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| Number | Title | Issue Date |
| 8170832 | Measurement and endpointing of sample thickness A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, ... | 05/01/2012 |
| RE41342 | Coating thickness gauge A modular coating thickness gauge includes a probe which generates a signal representative of coating thickness, a PCMCIA card connected to the probe for converting the signal into a standard PCMCIA output format, and a portable computing unit for receiving the sign... | 05/18/2010 |
| 7660698 | Phytometric intelligence sensors Methods and apparatus for determining when plants require watering, and methods of attending to the watering of plants including signaling the grower that the plants are in need of hydration are provided. The novel methods include real-time measurement of plant meta... | 02/09/2010 |
| 7640138 | Interconnection pattern inspection method, manufacturing method of semiconductor device and inspection apparatus A method of inspecting an interconnection pattern formed by depositing a metal onto a substrate having an interconnection pattern groove formed on a surface thereof includes: selectively measuring a thickness of a part above the substrate of a metal film formed on t... | 12/29/2009 |
| 7571074 | Method of using a wafer-thickness-dependant profile library A method for facilitating an ODP (optical digital profile) measurement of a semiconductor wafer. The method includes obtaining real time wafer characteristic data for a measurement site on the wafer and detecting a measured diffraction signal from a structure within... | 08/04/2009 |
| 7561984 | Method for calculating a model spectrum With technical surfaces, in particular in semiconductor manufacture, it is a regular requirement to determine the reflection coefficient. For this purpose, a model spectrum of an object of a plurality of wavelengths and a defined number of intermediate points is cal... | 07/14/2009 |
| 7444198 | Determining physical property of substrate A method of determining a physical property of a substrate includes recording a first spectrum obtained from a substrate, the first spectrum being obtained during a polishing process that alters a physical property of the substrate. The method includes identifying, ... | 10/28/2008 |
| 7427520 | Method and apparatus for measuring thickness of thin film formed on substrate A memory (43) of a control unit (4) stores correction data (81) indicating a relationship between a decrement in a measurement value of a film thickness by removal of organic contamination adsorbed onto a substrate and an amount of adsorbed orga... | 09/23/2008 |
| 7428470 | Method for monitoring edge exclusion during chemical mechanical planarization A method is provided for measuring edge exclusion on a workpiece that includes a wafer having a film disposed thereon. The method is performed by a CMP system employing a platen and a thickness sensor coupled to the platen and positioned to repeatedly travel a path ... | 09/23/2008 |
| 7415398 | Method of simulating viscoelastic material The present invention relates to a method of simulating the deformation of a viscoelastic material in which filler is blended to a matrix made of rubber or resin, the method including the steps of dividing the viscoelastic material into a finite number of elements t... | 08/19/2008 |
| 7409309 | Method of deciding the quality of the measurement value by the edge width A method of deciding the quality of a measurement value of the line width, the line interval or the like of a pattern on an object to-be-measured, including acquiring the signal intensity distribution of the pattern on the object to-be-measured, detecting the edge p... | 08/05/2008 |
| 7375828 | Modal method modeling of binary gratings with improved eigenvalue computation A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected... | 05/20/2008 |
| 7369947 | Quantification of adsorbed molecular contaminant using thin film measurement A test method for measuring adsorbed molecular contamination uses a test structure that includes a substrate comprising a plurality of separated test sites having a plurality separate thicknesses having a base design thickness and a designed thickness interrelations... | 05/06/2008 |
| 7365862 | Methods and apparatus for inspecting an object A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto an object, and an imaging sensor for receiving light reflected from the object. The method includes determining a profile of the object to b... | 04/29/2008 |
| 7350400 | Test method to measure lubricant mobility on a hard drive disk A method for measuring the mobility of a lubricant located on the top surface of a disk used in hard disk drives. The method includes forming one or more scribe lines in a lubricant layer of the disk. The disk is then spun by a spin stand where lubricant moves in re... | 04/01/2008 |
| 7352194 | Method for determining the thickness of a coating on a composite material The invention relates to a method for determining the thickness of a coating on a composite material by applying induced currents wherein the composite material together with its coating is placed on a conducting material, in which circulating electric currents indu... | 04/01/2008 |
| 7353141 | Method and system for monitoring component consumption A method for monitoring consumption of a component, including the steps of emitting a radiation beam onto a first area of the component and detecting a portion of the radiation beam that is refracted by the component. A radiation level signal is generated based at l... | 04/01/2008 |
| 7340320 | Method of recipe control operation An operation method of a recipe control process in which multiple processing targets are processed continuously in a processing apparatus using recipes that specify a set of control parameters specifying the processing conditions of processing targets. The method co... | 03/04/2008 |
| 7333925 | Manufacturing method and manufacturing apparatus of pipe, thickness deviation information derivation apparatus, and computer program A complex Fourier transform is performed on measured values of wall thickness at points in a cross section of a pipe in an axial direction, types of thickness deviation are classified, thickness deviation amount is calculated from the absolute value of the complex F... | 02/19/2008 |
| 7323867 | Apparatus which detects the thickness of a sheet of paper such as a bank note A thickness detecting apparatus comprises a printed board in a part of which a coil is patterned, a detection roller which is disposed near the coil, which detects thickness of a sheet P of paper as a displacement amount, and a thickness detection circuit mounted on... | 01/29/2008 |
| 7324865 | Run-to-run control method for automated control of metal deposition processes A method is provided, the method comprising monitoring consumption of a sputter target to determine a deposition rate of a metal layer during metal deposition processing using the sputter target, and modeling a dependence of the deposition rate on at least one of de... | 01/29/2008 |
| 7315174 | Method of measuring flat-band status capacitance of a gate oxide in a MOS transistor device A method of measuring flat-band status capacitance of a gate oxide in a MOS transistor device is disclosed. According to the method of measuring flat-band status capacitance of gate oxide in MOS transistor device, flat-band status capacitance of gate oxide in MOS tr... | 01/01/2008 |
| 7299151 | Microdevice processing systems and methods Mircodevice processing systems. One exemplary embodiment includes a component for removing substrate material to form a feature into a first surface of a substrate, and a component for measuring a thickness of a portion of the substrate defining the feature, wherein... | 11/20/2007 |
| 7277819 | Measuring layer thickness or composition changes A method of measuring the thickness or the rate of change of thickness of a layer as the layer is being formed on a substrate, includes illuminating the layer through the substrate with low coherence light that transmits through the layer; collecting a portion of th... | 10/02/2007 |
| 7239391 | Method of analysis of multiple layer samples Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, where... | 07/03/2007 |
| 7233878 | Method and system for monitoring component consumption A method for monitoring consumption of a component, including the steps of emitting a radiation beam onto a first area of the component and detecting a portion of the radiation beam that is refracted by the component. A radiation level signal is generated based at l... | 06/19/2007 |
| 7231315 | Distribution goodness-of-fit test device, consumable goods supply timing judgment device, image forming device, distribution goodness-of-fit test method and distribution goodness-of-fit test program A distribution goodness-of-fit test device for testing whether measured data matches an estimated probability distribution has a counting section determination unit, a counting unit and a goodness-of-fit test unit. The counting section determination unit determines ... | 06/12/2007 |
| 7224461 | Method for determining modifications to semiconductor optical functions A method for modeling the complex refractive index of doped, strained or ultra-thin semiconductors starts with a model for a standard bulk material which may be in any form such as a pre-existing lookup table, a dispersion model derived from an effective medium appr... | 05/29/2007 |
| 7206708 | Lifecycle support software tool The invention provides a simulation process and method of utilizing it to time to better estimate when a component of a product is about to fail by tracking varying “environmental factors” related to the severity of conditions to which product is exposed over a ... | 04/17/2007 |
| 7204639 | Method and apparatus for thin metal film thickness measurement A method for measuring a metal film thickness is provided. The method initiates with heating a region of interest of a metal film with a defined amount of heat energy. Then, a temperature of the metal film is measured. Next, a thickness of the metal film is calculat... | 04/17/2007 |
| 7203567 | Method and apparatus for electronically controlling fiber processing machines, particularly spinning preparation machines An apparatus for electronically controlling a fiber processing machine includes at least one plug-in module group and at least one memory for receiving and storing data. A non-volatile memory is disposed physically apart from the plug-in module group whereby the dat... | 04/10/2007 |
| 7203267 | System and method for boundary estimation using CT metrology A technique is provided for CT reconstruction for use in CT metrology. The boundary based CT reconstruction method includes the steps of initializing a boundary of an object to obtain a boundary estimate, defining a forward model based on the boundary estimate, line... | 04/10/2007 |
| 7197426 | Method and apparatus for measuring thickness of metal layer In a method and apparatus for measuring a thickness of a metal layer formed on a semiconductor substrate first, second, and third light pulses are successively irradiated onto a top surface of the metal layer to generate respective first, second, and third second so... | 03/27/2007 |
| 7182339 | Thickness measuring system, having improved software, for use within a mail handling system, and method of using same A thickness measuring device for measuring the thickness dimension of an article being conveyed along a conveyor system comprises a rotary encoder, and a lever arm pivotally mounted upon the shaft of the rotary encoder. The lever arm has an end portion thereof dispo... | 02/27/2007 |
| 7167241 | Dielectric function of thin metal films determined by combined transmission spectroscopic ellipsometry and intensity measurements Determination of thin metal film dielectric function and layer thicknesses using simultaneous transmission spectroscopic ellipsometric (SE) and transmission intensity (T) measurements obtained in-situ to break correlation between thickness and optical constants of v... | 01/23/2007 |
| 7146279 | Measuring device A device for measuring at least one property of a material web, in particular a paper or board web, includes movable measuring probes provided on both sides of the web, which can be pressed against the web with preferably at least substantially equal force, forming ... | 12/05/2006 |
| 7141440 | Apparatus and method for measuring a property of a layer in a multilayered structure A property of a layer is measured by: (1) focusing a heating beam on a region (also called “heated region”) of a conductive layer (2) modulating the power of the heating beam at a predetermined frequency that is selected to be sufficiently low to ensure that at ... | 11/28/2006 |
| 7131211 | Method and apparatus for measurement of thickness and warpage of substrates An apparatus comprises one or more pairs of mutually coaxial and opposing linear measuring devices including movable, biased fingers for simultaneously determining the thickness and warpage of a substrate such as a circuit board passing between the fingers. Each mea... | 11/07/2006 |
| 7115093 | Method and system for PDA-based ultrasound system A method and system are disclosed for a compact, inexpensive ultrasound system using an off-the-shelf personal digital assistant (PDA) device interfacing to a hand-held probe assembly through a standard digital interface. The hand-held probe assembly comprises a det... | 10/03/2006 |
| 7110912 | Method of applying parametric oscillators to model dielectric functions Methodology for segmentally modeling Real and Imaginary Parts of Optical Constants or Dielectric Functions using Kroneig-Kramer (K-K) Consistant Oscillators with substantially definite start and end points. ... | 09/19/2006 |
