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Class 438/665 - Utilizing textured surface


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Processes wherein a surface is roughened at some stage in
No. of patents: 192
Last issue date: 12/20/2011


1          
NumberTitleIssue Date
8080474Method for making electrode
The present invention provides a method for making an electrode. Firstly, a conducting substrate is provided. Secondly, a plurality of nano-sized structures is formed on the conducting substrate by a nano-imprinting method. Thirdly, a coating is formed on the nano-s...
12/20/2011
8048800Fabrication method of two-terminal semiconductor component using trench technology
A method of fabricating a two-terminal semiconductor component using a trench technique is disclosed that includes forming a trench by etching an etching pattern formed on a substrate on which an active layer having impurities added is grown, forming a front metal l...
11/01/2011
7727888Interconnect structure and method for forming the same
An interconnect structure and a method for forming the same are described. Specifically, under the present invention, a gouge is created within a via formed in the interconnect structure before any trenches are formed. This prevents the above-mentioned trench damage...
06/01/2010
7407862Method for manufacturing ferroelectric memory device
A method for manufacturing a ferroelectric memory device includes the steps of forming an active element on a substrate; forming an interlayer dielectric film on the substrate; forming a contact hole in the interlayer dielectric film; forming, in the contact hole, a...
08/05/2008
7329948Microelectronic devices and methods
A microelectronic device is made of a semiconductor substrate, a heat generating component in a layer thereof, and a body within the remaining semiconductor substrate. The body is made of materials which have a high thermal inertia and/or thermal conductivity. When ...
02/12/2008
7309650Memory device having a nanocrystal charge storage region and method
A memory device having a metal nanocrystal charge storage structure and a method for its manufacture. The memory device may be manufactured by forming a first oxide layer on the semiconductor substrate, then disposing a porous dielectric layer on the oxide layer and...
12/18/2007
7298002Hemispherical silicon grain capacitor with variable grain size
A semiconductor device includes cylindrical capacitors each including corresponding cylindrical electrodes. Each cylindrical electrode includes hemispherical silicon grains. The hemispherical silicon grains protruding from an upper region of the cylindrical electrod...
11/20/2007
7273791Methods for forming a conductive structure using oxygen diffusion through one metal layer to oxidize a second metal layer
A method for forming a metal/metal oxide structure that includes forming metal oxide regions, e.g. ruthenium oxide regions, at grain boundaries of a metal layer, e.g., platinum. Preferably, the metal oxide regions are formed by diffusion of oxygen through grain boun...
09/25/2007
7271071Method of forming a catalytic surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms
The invention includes methods of forming a substrate having a surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms. In one implementation, a substrate is provided which has a first substrate surface comprising at least o...
09/18/2007
7253104Methods of forming particle-containing materials
The invention includes methods of forming particle-containing materials, and also includes semiconductor constructions comprising particle-containing materials. One aspect of the invention includes a method in which a first monolayer is formed across at least a port...
08/07/2007
7249411Methods for mounting surface-mounted electrical components
Methods for mounting electrical components on a substrate and securely retaining the components are described. The methods include altering solder paste compositions, interposed between component retentive pins and retentive through holes, during a reflow process. E...
07/31/2007
7220670Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by same
A method for depositing a rough polysilicon film on a substrate is disclosed. The method includes introducing the reactant gases argon and silane into a deposition chamber and enabling and disabling a plasma at various times during the deposition process. ...
05/22/2007
7214569Apparatus incorporating small-feature-size and large-feature-size components and method for making same
An apparatus incorporating small-feature size and large-feature-size components. The apparatus comprise a strap including a substrate with an integrated circuit contained therein. The integrated circuit coupling to a first conductor disposed on the substrate. The fi...
05/08/2007
7205192Semiconductor memory device capable of preventing oxidation of plug and method for fabricating the same
A semiconductor device and a fabrication method thereof provides a plug structure composed of a diffusion barrier layer formed at the bottom and on the sides of a contact hole and an oxidation barrier layer formed on the diffusion barrier layer that fills up the ins...
04/17/2007
7199043Method of forming copper wiring in semiconductor device
Disclosed in a method of forming a copper wiring in a semiconductor device. A copper layer buries a damascene pattern in which an interlayer insulating film of a low dielectric constant. The copper layer is polished by means of a chemical mechanical polishing proces...
04/03/2007
7196000Method for manufacturing a wafer level chip scale package
A semiconductor wafer with semiconductor chips having chip pads and a passivation layer is provided. First and second dielectric layers are sequentially formed on the passivation layer. The first and second dielectric layers form a ball pad area that includes an emb...
03/27/2007
7183196Multilayer interconnection board and production method thereof
A multilayer interconnection board is disclosed that allows reliable electrical connection between an interconnection having a large width and a large area and a via provided in a via hole formed by pressing a tool against resin. A projecting portion for electrical ...
02/27/2007
7170176Semiconductor device
A technology for easily forming a multi-layer wiring structure that is fine and reliable. In the multi-layer wiring structure, the lower-layer wiring and the upper-layer wiring that are formed to sandwich an insulating layer are electrically connected to each other ...
01/30/2007
7160744Fabrication method of light emitting diode incorporating substrate surface treatment by laser and light emitting diode fabricated thereby
The present invention relates to a fabrication method of LEDs incorporating a step of surface-treating a substrate by a laser and an LED fabricated by such a fabrication method. The present invention can use a laser in order to implement finer surface treatment to a...
01/09/2007
7160758Electronic packaging apparatus and method
An electronic assembly includes a substrate, a device attached to the substrate, and a thermally conductive heat spreader covering the device and at least a portion of the substrate. A metal substantially fills the space between the device and the thermally conducti...
01/09/2007
7157367Device structure having enhanced surface adhesion and failure mode analysis
A substrate is provided having semiconductor device structures formed in and on the substrate. The semiconductor device structures comprise conductor layers embedded in openings in dielectric layers having a dielectric constant of less than 4.5. The dielectric layer...
01/02/2007
7132345Method for fabricating flash memory device
A flash memory device fabrication method is disclosed. A disclosed method comprises: depositing a first oxide layer on a substrate; depositing a first polysilicon layer on the first oxide layer; forming a second oxide layer on the entire surface of the first polysil...
11/07/2006
7129590Stencil and method for depositing material onto a substrate
A stencil and method for depositing a coupon of underfill material onto a substrate that is to receive an integrated circuit die. ...
10/31/2006
7122456Method for reduced input output area
An input output ring for a semiconductor device is disclosed that uses power buffers having widths that vary from the widths of the input and output buffers. In one embodiment, the pitches between bond pads are the same, in another embodiment the pitches between the...
10/17/2006
7105384Circuit device manufacturing method including mounting circuit elements on a conductive foil, forming separation grooves in the foil, and etching the rear of the foil
A circuit device manufacturing method is provided, wherein contaminants attached to the top surfaces of conductive patterns 21 are removed using plasma to thereby improve the adhesion of conductive patterns 21 to a sealing resin 28. By selective...
09/12/2006
7101760Charge trapping nanocrystal dielectric for non-volatile memory transistor
A layer of nanocrystals for use in making EEPROMs is made by creating a matrix of silicon seeds in annealed silicon oxide atop a thin silicon dioxide layer. Then nanocrystals are grown on the seeds by vapor deposition of silane in a reactor until a time before agglo...
09/05/2006
7078333Method to improve adhesion of dielectric films in damascene interconnects
Method of improving adhesion of low dielectric constant films to other dielectric films and barrier metals in a damascene process are achieved. In one method, a low dielectric constant material layer is deposited on a substrate. Silicon ions are implanted into the l...
07/18/2006
7067861Device and method for protecting against oxidation of a conductive layer in said device
In a semiconductor device including a first conductive layer, the first conductive layer is treated with a nitrogen/hydrogen plasma before an additional layer is deposited thereover. The treatment stuffs the surface with nitrogen, thereby preventing oxygen from bein...
06/27/2006
7049191Method for protecting against oxidation of a conductive layer in said device
In a semiconductor device including a first conductive layer, the first conductive layer is treated with a nitrogen/hydrogen plasma before an additional layer is deposited thereover. The treatment stuffs the surface with nitrogen, thereby preventing oxygen from bein...
05/23/2006
7041550Device and method for protecting against oxidation of a conductive layer in said device
In a semiconductor device including a first conductive layer, the first conductive layer is treated with a nitrogen/hydrogen plasma before an additional layer is deposited thereover. The treatment stuffs the surface with nitrogen, thereby preventing oxygen from bein...
05/09/2006
7029985Method of forming MIS capacitor
An MIS capacitor with low leakage and high capacitance is disclosed. A layer of hemispherical grained polysilicon (HSG) is formed as a lower electrode. Prior to the dielectric formation, the hemispherical grained polysilicon layer may be optionally subjected to a ni...
04/18/2006
7022603Method for fabricating semiconductor device having stacked-gate structure
A method for fabricating a semiconductor a semiconductor device having a stacked-gate structure. A polysilicon layer is formed overlying a substrate, which is insulated from the substrate by a dielectric layer. A metal-flash layer is formed overlying the polysilicon...
04/04/2006
7022570Methods of forming hemispherical grained silicon on a template on a semiconductor work object
The present invention provides a method of preparing a surface of a silicon wafer for formation of HSG structures. The method contemplates providing a wafer having at least one HSG template comprising polysilicon formed in BPSG, the HSG template being covered by sil...
04/04/2006
6995416Memory device for storing electrical charge and method for fabricating the same
The invention provides a memory device for storing electrical charge, which has, as memory elements, tube elements applied on an electrode layer and connect-connected thereto. The tube elements are provided with a dielectric coating, a filling material for filling t...
02/07/2006
6987070Method for forming low-k dielectric layer of semiconductor device
Disclosed is a method for forming a low-k dielectric layer of a semiconductor device. The method includes a step providing a semiconductor substrate having a predetermined pattern, a step coating porous powders having a micro size on the semiconductor by spraying th...
01/17/2006
6977213IC chip solder bump structure and method of manufacturing same
Disclosed herein are a method of manufacturing a solder bump on a semiconductor device, a solder bump structure formed on a substrate, and an intermediate solder bump structure. In one embodiment, the method includes creating a bonding pad over a semiconductor subst...
12/20/2005
6972452Device and method for protecting against oxidation of a conductive layer in said device
In a semiconductor device including a first conductive layer, the first conductive layer is treated with a nitrogen/hydrogen plasma before an additional layer is deposited thereover. The treatment stuffs the surface with nitrogen, thereby preventing oxygen from bein...
12/06/2005
6949434Method of manufacturing a vertical semiconductor device
A method of manufacturing a vertical semiconductor device includes preparing a semiconductor wafer which has a heavily doped semiconductor substrate and a lightly doped semiconductor layer disposed over the semiconductor substrate, forming a semiconductor element at...
09/27/2005
6933176Ball grid array package and process for manufacturing same
A ball grid array integrated circuit package is manufactured by mounting a semiconductor die, to a surface of a substrate such that bumps on the semiconductor die are electrically connected to conductive traces of the substrate. At least one collapsible spacer is mo...
08/23/2005
6924523Semiconductor memory device and method for manufacturing the device
A semiconductor memory device includes a semiconductor substrate and a support layer provided above the semiconductor substrate. Particles are formed on the support layer. A first electrode is provided on the support layer such that it covers the particles. The firs...
08/02/2005
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