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| Number | Title | Issue Date |
| 8057283 | Method of fabricating a whispering gallery mode resonator A method of fabricating a whispering gallery mode resonator (WGMR) is provided. The WGMR can be fabricated from a particular material, annealed, and then polished. The WGMR can be repeatedly annealed and then polished. The repeated polishing of the WGMR can be carri... | 11/15/2011 |
| 7896728 | Machining methods using superabrasive tool A tool for use in an abrasive machining process has a body extending along a central longitudinal axis from a first end to a tip end. An abrasive material is located on the tip end. The body has a tip end protuberance. An abrasive material is located on the protuber... | 03/01/2011 |
| 7794307 | Method for correcting semi-conductive belt The present invention provides a method for correcting a semi-conductive belt, the semi-conductive belt including a resin and a conductive substance, the method having grinding a geometrically defective part of the semi-conductive belt to flatten the geometrically d... | 09/14/2010 |
| 7708621 | Polishing apparatus and method of reconditioning polishing pad This polishing apparatus includes a head that holds a semiconductor wafer, a polishing pad that polishes a surface to be polished of the semiconductor wafer held by the head, and a dresser that reconditions the polishing pad by cutting the polishing pad. The polishi... | 05/04/2010 |
| 7563154 | Grinding apparatus having sludge-removing device and method of removing sludge A work having a portion to be ground, such as a tapered surface, is ground by a grinder driven by a driving device. During grinding operation, coolant is supplied to a grinding surface of the grinder and the portion to be ground. After the grinding operation is comp... | 07/21/2009 |
| 7442112 | Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface A nozzle for spraying sublimable solid particles and preventing frost from forming at surfaces of the nozzle. The nozzle includes: a cleaning agent block for phase-changing a cleaning agent into a snow containing sublimable solid particles; a nozzle block for growin... | 10/28/2008 |
| 7335088 | CMP system with temperature-controlled polishing head A chemical mechanical polish system for polishing a wafer includes a polishing head; an inner tube connected to the polishing head, wherein the inner tube is filled with a heat media; a media heater connected to the inner tube; and a pressure controller connected to... | 02/26/2008 |
| 7328639 | Tile saw A tile saw includes a base, a frame assembly disposed on the base, a first rail disposed on the frame assembly, the first rail having a longitudinal axis, a table slidingly disposed on the first rail, a support assembly disposed on the base, a saw assembly supported... | 02/12/2008 |
| 7297286 | Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants A method for manufacturing an article having polymeric residue that is to be removed during the manufacture of the article is disclosed. The article is introduced into a controlled environment of a processing tool having one or more processing chambers. Free radical... | 11/20/2007 |
| 7293570 | Carbon dioxide snow apparatus A carbon dioxide snow apparatus of the present invention includes a carbon dioxide snow generation system and a propellant generation system connected to a common carbon dioxide gas source. The carbon dioxide snow generation system includes a condenser having a at l... | 11/13/2007 |
| 7281536 | Cutting machine using wire saw, cutting method using wire saw, and mobile machine having wire saw cutting machine A cutting apparatus that positions a wire saw driving device movably and appropriately at the desired site by freely moving an arm of a backhoe provided with a boom, which arm carries the wire saw driving device and is turnable and movable in upward, downward, leftw... | 10/16/2007 |
| 7270592 | Milling machine The improved milling machine makes use of individually controlled x-axis, y-axis, and z-axis carriages. These carriages provide positive and precise control of the position of the cutting tools and the blank to be cut. The tools are located in spindles that are move... | 09/18/2007 |
| 7264538 | Method of removing a coating A method of removing at least a part of a thermal sprayed wear resistant coating on a gas turbine engine part includes grinding the thermal sprayed wear resistant coating with a superabrasive grinding wheel. ... | 09/04/2007 |
| 7257956 | Cooling apparatus A cooling apparatus configured such that a cooling body provided with heat-dissipating plates is pressed against a device to which a socket of a burn-in board is attached, and air is provided by a blower such that the air passes between the heat-dissipating plates, ... | 08/21/2007 |
| 7238084 | Chemical mechanical polishing apparatus and chemical mechanical polishing method using the same Polishing uniformity in a CMP process may be improved due to an improvement in the temperature uniformity of a polishing surface, when a wafer is polished by a CMP apparatus including a polishing head for holding the wafer, a platen, a polishing pad at a top of the ... | 07/03/2007 |
| 7226338 | Milling machine The improved milling machine makes use of individually controlled x-axis, y-axis, and z-axis carriages. These carriages provide positive and precise control of the position of the cutting tools and the blank to be cut. A tool changer allows the tools to be changed t... | 06/05/2007 |
| 7219408 | Tool for securing a component A method enables a component to be secured within a tool for manufacture. The tool includes a fixture, a component locator, and a clamping member. The method includes fixedly coupling the component locator to the fixture, coupling the clamping member to the fixture,... | 05/22/2007 |
| 7214941 | Crack detection in razor blades Methods are provided for determining the presence of cracks in razor blades during manufacturing. The methods may include, for example, providing a plurality of razor blades in a stack, inducing a current in the stack, and measuring a parameter that is related to th... | 05/08/2007 |
| 7214123 | Retainer ring, Polishing head, and chemical mechanical polishing apparatus A retainer ring configured to reduce heat generated during a polishing process may include a heat absorbing element, a thermoelectric element, and a heat dissipating element. A polishing head configured to polish a wafer may include a wafer carrier, a retainer ring,... | 05/08/2007 |
| 7201642 | Process for producing improved membranes The present invention relates generally to the field of chemical/mechanical polishing of substrates. In particular the invention relates to methods of producing improved membranes for use in chemical/mechanical polishing systems. The present invention provides a met... | 04/10/2007 |
| 7201634 | Polishing methods and apparatus Apparatus for and methods of chemical mechanical polishing (CMP) of semiconductor wafers are disclosed. A preferred embodiment comprises an apparatus for polishing a semiconductor workpiece that includes a polishing pad, a fluid dispenser adapted to dispense a fluid... | 04/10/2007 |
| RE39547 | Method and apparatus for endpointing mechanical and chemical-mechanical polishing of substrates An apparatus and method for stopping mechanical and chemical-mechanical polishing of a substrate at a desired endpoint. In one embodiment, a polishing machine has a platen, a polishing pad positioned on the platen, and a polishing medium located at a planarizing sur... | 04/03/2007 |
| 7195543 | Machine tool with 5 machining axes with a continuous grinding tool profilling system A machine tool for machining a part by on-head and continuous grinding tool profiling includes a part holder support driven into rotation by first driving means around a first axis in a vertical plane, a machining system provided with a grinding tool for machining t... | 03/27/2007 |
| 7189145 | Method of and apparatus for producing roll A belt grinding is integrated with an electroerosion machine for contouring the working surface of a mill roll and providing a texture thereon. The belt grinder can superfinish the roll and remove peaks in the surface without significantly affecting the mean surface... | 03/13/2007 |
| 7182674 | Coolant delivery apparatus for machine tool A coolant delivery apparatus for a machine tool wherein the position of the coolant delivery apparatus is controllable such that coolant may be delivered to the machining contact zone of a tool even though the location of the machining zone of the tool may change su... | 02/27/2007 |
| 7180707 | Thin-film magnetic head, head gimbal assembly, and hard disk drive A thin-film magnetic head on a support includes an electromagnetic transducer for writing, a magnetoresistive device for reading, an overcoat layer and a heating element. The transducer and magnetoresistive device are disposed on the support. The overcoat layer is d... | 02/20/2007 |
| 7163447 | Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces Conditioning devices, systems and methods for conditioning a contact surface of a processing pad used in processing microelectronic workpieces. One embodiment of a conditioning device comprises an end-effector having a conditioning surface configured to engage the c... | 01/16/2007 |
| 7156720 | Substrate holding apparatus A substrate holding apparatus can accurately control temperature of a substrate in a direct manner with a relatively simple arrangement. The substrate holding apparatus has a top ring configured to hold a substrate to be polished and press the substrate against a po... | 01/02/2007 |
| 7156947 | Energy enhanced surface planarization A substrate processing apparatus equipped to employ an energy directed at a process side of a substrate to enhance and control material removal is provided. ... | 01/02/2007 |
| 7153186 | Jet singulation Techniques for singulating a substrate into a plurality of component parts is disclosed. The singulation techniques include generating a jet stream in order to cut through large components so as to produce smaller components. The techniques are particularly suitable... | 12/26/2006 |
| 7153189 | Coolant supply method and apparatus for grinding machine In a coolant supply method and apparatus for a grinding machine, when an end surface of a workpiece is ground with a grinding wheel end surface of a grinding wheel with coolant being supplied toward a grinding point, a first coolant flow is ejected toward a first po... | 12/26/2006 |
| 7153188 | Temperature control in a chemical mechanical polishing system The carrier head has a base and a substrate backing structure for holding a substrate against a polishing surface during polishing. The substrate backing structure is connected to the base and includes an external surface that contacts a backside of the substrate du... | 12/26/2006 |
| 7147542 | Centerless grinder A centerless grinder for grinding an elongated workpiece includes a grinding wheel having a working surface with a plurality of raised areas extending circumferentially around at least a portion of the working surface. A platform is provided having an elongated top ... | 12/12/2006 |
| 7144304 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface A method and apparatus for planarizing a microelectronic substrate. In one embodiment, the apparatus can include an elongated, non-continuous polishing pad oriented at an angle relative to the horizontal to allow planarizing liquids and materials removed from the mi... | 12/05/2006 |
| 7140950 | Fiber polishing apparatus and method for field terminable optical connectors A method of polishing a remote grip optical connector comprises providing an optical fiber having a stripped terminal end. The fiber is inserted through a connector body and ferrule, where the connector body has a gripping region. The optical fiber is secured in the... | 11/28/2006 |
| 7134944 | Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces Conditioning devices, systems and methods for conditioning a contact surface of a processing pad used in processing microelectronic workpieces. One embodiment of a conditioning device comprises an end-effector having a conditioning surface configured to engage the c... | 11/14/2006 |
| 7125205 | Cutting tool for rough and finish milling A milling cutter comprises a cutter body having two concentric annular rings. An outer ring is provided for rough milling and includes a plurality of cutting inserts equally spaced about the periphery of a cutter body. An inner finish ring comprises a ring member ha... | 10/24/2006 |
| 7101256 | Machining apparatus using a rotary machine tool to machine a workpiece A machining apparatus includes a rotary machine tool for machining a workpiece. A nozzle jets a coolant for the rotary machine tool. Information which changes based on a position of the nozzle is obtained. The nozzle is moved based on the information obtained. ... | 09/05/2006 |
| 7089925 | Reciprocating wire saw for cutting hard materials The present invention features a reciprocating wire saw particularly adapted or configured for cutting hard materials. In one aspect, the reciprocating wire saw comprises (a) a flexible wire; (b) a plurality of cutting segments fittable onto the flexible wire, where... | 08/15/2006 |
| 7086931 | Magnetic head bar holding unit, lapping device, and method of lapping medium-opposing surface of thin-film magnetic head The heaters in the respective thin-film magnetic head in the bar are electrically connected to its neighbors, and a variable resistor is connected to each of the heaters in parallel. The resistance of each of the variable resistors is varied depending on the amount ... | 08/08/2006 |
