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| Number | Title | Issue Date |
| 8150548 | Apparatus for process automation using pin array and actuators An apparatus and method for transferring plurality of samples from one sample container to another one is disclosed wherein each sample is randomly accessible and can be “cherry picked”. The disclosed method of actuation allows for using a smaller number of actu... | 04/03/2012 |
| 8126588 | Method and system for controlling transport sequencing in a process tool by a look-ahead mode By providing a look-ahead functionality for a tool internal substrate handling system of process tools on the basis of a process history, the tool internal substrate sequencing may be significantly enhanced. The look-ahead functionality enables a prediction of proce... | 02/28/2012 |
| 8121724 | Transfer system, and transfer method In response to a transfer request, for which a loading time at a transfer source and a loading time at a transfer target are designated by a production controller, there is created a transfer scenario, which contains a basic transfer (From) from the transfer source ... | 02/21/2012 |
| 8086348 | Method of transferring a substrate, transfer system and lithographic projection apparatus A method is provided for transferring a substrate from a first substrate holder, e.g., a pre-alignment unit, to a second substrate holder, e.g., a substrate table in a lithographic apparatus, by means of a transfer unit on the basis of transfer data available theret... | 12/27/2011 |
| 8078315 | Control system for a load handling clamp A control system for a load-handling clamp includes first and second load-engaging surfaces for selectively gripping and releasing a load disposed between said surfaces. At least one of said surfaces is selectively movable toward the other by a hydraulic actuator. A... | 12/13/2011 |
| 8050794 | Method and device for transporting items A method and a device for transporting items, in particular mail items. uses multiple transport processes for transporting the items respectively to a processing system. For each item, a measurement is made before the transportation as to whether the item has a pred... | 11/01/2011 |
| 8019467 | Scheduling method for processing equipment Methods and apparatus for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput and repeatable wafer processing history are provided. In one embodiment a first substrate is transferred from a fir... | 09/13/2011 |
| 8019468 | Transport system and transport method A transport scenario composed of a basic transport (From) from a transport starting point to, e.g., a buffer near the transport destination point and a basic transport (To) from the buffer to the transport destination point is created in response to a transport requ... | 09/13/2011 |
| 7949425 | High throughput wafer notch aligner An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportat... | 05/24/2011 |
| 7925380 | Integrated transportation control for wafer fabrication facility System and method for implementing integrated transportation control in a wafer fabrication facility are described. One embodiment is a factory automation system for a wafer fabrication facility (“fab”) comprising a plurality of bays, wherein each of the bays co... | 04/12/2011 |
| 7912575 | Control device in feeding line The present invention relates to a control method in the feeding of plate shaped workpieces to a work station, comprising feeding of the workpiece (8) to a control station (1) at which control station (1) it is controlled that the desired number... | 03/22/2011 |
| 7801641 | Work transfer system, route setting method, and route setting program A route setting method according to the present invention sets, in a work transfer system including a plurality of work transfer units which connect a plurality of loading places to a plurality of unloading places, a route of the work transfer units to pass a work b... | 09/21/2010 |
| 7778728 | Apparatus and method for positioning objects/mailpieces An apparatus and method for positioning objects at a desired reference position, including a sensor for determining the length of each object/mailpiece from a leading to a trailing edge, a transport mechanism having a positionable drive element for transporting the ... | 08/17/2010 |
| 7765025 | Systems and methods for programming motion control Systems, methods and computer program code for the programming of motion control in load transportation systems are provided which may include programming motion control by specifying desired load motions. ... | 07/27/2010 |
| 7720565 | Ring management system A production system capable of further improving production efficiency and quality. The ring management system includes size measurement unit for measuring size of the ring, first convey unit for moving the ring w whose size has been measured, a first stocker having... | 05/18/2010 |
| 7627393 | Crane or digger for swinging a load hanging on a support cable with damping of load oscillations The invention concerns a crane or excavator for traversing a load hanging from a load cable, which is movable in three spatial directions. The crane or excavator has a computer-controlled regulation for the damping of load swings, which contains a path planning modu... | 12/01/2009 |
| 7584017 | Article transport apparatus An article transport apparatus has a path that has a first end and a second end and that extends along a plurality of article transferring locations, a plurality of article transporting vehicles that run on the path, and control means for controlling the plurality o... | 09/01/2009 |
| 7433756 | Calibration of high speed loader to substrate transport system In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the ... | 10/07/2008 |
| 7424339 | Method and system for acquiring delivery position data of carrying apparatus In a searching step, a laser beam by a laser beam projector is projected toward an object to be detected, which is previously disposed at a delivery position, while moving a holding member which is positioned apart from the object to be detected. In a delivery posit... | 09/09/2008 |
| 7402966 | Linear drive with travel measurement The invention concerns a linear drive (1) with a linear stroke for the displacement of movably supported parts, in particular of articles of furniture, comprising a rotary spindle (2) which is driven by a motor and which at the drive output side is in ... | 07/22/2008 |
| 7385529 | Dynamic and predictive information system and method for shipping assets and transport The dynamic, predictive information system and method assigns shipping assets (drivers-tractors-trailers) from carriers to transport orders by shippers. Computer databases hold shipping asset data. Specific transport orders are electronically joined to specific driv... | 06/10/2008 |
| 7363107 | Substrate transfer system A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to ... | 04/22/2008 |
| 7353701 | Assembly line for mounted units A tire assembly line including a wheel soaping work station, a tire soaping workstation, a tire and wheel assembly station, and a tire inflation station. The assembly line is formed from a plurality of modules that are interchangeable and releasably connected to one... | 04/08/2008 |
| 7356378 | Method and system for smart vehicle route selection In one aspect a factory automation system for a wafer fab is provided. The factory automation system comprises: a manufacturing execution system (“MES”) for providing lot information; a material control system (“MCS”) for providing dynamic traffic informatio... | 04/08/2008 |
| 7349879 | Methods and systems for market clearance In a marketplace, offers are processed that are intended to be associated with other offers in a pool. The offers specify conditions for acceptance. Improvable offers are received that are capable of being associated with offers having more favorable specifications ... | 03/25/2008 |
| 7346414 | Moving mechanism and stage system in exposure apparatus A moving mechanism includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving... | 03/18/2008 |
| 7346426 | Automatic dotting machine for manufacture of heat sink for electronic component An automatic dotting machine (100) includes a feeding device (10) for unloading workpieces (200) one by one with the same interval, a conveying device (40) for conveying the workpieces to a predetermined dotting region, a sensor unit (... | 03/18/2008 |
| 7333872 | Product processing system A product processing system applicable to a production process for producing an electronic device is disclosed. The product processing system includes a plurality of processing apparatuses installed according to processing stages in the production process of the ele... | 02/19/2008 |
| 7331443 | Vertical parallel transportation of caps A device for conveying closures (D) made from metallic sheet in an essentially vertical direction from a collecting point (1) to a release point (6) is proposed. The closures are selected to be in correct position during conveying in order to release a... | 02/19/2008 |
| 7333938 | Apparatus for supporting injection mixing work An apparatus for supporting injection mixing work comprises a memory for storing data for supporting injection mixing work, a display for displaying the data stored in the memory and a controller for controlling the display. The memory has a patient predictability d... | 02/19/2008 |
| 7327581 | Circuit device A circuit device includes plural semiconductor circuit devices that are formed on independent substrates, respectively, and communicate with each other. Each of the semiconductor circuit devices includes: plural modules of an identical type, functions of which are s... | 02/05/2008 |
| 7328079 | Process and system for conveying semifinished products during LCD manufacture A system (20) for conveying semifinished products during the manufacturing of liquid crystal displays, includes a first processing station (21); a second processing station (22) proximate to the first processing station; a shortcut conveyor inte... | 02/05/2008 |
| 7319912 | Management system for semiconductor manufacturing equipment A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a r... | 01/15/2008 |
| 7311256 | Barcode optical character recognition Computer software which includes code configured to create a printer label format based on a printed label that has been scanned. The code is configured to scan a label by either using a plurality of different types of scanners, or by using a single piece of hardwar... | 12/25/2007 |
| 7299752 | Trolley retrieval system A trolley retrieval system for transporting or returning trolleys from a finish area back to a start area for traveling along a cable. The systems may include a cable held in suspension between the first and second supports. A retrieval line may be suspended in a cl... | 11/27/2007 |
| 7293473 | Method and apparatus for sampling biological particles in an air flow A method and apparatus for sampling potential biohazard particles in an air flow tests for biological particles in the air flow; collects a sample of particulate matter from a specific portion of the air flow in response to an indication in the step of sensing of th... | 11/13/2007 |
| 7287637 | Conveyor system for minimizing product damage during collection A conveyor system is provided to limit the vertical fall experienced by a product transported along the conveyor and falling into a collection bin. A sensor in a fixed position relative to the product conveying plane of the conveyor measures product collection heigh... | 10/30/2007 |
| 7284743 | Hoist limiting system A hoist limiting system (15) comprising a frame (16), a hoist drum (17) supported by the frame and rotatable about a hoist axis (x-x), a hoist driver (19) supported by the frame and configured to rotate the hoist drum in opposite upward (... | 10/23/2007 |
| 7283890 | Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method There is a jump in the number of devices formed on a single wafer, and it takes a lot of time to inspect a single wafer. In addition, if wafers are inspected every lot, detected wafers remain in staying in a prober until the inspection of all of the wafers is comple... | 10/16/2007 |
| 7277774 | Transportation state notification system and method, and information storage medium A server includes a communication section which receives event information from an event detection device which detects a plurality of types of events occurring in a plurality of temporary storage devices provided at different locations, and transmits transportation... | 10/02/2007 |
