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Class 73/23.21 - With compensation detail (for error or drift correction, etc.)


Subclass of Class 73 - Measuring and testing
Definition: Subject matter including means for making a correction for
No. of patents: 166
Last issue date: 09/20/2011


1          
NumberTitleIssue Date
8020427Methods and apparatus for insitu analysis of gases in electronic device fabrication systems
Systems and methods are disclosed that include adjusting a pressure level of a sample gas in a testing chamber, for example, using a pressurized inert reference gas, and determining a composition of the adjusted sample gas. By adjusting the pressure level of the sam...
09/20/2011
7770431Methods and apparatus for insitu analysis of gases in electronic device fabrication systems
Systems and methods are disclosed that include adjusting a pressure level of a sample gas in a testing chamber, for example, using a pressurized inert reference gas, and determining a composition of the adjusted sample gas. By adjusting the pressure level of the sam...
08/10/2010
7654129Sensor with an analyte modulator
A sensor system having an analyte modulator, detector and a pump. The concentration of an analyte sample may be modulated at one time constant. The detector may have an output with a drift at another time constant. The one time constant may be shorter than the latte...
02/02/2010
7637143Substrate processing apparatus and analysis method therefor
An analysis method for a substrate processing apparatus capable of accurately detecting a state in a housing chamber. Emission intensities of processing gas before being introduced into the chamber and processing gas having passed therethrough are measured before an...
12/29/2009
7631537Gas sensor
A highly accurate gas sensor includes a circuit having an improved S/N ratio. First ends of a heat generating element and reference resistor brought into contact with a detected gas are commonly connected, and second ends are respectively connected to a first switch...
12/15/2009
7571634Leak detector with sniffer probe
The invention relates to a leak detector including a hand-held device with a sniffer tip. A distance detector for detecting a defined distance of the sniffer tip from the test object is provided on the sniffer tip. A test is only initiated if the distance between th...
08/11/2009
7568376Exhaust gas sensor
The invention concerns a procedure to determine a mass of particles or a particle mass flow in an exhaust gas system of an internal combustion engine, whereby at least one resistive particle sensor is disposed in the exhaust gas system of the internal combustion eng...
08/04/2009
7412872Process for screening outgas emissions in semiconductor processing
The present description relates to a process for measuring outgas emissions in fabrication chambers used for semiconductors, micromachines and the like. In one embodiment, the invention includes inserting a gas adsorption material into a processing chamber exhaust v...
08/19/2008
7389672Method and apparatus for thermal isolation of a gas sensor
A gas sensor assembly detects the presence of a constituent in a first gas stream. The assembly comprises: (a) a flexible circuit having a pair of oppositely-facing surfaces, (b) a sensor mounted on one surface of the flex circuit, the sensor electrically connected ...
06/24/2008
7368725Optical radiation sensor system having a radiation window with a non-circular opening
There is described an optical radiation sensor device for detecting radiation in a radiation field. The device comprises a sensor element capable of detecting and responding to incident radiation from the radiation field and a radiation window interposed between the...
05/06/2008
7359804System and method for calibrating remote emissions sensing instruments
A system and method is provided for obtaining calibration curves for CO and CO2 during laboratory calibration of one or more remote emissions sensing (RES) instruments, and for self-calibration of on-road RES instruments to compensate for changes in backg...
04/15/2008
7331218Capillary bridge viscometer and method for measuring specific viscosity
A bridge viscometer for measuring specific viscosity, ηsp(t), includes four capillaries, a delay volume, and a pressure transducer. The pressure transducer generates a signal indicative of a pressure differential, Δp(t), as a sample is introduced into t...
02/19/2008
7329549Monitoring method of processing state and processing unit
The present invention is a monitoring method of monitoring a change of a processing state of an object to be processed when a predetermined process is conducted to the object to be processed by using a processing unit. The method includes: a step of respectively set...
02/12/2008
7329917Permeable capacitor electrode
The present teachings describe a container capacitor that utilizes an etchant permeable lower electrode for the formation of single or double-sided capacitors without excessive etching back of the periphery of the use of sacrificial spacers. The present teachings fu...
02/12/2008
7302834Method for supplying an internal combustion engine with conditioned combustion gas, device for carrying out said method, method for determining the quantities of pollutants in the exhaust gases of an internal combustion engine, and device for carrying out said method
A method and apparatus for determining the quantities of pollutants in the exhaust gases of internal combustion engines wherein an essentially constant and fully conditioned quantity of humidity and/or temperature-conditioned combustion gas is supplied to the intern...
12/04/2007
7300833Process for producing semiconductor integrated circuit device
When an oxidation treatment for regenerating a gate insulating film 6 is performed after forming gate electrodes 7A of a polymetal structure in which a WNx film and a W film are stacked on a polysilicon film, a wafer 1 is heated and c...
11/27/2007
7269991Permeation calibrator
An apparatus, method, and system for ensuring a more accurate and precise calibration of gas or liquid analyzers using gas emitting permeation tubes for the production of calibration samples. The permeation devices are placed in a temperature-controlled housing to e...
09/18/2007
7255475Thermometry probe calibration method
A method in which thermal mass and manufacturing differences are compensated for in thermometry probes by storing characteristic data relating to individual probes into an EEPROM for each probe which is used by the temperature apparatus. ...
08/14/2007
7251981Method and device for diagnosing gas sensor degradation
A degradation diagnosis method for simply performing degradation diagnosis of a gas sensor such as a hydrogen sensor. The hydrogen sensor has a reference detector member and common detector member, with each detector member respectively constituted of a detector ele...
08/07/2007
7236083Resistance type oxygen sensor and oxygen sensor device using it and air/fuel ratio control system
The present invention provides a resistance-type oxygen sensor, and an oxygen sensor device and an air/fuel ratio control system using same. The present invention relates to a resistance-type oxygen sensor with suppressed temperature dependence, wherein: (1) a gas d...
06/26/2007
7232512System and method of sensitivity adjustment for an electrochemical sensor
A gas detector with a compensated electrochemical sensor exhibits altered sensitivity in response to decreasing sensitivity relative to both gas exposure and non-gas exposure. A sensitivity adjustment can be established in response thereto. ...
06/19/2007
7231807Gas measuring device and method with compensation of disturbances
Disclosed is a gas measuring device which comprises compensation of disturbances and offers high accuracy of measurement immediately after being activated. Said gas measuring device is provided with a gas sensor (1) for generating a measuring signal (S1
06/19/2007
7213439Automatic bridge balancing means and method for a capillary bridge viscometer
A thermally controlled stage is connected within one arm of a bridge of a capillary bridge viscometer so that the bridge can be balanced in situ to provide accurate measurement signals. The thermally controlled stage includes a tuning capillary tubing portion that i...
05/08/2007
7207220Fluid coupling for a chromatograph
A fluid coupling comprises a compliant material, a seal gland having at least one projection configured to contact the compliant material, and a cover plate configured to compress the compliant material into the gland, thus forcing the compliant material against the...
04/24/2007
7191645Dynamic mixed gas flowmeter
A compensated flowmeter having a probe adapted to project into flowing media within a conduit. The probe includes a thermal dispersion sensor, and a compensating gas properties sensor contained within a no-flow chamber of the probe. The thermal flow sensor has activ...
03/20/2007
7186372Method for determining lumen penetration of a vapor phase sterilant
Concentration of a chemical vapor sterilant, especially, hydrogen perioxide, can be calculated at a point within a lumen based upon physical characteristics of the lumen and process parameters of a sterilization process employing the sterilant. ...
03/06/2007
7174768Hydrogen sensor, apparatus for measuring hydrogen concentration, and method for measuring hydrogen concentration
A hydrogen sensor includes a hydrogen-absorbing material, a thermoelectric element, an electrical circuit for driving the thermoelectric element, a thermometer for the hydrogen-absorbing material, a temperature control circuit for maintaining the hydrogen-absorbing ...
02/13/2007
7168288Hydrogen sulfide generator for sensor calibration
The present invention relates to the use of internally-generated hydrogen sulfide as a calibration gas for hydrogen sulfide sensors. The present invention also relates to an apparatus and methods for self-calibration of hydrogen sulfide sensors. ...
01/30/2007
7158895Device for detecting hydrogen concentration and method of detecting hydrogen concentration
The method of detecting the hydrogen concentration by using a first heat-generating resistor of which a first electrophysical quantity varies depending upon the hydrogen concentration and a second heat-generating resistor which is neighboring said first heat-generat...
01/02/2007
7152454Continuous blending for gas analyzer calibration
A method for calibrating a plurality of gas analyzers includes providing gas analyzers that measure the concentrations of gases. A span gas includes a mixture of the gases. A calibration mixture is supplied to the gas analyzers that includes the span gas and a non-r...
12/26/2006
7148490Method for determining the concentration of hydrogen peroxide in a process stream and a spectrophotometric system for the same
The present invention is directed to a method for determining the concentration of hydrogen peroxide in a chemical process stream which may include interfering components. Still further, this invention is directed to a method and apparatus for the on-line, automated...
12/12/2006
7144494Circuit arrangement for compensating interference signals in the control loop of a linear lambda probe
A compensation circuit (KS) is provided between the output of a differential amplifier (Diff_Amp) and the input of a controller (R). The compensation circuit generates a compensation signal, whose characteristic curve approximates to that of the parasitic signal, wi...
12/05/2006
7144766Method of manufacturing semiconductor integrated circuit device having polymetal gate electrode
When an oxidation treatment for regenerating a gate insulating film 6 is performed after forming gate electrodes 7A of a polymetal structure in which a WNx film and a W film are stacked on a polysilicon film, a wafer 1 is heated and c...
12/05/2006
7127936Acoustic analysis of gas mixtures
An acoustic gas analyzer for gas mixture has an acoustic velocity meter that provides a first output dependent on a detected transmission of acoustic energy through a gas to be analyzed, a temperature probe having a probe time constant that provides a second output ...
10/31/2006
7114325Control system with a sensor
An improved engine control system using a NOx sensor is disclosed. In one example, the NOx sensor structure and/or signals are modified to improve distance transmission of NOx sensor output signals so that at least some processing electronics can be relocated remote...
10/03/2006
7096717Control device of gas sensor
When the ignition switch of a vehicle is turned OFF, a purging process for increasing the flow of an off-gas fluidizing in each of the outlet side pipings of a fuel cell and discharging water remaining in a fuel cell system to an outside is started to be executed, a...
08/29/2006
7094614In-situ monitoring of chemical vapor deposition process by mass spectrometry
A method and apparatus are provided for controlling a CVD process used to deposit films on semiconductor substrates wherein the by-products of the reaction are measured and monitored during the reaction preferably using mass spectrometry and the results used to calc...
08/22/2006
7081368Method for detecting gas with the use of photocurrent amplification and the like and gas sensor
An indium electrode film (2) is formed closely adhering to one face of an organic semiconductor film (1) made of copper phthalocyanine while a gold electrode film (3) is formed on the other face. A voltage is applied to the organic semiconductor...
07/25/2006
7073403Method and apparatus for the collection of samples
A system for the collection of near real time confirmation samples is provided to quickly eliminate false positive alarms by confirming the presence or absence of a chemical agent when a monitor operating in near real time to detect the presence of that chemical age...
07/11/2006
7059112Degradation detection method for an engine having a NOx sensor
An engine diagnostic system for use with an internal combustion engine coupled to a lean NOx trap with a NOx sensor coupled downstream of the trap. Degradation of the NOx sensor is determined by estimated NOx exiting the trap based on engine out NOx and various othe...
06/13/2006
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