at least one mode varying with changes in cavity length. A second source drives... | 08/16/2005 |
| 6924588 | Piezoelectric crystal material and piezoelectric resonator In a gallium phosphate crystal, a crystallographic Y-axis and a Z-axis that have been rotated about an X-axis counterclockwise through an angle α is referred to as a Y′-axis and a Z′-axis, respectively, where the angle α is in a range from 10° to 20°. A piez... | 08/02/2005 |
| 6843125 | Fluid-aligned measurement apparatus and method An apparatus 10 for producing one or more characterizing measurements of a surface 12 in relation to a repeatedly reproducible datum axis A-A, the apparatus 10 comprising a probe 14; a first porous surface 16 located on the probe | 01/18/2005 |
| 6826957 | Self-contained portable air pressure decay test apparatus A portable air pressure decay test apparatus for leak testing of a sealed system includes a hollow housing, an air pump having an inlet and an outlet disposed in the housing, and a controller disposed in the housing and connected to the pump for controlling the oper... | 12/07/2004 |
