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| Number | Title | Issue Date |
| 7338569 | Method and system of using offset gage for CMP polishing pad alignment and adjustment A method and system are provided using an offset dial gage for alignment and adjustment of a polishing pad that has been attached to a turntable of a chemical mechanical polishing (CMP) device. In a described embodiment, an offset dial gage has a surface that contac... | 03/04/2008 |
| 7306510 | Method of adhering polishing pads and jig for adhering the same The method of adhering polishing pads is capable of easily exchanging polishing pads in a comfortable posture. The method comprises the steps of: setting a pad adhering carrier, which has a through-hole in which a roller unit for pressing polishing pads is fixed, in... | 12/11/2007 |
| 7278907 | Method of adhering polishing pads and jig for adhering the same The method of adhering polishing pads is capable of easily adhering the polishing pads without damages. The method comprises the steps of: tentatively adhering the polishing pads to polishing plates; attaching a roller unit having a shaft and a roller member, which ... | 10/09/2007 |
| 7156933 | Configuration and method for mounting a backing film to a polish head By applying heat and pressure to a backing film with an adhesive layer while mounting it to a polish head used for chemical mechanical polishing, inhomogeneities inside the adhesive layer, e.g. thickness and compressibility variations or air bubbles can easily be re... | 01/02/2007 |
| 7144313 | Abrasive sheet alignment dispenser An abrasive sheet dispenser for aligning and attaching hook and loop backed abrasive sheets onto abrading tools, which utilize vacuum holes incorporated into the backup pad and into its corresponding abrasive sheet. In a preferred embodiment, the dispenser has an in... | 12/05/2006 |
| 7090572 | Polishing pad, polishing apparatus having the same, and bonding apparatus A plurality of projections and grooves are formed on a polishing member. The grooves are formed in grid pattern. A portion on which the grooves and the projections are formed (polishing portion) has a substantially circular shape in a plane view. Around the polishin... | 08/15/2006 |
| 6951297 | Sandpaper dispenser A sandpaper dispenser (100) is provided. The sandpaper dispenser includes a frame (102) adapted to be coupled to a sanding device (106) and a sandpaper dispensing assembly 144 coupled to the frame. A sanding pad (105 or 110)... | 10/04/2005 |
| 6896606 | Drywall sanding implement A drywall sanding implement having a shaft, a yoke attached to the shaft, a block pivotably mounted to the yoke, a pair of spindles mounted to the block, and a sanding block removably mounted on each spindle. ... | 05/24/2005 |
| 6663478 | Sand paper disc loading device A sand paper disc loading device that allows sanding discs to be easily and accurately placed on a sander including a sand paper support adapted for holding a plurality of sanding discs. The sand paper support has a front surface and a back surface. The f... | 12/16/2003 |
| 6514123 | Semiconductor polishing pad alignment device for a polishing apparatus and method of use The present invention provides a polishing pad alignment device having an alignment member positionable against a side wall of a platen. The height of the alignment member is sufficient to extend above a top surface of the platen when positioned against t... | 02/04/2003 |
| 6439973 | Polishing device, end face polishing apparatus having polishing device, and end face polishing method An end face polishing apparatus in which whereas a jig board mounted with a rod-like member is supported by an apparatus main body by a supporting mechanism, a polishing board mounted with a polishing member for polishing the rod-like member is supported ... | 08/27/2002 |
| 6346036 | Multi-pad apparatus for chemical mechanical planarization An apparatus for chemical mechanical planarization (100). The apparatus has a platen assembly for holding an object (e.g., wafer, disk, flat panel, glass) to be planarized. The apparatus (100) also has a polishing head coupled to a polishing pad, which ha... | 02/12/2002 |
| 6296551 | Polishing apparatus and polishing method A polishing apparatus and a polishing method which can reduce the amount of consumption of the polishing agent and scratches caused on the object to be polished due to an increase of the particle size in the polishing agent. The polishing apparatus has a ... | 10/02/2001 |
| 6264534 | Method and tooling for automated wet or dry sanding of a vehicle surface An automotive vehicle body can be sanded with a robotic sanding (polishing) disk that is carried on a robotic head, such that the sanding disk has a relatively constant unit pressure on the vehicle surface as the head moves the sanding disk along the vehi... | 07/24/2001 |
| 6050887 | Sand cloth packaging structure for vacuum-type rotary sanders A sand cloth packaging structure for vacuum-type rotary sanders comprised of sand cloths having a number of vacuum holes that are cluster mounted on the circular surface, with a number of support ribs that protrude upward from the bottom surface of the ci... | 04/18/2000 |
| 6035474 | Sander with depth guide and process of sanding a surface A sander is mounted in a cavity in a guide block so as to have an abrasive surface protruding from a bottom surface to a selectively variable extent. The bottom surface of the guide block acts as a depth guide when engaging a flat surface adjacent to a su... | 03/14/2000 |
| 4287685 | Pad assembly for vacuum rotary sander A pad assembly for a vacuum rotary sander has a flexible pad body secured to a rigid head that is connectable to a vacuum housing and a pad rotating means. A plurality of apertures in the head communicate with other apertures in the lower surface of the p... | 09/08/1981 |
