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Class 505/476 - RF sputtering (e.g., 13.56 MHz, etc.)


Subclass of Class 505 - Superconductor technology: apparatus, material, process
Definition: Process wherein radio frequency electromagnetic wave energy
No. of patents: 56
Last issue date: 10/21/2008


1    
NumberTitleIssue Date
7439208Growth of in-situ thin films by reactive evaporation
A method of forming MgB2 films in-situ on a substrate includes the steps of (a) depositing boron onto a surface of the substrate in a deposition zone; (b) moving the substrate into a reaction zone containing pressurized, gaseous magnesium; (c) moving the ...
10/21/2008
7335283Production method for composite oxide thin film and device therefor and composite oxide film produced thereby
A method and an apparatus which permits making a composite oxide thin film excellent in crystallinity easily and at a low temperature, with the capability of controlling the basic unit cell structure as desired, and without the need for a post annealing, as well as ...
02/26/2008
7294404Graded photocatalytic coatings
The invention provides graded photocatalytic coatings. In one aspect, the invention provides a substrate carrying a photocatalytic coating that includes a first graded film region and a second graded film region. The first graded film region has a substantially cont...
11/13/2007
7074744Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers
A method of coating a substrate for a high temperature superconductor material is disclosed, including loading a substrate into a first deposition chamber, routing the substrate in the first deposition chamber such that the substrate forms a helical winding in the f...
07/11/2006
7071496Electronic device and method for manufacturing the same
An electronic device including a new oxide layer and a method for manufacturing the same are provided. The electronic device of the present invention includes an oxide layer, which is formed of an oxide containing an element from group IIa, an element from group IIb...
07/04/2006
7001459Spinel-structured metal oxide on a substrate and method of making same by molecular beam epitaxy
A method of making a spinel-structured metal oxide on a substrate by molecular beam epitaxy, comprising the step of supplying activated oxygen, a first metal atom flux, and at least one other metal atom flux to the surface of the substrate, wherein the metal atom fl...
02/21/2006
6994775Multilayer composites and manufacture of same
The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segm...
02/07/2006
6906008Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers
The present invention is a deposition system for the production of coated substrates that provides a first deposition process that subsequently feeds a second deposition process and where the two deposition processes are occurring concurrently. The consecutive depos...
06/14/2005
6835696Method of forming a superconductor film
The present invention provides methods forming the superconductor of as-grown film of MgB2 which is made with magnesium and boron ejected from a magnesium target and a boron target, respectively, each in simultaneously sputtering process. The as-grown fil...
12/28/2004
6037313Method and apparatus for depositing superconducting layer onto the substrate surface via off-axis laser ablation
The method for forming superconducting films of complex oxide compounds in a process chamber according to the present invention includes the steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to be generally p...
03/14/2000
5747427Process for forming a semiconductive thin film containing a junction
Disclosed is a method of forming a thin junction film including a first thin oxide flilm presenting a superconductivity and second thin oxide film presenting an insulator properties or possibly semiconductive properties with an improved production efficie...
05/05/1998
5679625Method of making an oxide superconducting thin film
A method of making a superconducting thin film of a Y--Ba--Cu--O series material by using a diode parallel plate type sputtering apparatus including a vacuum chamber, a substrate disposed within the vacuum chamber and having a substantially flat surface o...
10/21/1997
5667650High flow gas manifold for high rate, off-axis sputter deposition
An improved device for off-axis magnetron sputter deposition of inorganic oxide compounds having a sputter gun, target, substrate, gas flow means and enclosure chamber wherein the improvement comprises a hollow gas flow manifold positioned between the sub...
09/16/1997
5488031Process for making high temperature superconducting oxide films
A process for making high temperature superconducting oxide films comprising using a sintered body of Y-Ba-Cu-O or Bi-Sr-Ca-Cu-O oxide as a sputtering target and using a mixture of argon and oxygen as a sputtering gas, forming glow discharge between the s...
01/30/1996
5478800Process for preparing a superconducting thin film
A process for preparing a superconducting thin film of K2 NiF4 -type oxides such as [La, Ba ]2 CuO4, or [La, Sr ]2 CuO having higher transition temperature of superconductivity which can be used for J...
12/26/1995
5476838Process for producing thin layers by means of reactive cathode sputtering and apparatus for implementing the process
The invention relates to a process for producing thin films in which the pressure of the process gas is kept constant in a process chamber with a gas inlet and outlet, a target and a substrate, while material is sputtered from the target and deposited on ...
12/19/1995
5466665Method of manufacturing Y-Ba-Cu-O superconducting thin film
A method of manufacturing YBCO superconducting thin films is obtained which is capable of providing superconducting thin films having excellent crystallinity in a high yield by introducing a new film formation parameter in a hybrid plasma sputtering metho...
11/14/1995
5447908Superconducting thin film and a method for preparing the same
An outer surface of a superconducting thin film of compound oxide such as YBa2 Cu3 O7-δ deposited on a substrate such as MgO and SrTiO3 is protected with a protective layer which is composed of amorphous inorga...
09/05/1995
5413986Method for production of thin oxide superconducting film and substrate for production of the film
A method for producing a thin oxide superconducting film possessing high crystallinity and excellent quality and a novel single crystal as a substrate allowing easy formation of an epitaxial film of high quality usable for the method are provided. The met...
05/09/1995
5389606Process for producing thin films of inorganic oxides of controlled stoichiometry
An in-situ process for preparing thin films which contain relatively volatile and involatile oxides is disclosed, in particular, crystalline thin films of oxides of conductors, superconductors or ferroelectric materials, wherein separate sources of the re...
02/14/1995
5378341Conical magnetron sputter source
The sputtering source of the present invention comprises a means for providing DC or RF power and cooling to a conical target electrode with magnets thereabout and anode at the bottom. At the center of the sputtering source is a grounded anode. A pluralit...
01/03/1995
5362711Method for producing single crystal superconducting LnA2 Cu3 O7-x films
A process for forming a single crystal superconducting LnA2 Cu3 O7-x film, wherein Ln is at least one rare earth element and A is at least one alkaline earth element, is disclosed, which comprises simultaneously evaporatin...
11/08/1994
5314870Preparing thin film of oxide superconductor
A process for preparing a thin film of oxide superconductor on a single crystal substrate of semiconductor by RF sputtering. At first, an under-layer of an oxide having a thickness of 50 to 200 Å is deposited on the single crystal substrate of semiconduc...
05/24/1994
5314871Substrate of single crystal of oxide, device using said substrate and method of producing said superconductive device
According to the present invention, when a superconductive thin film is formed on a substrate of a single crystal, a compound having a composition of SrNdGaO4 and a K2 NiF4 type crystal structure is used as a material empl...
05/24/1994
5312803Process for producing Bi- and Pb-containing oxide superconducting wiring films
In an oxide superconducting film wiring, when the line width is reduced, the evaporation of a component during firing becomes so vigorous that it becomes impossible to form a desired single crystal phase, which causes a significant lowering in the propert...
05/17/1994
5308801Process for the increase in critical temperature of high Tc superconductors
A method is disclosed to increase the critical transition temperature of superconducting materials by the selective application of stress to specific crystal directions. It has been found that by applying tensile stresses in certain directions and compres...
05/03/1994
5306702Process for producing Bi-Pb-Sr-Ca-Cu-O superconducting films
A process for producing a Bi-based perovskite superconducting film, comprising the steps of forming on a substrate a Pb-film, containing Bi-base material film comprising Bi, Pb, Sr, Ca and Cu in a Bi:Pb:Sr:Ca:Cu molar ratio of (1.9 to 2.1):(1.2 to 2.2, pr...
04/26/1994
5296455Process for preparing superconductor of compound oxide of Bi-Sr-Ca-Cu system
A compound oxide superconductor represented by the general formula: Bi4+d (Sr1-x, Cax)m Cun Op+y in which, "d" is an amount of excess bismuth and satisfies a range of 0
03/22/1994
5292718Process for preparing superconducting junction of oxide superconductor
Improvement in a process for fabricating a superconducting junction by depositing successively a first oxide superconductor thin layer, a non-superconducting intermediate thin film layer and a second oxide superconductor thin film layer on a substrate in ...
03/08/1994
5283233Method for producing a superconductor layer of YBa2 Cu3 O7 on a sapphire substrate
A method for producing a superconducting layer of YBa2 CU3 O7 on a sapphire substrate utilizes the steps of epitaxially growing an intermediate layer that at least contains a yttrium-stabilized zirconium oxide layer direct...
02/01/1994
5276010Process for producing bismuth-based oxide superconducting films
A process for producing an oxide crystalline thin film having a structure in which atomic layers having different chemical compositions are laminated along the film thickness direction, the process including the steps of depositing amorphous atomic layers...
01/04/1994
5272133Passivation of thin film oxide superconductors
An oxide superconductor having a high critical temperature is provided with a passivation coating comprising a first layer of a Group II oxide, such as magnesium oxide, and a second layer of a polymer, such as polyimide. The Group II oxide is formed under...
12/21/1993
5260251Process for making superconducting Tl-Pb-Sr-Ca-Cu oxide films
A process for making a superconducting Tl--Pb--Sr--Ca--Cu--O thin film comprised of at least one phase of the formula Tl0.5 Pb0.5 Sr2 Ca1+n Cu2+n O7+2n where n=0, 1 or 2. The process compri...
11/09/1993
5240904Process for preparing a-axis oriented superconducting oxide thin films
Improvement in a process for preparing a-axis oriented thin film of high-Tc oxide superconducting material by laser evaporation method. Before the a-axis oriented thin film of oxide superconducting material is deposited by laser evaporation method, an und...
08/31/1993
5236894Process for producing a superconducting thin film at relatively low temperature
A process for depositing a superconducting thin film composed mainly of compound oxide such as LnBa2 Cu3 O7-δ (Ln is lanthanide) or (La1-x ଱x)2 CuO4 (଱ is Ba or Sr)...
08/17/1993
5229360Method for forming a multilayer superconducting circuit
A method for forming a superconducting circuit is disclosed, comprising the steps of forming a mask pattern on a superconducting layer, forming a covering layer, containing a modifying element for superconductor, on the resultant structure, diffusing the ...
07/20/1993
5225393Process for forming thin oxide film
A process for forming a thin oxide film on an underlying surface adapted for film formation thereon according to a radio frequency magnetron sputtering method using an oxide target(s). The excitation frequency is a frequency which is higher than 13.56 MHz...
07/06/1993
5196400High temperature superconductor deposition by sputtering
A target which is a good conductor of heat and electricity is plasma sprayed with a weakly conducting material such as a metallic oxide. The target is then employed in a magnetron sputtering apparatus to sputter the material sprayed onto the target onto a...
03/23/1993
5169829Method for producing a superconducting circuit
An improvement in a process for manufacturing a superconductor, characterized by irradiating a material composed of compound oxide by one of ion beams selected from oxygen ion beam, inert gas ion beams and an ion beam consisting of a mixture of oxygen gas...
12/08/1992
5151408Process for preparing a-axis oriented high-temperature superconducting thin films
A process for preparing a-axis oriented thin film of oxide superconducting material on a substrate by two steps. In the first step, an under-layer of an oxide superconducting material is deposited on the substrate under such a condition that the substrate...
09/29/1992
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