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Class 451/443 - Dressing


Subclass of Class 451 - Abrading
Definition: Accessory for returning an abrading tool to a predetermined
No. of patents: 494
Last issue date: 04/09/2013


1                      
NumberTitleIssue Date
8414362Methods of bonding superabrasive particles in an organic matrix
Superabrasive tools and their methods of manufacture are disclosed. In one aspect, a method of improving retention of superabrasive particles held in a solidified organic material layer of an abrading tool, a portion of each of said superabrasive particles protrudin...
04/09/2013
8398466CMP pad conditioners with mosaic abrasive segments and associated methods
A CMP pad conditioner comprises a plurality of abrasive segments. Each abrasive segment includes a segment blank and an abrasive layer attached to the segment blank, the abrasive layer including a superhard abrasive material. A pad conditioner substrate is also prov...
03/19/2013
8393938CMP pad dressers
An abrasive tool includes an assembly of tool precursors. At least one of the tool precursors has a continuous polycrystalline diamond, polycrystalline cubic boron nitride, or ceramic material cutting element formed into a blade shape. The abrasive tool can addition...
03/12/2013
8382558Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method
An apparatus dresses a polishing pad. The apparatus includes a dresser drive shaft which is rotatable and vertically movable, a dresser flange coupled to the dresser drive shaft and configured to secure a dressing member thereto, a spherical bearing provided in the ...
02/26/2013
8382557Chemical mechanical planarization pad conditioner and methods of forming thereof
A CMP pad conditioner is provided that includes a substrate having a surface and three dimensional structures protruding relative to the surface of the substrate. The three dimensional structures include CVD carbon-containing material selected from the group consist...
02/26/2013
8298048CMP pad dresser with oriented particles and associated methods
CMP pad dressers with superabrasive particles oriented into an attitude that controls CMP pad performance, and methods associated therewith are disclosed and described. The controlled CMP pad performance may be selected to optimize CMP pad dressing rate and dresser ...
10/30/2012
8192256Rotary dressing tool containing brazed diamond layer
A disc-shaped, rotary dressing tool has a rigid core and an abrasive rim around at least one surface of the periphery of the rigid core, the rigid core and the abrasive rim being oriented in a direction orthogonal to the axis of rotation of the tool. The abrasive ri...
06/05/2012
8096858Polishing pad conditioner
The invention provides a polishing pad conditioner that enables stabilization of brazing metal melting point, minimization of abrasive grain detachment by uniformizing and stabilizing abrasive grain brazing condition, and enhancement of flatness by minimizing therma...
01/17/2012
8043145CMP pad dresser with oriented particles and associated methods
CMP pad dressers with superabrasive particles oriented into an attitude that controls CMP pad performance, and methods associated therewith are disclosed and described. The controlled CMP pad performance may be selected to optimize CMP pad dressing rate and dresser ...
10/25/2011
7815495Pad conditioner
A pad conditioner is provided for conditioning a polishing pad in chemical mechanical planarization (CMP). The pad conditioner comprises a plastic abrasive portion having a first hardness and optionally a brush portion having a second hardness less than the first ha...
10/19/2010
7690971Methods of bonding superabrasive particles in an organic matrix
Superabrasive tools and their methods of manufacture are disclosed. In one aspect, a method of improving retention of superabrasive particles held in a solidified organic material layer of an abrading tool, a portion of each of said superabrasive particles protrudin...
04/06/2010
7670209Pad conditioner, pad conditioning method, and polishing apparatus
The present invention provides a pad conditioner for dressing a surface of a polishing pad which is used in a polishing apparatus for polishing works, comprising: a substrate disposed opposite to the polishing pad; a plurality of pellets removably attached to the su...
03/02/2010
7641538Conditioning disk
An abrasive article includes a plurality of abrasive particles securely affixed to a substrate with a corrosion resistant matrix material. The matrix material includes a sintered corrosion resistant powder and a brazing alloy. The brazing alloy includes an element w...
01/05/2010
7572174Abrasive grain and grindstone
An abrasive grain 1 includes a crystal defect CD in its crystal structure CS. The crystal defect CD is formed by a laser irradiation. ...
08/11/2009
7563157Apparatus for conditioning chemical-mechanical polishing pads
An apparatus for conditioning a polishing pad, or conditioner, includes a supporting substrate and abrasive elements. The abrasive elements of the conditioner are used to condition a polishing pad to be used in abrasive, or at least partially mechanical, semiconduct...
07/21/2009
7544117Tools for polishing and associated methods
Methods for making polishing tools and associated tools are disclosed. In one aspect, a method of making a polishing tool is provided. Such a method may include truing a working surface of a nano-diamond impregnated substrate. The method may further include forming ...
06/09/2009
7540802CMP pad conditioner
A CMP pad conditioner is provided with a grinding part formed by fixing abrasive grains on a metal base by soldering, wherein the grinding part has a flat part near an inner periphery and an inclined part near an outer periphery, wherein abrasive grains having regul...
06/02/2009
7438632Method and apparatus for cleaning a web-based chemical mechanical planarization system
A method and apparatus for cleaning a web-based chemical-mechanical planarization (CMP) system. Specifically, a fluid spray bar is coupled to a frame assembly which may be mounted on a CMP system. The fluid spray bar will move along the frame assembly. As the fluid ...
10/21/2008
7435157Grinding machine, computer software to operate such a machine, and their uses therefor
An extremely precise computer controlled grinding machine having the capability to write its own computer programs for controlling the grinding machine to perform individual tasks, including both grinding and dressing to several millionths of an inch. A new device f...
10/14/2008
7413498Lapping apparatus and lapping method
A film feeder (FF1) feeds a film (1), a first drive (20) rotates a work (W), a second drive (30) moves the work (W) relative to the film (1), a shoe set handler (40) handles the shoe set (2) to press the film (1
08/19/2008
7410410Method and apparatus to produce a GRM lapping plate with fixed diamond using electro-deposition techniques
A system and method are described for manufacturing a lapping plate. Diamond particles are premixed with a metal matrix. The diamond particles are electro-deposited onto the surface of a lapping plate. The lapping plate may have a substrate of hard metal with a soft...
08/12/2008
7410411Method of determining the number of active diamonds on a conditioning disk
The invention relates to a method for determining the number of active diamonds on a conditioning disk. In particular, the method comprises (a) contacting a diamond conditioner disk with a hard surface, wherein the diamond-containing side of the diamond conditioning...
08/12/2008
7404757Apparatus and method for breaking in multiple pad conditioning disks for use in a chemical mechanical polishing system
An apparatus for breaking in new pad conditioning disks for use in a chemical mechanical polishing (CMP) system that polishes a semiconductor wafer by pressing the semiconductor wafer against a moving polishing pad. The apparatus comprises a break-in head that is re...
07/29/2008
7371155Glass substrate for information recording medium and method for producing same
A glass substrate for an information recording medium is manufactured by polishing the surface of a raw material glass plate. The polishing of the raw material glass plate is divided into a step for performing a first polishing process to roughly polish the surface ...
05/13/2008
7371156Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system
An off-line tool for breaking in pad conditioning disks used in a chemical mechanical polishing (CMP) system. The off-line tool comprises a platen having a first surface for holding a polishing pad and a motor for rotating the polishing pad. The motor is coupled to ...
05/13/2008
7367872Conditioner disk for use in chemical mechanical polishing
A conditioner disk for use on a polish pad in chemical mechanical polishing process includes a base structure a plurality of curved blades supported by the base structure. The blades radiate outwardly from a center region of the base structure and curve in a common ...
05/06/2008
7367875CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
The present invention relates to a composite material and the method of making same, which comprises a CVD diamond coating applied to a composite substrate of ceramic material and an unreacted carbide-forming material of various configurations and for a variety of a...
05/06/2008
7354337Pad conditioner, pad conditioning method, and polishing apparatus
The present invention provides: a pad conditioner for dressing a surface of a polishing pad which is used in a polishing apparatus for polishing works, comprising a bending or deflecting or elastic member and a supporting section to support a base end of the bending...
04/08/2008
7341501Gear grinding machine, method for dressing threaded grinding wheel and method for grinding work
A gear grinding machine, a method for dressing a threaded grinding wheel, and a method for grinding a work are disclosed. A dressing tool is rotated in a vertical plane, with its position being fixed. The position of a threaded grinding wheel is NC-controlled, where...
03/11/2008
7335091Methods and apparatus for machining a coupling
A method facilitates fabricating a coupling including a first annular coupling member and a second annular coupling member. The method comprises coupling the first coupling member to a machine assembly that includes a plurality of grinding wheels coupled to a tool s...
02/26/2008
7331845Double end face truing device, double end face truing tool, and double end face truing method
First and second end surface truing sections are formed by protruding cylindrical first and second base bodies from opposite end surfaces of a disc-like base of an opposite end surface truing tool in the axial direction thereof and by providing on the external surfa...
02/19/2008
7303662Contacts for electrochemical processing
Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact elem...
12/04/2007
7300521Wall scrubber for blown insulation
An insulation system comprising: a supply of material having discrete elements; an applicator assembly for installation of the material having discrete elements to a surface; and a scrubber for finishing the face of the material, the scrubber including: (a) a vacuum...
11/27/2007
7300338CMP diamond conditioning disk
A method of making and the resulting non-metallic CMP conditioning pad comprising a non-metallic substrate and a single layer of abrasive particles bonded to the substrate by a non-metallic bonding medium. Preferred substrates include aluminum oxide and graphite. A ...
11/27/2007
7291799Electrode dressing template
Disclosed are various embodiments of an EDM electrode dressing template comprising a body made of an electrically conductive material. Bonded to the body is a pad with an electrically conductive material with hardness greater than the body. An electrode with an erod...
11/06/2007
7289872Method and apparatus for prediction of polishing condition, and computer product
A polishing-condition predicting apparatus determines optimum parameters to be substituted into various function models by performing calibration by use of a TEG. A polishing condition enabling polishing of a thin film formed on a substrate to be designed so as to o...
10/30/2007
7288165Pad conditioning head for CMP process
In a first aspect, a first apparatus is provided for a chemical mechanical polishing (CMP) process. The first apparatus includes (1) a rotatable member; (2) an end effector adapted to receive and retain a conditioning disk; and (3) an elastic device disposed between...
10/30/2007
7285039Tools for polishing and associated methods
Methods for making polishing tools and associated tools are disclosed. In one aspect, a method of making a polishing tool is provided. Such a method may include truing a working surface of a nano-diamond impregnated substrate. The method may further include forming ...
10/23/2007
7278905Apparatus and method for conditioning polishing surface, and polishing apparatus and method of operation
A chemical-mechanical polishing apparatus is provided with a downstream device for conditioning a web-shaped polishing pad. The device may be used to condition a glazed portion of the pad, and then the conditioned pad portion may be used again for polishing. The con...
10/09/2007
7278901Method and apparatus for measuring abrasion amount and pad friction force of polishing pad using thickness change of slurry film
A method and apparatus for measuring an abrasion amount and a friction force of a polishing pad using a thickness change of a slurry film in a chemical mechanical polishing operation are provided. In a preferred method, for example, a first displacement of a semicon...
10/09/2007
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