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Class 438/900 - BULK EFFECT DEVICE MAKING


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Art collection involving the construction of a semiconductor
No. of patents: 56
Last issue date: 03/23/2010


1    
NumberTitleIssue Date
7682992Resistance variable memory with temperature tolerant materials
A PCRAM memory device having a chalcogenide glass layer, preferably comprising antimony selenide having a stoichometric formula of about Sb2Se3, and a metal-chalcogenide layer and methods of forming such a memory device. ...
03/23/2010
7422985Method for reducing dielectric overetch using a dielectric etch stop at a planar surface
A substantially planar surface coexposes conductive or semiconductor features and a dielectric etch stop material. In a preferred embodiment, the conductive or semiconductor features are pillars forming vertically oriented diodes. A second dielectric material, diffe...
09/09/2008
7397060Pipe shaped phase change memory
A memory cell device includes a bottom electrode, pipe shaped member comprising phase change material and a top electrode in contact with the pipe-shaped member. An electrically and thermally insulating material is inside the pipe-shaped member. An integrated circui...
07/08/2008
7393798Resistance variable memory with temperature tolerant materials
A PCRAM memory device having a chalcogenide glass layer, preferably comprising antimony selenide having a stoichometric formula of about Sb2Se3, and a metal-chalcogenide layer and methods of forming such a memory device. ...
07/01/2008
7394087Phase-changeable memory devices and methods of forming the same
A phase-changeable memory device includes a substrate having a contact region on an upper surface thereof. An insulating interlayer on the substrate has an opening therein, and a lower electrode is formed in the opening. The lower electrode has a nitrided surface po...
07/01/2008
7381982Method for fabricating chalcogenide-applied memory
A chalcogenide memory cell includes a lower electrode, a chalcogenide layer, and an upper electrode. The lower electrode includes a tapered cavity. The chalcogenide layer is formed in the tapered cavity of the lower electrode. One side of the chalcogenide layer is a...
06/03/2008
7378678Memory device and method of manufacturing the device by simultaneously conditioning transition metal oxide layers in a plurality of memory cells
Disclosed are non-volatile memory devices that incorporate a series of single or double memory cells. The single memory cells are essentially “U” shaped. The double memory cells comprise two essentially “U” shaped memory cells. Each memory cell comprises a m...
05/27/2008
7368384Film formation apparatus and method of using the same
A method of using a film formation apparatus for a semiconductor process includes a step of removing a by-product film deposited on an inner surface of a reaction chamber of the film formation apparatus. This step is performed while supplying a cleaning gas containi...
05/06/2008
7365355Programmable matrix array with phase-change material
A phase-change material is proposed for coupling interconnect lines an electrically programmable matrix array. Leakage may be reduced by optionally placing a thin insulating breakdown layer between the phase change material and at least one of the lines. The matrix ...
04/29/2008
7354793Method of forming a PCRAM device incorporating a resistance-variable chalocogenide element
A method of forming a memory device, such as a PCRAM, including selecting a chalcogenide glass backbone material for a resistance variable memory function and devices formed using such a method. ...
04/08/2008
7348209Resistance variable memory device and method of fabrication
Methods and apparatus for providing a resistance variable memory device with agglomeration prevention and thermal stability. According to one embodiment, a resistance variable memory device is provided having at least one tin-chalcogenide layer proximate at least on...
03/25/2008
7339185Phase change memory device and method for forming the same
A phase change memory device includes a mold layer disposed on a substrate, a heating electrode, a filling insulation pattern and a phase change material pattern. The heating electrode is disposed in an opening exposing the substrate through the mold layer. The heat...
03/04/2008
7316746Crystals for a semiconductor radiation detector and method for making the crystals
A method for a growing solid-state, spectrometer grade II-VI crystal using a high-pressure hydrothermal process including the following steps: positioning seed crystals in a growth zone of a reactor chamber; positioning crystal nutrient material in the nutrient zone...
01/08/2008
7307267Electric device with phase change material and parallel heater
The electric device (1, 100) has a body (2, 102) having a resistor (7, 107) comprising a phase change material being changeable between a first phase and a second phase. The resistor (7, 107) has a first electrical resistance when the pha...
12/11/2007
7256415Memory device and method of manufacturing the device by simultaneously conditioning transition metal oxide layers in a plurality of memory cells
Disclosed are non-volatile memory devices that incorporate a series of single or double memory cells. The single memory cells are essentially “U” shaped. The double memory cells comprise two essentially “U” shaped memory cells. Each memory cell comprises a m...
08/14/2007
7235497Selective oxidation methods and transistor fabrication methods
The invention includes selective oxidation methods and transistor fabrication methods. In one implementation, a selective oxidation method includes positioning a substrate within a chamber. The substrate has first and second different oxidizable materials. The subst...
06/26/2007
7214632Using selective deposition to form phase-change memory cells
A phase-change memory cell may be formed by selectively depositing the lower electrode in the phase-change memory pore. Thereafter, an adhesion-promoting material may be selectively deposited on the selectively deposited lower electrode and the upper surface surroun...
05/08/2007
7183567Using selective deposition to form phase-change memory cells
A phase-change memory cell may be formed by selectively depositing the lower electrode in the phase-change memory pore. Thereafter, an adhesion-promoting material may be selectively deposited on the selectively deposited lower electrode and the upper surface surroun...
02/27/2007
7064344Barrier material encapsulation of programmable material
A method comprising forming as stacked materials on a substrate, a volume of programmable material and a signal line, conformably forming a first dielectric material on the stacked materials, forming a second dielectric material on the first material, etching an ope...
06/20/2006
7049154Vapor phase growth method by controlling the heat output in the gas introduction region
A vapor phase growth method for growing a semiconductor single crystal thin film on a front surface of a semiconductor single crystal substrate (1) while introducing gas into a reaction chamber (11), has a step of performing heating output power contro...
05/23/2006
7041611Enhancement of fabrication yields of nanomechanical devices by thin film deposition
A protective film is applied onto a nanostructural feature supported on a sacrificial layer by energy beam assisted deposit of material from a vapor through which the beam passes. A wet etchant is applied to etch away the sacrificial layer beneath the nanostructural...
05/09/2006
7030431Metal gate with composite film stack
A novel metal gate structure includes a gate oxide layer formed on a surface of a silicon substrate, a doped silicon layer stacked on the gate oxide layer, a CVD ultra-thin titanium nitride film deposited on the doped silicon layer, a tungsten nitride layer stacked ...
04/18/2006
7022603Method for fabricating semiconductor device having stacked-gate structure
A method for fabricating a semiconductor a semiconductor device having a stacked-gate structure. A polysilicon layer is formed overlying a substrate, which is insulated from the substrate by a dielectric layer. A metal-flash layer is formed overlying the polysilicon...
04/04/2006
6936837Film bulk acoustic resonator
A thin film bulk acoustic resonator comprises a substrate (12) of a silicon single crystal, a base film (13) formed on the substrate (12) and composed of a dielectric film mainly containing silicon oxide, and a piezoelectric stacked structure (
08/30/2005
6830952Spacer chalcogenide memory method and device
The present invention includes devices and methods to form memory cell devices including a spacer comprising a programmable resistive material alloy. Particular aspects of the present invention are described in the claims, specification and drawings. ...
12/14/2004
6815270Thin film transistor formed by an etching process with high anisotropy
The present invention discloses a thin film transistor and a process for forming thereof by a high anisotropy etching process. A thin film transistor according to the present invention comprises a transistor element including a gate electrode, a gate insulating laye...
11/09/2004
6787390Electrical and thermal contact for use in semiconductor devices
An electrical and thermal contact which includes an intermediate conductive layer, an insulator component, and a contact layer. The insulator component is fabricated from a thermally insulative material and may be sandwiched between the intermediate conductive layer...
09/07/2004
6692978Methods for marking a bare semiconductor die
The present invention provides a method and apparatus for marking a semiconductor wafer or device. The method and apparatus have particular application to wafers or devices which have been subjected to a thinning process, including backgrinding in particu...
02/17/2004
6690026Method of fabricating a three-dimensional array of active media
An apparatus comprising control circuitry formed on a substrate, and a plurality of active media coupled to the control circuitry and formed in a plurality of planes over the substrate. A method comprising forming a pair of junction regions on a substrate...
02/10/2004
6673647Method for growing a solid type II-VI semiconductor material
A growth method for a bulk II-VI type semiconductor material, including at least a first component and a second component. The method supplies in a crucible a charge including the components, with proportions of the components being such that the first co...
01/06/2004
6653211Semiconductor substrate, SOI substrate and manufacturing method therefor
A substrate for a semiconductor device includes a crystalline silicon substrate; an insulative silicon compound layer thereon and a crystalline insulation layer on the insulative silicon compound layer, wherein the insulative silicon compound layer contai...
11/25/2003
6605821Phase change material electronic memory structure and method for forming
The invention includes an electronic memory structure. The electronic memory structure includes a substrate. A substantially planar first conductor is formed adjacent to the substrate. An interconnection layer is formed adjacent to the first conductor. A ...
08/12/2003
6590236Semiconductor structure for use with high-frequency signals
High quality epitaxial layers of compound semiconductor materials can be grown overlying large silicon wafers by first growing an accommodating buffer layer on a silicon wafer. The accommodating buffer layer is a layer of monocrystalline oxide spaced apar...
07/08/2003
6569705Metal structure for a phase-change memory device
The invention relates to a damascene chalcogenide memory cell structure. The damascene chalcogenide memory cell structure is fabricated under conditions that simplify previous process flows. The damascene chalcogenide memory cell structure also prevents v...
05/27/2003
6548397Electrical and thermal contact for use in semiconductor devices
The electrical and thermal contact fabricated by forming a first layer on a surface of a semiconductor device, depositing a dielectric layer adjacent the first layer, patterning the dielectric layer to define an insulator component, and forming a second l...
04/15/2003
6545287Using selective deposition to form phase-change memory cells
A phase-change memory cell may be formed by selectively depositing the lower electrode in the phase-change memory pore. Thereafter, an adhesion-promoting material may be selectively deposited on the selectively deposited lower electrode and the upper surf...
04/08/2003
6495395Electrical and thermal contact for use in semiconductor devices
An electrical and thermal contact which includes an intermediate conductive layer, an insulator component, and a contact layer. The insulator component is fabricated from a thermally insulative material and may be sandwiched between the intermediate condu...
12/17/2002
6294404Semiconductor integrated circuit having function of reducing a power consumption and semiconductor integrated circuit system comprising this semiconductor integrated circuit
A semiconductor integrated circuit according to the present invention comprises a synchronous SRAM, a signal generation circuit generating a chip selection signal, a clock signal etc. supplied to the synchronous SRAM, a voltage set circuit setting the vol...
09/25/2001
5985689Method of fabricating photoelectric conversion device having at least one step-back layer
A photoelectric conversion device includes a plurality of photoelectric conversion units and a signal output unit. The signal output unit has at least one storage device for storing electrical signals generated by the photoelectric conversion device. A sc...
11/16/1999
5920788Chalcogenide memory cell with a plurality of chalcogenide electrodes
A chalcogenide memory cell with chalcogenide electrodes positioned on both sides of the active chalcogenide region of the memory cell. The chalcogenide memory cell includes upper and lower chalcogenide electrodes with a dielectric layer positioned therebe...
07/06/1999
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