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Class 505/728 - Etching


Subclass of Class 505 - Superconductor technology: apparatus, material, process
Definition: Process involving the removal of superconducting material
No. of patents: 55
Last issue date: 12/13/2005


1    
NumberTitleIssue Date
6974501Multi-layer articles and methods of making same
The invention relates to multi-layer articles and methods of making such articles. The methods include first conditioning the surface of an underlying layer, such as a buffer layer or a superconductor layer, then disposing a layer of material on the conditioned surf...
12/13/2005
6339047Composites having high wettability
Methods of treating superconducting composites to enhance their wettability in solder, and composites having enhanced wettability. It has been found that wettability can be substantially enhanced by stripping a thin layer off the surface of the composite ...
01/15/2002
6270688Chemical polishing of barium strontium titanate
A method of polishing ferroelectric materials and specifically perovskite materials and still more specifically barium strontium titanate (1) wherein the surface (5) to be polished is initially partially smoothened or planarized by mechanical abrading wit...
08/07/2001
6207067Method for fabricating oxide superconducting device
A method for fabricating an oxide superconducting device includes the steps of: forming a V-shaped groove on a substrate by a converging ion beam and forming a barrier with reduced superconductivity on the oxide superconducting thin-film on the groove to ...
03/27/2001
6060433Method of making a microwave device having a polycrystalline ferrite substrate
The invention provides a structure comprising a high temperature superconducting layer deposited on a ceramic polycrystalline ferrite plate suitable for making commercial microwave devices. In one embodiment, the high temperature superconductor is yttrium...
05/09/2000
5952269Formation of superconducting devices using a selective etching technique
A method for forming a superconducting device using a selective etching technique on superconducting thin films. The method utilizes rapid etching which combines ion implantation with chemical etching. The portions of the superconducting film to be retain...
09/14/1999
5840204Method for patterning a layer on oxide superconductor thin film and superconducting device manufactured thereby
A method for patterning an oxide superconductor thin film, comprising a step of forming a SiO2 layer on the oxide superconductor thin film, patterning the SiO2 layer so as to form the same pattern as that of the oxide superconductor ...
11/24/1998
5789346Method for manufacturing an oxide superconductor device
Method for manufacturing a superconducting device including forming on a surface of a substrate a non-superconducting oxide layer, a first oxide superconductor thin film, etching the first oxide superconductor thin film so as to form a concave portion, im...
08/04/1998
5750474Method for manufacturing a superconductor-insulator-superconductor Josephson tunnel junction
A superconductor-insulator-superconductor Josephson tunnel junction, comprising: a single crystalline substrate having a perovskite crystal structure; a template layer formed of a b-axis oriented PBCO thin film on the substrate; and a trilayer structure c...
05/12/1998
5739084Method for manufacturing a superconducting device having a reduced thickness of oxide superconducting layer
A method for fabricating a superconducting device with a substrate, a first oxide superconductor thin film, a barrier layer, a diffusion layer, and a second oxide superconductor thin film. The first oxide superconductor thin film with a very thin thicknes...
04/14/1998
5688383Method for improving the performance of high temperature superconducting thin film wafers
A method for decreasing the microwave surface impedance of high-temperature superconducting thin films comprises (a) applying, preferably by spin-coating, a protective coating (preferably poly(methyl methacrylate) or polyimide) to the surface of a high-te...
11/18/1997
5677265Process for oxygenation of ceramic high Tc superconductors
A process for the oxygenation of ceramic high Tc superconductors is disclosed. The superconductor is formed from a sintered powdered ceramic. Microchannels are formed in the ceramic material by embedding in the powder a plurality of wires or fi...
10/14/1997
5650377Selective epitaxial growth of high-TC superconductive material
Fine epitaxial patterns of yttrium barium copper oxide on a strontium titanate substrate are provided by using a silicon nitride mask to define the pattern to be formed. A thin film of yttrium barium copper oxide is placed on the silicon nitride mask and ...
07/22/1997
5646095Selective insulation etching for fabricating superconductor microcircuits
A method for selectively etching insulative material composed of SrTiO3 or MgO in the presence of a copper oxide perovskite superconductive material includes treating the insulative material with a liquid selective etchant solution containing hydrogen flu...
07/08/1997
5599465Method for producing high-temperature superconducting Josephson devices
A method is provided for producing superconducting Josephson devices using a chemical etching solution which comprises forming a mask on a predetermined portion of a MgO substrate, and immersing the MgO substrate having the mask in an aqueous acid solutio...
02/04/1997
5571778Superconducting junction material and process of preparing same
A superconductor junction material is disclosed which comprises a substrate of a single crystal, and at least flux flow element, and optionally at least one Josephson junction element, provided on the surface, each of the flux flow and Josephson junction ...
11/05/1996
5494891Method for manufacturing three-terminal oxide superconducting devices
A superconducting device comprises a substrate, a non-superconducting layer formed in a principal surface of said substrate, an extremely thin superconducting channel formed of an oxide superconductor thin film on the non-superconducting layer. A supercon...
02/27/1996
5446016Method for forming a patterned oxide superconductor thin film
A method for forming a patterned oxide superconductor thin film on a substrate comprises steps of forming a metal or semi-metal layer on a portion of the substrate, on which the oxide superconductor thin film will be formed, forming a layer of a material ...
08/29/1995
5434127Method for manufacturing superconducting device having a reduced thickness of oxide superconducting layer
For manufacturing a superconducting device, a first c-axis orientated oxide superconductor thin film having a very thin thickness is formed on a principal surface of a substrate, and a stacked structure of a gate insulator and a gate electrode is formed o...
07/18/1995
5418213Method for forming continuous oxide superconducting layer having difference thickness portions for superconducting device
A method for forming an oxide superconductor thin film having different thickness portions, in a process for manufacturing a superconductor device, includes the step of forming an oxide superconductor thin film having a uniform thickness on a substrates. ...
05/23/1995
5411937Josephson junction
A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination wi...
05/02/1995
5356870Method for processing superconducting thin films
An ion beam is irradiated to an oxide superconducting thin film formed on a substrate to disturb the crystal structure of the superconducting thin film and thus forming a damaged layer. The damaged layer has higher solubility in a halogen solution has a f...
10/18/1994
5326747Process for patterning layered thin films including a superconductor
A process for patterning layered thin films comprising a bottom oxide superconductor (1) layer deposited on a substrate (3) and another thin film (2) deposited on the bottom superconductor layer and consisting of insulator, ordinary conductor or oxide sup...
07/05/1994
5321004Method for forming Josephson break junctions
A Josephson break junction device suitable for highly sensitive electronic detecting systems. A superconductor film such as YBa2 Cu3 O7 is deposited on a substrate such as a simple-crystal MgO. The film is fractured across...
06/14/1994
5306702Process for producing Bi-Pb-Sr-Ca-Cu-O superconducting films
A process for producing a Bi-based perovskite superconducting film, comprising the steps of forming on a substrate a Pb-film, containing Bi-base material film comprising Bi, Pb, Sr, Ca and Cu in a Bi:Pb:Sr:Ca:Cu molar ratio of (1.9 to 2.1):(1.2 to 2.2, pr...
04/26/1994
5304535Etching of nanoscale structures on high temperature superconductors
A process for etching with a scanning tunneling microscope on both a single crystal and a thin film of high temperature superconductor is disclosed....
04/19/1994
5292717Method for the production of a structured composite with high-temperature superconductor material
A method for producing a structured layer of a first material having at least one recess of a predetermined geometrical shape on a substructure formed of at least one second material that includes a metal oxide superconductor material with a high transiti...
03/08/1994
5286336Submicron Josephson junction and method for its fabrication
A Josephson junction and a method for its fabrication in which a laminated junction layer is formed in situ on the side edge of a base electrode contact. The laminated junction layer forms the Josephson junction of the present invention and includes an in...
02/15/1994
5280013Method of preparing high temperature superconductor films on opposite sides of a substrate
A superconducting electronic circuit device, useful when impedance matching is desired, especially suited to microwave frequencies, consisting of a thin dielectric layer with superconducting layers on both sides. A superconductor such as Yttrium Barium Co...
01/18/1994
5278140Method for forming grain boundary junction devices using high Tc superconductors
A method is disclosed for fabricating grain boundary junction devices, which comprises preparing a crystalline substrate containing at least one grain boundary therein, epitaxially depositing a high Tc superconducting layer on the substrate, patterning th...
01/11/1994
5250507Process for producing molded bodies from precursors of oxidic high-temperature superconductors
In the process for producing molded bodies from precursors of oxidic high-temperature superconductors of the BSCCO type, a copper mold of the desired shape which encloses a solidified bismuth strontium calcium cuprate melt is wired as anode in a direct cu...
10/05/1993
5248657Method for forming internally helixed high temperature superconductor assembly
A superconducting conductor assembly using high temperature materials. A double-walled tubular structure has at least one helical strip of superconductive material on the inner wall of the inside tube. Brittle, non-ductile superconducting materials may be...
09/28/1993
5238913Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials
Superconducting microcircuits including a thin layer of Ba2 Cu3 O5+x (0
08/24/1993
5231073Microwave/far infrared cavities and waveguides using high temperature superconductors
The structures for confining or guiding high frequency electromagnetic radiation have surfaces facing the radiation constructed of high temperature superconducting materials, that is, materials having critical temperatures greater than approximately 35° ...
07/27/1993
5227364Method of forming patterned oxide superconducting films and Josephson junction devices by using an aqueous alkaline solution
A method of forming a fine groove on a superconducting thin film. A superconducting oxide thin film is formed on a MgO substrate, and a damaged layer is formed thereon by irradiating the superconducting thin film with focused ion beams to such a degree th...
07/13/1993
5219826Superconducting junctions and method of making same
A superconducting Josephson junction is created in high Tc superconducting film, with a bridge connecting two superconducting banks, by subjecting the bridge to a tunneling electron current from a sharp electrode close to the bridge. The tunnel...
06/15/1993
5219830Process for preparing high-Tc superconducting integrated circuits
A process for preparing high-Tc superconducting integrated circuits by using a method in which a thin surface layer of non-superconducting tetragonal YBa2 Cu3 Oy wafer is selectively transformed into a superconducting orthorhombic ph...
06/15/1993
5215960Method for manufacturing oxide superconducting devices
In a method of manufacturing a superconducting device which has a first thin film of oxide superconductor material formed on a substrate and a second thin film formed on the first thin film of oxide superconductor material, after the second thin film is d...
06/01/1993
5212147Method of forming a patterned in-situ high Tc superconductive film
A method of forming a patterned in-situ photoconductive film on a substrate including providing a patterned photoresist layer on upper and lower metallic layers formed on a substrate. The patterned photoresist layer is used to form an opening in the upper...
05/18/1993
5198412Method for making superconductor films
A process is disclosed for producing superconductor films on a variety of substrates, and more particularly a patterned superconductor film on a planar substrate. The basic process includes the steps of: 1) depositing a metal film of superconductor precur...
03/30/1993
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