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| Number | Title | Issue Date |
| 7419421 | Slider having rounded corners and edges, and method for producing the same A slider body characterized by rounded corners and edges and smooth surfaces, formed by polishing with a polymeric fiber and a free abrasive slurry of submicron particles. ... | 09/02/2008 |
| 7371158 | Plating removing apparatus for two-piece wheel To provide a plating removing apparatus for 2-piece wheels, which can easily and beautifully remove plating at the welding planned portion on the rim inner circumferential surface and achieves 2-piece wheels with rims plated without requiring any troublesome operati... | 05/13/2008 |
| 7347769 | Method of fabricating pliant workpieces, tools for performing the method and methods for making those tools An improved method of manufacturing automotive accessory drive belts or other workpieces of pliant material which have a grooved operative face, a tool having an abrasive ramp configuration for performing said improved method and a method of manufacturing said tool ... | 03/25/2008 |
| 7241207 | Grinding machine and method for grinding a workpiece Disclosed is a grinding machine comprising oscillating driving means (3, 4) for setting grinding means (1) into an oscillating grinding motion and an actuation device (7) that is provided with a plurality of actuation areas (8) which can ... | 07/10/2007 |
| 7144304 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface A method and apparatus for planarizing a microelectronic substrate. In one embodiment, the apparatus can include an elongated, non-continuous polishing pad oriented at an angle relative to the horizontal to allow planarizing liquids and materials removed from the mi... | 12/05/2006 |
| 7090560 | System and method for detecting abrasive article orientation Systems and methods control abrading operations of an abrading machine by sensing characteristics of an abrading article installed on the abrading machine. When a problem is discovered by sensing the article, appropriate actions may be taken. As one example, the abr... | 08/15/2006 |
| 7077733 | Subpad support with a releasable subpad securing element and polishing apparatus including the subpad support A subpad support for use in a web format or belt format polishing apparatus for polishing one or more layers of semiconductor device structures. The subpad support includes a subpad retention element for non-adhesively securing the subpad thereto. The subpad support... | 07/18/2006 |
| 7063595 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface A method and apparatus for planarizing a microelectronic substrate. In one embodiment, the apparatus can include an elongated, non-continuous polishing pad oriented at an angle relative to the horizontal to allow planarizing liquids and materials removed from the mi... | 06/20/2006 |
| 7052380 | Sanding station for a belt sanding machine A sanding station for a belt sanding machine includes at least an endless sanding belt guided over deflection rollers and a pressure segment belt circulating within the sanding belt for pressing the sanding belt against the workpiece. The running direction of the pr... | 05/30/2006 |
| 7044837 | Magnetic head cleaning method A method for cleaning a magnetic head using a cleaning tape comprising a substrate and a cleaning layer, wherein the cleaning tape has a stiffness of 2 or less in a width direction, and the magnetic head has trenches substantially parallel to a sliding direction of ... | 05/16/2006 |
| 6997790 | Method of fabricating pliant workpieces, tools for performing the method and methods for making those tools An improved method of manufacturing automotive accessory drive belts or other workpieces of pliant material which have a grooved operative face, a tool having an abrasive ramp configuration for performing said improved method and a method of manufacturing said tool ... | 02/14/2006 |
| 6957511 | Single-step electromechanical mechanical polishing on Ni-P plated discs Beginning with a smooth ground aluminum blank with a relatively thin layer of leveled Ni—P, circumferential electropolishing/texturing is carried out to achieve a smooth oriented surface. A conductive slurry is provided between the disc and a porous texturing tape... | 10/25/2005 |
| 6932672 | APPARATUS FOR IN-SITU OPTICAL ENDPOINTING ON WEB-FORMAT PLANARIZING MACHINES IN MECHANICAL OR CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC-DEVICE SUBSTRATE ASSEMBLIES AND METHODS FOR MAKING AND USING SAME Polishing pads, planarizing machines and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies. The polishing pads, for example, can be web-format pads, and the planarizing machines can be web-format machines.... | 08/23/2005 |
| 6913521 | Methods using active retainer rings for improving edge performance in CMP applications An invention improves edge performance in chemical mechanical polishing processes. A method operation provides a wafer head above a wafer. The wafer head includes a first active retaining ring capable of extension and retraction. Another operation provides a polishi... | 07/05/2005 |
| 6899601 | Method and apparatus for conditioning a polishing pad A method and apparatus for conditioning a polishing pad is described. The method includes applying a stream of pressurized liquid to the polishing pad, and removing a significant amount of slurry and liquid from the polishing pad using a vacuum. The apparatus includ... | 05/31/2005 |
| 6875094 | Worktable for an apparatus for grinding recesses A worktable for an apparatus for grinding recesses, having on a frame (3) a pair of pulleys carrying a grinding belt (2), is provided with a sole control member (19) to approach and move apart said workpiece vice (20) with respect to said... | 04/05/2005 |
| 6869341 | Single-sided finishing apparatus A single-sided finishing apparatus is provided having a plurality of finishing stations with rotating transfer stations positioned therebetween. A hold down system presents the edge of the workpiece to the finishing head. The rotating transfer station includes a cla... | 03/22/2005 |
| 6837774 | Linear chemical mechanical polishing apparatus equipped with programmable pneumatic support platen and method of using A linear chemical mechanical polishing apparatus that is equipped with a programmable pneumatic support platen and a method for controlling the polishing profile on a wafer surface during a linear CMP process are disclosed. The programmable pneumatic support platen ... | 01/04/2005 |
| 6786805 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface A method and apparatus for planarizing a microelectronic substrate. In one embodiment, the apparatus can include an elongated, non-continuous polishing pad oriented at an angle relative to the horizontal to allow planarizing liquids and materials removed from the mi... | 09/07/2004 |
| 6776695 | Platen design for improving edge performance in CMP applications An invention is disclosed for improving edge performance in a chemical mechanical polishing process is disclosed. The system includes a wafer head disposed above a wafer, where the wafer head includes a first active retaining ring capable of extension and retraction... | 08/17/2004 |
| 6776697 | Rotary woodworking machine A rotary woodworking machine includes a longitudinally extending transmitting shaft having two ends respectively coupled to two rotary woodworking members. A speed ratio varying device is disposed to couple the transmitting shaft to an output shaft of a motor, and i... | 08/17/2004 |
| 6761618 | Defect-free magnetic stampers/imprinters for contact patterning of magnetic media A method of manufacturing a magnetic stamper/imprinter for use in patterning of magnetic recording media by means of a contact printing process, comprising sequential steps of: (a) providing a stamper/imprinter comprising a body of a magnetic material having ... | 07/13/2004 |
| 6752706 | Adjusting device for the sanding drum of a double-drum sander An adjusting device for the sanding drum of a double-drum sander is installed between the opposite ends of the rear grinding drum and the machine frame of a sander for adjusting a rear sanding drum to a most suitable height to match with the size number of the emery... | 06/22/2004 |
| 6749492 | Rotary sanding machine with a dust collecting mechanism A rotary sanding machine includes a driven wheel coupled to a transmission shaft which is driven by a motor so as to actuate an emery coated belt for sanding. A barrier wall is disposed to hold back dust flying during sanding action to permit the dust to fall into a... | 06/15/2004 |
| 6743084 | Emery polishing machine An emery polishing machine is provided with plural adjusting devices positioned between the opposite shaft ends of two emery polishing wheels and machine box. The adjusting devices enable the two emery-polishing wheels to be micro-adjusted to move upward and downwar... | 06/01/2004 |
| 6663470 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine A method and apparatus for releasably attaching a planarizing medium, such as a polishing pad, to the platen of a chemical-mechanical planarization machine. In one embodiment, the apparatus can include several apertures in the upper surface of the platen ... | 12/16/2003 |
| 6638139 | Multi-spindle end effector A multi-spindle end effector is provided for a multiple axis robot. The multi-spindle end effector includes a plate housing having at least a pair of spaced-apart spindles mounted thereon. A servo-motor drivingly engages the spindles. A gear box steps dow... | 10/28/2003 |
| 6634925 | Width utilization prompter/monitor system for wide-belt abrasive machines A prompter/monitor system for use in combination with wide-belt abrasive surface treating apparatus and including an array of individual axially spaced apart signal generating workpiece sensors operatively positioned across the width of the belt with each... | 10/21/2003 |
| 6634926 | Width utilization prompter/monitor system for wide-belt abrasive machines A prompter/monitor system for use in combination with wide-belt abrasive surface treating apparatus and including an array of individual axially spaced apart signal generating workpiece sensors operatively positioned across the width of the belt with each... | 10/21/2003 |
| 6626743 | Method and apparatus for conditioning a polishing pad A method and apparatus for conditioning a polishing pad is described. The method includes applying a stream of pressurized liquid to the polishing pad, and removing a significant amount of slurry and liquid from the polishing pad using a vacuum. The appar... | 09/30/2003 |
| 6585576 | Rollers' position moving device for a sand belt machine A rollers' position moving device for a sand belt machine includes a conveyor in the machine, a sand belt, and plural rollers moving the sand belt. The rollers are deposited across on the conveyor. Further, a first wheel and a second wheel are pivotally c... | 07/01/2003 |
| 6558234 | Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates A method and apparatus for planarizing a microelectronic substrate. In one embodiment, the apparatus can include an elongated polishing pad that is moved over a platen either between or during the planarization cycles, and a support pad that is moved alon... | 05/06/2003 |
| 6527629 | Grinding device for rounding off edges of an opening in a work piece An apparatus for rounding off edges of openings in a work piece, such as internal openings or cut outs in steel plates. The apparatus includes a belt grinding machine having a continuous grinding belt running over several belt guiding rollers which are pr... | 03/04/2003 |
| 6511366 | Rotary woodworking machine A rotary woodworking machine includes an upright shaft rotatable relative to a plunger and driven by a rotary transmitting shaft which is driven by an output shaft of a motor. A lifting lever has a fulcrum end pivoted on a support frame, and a force end c... | 01/28/2003 |
| 6409587 | Dual-hardness polishing pad for linear polisher and method for fabrication A composite, dual-hardness polishing pad for use in a linear chemical mechanical polishing apparatus and a method for forming the pad are described. In the composite, dual-hardness polishing pad, a pad body is first provided which has a leading edge and a... | 06/25/2002 |
| 6368197 | Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates A method and apparatus for supporting, cleaning and/or drying a polishing pad used for planarizing a microelectronic substrate. In one embodiment, the apparatus can include a cleaning head positioned adjacent a post-operative portion of the polishing pad ... | 04/09/2002 |
| 6352470 | Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates A method and apparatus for supporting, cleaning and/or drying a polishing pad used for planarizing a microelectronic substrate. In one embodiment, the apparatus can include a cleaning head positioned adjacent a post-operative portion of the polishing pad ... | 03/05/2002 |
| 6331139 | Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates A method and apparatus for planarizing a microelectronic substrate. In one embodiment, the apparatus can include an elongated polishing pad that is moved over a platen either between or during the planarization cycles, and a support pad that is moved alon... | 12/18/2001 |
| 6325707 | Belt borer A machine for the versatile removal of material for shaping an object. The machine includes a platform that provides support for three substantially horizontal and parallel plates. The uppermost plate or "table top" is height-adjustable and provides a wor... | 12/04/2001 |
| 6325706 | Use of zeta potential during chemical mechanical polishing for end point detection A technique for utilizing a sensor to monitor fluid pressure from a fluid bearing located under a polishing pad to detect a polishing end point. A sensor is located at the leading edge of a fluid bearing of a linear polisher, which is utilized to perform ... | 12/04/2001 |
