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Class 438/72 - Having reflective or antireflective component


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a semiconductor device responsive to
No. of patents: 381
Last issue date: 05/29/2012


1                    
NumberTitleIssue Date
8187909Backside illuminated image sensor having deep light reflective trenches
An array of pixels is formed using a semiconductor layer having a frontside and a backside through which incident light is received. Each pixel typically includes a photosensitive region formed in the semiconductor layer and a trench formed adjacent to the photosens...
05/29/2012
8183081Hybrid heterojunction solar cell fabrication using a metal layer mask
Embodiments of the invention generally provide a high efficiency solar cell using a novel processing sequence to form a solar cell device. In one embodiment, the methods include forming one or more layers on a backside of a solar cell substrate prior to the texturin...
05/22/2012
8163591Backside illuminated image sensor
A backside illuminated image sensor includes a photodiode, formed below the top surface of a semiconductor substrate, for receiving light illuminated from the backside of the semiconductor substrate to generate photoelectric charges, a reflecting gate, formed on the...
04/24/2012
8148191Combined etching and doping media
The present invention relates firstly to HF/fluoride-free etching and doping media which are suitable both for the etching of inorganic layers and also for the doping of underlying layers. The present invention secondly also relates to a process in which these media...
04/03/2012
8133754Image sensor and method for manufacturing the same
An image sensor is disclosed that includes a first substrate including an electric junction region, a transistor, and a metal line connected to the electric junction region or the transistor; and a photodiode formed on the first substrate. The first substrate is for...
03/13/2012
8129213Solid-state imaging device and method for manufacturing the same
Disclosed herein is a solid-state imaging device including: a semiconductor layer; a charge accumulation region configured to be formed inside the semiconductor layer and serve as part of a photodiode; and a reflective surface configured to be disposed inside or und...
03/06/2012
8119440Method and apparatus providing refractive index structure for a device capturing or displaying images
A transient index stack having an intermediate transient index layer, for use in an imaging device or a display device, that reduces reflection between layers having different refractive indexes by making a gradual transition from one refractive index to another. Ot...
02/21/2012
8119439Methods of manufacturing an image sensor having an air gap
In an example embodiment, the method of manufacturing an image sensor includes forming an interlayer dielectric (ILD) on a substrate. The substrate may have a plurality of pixels arranged thereon and each of the pixels includes a photoelectric conversion device conf...
02/21/2012
8043883Method for manufacturing solid-state imaging device having improved sensitivity and reduced flare
Provided is a solid-state imaging device that realizes sensitivity improvement while maintaining flare prevention effect even when miniaturization of cell is advanced. The solid-state imaging device according to the present invention includes: light receiving units ...
10/25/2011
8039289Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing
Multi-zone, solar cell diffusion furnaces having a plurality of radiant element (SiC) or/and high intensity IR lamp heated process zones, including baffle, ramp-up, firing, soaking and cooling zone(s). The transport of solar cell wafers, e.g., silicon, selenium, ger...
10/18/2011
8021909Method for making a planar concentrating solar cell assembly with silicon quantum dots
Disclosed is a method for making a silicon quantum dot planar concentrating solar cell. At first, silicon nitride or silicon oxide mixed with silicon quantum dots is provided on a transparent substrate. By piling, there is formed a planar optical waveguide for conce...
09/20/2011
8017428Process of forming a silicon solar cell
A process for the production of a silicon solar cell comprising application and firing of an aluminum paste which comprises magnesium oxide and/or magnesium compounds capable of forming magnesium oxide on firing on the back-side of a silicon wafer provided with a si...
09/13/2011
8017427Backside-illuminated (BSI) image sensor with backside diffusion doping
Embodiments of a process comprising forming a pixel on a front side of a substrate, thinning the substrate, depositing a doped silicon layer on a backside of the thinned substrate, and diffusing a dopant from the doped silicon layer into the substrate. Embodiments o...
09/13/2011
7977144Thin film transistor array panel and manufacture thereof
A method for a thin film transistor array panel includes forming a gate line and a pixel electrode on a substrate, forming a gate insulating layer covering the gate line, forming a data line including a source electrode and a drain electrode on the gate insulating l...
07/12/2011
7972891Image sensor and method for manufacturing the same
An image sensor and a method for manufacturing the same that includes photodiodes formed in a semiconductor substrate, a first insulating layer formed over the semiconductor substrate, the first insulating layer including a seed pattern corresponding spatially to th...
07/05/2011
7968367Fabricating method of thin film transistor array substrate
A fabricating method of a TFT array substrate includes following steps: providing a substrate having a pixel region and a bonding pad region surrounding the pixel region; forming a patterned polysilicon layer within the pixel region on the substrate; forming a first...
06/28/2011
7964433Anti-reflective device having an anti-reflective surface formed of silicon spikes with nano-tips
Described is a device having an anti-reflection surface. The device comprises a silicon substrate with a plurality of silicon spikes formed on the substrate. A first metallic layer is formed on the silicon spikes to form the anti-reflection surface. The device furth...
06/21/2011
7939362Image sensor and method of fabricating the same
An image sensor and a method of fabricating the same are provided. A pad region is disposed on a substrate. The pad region has a higher concentration of impurity ions than the substrate. The pad region is selectively removed using the substrate as an etch mask, ther...
05/10/2011
7935563Solid-state imaging device and method for manufacturing thereof as well as driving method of solid-state imaging device
A solid-state imaging device with a structure such that an electrode for reading a signal charge is provided on one side of a light-receiving sensor portion constituting a pixel; a predetermined voltage signal V is applied to a light-shielding film formed to cover a...
05/03/2011
7935562Method for annealing photovoltaic cells
Method for annealing at least one photovoltaic cell comprising a substrate based on silicon with a first type of conductivity, a layer doped with a second type of conductivity produced in the substrate and forming a front face of the substrate, an antireflection lay...
05/03/2011
7927910Manufacturing method of solar cell
The present invention discloses a method of manufacturing a solar cell by forming two electrode layers on the same side of a wafer, and avoiding sunlight incident to another side from being blocked by the electrode layers to enhance the photoelectric conversion effi...
04/19/2011
7888162Method of manufacturing a photoelectronic device
This application discloses a method of manufacturing a photoelectronic device comprising steps of providing a semiconductor stack layer, forming at least one metal adhesive on the semiconductor stack layer by a printing technology, forming an electrode by heating th...
02/15/2011
7888161Solid-state imaging device and method for producing the same
A method for producing a solid-state imaging device, which including: a photoelectric conversion section; a charge transfer section having a charge transfer electrode; and an antireflection film covering a light-receiving region in the photoelectric conversion secti...
02/15/2011
7888160Process of manufacturing solar cell
A process of manufacturing a solar cell is disclosed. The process comprises steps of (a) providing a semiconductor substrate, (b) forming a dielectric layer with amorphous silicon structure on the semiconductor substrate, (c) partially removing the dielectric layer ...
02/15/2011
7875489CMOS image sensor and fabricating method thereof
A CMOS image sensor and a fabricating method for a semiconductor device are disclosed. Embodiments provide a CMOS image sensor having an improved structure using a light reflection system, with a fabricating method thereof to simplify the fabrication process and max...
01/25/2011
7867809One-step diffusion method for fabricating a differential doped solar cell
A one-step diffusion method for fabricating a differential doped solar cell is described. The one-step diffusion method includes the following step. First, a substrate is provided. A doping control layer is formed on the substrate. The doping control layer includes ...
01/11/2011
7863079Methods of reducing CD loss in a microelectromechanical device
Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity. ...
01/04/2011
7863078Method for making an anti-reflection film of a solar cell
A method is disclosed for making an anti-reflection film of a solar cell. The method includes the step of providing a laminate. The laminate includes a ceramic substrate, a titanium-based compound film, a p+ type poly-silicon back surface field, a pâ...
01/04/2011
7858430Method for making a photovoltaic cell comprising contact regions doped through a lamina
In aspects of the present invention, a method is disclosed to form a lamina having opposing first and second surfaces. Heavily doped contact regions extend from the first surface to the second surface. Generally the lamina is formed by affixing a semiconductor donor...
12/28/2010
7718463Display device and manufacturing method thereof
A display device with improved reliability and a manufacturing method of the same with improved yield. A display device according to the invention comprises a display area including a first electrode, an insulating layer covering an edge of the first electrode, a la...
05/18/2010
7659135Semiconductor device fabrication method and semiconductor device
A semiconductor device fabrication method in which when a semiconductor device with a built-in light receiving element is fabricated, a section for dividing the light receiving element is protected from damage caused by, for example, etching. An antireflection coati...
02/09/2010
7655496Metal lift-off systems and methods using liquid solvent and frozen gas
A method of fabricating a semiconductor device includes patterning a layer of photoresist onto a surface of a wafer to define metal feature areas and residual metal areas. A layer of metal is deposited over the patterned layer of photoresist, the metal layer include...
02/02/2010
7629197Spatial light modulator
An interferometric spatial light modulator comprises of two cavities. One is the optical resonant cavity having a partially reflective film and a movable reflective membrane as two walls, and the other is the electromechanical actuation cavity having the movable ref...
12/08/2009
7592198Method for making a photovoltaic cell based on thin-film silicon
The invention concerns a method for making a photovoltaic cell based on thin film silicon, which consists in providing a heterojunction by depositing on a support at least one first P— (or N—) doped amorphous silicon layer (13) and a second N— (or P—)...
09/22/2009
7556981Switches for shorting during MEMS etch release
A MEMS (Microelectromechanical system) device is described. The device includes a first layer on a substrate, and a sacrificial layer on or over the first layer, the first sacrificial layer being configured to be removed in a removal procedure. The device also inclu...
07/07/2009
7521280Method for forming an optical image sensor with an integrated metal-gate reflector
A method according to one embodiment includes forming a photosensitive region on an substrate; forming at least one dielectric layer upon the photosensitive region; simultaneously forming and patterning a metal layer upon the photosensitive region; wherein a first p...
04/21/2009
7488618Microlenses including a plurality of mutually adhered layers of optically transmissive material and systems including the same
Microlenses for directing radiation toward a sensor of an imaging device include a plurality of mutually adhered layers of cured optically transmissive material. Systems include at least one microprocessor and a substrate including an array of microlenses formed the...
02/10/2009
7435615Method for fabricating CMOS image sensor
A method for fabricating a CMOS image sensor improves the characteristics of device by preventing a pad from being contaminated without damaging a micro-lens. The method includes steps of forming a device protection layer on a semiconductor substrate including at le...
10/14/2008
7416834Antireflective coating compositions
The present invention relates to a spin-on antireflective coating composition for a photoresist comprising a polymer, a crosslinking compound and a thermal acid generator, where the polymer comprises at least one functional moiety capable of increasing the refractiv...
08/26/2008
7413923Method of manufacturing CMOS image sensor
Provided is a manufacturing method of a CMOS image sensor. The method includes forming an interlayer insulating layer, a color filter layer, and a planarizing layer. A first photoresist is applied on the planarizing layer, and patterning of the first photoresist is ...
08/19/2008
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