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Class 505/816 - Sputtering, including coating, forming, or etching (Class 204/192.24)


Subclass of Class 505 - Superconductor technology: apparatus, material, process
Definition: Subject matter consisting of the process of sputtering which
No. of patents: 40
Last issue date: 02/07/2006


NumberTitleIssue Date
6994775Multilayer composites and manufacture of same
The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segm...
02/07/2006
6218341Process for the preparation of a high temperature superconductor
A process for preparing a superconductor which is a low anisotropy, high temperature superconductor, includes providing a target in molded form comprised of one of the superconductor or constituent elements of the superconductor, the superconductor having...
04/17/2001
5545613Preparation of superconducting oxides and oxide-metal composites
A method of preparing a superconducting oxide by combining the metallic elements of the oxide to form an alloy, followed by oxidation of the alloy to form the oxide. Superconducting oxide-metal composites are prepared in which a noble metal phase intimate...
08/13/1996
5476838Process for producing thin layers by means of reactive cathode sputtering and apparatus for implementing the process
The invention relates to a process for producing thin films in which the pressure of the process gas is kept constant in a process chamber with a gas inlet and outlet, a target and a substrate, while material is sputtered from the target and deposited on ...
12/19/1995
5317006Cylindrical magnetron sputtering system
An improved cathode for a sputtering system includes a metal cylinder and strips of material bonded to the inside of the metal cylinder and/or material sprayed onto the inside of the metal cylinder. The strips may have various specified compositions and/o...
05/31/1994
5306406Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
A method of providing a thin film for lining quarter-wave resonant cavities of copper comprises the deposition of a superconducting material, in particular niobium, in the form of a micro-layer having a substantially constant thickness covering both the c...
04/26/1994
5306405Sputtering target and method of manufacture
A method for preparing a slurry target for use in a sputtering apparatus. The target material is ground into a powder form, and mixed with a solvent to form a slurry. The slurry is poured into a target mold and allowed to slow dry by evaporation at or nea...
04/26/1994
5236894Process for producing a superconducting thin film at relatively low temperature
A process for depositing a superconducting thin film composed mainly of compound oxide such as LnBa2 Cu3 O7-δ (Ln is lanthanide) or (La1-x ଱x)2 CuO4 (଱ is Ba or Sr)...
08/17/1993
5225397Method for preparing superconducting thin film
A superconducting material composed mainly of compound oxide having a composition represented by the general formula: Tlx Cay BaCuz Op in which "x", "y" and "z" are numbers each satisfies 0.5ࣘxࣘ3.0, 0.5ࣘyࣘ3.0...
07/06/1993
5196399Apparatus for producing oxide superconductor cable
A device for fabricating an oxide superconductor cable includes a spinning furnace for receiving a preform and spinning the preform into a glass fiber. The device further includes a sputtering apparatus for receiving the spun glass fiber and coating the g...
03/23/1993
5180708Process and apparatus for preparing superconducting thin films
A process for preparing a thin film of high-temperature compound oxide superconductor having a large area on a substrate by a magnetron sputtering method. A magnetron electrode on which an elongated target is secuerd has an elongated shape and a substrate...
01/19/1993
5158933Phase separated composite materials
A method of forming a phase-separated composite material which utilizes sputtering in a thermal gradient at relatively high sputtering pressures generally above about 0.1 Torr sufficient to produce nanoscale particles which are embedded in a continuous ph...
10/27/1992
5145713Stoichiometric growth of compounds with volatile components
A method of growing KTax Nb1-x O3 by pulsed laser evaporation. In order to compensate for the volatile K, two targets are prepared, one of sintered oxide powder having K, Ta, and Nb in amounts stoichiometric to KTax
09/08/1992
5126320Method for manufacturing an oxide superconducting thin-film
A method is disclosed which comprises setting a substrate within a mixed gas atmosphere containing 0.1 to 5% of oxygen gas and a balance as an inert gas, and sputtering a target member containing Ln, M, Cu and O within that atmosphere to obtain an oxygen-...
06/30/1992
5100863Superconducting ceramics manufacturing method
An improved method of manufacturing superconducting ceramics in the form of a thin film are described. The thin film is first formed of a superimposed structure composed of three films which contain a rare earth metal, an alkaline metal and copper respect...
03/31/1992
5094880Thin superconducting film and manufacturing method for the same
A superconducting film is formed by a physical vapor deposition. In order to form such a superconducting film as exhibits a sufficient superconductivity a small portion of a target is sublimed without decomposing molecules of the target and deposited on a...
03/10/1992
5057201Process for depositing a superconducting thin film
This invention relates to a process for producing a superconducting thin film, characterized in that a target made of a compound oxide containing Ba; one element M selected from a group consisting of Y, La, Gd, Ho Er and Yb; and Cu is used for carrying ou...
10/15/1991
5053833Device made of oxide superconductive material covered with ion conductive means for adjusting the doping level and Tc thereof
Disclosed is a device made of superconductive material wherein the superconducting layer is enclosed by at least one material which is a conductor of ions of one of the anionic constituent elements of the superconductive layer. This makes it possible to a...
10/01/1991
5047394Sputtering method
Combination of a flattened cathode in a cylindrical magnetron sputtering system and positioning of a substrate relatively close to the flattened cathode allows deposition of a uniform film having good composition. The system and method of the present inve...
09/10/1991
4956337Nb-Si-Al-O superconductors with high transition temperatures and process for manufacturing the same
A superconductive material with a superconducting critical temperature of at least 77° K. comprising 20 at. % Nb, 10 at. % Si, 10 at. % Al and 60 at. % O is provided by simultaneous vapor-phase physical deposition or sputtering of Nb, Si and Al onto a he...
09/11/1990
4929595Superconducting thin film fabrication
An improved fabrication of superconducting films is disclosed whereby a multi-phase Y-Ba-Cu-O compound is utilized. The film is formed by sputtering of a target material consisting of the superconducting 123 phase Y1 Ba2 Cu3
05/29/1990
4913769Process for preparing superconductive wiring board
The present invention relates to an element comprising a superconductive material or a wiring formation technique. In a thin film wiring board in which a superconductive material is used as a conductor, annealing should be conducted at a high temperature ...
04/03/1990
4904341Selective silicon dioxide etchant for superconductor integrated circuits
This is an improved method for providing silicon dioxide with openings which expose contact pad areas for connections to superconductor in the preparation of superconducting integrated circuits. It relates to the type of method which utilizes depositing o...
02/27/1990
4902671Manufacturing method of conductive or superconductive thin film
The present invention provides a manufacturing method of a conductive or superconductive thin film of mixed oxide as an easier way to apply the mixed oxide type superconductive materials to electronic devices, etc. The manufacturing method of the present ...
02/20/1990
4891355Method for producing superconducting circuit
A method of producing a superconducting circuit by forming a film having a superconducting phase on a substrate and applying a laser beam to a part of the superconducting phase to cause transition of the part of the superconducting phase into a non-superc...
01/02/1990
4866032Method and apparatus for producing thin film of high to superconductor compound having large area
A thin film of a preselected compound having a large area is continuously produced on a substrate by depositing elements constituting the preselected compound from a target member onto the surface of a substrate by sputtering, comprising the steps of: rot...
09/12/1989
4842704Magnetron deposition of ceramic oxide-superconductor thin films
A method for depositing and tailoring anisotropic properties of ceramic oxide superconductive films onto the outer surface of fibers, wires, rods, bars and onto the inner surface of tubes, as well as onto the surface of disc-shaped substrates, employs eit...
06/27/1989
4834856Method and apparatus for sputtering a superconductor onto a substrate
A method for sputter deposition of films or coatings over large areas or at widely different substrate locations relative to the target where the coating is of exactly the same component composition as the target from where the material is being sputtered...
05/30/1989
4828664Process for the production of a niobium oxycarbonitride superconducting fiber bundle
Superconducting fiber bundle which contains a multiplicity of carrier fibers such as, for instance, carbon fibers, boron fibers, steel fibers coated with a superconducting layer of a niobium compound of the general formula NbCx Ny O
05/09/1989
4536414Superconductive tunnel junction device with enhanced characteristics and method of manufacture
A superconductive tunnel junction device comprises first and second superconductive electrodes with a barrier disposed therebetween where the first superconductive electrode and the barrier are formed without interruption in the same vacuum system pump do...
08/20/1985
4426268Method for forming high superconducting Tc niobium nitride film at ambient temperatures
A method of forming a high Tc niobium nitride (NbN) film on a substr at ambient substrate temperature. The method includes the step of reactively sputtering NbN onto the substrate in an argon-nitrogen atmosphere with controlled amounts of meth...
01/17/1984
4325795Process for forming ambient temperature superconducting filaments
This invention is a process for forming electrical conductors in the form of filaments which exhibit properties of electrical superconductivity at ambient or normal room temperature. The process includes the preparation of a molten mixture of conducting a...
04/20/1982
4316785Oxide superconductor Josephson junction and fabrication method therefor
A tunneling Josephson junction is disclosed in which first and second superposed superconducting electrode layers are formed of thin films of oxide superconducting materials having a perovskite structure of BaPB1-x Bix O3....
02/23/1982
4299679Method of producing Josephson elements of the tunneling junction type
In a method of producing a Josephson element of the tunneling junction type comprising the steps of forming the first electrode by utilizing a photoresist film, forming a barrier oxide film on the first electrode by an rf oxygen glow discharge process and...
11/10/1981
4279969Method of forming thin niobium carbonitride superconducting films of exceptional purity
Thin superconducting NbCN films are deposited by reactive sputtering onto a dielectric substrate inside a vacuum chamber. The substrate is heated to a temperature of 600°-1200° C., ultra-pure Argon is introduced into the chamber, and niobium is presputt...
07/21/1981
4176029Subminiature bore and conductor formation
A process for forming subminiature bores through very thin layers of insulative material disposed between spaced electrical conductors permits the joining of the conductors by a further conductor of microscopic cross section whose dimensions are readily c...
11/27/1979
4151325Titanium nitride thin films for minimizing multipactoring
Applying a thin film coating to the surface of a workpiece, in particular, applying a coating of titanium nitride to a klystron window by means of a crossed-field diode sputtering array. The array is comprised of a cohesive group of numerous small hollow ...
04/24/1979
4064029Method of making an improved superconducting quantum interference device
An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as c...
12/20/1977
4043888Superconductive thin films having transition temperature substantially above the bulk materials
A sputtering technique is described in which a thin film superconductor is produced which exhibits a transition temperature in excess of the transition temperature of the bulk material. High gas pressures and low voltages are employed to produce Nb3
08/23/1977
3988178Method for preparing superconductors
A superconductor having an equiaxed fine grain beta-tungsten crystalline structure found to have improved high field critical current densities is prepared by sputter-depositing superconductive material onto a substrate cooled to below 200° C. and heat-t...
10/26/1976
 
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