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Patent No. 6293874

User-operated amusement apparatus for kicking the user's buttocks

An apparatus including a user-operated and controlled apparatus for self-infliction of repetitive blows to the user's buttocks by a plurality of elongated arms bearing flexible extensions that rotate under the user's control.

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Class 438/950 - Multilayer mask including nonradiation sensitive layer


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Art collection under 948 involving the use of a multilayer
No. of patents: 142
Last issue date: 10/14/2008


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NumberTitleIssue Date
7435536Method to align mask patterns
Alignment tolerances between narrow mask lines, for forming interconnects in the array region of an integrated circuit, and wider mask lines, for forming interconnects in the periphery of the integrated circuit, are increased. The narrow mask lines are formed by pit...
10/14/2008
7419894Gate electrode and manufacturing method thereof, and semiconductor device and manufacturing method thereof
The present invention provides a method of manufacturing a gate electrode in which a fine gate electrode can effectively be manufactured by thickening a resist opening for gate electrodes formed by ordinary electron beam lithography so as to reduce opening dimension...
09/02/2008
7407824Guard ring for improved matching
A semiconductor manufacturing method comprises forming a leveling guard ring defining an interior area into which are fabricated one or more devices. In certain embodiments two or more matched devices, such as in a common centroid layout, are fabricated in the inter...
08/05/2008
7384874Method of forming hardmask pattern of semiconductor device
A method of forming a hardmask pattern over a semiconductor device semiconductor device includes forming a first hardmask layer over a semiconductor substrate. First and second structures are formed over the first hardmask layer, the first and second structures form...
06/10/2008
7358140Pattern density control using edge printing processes
A structure fabrication method. The method comprises providing a design structure that includes (i) a design substrate and (ii) M design normal regions on the design substrate, wherein M is a positive integer greater than 1. Next, N design sacrificial regions are ad...
04/15/2008
7335542Semiconductor device with mushroom electrode and manufacture method thereof
A semiconductor device has: a semiconductor substrate having a pair of current input/output regions via which current flows; an insulating film formed on the semiconductor substrate and having a gate electrode opening; and a mushroom gate electrode structure formed ...
02/26/2008
7288476Controlled dry etch of a film
The controlled etch into a substrate or thick homogeneous film is accomplished by introducing a sacrificial film to gauge the depth to which the substrate/thick film has been etched. Optical endpointing the etch of the sacrificial film on the etch stop layer allows ...
10/30/2007
7282440Integrated circuit contact
A process is provided for forming vertical contacts in the manufacture of integrated circuits and devices so manufactured. The process eliminates the need for precise mask alignment and allows the etch of the contact hole to be controlled independent of the etch of ...
10/16/2007
7253012Guard ring for improved matching
A semiconductor manufacturing method comprises forming a leveling guard ring defining an interior area into which are fabricated one or more devices. In certain aspects, two or more matched devices, such as in a common centroid layout, are fabricated in the interior...
08/07/2007
7238624System and method for manufacturing semiconductor devices using a vacuum chamber
The present disclosure relates generally to the manufacturing of semiconductor devices, and more particularly to semiconductor manufacturing using a vacuum chamber. In one example, a method for semiconductor manufacturing includes: providing a photoresist layer for ...
07/03/2007
7223703Method of forming patterns
In forming a mask pattern on a circuit board, a mask pattern of N-layer structure is formed in a region where the mechanical strength of the circuit board needs to be increased. N photosensitive layers are first stacked on a substrate so that they becomes lower in s...
05/29/2007
7223645Semiconductor device with mushroom electrode and manufacture method thereof
A semiconductor device has: a semiconductor substrate having a pair of current input/output regions via which current flows; an insulating film formed on the semiconductor substrate and having a gate electrode opening; and a mushroom gate electrode structure formed ...
05/29/2007
7183150Resist protect oxide structure of sub-micron salicide process
In accordance with the objectives of the invention a new method is provided for the creation of a layer of a Resistance Protective Oxide (RPO) layer. A layer of ONO is deposited that is to function as the layer of RPO. The deposited layer of ONO is patterned and wet...
02/27/2007
7176074Manufacturing method of thin film transistor array substrate
A manufacturing method of thin film transistor array substrate is provided. A substrate, whereon first, second, and third poly-silicon islands, a gate insulating layer, a plurality of first, second, and third gates, and a first passivation layer have been formed, is...
02/13/2007
7172960Multi-layer film stack for extinction of substrate reflections during patterning
A method including introducing a dielectric layer over a substrate between an interconnection line and the substrate, the dielectric layer comprising a plurality of alternating material layers; and patterning an interconnection to the substrate. An apparatus compris...
02/06/2007
7074631Light emitting device methods
A method includes disposing a planarization layer on a surface of a layer of semiconductor material and disposing a lithography layer on a surface of the planarization layer. The method also includes performing nanolithography to remove at least a portion of the pla...
07/11/2006
7071121Patterned ceramic films and method for producing the same
A ceramic film is useful as ion-conducting ceramics, electrodes, hard ceramic coatings, transparent conducting oxides, transparent semiconducting oxides, ferroelectric oxides, and dielectric oxides. The ceramic film may be produced from a liquid precursor solution.
07/04/2006
7033960Multi-chamber deposition of silicon oxynitride film for patterning
Pinholes in a silicon oxynitride film are reduced by PECVD deposition of a plurality of silicon oxynitride sub-layers in a PECVD apparatus containing multiple chambers. Embodiments include forming a layer of amorphous carbon over a conductive layer, such as doped po...
04/25/2006
7015136Method for preventing formation of photoresist scum
A method for preventing formation of photoresist scum. First, a substrate on which a dielectric layer is formed is provided. Next, a non-nitrogen anti-reflective layer is formed on the dielectric layer. Finally, a photoresist pattern layer is formed on the non-nitro...
03/21/2006
7008856Method for fabricating AND-type flash memory cell
A flash memory cell and fabrication method thereof are disclosed. An example fabrication method deposits a pad oxide layer and a pad nitride layer on a semiconductor substrate, patterns the pad nitride layer, implants ions into the substrate to form an ion implant r...
03/07/2006
6958292Method of manufacturing integrated circuit
In order to shorten the period for the development and manufacture of a semiconductor integrated circuit device, at the time of transferring integrated circuit patterns onto a wafer by an exposure process, a photomask PM1 is used which is provided partially w...
10/25/2005
6929959Manufacturing method of CPP type magnetic sensor having current-squeezing path
On a multilayer film formed on a lower electrode layer, a resist layer having cutaway parts at a lower portion is formed, and on parts of the upper surface of the multilayer film which are not overlapped with the resist layer except for areas inside the cutaway part...
08/16/2005
6869899Lateral-only photoresist trimming for sub-80 nm gate stack
The invention relates generally to lithographic patterning of very small features. In particular, the invention relates generally to patterning of semiconductor circuit features smaller than lithographically defined using either conventional optical lithography or n...
03/22/2005
6855646Plasma polymerized electron beam resist
A process for producing a pattern of negative electron beam resist comprises: depositing a layer of plasma polymerized fluoropolymer on a face of a substrate, the plasma polymerized fluoropolymer forming the negative electron beam resist; producing an electron beam;...
02/15/2005
6841465Method of forming dual damascene pattern in semiconductor device
Disclosed is a method of forming the dual damascene pattern in the semiconductor device. After forming the trench, a photoresist pattern in which a via hole region is defined is formed by exposure and development processes in a state that a photoresist is thinly coa...
01/11/2005
6815347Method of forming a reflective electrode
The present invention provides a method of forming a TFT and a reflective electrode having recesses or projections with reduced manufacturing cost and a reduced number of manufacturing steps, and provides a liquid crystal display device to which the method is applie...
11/09/2004
6815274Resist protect oxide structure of sub-micron salicide process
In accordance with the objectives of the invention a new method is provided for the creation of a layer of a Resistance Protective Oxide (RPO) layer. A layer of ONO is deposited that is to function as the layer of RPO. The deposited layer of ONO is patterned and wet...
11/09/2004
6808984Method for forming a contact opening
A method for forming a contact opening is provided. After forming transistors on a substrate, a stacked resist layer including a resist layer without a silicon element and a resist layer with a silicon element covers the transistors and the substrate. The stacked re...
10/26/2004
6790743[Method to relax alignment accuracy requirement in fabrication for integrated circuit]
A method to relax the alignment accuracy requirement in an integrate circuit manufacturing is described. The method comprises forming a mask layer over a substrate, and the mask layer comprises a plurality of first openings. Thereafter, a buffer layer fills the firs...
09/14/2004
6774032Method of making a semiconductor device by forming a masking layer with a tapered etch profile
A method for making a semiconductor device is described. That method includes forming a sacrificial layer on a substrate, then forming a layer of photoresist on the sacrificial layer. After the photoresist layer is patterned, to form a patterned photoresist layer th...
08/10/2004
6759328Masks and method for contact hole exposure
A mask and method for contact hole exposure. First, a mask including a transparent substrate, a phase shift layer installed on the transparent substrate to define a series of patterns having contact hole areas set in array, an a plurality of metal lines installed on...
07/06/2004
6727179Method for creating an integrated circuit stage wherein fine and large patterns coexist
Successive use is made of a layer of radiation-sensitive resin at points intended to form wide semi-conductor patterns in a still intact layer, under at least one hard mask, then of a resin sensitive to particle bombardment over fine patterns to be formed in this sa...
04/27/2004
6713348Method for forming an etch mask during the manufacture of a semiconductor device
A method used during the formation of a semiconductor device comprises the steps of forming a polycrystalline silicon layer over a semiconductor substrate assembly and forming a silicon nitride layer over the polycrystalline silicon layer. A silicon dioxide layer is...
03/30/2004
6692977Method for manufacturing magnetic head
A method is provided for manufacturing a magnetic head for recording information on a magnetic recording medium in the form of a direction of magnetization, which enables manufacture of a magnetic head with gaps between turns of a conductive material cons...
02/17/2004
6689665Method of forming an STI feature while avoiding or reducing divot formation
A method for forming shallow trench isolation (STI) features to reduce or avoid divot formation at STI trench corners including providing a shallow trench isolation (STI) feature included in a semiconductor process surface the STI feature including an ani...
02/10/2004
6670280Methods of microstructuring ferroelectric materials
A method of micro-structuring a surface of a sample of ferroelectric material, the method comprising: (a) taking a sample of ferroelectric material having a -z face which is to be etched; (b) illuminating the -z face with ultraviolet light to define illum...
12/30/2003
6664173Hardmask gate patterning technique for all transistors using spacer gate approach for critical dimension control
An electrical element may be made by providing a hardmask unit that has a double gate stack with a first gate layer, a first hardmask layer formed over the first gate layer, a second gate layer formed over the first hardmask layer, and a second hardmask l...
12/16/2003
6653244Monolithic three-dimensional structures
Three-dimensional structures of arbitrary shape are fabricated on the surface of a substrate through a series of processing steps wherein a monolithic structure is fabricated in successive layers. A first layer of photoresist material is spun onto a subst...
11/25/2003
6645868Method of forming shallow trench isolation using antireflection layer
Shallow trench isolation among transistors and other devices on a semiconductor substrate is provided by initially forming a layer of highly absorbing silicon rich nitride to serve as a hardmask between a semiconductor substrate and a photoresist. The hig...
11/11/2003
6624085Semiconductor structure, capacitor, mask and methods of manufacture thereof
A method of fabricating a mask forms a rectangular opening within etch resistant material that overlays a substrate. The mask preferably comprises two layers of photoresist separated by a layer of light blocking material. One of the layers of photoresist ...
09/23/2003
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