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| Number | Title | Issue Date |
| 6632539 | Polycrystalline thin film and method for preparing thereof, and superconducting oxide and method for preparation thereof The polycrystalline thin film is made of a composite oxide of a cubic crystal system which has a pyrochlore type crystalline structure of a composition represented as either AZrO or AHfO (A in the formula represents a rare earth element selected from amon... | 10/14/2003 |
| 6426320 | Low vacuum vapor process for producing superconductor articles with epitaxial layers A method for fabricating superconductor articles with an epitaxial layer is described. The method can be performed under conditions of relatively high pressure and low substrate surface temperature. The resulting epitaxial layers can demonstrate various a... | 07/30/2002 |
| 6218341 | Process for the preparation of a high temperature superconductor A process for preparing a superconductor which is a low anisotropy, high temperature superconductor, includes providing a target in molded form comprised of one of the superconductor or constituent elements of the superconductor, the superconductor having... | 04/17/2001 |
| 6214772 | Process for preparing polycrystalline thin film, process for preparing oxide superconductor, and apparatus therefor A method is presented for making a polycrystalline thin film (B) by depositing particles emitted from a target (36) on a substrate base (A) to form the film (B) constituted by the target material while concurrently irradiating the depositing particles wit... | 04/10/2001 |
| 6172008 | Process for preparing high crystallinity oxide thin film A process for preparing an oxide thin film which has a crystalline, clean and smooth surface on a substrate. The process is conducted by using an apparatus comprising a vacuum chamber in which an oxidizing gas of O2 including O3 can ... | 01/09/2001 |
| 6110392 | Process for reducing surface roughness of superconductor integrated circuit having a ground plane of niobium nitride of improved smoothness The invention is a process for reducing roughness of a surface of a superconductor material (23) having an undesirable surface roughness (30 and 32) and a trilayer superconductor integrated circuit (100). The process for reducing roughness of a surface of... | 08/29/2000 |
| 6060433 | Method of making a microwave device having a polycrystalline ferrite substrate The invention provides a structure comprising a high temperature superconducting layer deposited on a ceramic polycrystalline ferrite plate suitable for making commercial microwave devices. In one embodiment, the high temperature superconductor is yttrium... | 05/09/2000 |
| 6037313 | Method and apparatus for depositing superconducting layer onto the substrate surface via off-axis laser ablation The method for forming superconducting films of complex oxide compounds in a process chamber according to the present invention includes the steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to be generally p... | 03/14/2000 |
| 6027564 | Low vacuum vapor process for producing epitaxial layers A method for fabricating composite articles with an epitaxial layer is described. The method can be performed under conditions of relatively high pressure and low substrate surface temperature. The resulting epitaxial layers can demonstrate various advant... | 02/22/2000 |
| 6022832 | Low vacuum vapor process for producing superconductor articles with epitaxial layers A method for fabricating superconductor articles with an epitaxial layer is described. The method can be performed under conditions of relatively high pressure and low substrate surface temperature. The resulting epitaxial layers can demonstrate various a... | 02/08/2000 |
| 5939361 | Method of fabricating Tl or Hg-containing oxide superconductor film A substrate is set in a reaction chamber, to heat the substrate to a predetermined temperature. Tl, Ba, Ca, Cu and O are supplied to the substrate by a Tl evaporation source and a target, to cause a TlBaCaCuO film to grow on the substrate. The TlBaCaCuO f... | 08/17/1999 |
| 5922651 | Method for forming high tc superconductive thin films Herein disclosed is a superconductive thin film formation method of forming a superconductive thin film having a high critical temperature and a low surface resistance. The method comprises a first step of depositing a superconductive thin film layer on a... | 07/13/1999 |
| 5900391 | High temperature superconducting thin film deposition method Herein disclosed is a method for depositing a high Tc superconducting thin film. The superconducting thin film is deposited on one surface of a substrate. The substrate is exposed to an electromagnetic wave to heat the substrate during the process for dep... | 05/04/1999 |
| 5679625 | Method of making an oxide superconducting thin film A method of making a superconducting thin film of a Y--Ba--Cu--O series material by using a diode parallel plate type sputtering apparatus including a vacuum chamber, a substrate disposed within the vacuum chamber and having a substantially flat surface o... | 10/21/1997 |
| 5667650 | High flow gas manifold for high rate, off-axis sputter deposition An improved device for off-axis magnetron sputter deposition of inorganic oxide compounds having a sputter gun, target, substrate, gas flow means and enclosure chamber wherein the improvement comprises a hollow gas flow manifold positioned between the sub... | 09/16/1997 |
| 5650378 | Method of making polycrystalline thin film and superconducting oxide body The present invention relates to a polycrystalline thin film deposit acting as a substrate material composed of grains of a cubic structure in which the intergranular misorientation, defined as the orientation difference between the a-axes (or b-axes) of ... | 07/22/1997 |
| 5648321 | Process for manufacturing thin films by multi-layer deposition Described is a process for manufacturing thin films by periodically depositing (DEP) a number of block layers consisting of different base materials on a substrate (multilayer deposition), wherein the thickness of the layers (LT) is restricted to one to 2... | 07/15/1997 |
| 5629268 | Process for preparing a layered superconducting structure A process for depositing successively a plurality of thin films on a bottom superconductor layer made of oxide superconductor deposited on a substrate in a single chamber under a condition, the bottom superconductor layer is heated in ultra-high vacuum at... | 05/13/1997 |
| 5595959 | Method of forming a high-TC microbridge superconductor device A method of forming a high-Tc microbridge superconductor device is disclosed, which comprises the steps of forming an inclined step on the surface of a substrate, the inclined step having an angle of inclination of from about 20 to about 80 degrees; depos... | 01/21/1997 |
| 5585332 | Process for preparing a perovskite Bi-containing superconductor film A perovskite type superconductor film having a high content, almost a single phase, of the high Tc phase is formed by the steps of: depositing at least one first film of a first material (e.g., a composite oxide of Bi-Sr-Ca-Cu-O system or Tl-Ba-Ca-Cu-O sy... | 12/17/1996 |
| 5567674 | Process of forming oxide superconductor possessing locally different crystal orientations A thin film of oxide superconductor consisting of more than two portions (1, 11, 12) each possessing a predetermined crystal orientation and deposited on a common surface of a substrate (2). At least one selected portion (10) of thin film of oxide superco... | 10/22/1996 |
| 5488031 | Process for making high temperature superconducting oxide films A process for making high temperature superconducting oxide films comprising using a sintered body of Y-Ba-Cu-O or Bi-Sr-Ca-Cu-O oxide as a sputtering target and using a mixture of argon and oxygen as a sputtering gas, forming glow discharge between the s... | 01/30/1996 |
| 5478800 | Process for preparing a superconducting thin film A process for preparing a superconducting thin film of K2 NiF4 -type oxides such as [La, Ba ]2 CuO4, or [La, Sr ]2 CuO having higher transition temperature of superconductivity which can be used for J... | 12/26/1995 |
| 5476838 | Process for producing thin layers by means of reactive cathode sputtering and apparatus for implementing the process The invention relates to a process for producing thin films in which the pressure of the process gas is kept constant in a process chamber with a gas inlet and outlet, a target and a substrate, while material is sputtered from the target and deposited on ... | 12/19/1995 |
| 5439877 | Process for depositing high temperature superconducting oxide thin films In-situ process are provided for 1) depositing on a substrate a crystalline thin film of a high temperature superconducting oxide by exposing the back surface of the substrate, i.e., the surface of the substrate opposite the surface on which the thin film... | 08/08/1995 |
| 5430014 | Method of producing an SrTiO3 /YBa2 Cu3 O7 layer system and a layer system as thus produced as a high-temperature superconductor c-axis oriented YBa2 Cu3 O7 layers are grown with intervening SrTiO3 layers bridged over steps at which there is a transformation to a-axis crystal-oriented growth. The multilayer superconductor has YBa2 | 07/04/1995 |
| 5426092 | Continuous or semi-continuous laser ablation method for depositing fluorinated superconducting thin film having basal plane alignment of the unit cells deposited on non-lattice-matched substrates A thin film, high Tc fluorinated, superconducting having a lattice structure differing from the lattice structure of the material substrate, such as sapphire or stainless steel, upon which it is grown. The superconducting material is characteri... | 06/20/1995 |
| 5389606 | Process for producing thin films of inorganic oxides of controlled stoichiometry An in-situ process for preparing thin films which contain relatively volatile and involatile oxides is disclosed, in particular, crystalline thin films of oxides of conductors, superconductors or ferroelectric materials, wherein separate sources of the re... | 02/14/1995 |
| 5376627 | Method of preparing Tl-containing oxide superconducting thin film Provided herein is a method of efficiently preparing a thin film having a higher critical temperature as to an oxide superconducting material containing Tl. A thin film of an oxide containing Tl is formed and then heat treated at a temperature of about 85... | 12/27/1994 |
| 5364835 | Method of adding a halogen element into oxide superconducting materials by ion injection or thermal diffusion A method of producing an oxide superconducting material comprises the steps of adding a halogen element to an oxide superconducting material by ion injection and thermal diffusion, forming a film either on the oxide material before or after the adding ste... | 11/15/1994 |
| 5362710 | Process for preparing high Tc superconducting material A process for preparing a thin film of superconducting material is disclosed in which films are deposited from a defined target. The thin films prepared by the process are characterized by high critical temperature of superconductivity and a smaller discr... | 11/08/1994 |
| 5342828 | Superconducting Tl-Pb-Sr-Ca-Cu-O thin film A superconducting Tl--Pb--Sr--Ca--Cu--O thin film comprised of at least one phase of the formula Tl0.5 Pb0.5 Sr2 Ca1+n Cu2+n O7+2n where n=0, 1 or 2 is disclosed, which is prepared by a process ... | 08/30/1994 |
| 5330966 | Method of preparing 2223 phase (Bi,Pb)-Sr-Ca-Cu-O superconducting films An oxide superconducting layer is formed on a base material of silver, whose single side is coated with MgO, or single-crystalline MgO for depositing a Bi2 Sr2 Ca2 Cu3 phase in a crystallographically oriented st... | 07/19/1994 |
| 5317006 | Cylindrical magnetron sputtering system An improved cathode for a sputtering system includes a metal cylinder and strips of material bonded to the inside of the metal cylinder and/or material sprayed onto the inside of the metal cylinder. The strips may have various specified compositions and/o... | 05/31/1994 |
| 5314870 | Preparing thin film of oxide superconductor A process for preparing a thin film of oxide superconductor on a single crystal substrate of semiconductor by RF sputtering. At first, an under-layer of an oxide having a thickness of 50 to 200 Å is deposited on the single crystal substrate of semiconduc... | 05/24/1994 |
| 5312803 | Process for producing Bi- and Pb-containing oxide superconducting wiring films In an oxide superconducting film wiring, when the line width is reduced, the evaporation of a component during firing becomes so vigorous that it becomes impossible to form a desired single crystal phase, which causes a significant lowering in the propert... | 05/17/1994 |
| 5308801 | Process for the increase in critical temperature of high Tc superconductors A method is disclosed to increase the critical transition temperature of superconducting materials by the selective application of stress to specific crystal directions. It has been found that by applying tensile stresses in certain directions and compres... | 05/03/1994 |
| 5306698 | Methods for producing Tl2 Ca2 Ba2 Cu3 oxide superconductors Improved processes for making thin film and bulk thallium superconductors are described, as well as Tl superconductors having high critical current densities and low surface impedance. An annealing step in a reduced oxygen atmosphere is used to convert co... | 04/26/1994 |
| 5306702 | Process for producing Bi-Pb-Sr-Ca-Cu-O superconducting films A process for producing a Bi-based perovskite superconducting film, comprising the steps of forming on a substrate a Pb-film, containing Bi-base material film comprising Bi, Pb, Sr, Ca and Cu in a Bi:Pb:Sr:Ca:Cu molar ratio of (1.9 to 2.1):(1.2 to 2.2, pr... | 04/26/1994 |
| 5306405 | Sputtering target and method of manufacture A method for preparing a slurry target for use in a sputtering apparatus. The target material is ground into a powder form, and mixed with a solvent to form a slurry. The slurry is poured into a target mold and allowed to slow dry by evaporation at or nea... | 04/26/1994 |
