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| Number | Title | Issue Date |
| 8112169 | Polishing apparatus and polishing method A polishing apparatus has a polishing table having a polishing surface and a top ring for pressing a substrate against the polishing surface while independently controlling pressing forces applied to a plurality of areas on the substrate. The polishing apparatus has... | 02/07/2012 |
| 8108060 | System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture System and method for implementing wafer acceptance test (“WAT”) advanced process control (“APC”) are described. In one embodiment, the method comprises performing a key process on a sample number of wafers of a lot of wafers; performing a key inline measure... | 01/31/2012 |
| 8090463 | Operating method for an evaluation device for a production machine During the production of a product by means of a production machine, an evaluation device receives actual states of components of the production machine, detected by sensors at detection times, and/or operating states of a control device of the production machine at... | 01/03/2012 |
| 8086338 | Component mounting apparatus, service providing device and servicing method A service providing method for monitoring a mounting tact of a component mounting apparatus includes collecting, from the service receiver, mounting tact information including a mounting tact result value of the component mounting apparatus from the service receiver... | 12/27/2011 |
| 8078919 | Method, apparatus and program storage device for managing multiple step processes triggered by a signal A method, apparatus and program storage device for managing multiple step processes triggered by a signal is disclosed. Status records are created for each process step. When an error occurs, error status record in recorded in the status record. A user may then use ... | 12/13/2011 |
| 8055371 | Services portal An apparatus for monitoring performance of an industrial process includes a service portal for collecting, transmitting and analyzing parameter data from process field devices that includes a network connection that connects to a process control system of the indust... | 11/08/2011 |
| 8055370 | Apparatus and methods for monitoring health of semiconductor process systems Disclosed are apparatus and methods for monitoring an operation parameter of a process tool, independently of a process system recipe, are provided. In general, an indirect effect that results from implementing an event from a process system recipe on the process sy... | 11/08/2011 |
| 8014887 | Substrate processing apparatus A substrate processing apparatus includes an operating section. The operating section includes a display unit having an operation screen, a screen file that stores daily check data monitor screen data in which a row number is settable as a data number, and a data na... | 09/06/2011 |
| 8010218 | Industrial automation interfaces integrated with enterprise manufacturing intelligence (EMI) systems A visualization system integrated with an enterprise manufacturing intelligence (EMI) system utilizing preconfigured EMI data models, workflow reports and process event notifications to optimize a manufacturing process. The visualization system and the EMI system ex... | 08/30/2011 |
| 7991497 | Method and system for defect detection in manufacturing integrated circuits Method and system for defect detection in manufacturing integrated circuits. In an embodiment, the invention provides a method for identifying one or more sources for possible causing manufacturing detects in integrated circuits. The method includes a step for provi... | 08/02/2011 |
| 7974724 | Product-related feedback for process control A method, apparatus, and a system for performing a product feedback for process control are provided. Metrology data relating to a first workpiece is received. An end of line parameter relating to the first workpiece is received. The end of line parameter is correla... | 07/05/2011 |
| 7970483 | Methods and apparatus for improving operation of an electronic device manufacturing system In one aspect of the invention, a method for the improved operation of an electronic device manufacturing system is provided. The method includes providing information to an interface coupled to an electronic device manufacturing system having parameters, processing... | 06/28/2011 |
| 7962234 | Multidimensional process window optimization in semiconductor manufacturing A method for optimizing multiple process windows in a semiconductor manufacturing process is disclosed. The method comprises performing dependent variable composition on a plurality of dependent variables. Metrology data is joined with the dependent variables, and t... | 06/14/2011 |
| 7937178 | Charging method for semiconductor device manufacturing apparatus, storage medium storing program for implementing the charging method, and semiconductor device manufacturing apparatus implementing the charging method A charging method for a semiconductor device manufacturing apparatus, which can appropriately and promptly distribute profits between a customer and a manufacturer according to the yield of semiconductor devices. An indicator related to the yield of the semiconducto... | 05/03/2011 |
| 7908023 | Method of establishing a lot grade system for product lots in a semiconductor manufacturing process A method of establishing a lot grading system for lots in a semiconductor manufacturing process includes defining a new lot grade for at least one lot in the semiconductor manufacturing process. The at least one lot is has a current lot grade and the new lot grade i... | 03/15/2011 |
| 7840297 | Dynamic control system for manufacturing processes including indirect process variable profiles Methods, apparatuses and systems that facilitate the design, production, control and/or measurement tasks associated with manufacturing and other processes. In one implementation, the present invention facilitates or enables the use of indirect process variables for... | 11/23/2010 |
| 7840296 | Services portal An apparatus for monitoring performance of an industrial process includes a service portal for collecting, transmitting and analyzing parameter data from process field devices that includes a network connection that connects to a process control system of the indust... | 11/23/2010 |
| 7835814 | Tool for reporting the status and drill-down of a control application in an automated manufacturing environment Disclosed are embodiments that provide near real-time monitoring of a control application in a manufacturing environment to detect and determine the root cause of faults within the control application. The embodiments monitor the flow of data within the control appl... | 11/16/2010 |
| 7831326 | Graphical user interface for presenting multivariate fault contributions Recipe steps of a manufacturing process run that generated a fault are displayed in a current view of a user interface, the recipe steps being displayed in association with a first axis. At least one of measured parameters or calculated parameters of the manufacturi... | 11/09/2010 |
| 7831325 | Computing estimated performance of a software application in a target system User input regarding a target system on which a software application is to be deployed is received. A benchmark system from plural candidate benchmark systems is matched to the target system. An estimated performance of the software application on the target system ... | 11/09/2010 |
| 7822500 | Polishing apparatus and polishing method A polishing apparatus has a polishing table (18) having a polishing surface (40) and a top ring (20) for pressing a substrate against the polishing surface (40) while independently controlling pressing forces applied to a plurality of are... | 10/26/2010 |
| 7818083 | Automated washing system with compliance verification and automated compliance monitoring reporting A system is provided for providing automated washing and verifying compliance of use. The system provides for identifying individual users of one or more cleaning stations through various technologies, such as RFID. Individual's use of cleaning stations is monitored... | 10/19/2010 |
| 7801634 | Manufacturing management method, manufacturing management apparatus, and mounter A mounter for a manufacturing management method suppresses an occurrence of inventory shortage or excess inventory as much as possible, and provides energy savings when manufacturing is not performed at full capacity. A throughput determining step acquires manufactu... | 09/21/2010 |
| 7787978 | Apparatus and method for controller performance monitoring in a process control system An apparatus, method, and computer program are provided for controller performance monitoring in a process control system. A level of disturbance associated with the process system is determined, and at least one value identifying a stability measure of a controller... | 08/31/2010 |
| 7783372 | Automated throughput control system and method of operating the same An automated throughput control system and method is provided. By gathering tool specific information of a plurality of process tools on entity level, appropriate throughput related performance characteristics may be calculated with high statistical significance dur... | 08/24/2010 |
| 7774081 | Manufacturing system, manufacturing method, managing apparatus, managing method and computer readable medium There is provided a manufacturing system for manufacturing an electronic device through a plurality of manufacturing stages. The manufacturing system includes a plurality of manufacturing apparatuses performing processes corresponding to the plurality of manufacturi... | 08/10/2010 |
| 7769480 | Writing method of hardware performance information of unit in vehicle In an inspection procedure of a completed product of an automatic transmission main body at a unit factory, a control system transmits a control signal to an actuator to receive characteristic data (hardware performance information) output in response to operation o... | 08/03/2010 |
| 7765020 | Graphical user interface for presenting multivariate fault contributions Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. T... | 07/27/2010 |
| 7765021 | Method to check model accuracy during wafer patterning simulation A method, and computer program product and system for performing the method, is provided for designing a mask used in the manufacture of semiconductor integrated circuits, in which a model of the lithographic process is used during the mask design process. More part... | 07/27/2010 |
| 7756598 | System and method for automating integration of semiconductor work in process updates WIP status updates, as received from semiconductor manufacturing suppliers, is converted to transactions. In one approach, supply chain events, for example lot splits, lot merges, and lot scrap, are identified based on previous lot statuses and current lot statuses ... | 07/13/2010 |
| 7751921 | Semiconductor manufacturing apparatus, method of detecting abnormality, identifying cause of abnormality, or predicting abnormality in the semiconductor manufacturing apparatus, and storage medium storing computer program for performing the method In order to detect an abnormality of semiconductor manufacturing apparatus, a biaxial coordinate system having first and second axes respectively assigned two different monitoring parameters selected from plural apparatus status parameters representing statuses of s... | 07/06/2010 |
| 7742833 | Auto discovery of embedded historians in network Systems and methods that facilitate discovery of history data via a locator component associated with a plant embedded historian(s) of an industrial programmer (e.g., a controller device.) Such locator component can further detect micro historians that are distribut... | 06/22/2010 |
| 7729792 | Version control for objects in a process plant configuration system A version control system helps to keep track of versions of process plant items that may represent, or be capable of representing, entities in a process plant. The process plant items may comprise, for example, module objects which may be capable of specifically rep... | 06/01/2010 |
| 7715937 | Allocating manufactured devices according to customer specifications A method and system sorts manufactured integrated circuit devices by evaluating performance characteristics of the manufactured integrated circuit devices. All of the integrated circuit devices are manufactured using an identical design, and differences in the perfo... | 05/11/2010 |
| 7698011 | Operating condition monitoring apparatus, method for monitoring operating condition and program An operating condition monitoring apparatus includes a load-time information acquisition unit 203 obtaining load-time information, of one or more production apparatuses 11, concerning load time allocated to production within a predetermined period, an ... | 04/13/2010 |
| 7680553 | Methods of interfacing nanomaterials for the monitoring and execution of pharmaceutical manufacturing processes Methods of interfacing nanomaterials used to monitor and execute the pharmaceutical manufacturing process are disclosed herein. The nanomaterials are useful to provide a plurality of analysis to the manufacturing process. Consequently, the methods provide a means to... | 03/16/2010 |
| 7676294 | Visualization of workflow in an industrial automation environment A visualization system that generates a visualization of manufacturing operations and corresponding workflow is provided. An interface component receives input concerning displayed objects and information. A context component can detect, infer or determine context i... | 03/09/2010 |
| 7650198 | Automation system unified data access for disparate data sources Historical and real-time data access is leveraged to provide unified data access for interacting with manufacturing process entities such as, for example, process overview displays, charting systems, reporting systems, logging systems, and/or recipe systems and the ... | 01/19/2010 |
| 7647131 | Dynamic determination of sampling rates A system that facilitates determination of a sampling rate to utilize in connection with sampling data in an industrial environment comprises a receiver component that receives data from an I/O port of a controller. An analysis component automatically and dynamicall... | 01/12/2010 |
| 7636608 | Method for dynamic sensor configuration and runtime execution Graphical User Interfaces (GUIs) are presented for configuring and setting-up dynamic sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of pro... | 12/22/2009 |
