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Class 73/31.06 - Semiconductor


Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the detector includes semiconductor
No. of patents: 359
Last issue date: 11/29/2011


1                  
NumberTitleIssue Date
8065904Method and apparatus for detecting an analyte
We describe the use of coordination polymers (CP) as coatings on microcantilevers for the detection of chemical analytes. CP exhibit changes in unit cell parameters upon adsorption of analytes, which will induce a stress in a static microcantilever upon which a CP l...
11/29/2011
8033160Sensor element for determining different gas components in a test gas
A sensor element for determining different gas components in a test gas, in particular in an exhaust gas of an internal combustion engine, including a lambda sensor for determining an oxygen content in the test gas, at least one semiconductor gas sensor for determin...
10/11/2011
8001828Miniaturized metal (metal alloy)/ PdO/SiC hydrogen and hydrocarbon gas sensors
A miniaturized Schottky diode hydrogen and hydrocarbon sensor and the method of making same is disclosed and claimed. The sensor comprises a catalytic metal layer, such as palladium, a silicon carbide substrate layer and a thin barrier layer in between the catalytic...
08/23/2011
7992426Apparatus and method for increasing the selectivity of FET-based gas sensors
A FET gas sensor having a relatively low operating temperature, for example, room temperature, is free from cross sensitivities from interfering gases by a preceding in-line filter. The sensor's service life is substantially stabilizable by using fabric-like activat...
08/09/2011
7992425Hydrogen sensor
A novel, resistance-based porous silicon sensor with Pd nano structures as the hydrogen sensing layer is presented. The sensor operates at room temperature. The hydrogen sensor of the present includes a p-Type Si substrate that is subjected to porous Si etching to f...
08/09/2011
7963147Micro gas sensor and method for manufacturing the same
Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for ma...
06/21/2011
7963148Gas sensor made of field effect transistor based on ZnO nanowires
The present invention discloses a gas sensor made of field effect transistor based on ZnO nanowires (ZnO-FET) which operates according to the principle of metal-oxide-semiconductor field effect transistor (MOSFET) and has a charge carrier channel made of ZnO nanowir...
06/21/2011
7950271Gated beta-molybdenum oxide sensor
An apparatus for sensing an analyte gas is provided. The apparatus may include a signal amplifier that may include a thin film transistor that may include a semiconducting film that may include a metal oxide capable of chemical interaction with the analyte gas, such...
05/31/2011
7918123Gas sensor
A gas sensor has at least one gas sensitive layer, which has at least one surface area in which the work function is dependent upon the concentration of a target gas capable of being brought into contact with the surface zone. At least one electric potential sensor ...
04/05/2011
7866202Method of fabricating a carbon monoxide detector and a carbon monoxide detector fabricated using the same
Disclosed is a method of fabricating a carbon monoxide detector and a carbon monoxide detector fabricated using the same. Particularly disclosed is a method of fabricating a carbon monoxide detector, which can operate at room temperature and process high detecting s...
01/11/2011
7861575Micro gas sensor and manufacturing method thereof
A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the...
01/04/2011
7849727Gas-sensing semiconductor devices
A gas-sensing semiconductor device 1′ is fabricated on a silicon substrate 2′ having a thin silicon dioxide insulating layer 3′ in which a resistive heater 6 made of doped single crystal silicon formed simultaneously with source and...
12/14/2010
7827852Gas sensor and method of making
A gas sensor is disclosed. The gas sensor includes a gas sensing layer including doped oxygen deficient tungsten oxide and a dopant selected from the group consisting of Re, Ni, Cr, V, W, and a combination thereof, at least one electrode positioned within a layer of...
11/09/2010
7802464FET-based gas sensor system
A sensor system for detection of gas with a modified ion selection FET. The FET may have a gate of low conductivity material for detection of a species in a fluid. A component such as a capacitor may be connected to an electrode of the FET, such as a source, in conj...
09/28/2010
7681434Sensing device
The present invention provides a sensing device for obtaining information of a test sample using an electromagnetic wave including a frequency region within a frequency region of 30 GHz to 30 THz, the sensing device comprising an electromagnetic wave transmitting po...
03/23/2010
7640789Ultra-sensitive metal oxide gas sensor and fabrication method thereof
A method for fabricating an ultra-sensitive metal oxide gas sensor is disclosed, which comprises the steps of spinning a mixture solution including a metal oxide precursor and a polymer onto a sensor electrode to form a metal oxide precursor-polymer composite fiber;...
01/05/2010
7631540Gas sensor with nanowires of zinc oxide or indium/zinc mixed oxides and method of detecting NOx gas
A gas sensor is disclosed, which includes two separate metal electrodes on a surface of a substrate and a semiconductor thin film deposited on the surface of the substrate and connecting the two metal electrodes. The semiconductor thin film contains zinc oxide or a ...
12/15/2009
7584649Sensor with microelectro-mechanical oscillators
A sensor is provided which is configured to detect the presence of multiple analytes, for example chemical or biological compounds, through the measurement of induced resonance shifts in a coupled array of microelectromechanical or micromechanical resonators. ...
09/08/2009
7441440Thin semiconductor film gas sensor device
The gas sensor device of the semiconductor film type comprises, on a single face of it, at least one gas sensor, a resistive heating film and pads for electrical contact of the sensors and of the resistive heating film; the heating element, the gas sensor film and t...
10/28/2008
7434450Method and apparatus for detecting exhaust gas sensor defect
An air-fuel ratio sensor that outputs a sensor signal used for the feedback control of an air-fuel ratio is provided. It is determined whether an element crack is present by applying a reverse voltage to the air-fuel ratio sensor. The value of the sensor signal outp...
10/14/2008
7406856Chromium/titanium oxide semiconductor gas sensor and method for production thereof
A metal oxide semiconductor gas sensor and a method for production thereof. The sensor comprises a sensor-active metal oxide thin layer applied to a substrate, in contact with at least one electrode. The sensor-active metal oxide thin layer comprises a chromium/tita...
08/05/2008
7389671Ultrafast and ultrasensitive hydrogen sensors based on self-assembly monolayer promoted 2-dimensional palladium nanoclusters
A device and method of making same. The device or hydrogen detector has a non-conducting substrate with a metal film capable of absorbing hydrogen to form a stable metal hydride. The metal film is on the threshold of percolation and is connected to mechanism for sen...
06/24/2008
7389675Miniaturized metal (metal alloy)/ PdO/SiC hydrogen and hydrocarbon gas sensors
A miniaturized Schottky diode hydrogen and hydrocarbon sensor and the method of making same is disclosed and claimed. The sensor comprises a catalytic metal layer, such as palladium, a silicon carbide substrate layer and a thin barrier layer in between the catalytic...
06/24/2008
7367217Sensor device for detection of dissolved hydrocarbon gases in oil filled high-voltage electrical equipment
A multi-gas sensor device for the detection of dissolved hydrocarbon gases in oil-filled electrical equipment. The device comprising a semiconductor substrate, one or more catalytic metal gate-electrodes deposited on the surface of the semiconductor substrate operab...
05/06/2008
7357015Gas concentration sensor, hydrogen purification unit using this and fuel cell system
In order to provide a step capable of reliably detecting a CO concentration in a reformed gas at low cost and a hydrogen purifier capable of fully exerting a function of a CO purifying catalyst, a gas concentration detector comprising a reaction chamber which has a ...
04/15/2008
7356420Analyzing system for the detection of reducing and oxidizing gases in a carrier gas with a metal-oxide-semiconductor sensor arrangement
Analyzing system for the detection of reducing and oxidizing gases in a carrier gas, wherein the detection means are sensors based on semiconductor-type metal oxides that work in the absence of oxygen. The system includes means for connecting to a chamber which cont...
04/08/2008
7350396Pulse-type gas concentration measurement system and method thereof
A pulse-type gas concentration measurement system and a method of pulse-type gas concentration measurement in a specific environment. When the sensor is located at a specific position, a variable pulse-modulated voltage is sent to the sensor, so that the sensor outp...
04/01/2008
7340938MIS-based sensors with hydrogen selectivity
The invention provides hydrogen selective metal-insulator-semiconductor sensors which include a layer of hydrogen selective material. The hydrogen selective material can be polyimide layer having a thickness between 200 and 800 nm. Suitable polyimide materials inclu...
03/11/2008
7341694Ammonia sensor
In an ammonia sensor (1), lead portions (7) and (9) are provided on an insulating substrate (5); a pair of comb-shaped electrodes (11) and (13) are connected to the lead portions (7) and (9), respectively; a se...
03/11/2008
7334452Method for characterizing materials by using a mechanical resonator
Methods for monitoring a fluid composition include placing a mechanical resonator in the fluid composition and oscillating the resonator. The resonator can be a tuning fork resonator having tines oscillated in opposite directions and in opposite phases. A variable f...
02/26/2008
7313945Cantilevers for sensing fluid properties
A system for sensing a property of a fluid comprises a fluid channel operable to receive the fluid therein, a flexible arm having a free end positioned within at least a portion of the fluid channel, a fluid actuator disposed sufficiently close to the flexible arm s...
01/01/2008
7296460Apparatus and process for sensing fluoro species in semiconductor processing systems
A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a ...
11/20/2007
7296458Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same
A (MEMS)-based gas sensor assembly for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. Such gas sensor assembly in a preferred embodiment co...
11/20/2007
7287412Method and apparatus for sensing hydrogen gas
A hydrogen sensor and/or switch fabricated from an array of nanowires or a nanoparticle thick film composed of metal or metal alloys. The sensor and/or switch demonstrates a wide operating temperature range and shortened response time due to fabrication materials an...
10/30/2007
7287431Wireless oil filter sensor
A wireless oil filter sensing system includes an oil filter and a sensing mechanism that is connectable to the oil filter. The sensing mechanism includes one or more acoustic wave sensing elements and at least one antenna that communicate with the acoustic wave sens...
10/30/2007
7276745Gas sensor
The present invention provides a gas sensor having excellent humidity resistance even if used in a high temperature and high humidity atmosphere. According to the present invention, a gas sensor is comprised of: a silicon substrate; a metal-oxide semiconductor porti...
10/02/2007
7264778Carbon monoxide sensor and method of use thereof
Carbon monoxide sensors suitable for use in hydrogen feed streams and methods of use thereof are disclosed. The sensors are palladium metal/insulator/semiconductor (Pd-MIS) sensors which may possess a gate metal layer having uniform, Type 1, or non-uniform, Type 2, ...
09/04/2007
7254986Sensor device for detection of dissolved hydrocarbon gases in oil filled high-voltage electrical equipment
A multi-gas sensor device for the detection of dissolved hydrocarbon gases in oil-filled electrical equipment. The device comprising a semiconductor substrate, one or more catalytic metal gate-electrodes deposited on the surface of the semiconductor substrate operab...
08/14/2007
7249490Isolated gas sensor configuration
A gas sensor assembly detects a constituent in a gaseous stream. The assembly comprises: (a) a mounting surface, (b) a sensor mounted on the mounting surface and sensor capable of generating a detectable signal in the presence of the constituent, and (c) an enclosin...
07/31/2007
7247271Compact ceramic sensor for fuel volatility and oxygenate concentration
A compact ceramic fuel property sensor comprises a plurality of laminated ceramic layers. The heater, temperature sensor, and capacitance measurement electrodes are embedded between the layers. The capacitance electrodes include interdigitated electrodes and fuel tr...
07/24/2007
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