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Class 438/679 - Evaporative coating of conductive layer


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Processes wherein the formation of the conductive layer
No. of patents: 125
Last issue date: 03/13/2012


1        
NumberTitleIssue Date
8133811Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, computer program and storage medium
A semiconductor device, which suppresses formation of an organic impurity layer and has excellent adhesiveness to a copper film and a metal to be a base, is manufactured. A substrate (wafer W) coated with a barrier metal layer (base film) 13 formed of a metal...
03/13/2012
7972960Method for manufacturing thin film
A method for manufacturing a thin film includes: applying a liquid to a surface of a processing target member having at least one of a trench and a concave portion. The liquid includes a solvent and at least one of fine particles of a metal, fine particles of a semi...
07/05/2011
7867904Method and system for isolated and discretized process sequence integration
A system for processing a semiconductor substrate is provided. The system includes a mainframe having a plurality of modules attached thereto. The modules include processing modules, storage modules, and transport mechanisms. The processing modules may include combi...
01/11/2011
7795144Method for forming electrode structure for use in light emitting device and method for forming stacked structure
A method for forming an electrode structure in a light emitting device is disclosed. The method includes the steps of: forming a mask material layer having an opening; depositing a first material layer on the mask material layer and on a portion of a compound semico...
09/14/2010
7745332PVD-based metallization methods for fabrication of interconnections in semiconductor devices
Recessed features on a Damascene substrate are filled with metal using plasma PVD. Recessed features having widths of less than about 300 nm, e.g., between about 30-300 nm can be filled with metals (e.g., copper and aluminum), without forming voids. In one approach,...
06/29/2010
7709383Film forming method, and substrate-processing apparatus
A film forming method comprising forming a liquid coating film on a substrate by supplying a liquid containing a coating type thin film forming substance and a solvent onto the substrate, substantially converging a variation in film thickness of the coating film, ma...
05/04/2010
7659204Oxidized barrier layer
A method and resultant produce of forming barrier layer based on ruthenium tantalum in a via or other vertical interconnect structure through a dielectric layer in a multi-level metallization. The RuTa layer in a RuTa/RuTaN bilayer, which may form discontinuous isla...
02/09/2010
7618893Methods of forming a layer for barrier applications in an interconnect structure
Methods of forming a barrier layer are provided. In one embodiment, the method includes providing a substrate into a physical valor deposition (PVD) chamber, supplying at least two reactive gases and an inert gas into the PVD chamber, sputtering a source material fr...
11/17/2009
7601639Method for conditioning a microelectronics device deposition chamber
The present invention provides, in one aspect, the present invention provides, in one embodiment, a method of conditioning a deposition chamber 100. This method comprises placing an undercoat on the walls of a deposition chamber 100 and depositing a pr...
10/13/2009
7592255Fabricating arrays of metallic nanostructures
A patterned array of metallic nanostructures and fabrication thereof is described. A plurality of nanowires is grown on a substrate, the plurality of nanowires being laterally arranged on the substrate in a predetermined array pattern. The plurality of nanowires is ...
09/22/2009
7351596Method and system for operating a physical vapor deposition process
A method for fabricating semiconductor wafers using physical vapor deposition. The method includes maintaining a substrate on a susceptor in a chamber. The substrate has a face positioned within a vicinity of a target material, which is within the chamber. The targe...
04/01/2008
7351657Method and apparatus for applying external coating to grid array packages for increased reliability and performance
A method and apparatus are disclosed for selective removal of a conformal coating from the solder balls of grid array packages such that the benefits of the coating are realized. An ancillary benefit of the invention is improved process-ability of the grid array pac...
04/01/2008
7348274Method of aligning carbon nanotubes and method of manufacturing field emission device using the same
A method of aligning carbon nanotubes (CNTs) and a method of manufacturing a field emission device (FED) using the same, wherein a mold having an intaglio pattern is prepared, an aqueous solution containing an amphiphilic organic material and the CNTs are coated on ...
03/25/2008
7341942Method for forming metal line of semiconductor device
A method for forming a metal line of a semiconductor device forms an aluminum line having an excellent orientation. A specific resistance of a metal line is reduced, thereby enabling sufficient supply of a desired electric current. The method includes steps of formi...
03/11/2008
7341948Method of making a semiconductor structure with a plating enhancement layer
Disclosed is a method of making a semiconductor structure, wherein the method includes forming an interlayer dielectric (ILD) layer on a semiconductor layer, forming a conductive plating enhancement layer (PEL) on the ILD, patterning the ILD and PEL, depositing a se...
03/11/2008
7341944Methods for synthesis of metal nanowires
Methods for synthesizing metal nanowires are provided. A metalorganic layer is deposited on a substrate as a thin film. The thermal decomposition of the metalorganic thin film in the presence of air synthesizes metal nanowires. The metal can be varied to produce nan...
03/11/2008
7300859Atmospheric glow discharge with concurrent coating deposition
A plasma is produced in a treatment space (58) by diffusing a plasma gas at atmospheric pressure and subjecting it to an electric field created by two metallic electrodes (54,56) separated by a dielectric material (64), a precursor material is i...
11/27/2007
7285196Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals
In recent years, copper wiring has emerged as a promising substitute for the aluminum wiring in integrated circuits, because copper offers lower electrical resistance and better reliability at smaller dimensions than aluminum. However, use of copper typically requir...
10/23/2007
7271094Multiple shadow mask structure for deposition shadow mask protection and method of making and using same
The present invention is a multi-layer shadow mask and method of use thereof. The multi-layer shadow mask includes a sacrificial mask bonded to a deposition mask. The sacrificial mask provides protection against an accumulation of evaporant on the deposition mask wh...
09/18/2007
7268077Carbon nanotube reinforced metallic layer
A method and apparatus including an interconnect structure having a surface, a plurality of nanotubes disposed adjacent to the surface, and a metallic layer disposed adjacent to the surface and substantially including the nanotubes. An assembly may include a first e...
09/11/2007
7262130Methods for making integrated-circuit wiring from copper, silver, gold, and other metals
Integrated circuits, the key components in thousands of electronic and computer products, include interconnected networks of electrical components. The components are typically wired, or interconnected, together with aluminum wires. In recent years, researchers have...
08/28/2007
7259387Nonvolatile semiconductor memory device
A nonvolatile memory element is formed by layering a lower electrode, a variable resistor and an upper electrode in sequence. The variable resistor is formed in which crystallinity and amorphism are mixed. Thus, the nonvolatile memory element is formed. More prefera...
08/21/2007
7247564Electronic device
One embodiment of a method of making an electronic device includes forming on a substrate surface a first layer having a peak-valley-peak profile, and forming a second layer on the first layer by use of a target positioned along a line-of-sight that excludes a floor...
07/24/2007
7247563Filling high aspect ratio openings by enhanced electrochemical deposition (ECD)
One embodiment of the invention is a method for void-free filling with a metal or an alloy inside openings by electrochemical deposition (ECD), said method including steps of: (a) providing a substrate with at least one opening and a field surrounding the at least o...
07/24/2007
7241690Method for conditioning a microelectronics device deposition chamber
The present invention provides, in one aspect, a method of conditioning a deposition chamber 100. An undercoat is placed on the walls of a deposition chamber 100 and a pre-deposition coat is deposited over the undercoat with a plasma gas mixture conducted at a high ...
07/10/2007
7238606Semiconductor devices and method for fabricating the same
Methods for fabricating a copper interconnect of a semiconductor device are disclosed. An example method for fabricating a copper interconnect of a semiconductor device deposits a first insulating layer on a substrate having at least one predetermined structure, for...
07/03/2007
7205233Method for forming CoWRe alloys by electroless deposition
A method for fabricating a capping layer with enhanced barrier resistance to both copper and oxygen diffusion, comprises forming a capping layer on a conductive surface of an interconnect, wherein the capping layer comprises cobalt (Co), tungsten (W), rhenium (Re), ...
04/17/2007
7192866Source alternating MOCVD processes to deposit tungsten nitride thin films as barrier layers for MOCVD copper interconnects
An alternating source MOCVD process is provided for depositing tungsten nitride thin films for use as barrier layers for copper interconnects. Alternating the tungsten precursor produces fine crystal grain films, or possibly amorphous films. The nitrogen source may ...
03/20/2007
7189636Fabrication method of semiconductor integrated circuit device
A low resistance Co silicide layer with less leakage current is formed over the surface of the source and drain of a MISFET by optimizing the film forming conditions and annealing conditions upon formation of Co (cobalt) silicide. More specifically, a low resistance...
03/13/2007
7144808Integration flow to prevent delamination from copper
The present invention provides, in one embodiment, method of forming a barrier layer 300 over a semiconductor substrate 110. The method comprises forming an opening 120 in an insulating layer 130 located over a substrate thereby uncovering an underlying copper layer...
12/05/2006
7135407Method of manufacturing a semiconductor device
In a method of manufacturing a semiconductor device, a tungsten layer pattern having an oxidized surface is formed on a substrate. A source gas including silicon is provided to the oxidized surface of the tungsten layer pattern to form a protecting layer on the oxid...
11/14/2006
7094675Structure having spatially separated photo-excitable electron-hole pairs and method of manufacturing same
A method for producing quantum dots. The method includes cleaning an oxide substrate and separately cleaning a metal source. The substrate is then heated and exposed to the source in an oxygen environment. This causes metal oxide quantum dots to form on the surface ...
08/22/2006
7086918Low temperature process for passivation applications
An organic electroluminescent device comprising an anode layer on a substrate, an organic layer on the anode layer, and a cathode layer on the organic layer. In one embodiment, the cathode layer is subjected to H2 plasma prior to deposition of a protectiv...
08/08/2006
7084053Unidirectionally conductive materials for interconnection
A method of forming and a device including an interconnect structure having a unidirectional electrical conductive material is described. The unidirectional conductive material may overlie interconnect materials, and/or may surround interconnect materials, such as b...
08/01/2006
7067420Methods for forming a metal layer on a semiconductor
A metal layer is formed on an integrated circuit device including forming an insulating layer on an integrated circuit substrate. A contact hole is formed by selectively etching the insulating layer to thereby partially expose the substrate. A metal layer including ...
06/27/2006
7067417Methods of removing resistive remnants from contact holes using silicidation
A contact hole can be formed in an insulating layer to expose a surface of an underlying silicon layer at a bottom of the contact hole having a first size. A metal silicide layer can be formed beneath the bottom of the contact hole and removed to form a void beneath...
06/27/2006
7067405Atmospheric glow discharge with concurrent coating deposition
A plasma is produced in a treatment space by diffusing a plasma gas at atmospheric pressure and subjecting it to an electric field created by two metallic electrodes separated by a dielectric material, a precursor material is mixed with the plasma, and a substrate f...
06/27/2006
7015495Metallic very thin film, metallic very thin film multilayer body, and method for manufacturing the metallic very thin film or the metallic very thin film laminate
The present invention relates to an ultra-thin metal film, an ultra-thin metal multilayer film, and a method of fabricating an ultra-thin metal film or an ultra-thin metal multilayer film. The ultra-thin metal film and the ultra-thin metal multilayer film can be obt...
03/21/2006
6998331Methods for fabricating three dimensional anisotropic thin films and products produced thereby
A three dimensional structure comprising at least two materials capable of being deposited by vapor deposition. The structure is fabricated by the controlled vapor deposition of the materials onto a substrate. ...
02/14/2006
6995088Surface treatment of copper to improve interconnect formation
The present invention provides, in one embodiment, a method of forming a copper layer (100) over a semiconductor substrate (105). The method comprises coating a copper seed layer (110) located over a semiconductor substrate with a protective age...
02/07/2006
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