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Class 438/61 - Continuous processing


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a semiconductor device responsive to
No. of patents: 61
Last issue date: 02/15/2011


1    
NumberTitleIssue Date
7888158System and method for making a photovoltaic unit
A process of making a photovoltaic unit includes steps of simultaneously forming a first layer of n-type material and a second layer of p-type material using a continuous casting process, and continuously bonding the first and second layers to form a p-n junction. T...
02/15/2011
7427523Method of making light emitting device with silicon-containing encapsulant
A method of making a light emitting device is disclosed. The method includes providing a light emitting diode and forming an encapsulant in contact with the light emitting diode; wherein forming the encapsulant includes contacting the light emitting diode with a pho...
09/23/2008
7358185Device having contact pad with a conductive layer and a conductive passivation layer
A method and apparatus is disclosed for sequential processing of integrated circuits, particularly for conductively passivating a contact pad with a material which resists formation of resistive oxides. In particular, a tank is divided into three compartments, each ...
04/15/2008
7320942Method for removal of metallic residue after plasma etching of a metal layer
A method for removal of metallic residue from a substrate after a plasma etch process in a semiconductor substrate processing system by cleaning the substrate in a hydrogen fluoride solution. ...
01/22/2008
7211708Exhaust processing method, plasma processing method and plasma processing apparatus
A chemical-reaction inducing means is provided in an exhaust line connecting a processing space for subjecting a substrate or a film to plasma processing to an exhaust means, and at least either an unreacted gas or byproduct exhausted from the processing space are c...
05/01/2007
7192795Method of making light emitting device with silicon-containing encapsulant
A method of making a light emitting device is disclosed. The method includes providing a light emitting diode and forming an encapsulant in contact with the light emitting diode; wherein forming the encapsulant includes contacting the light emitting diode with a pho...
03/20/2007
7183120Etch-stop material for improved manufacture of magnetic devices
A method for fabricating a magnetoresistive device having at least one active region, which may be formed into a magnetic memory bit, sensor element and/or other device, is provided. In forming the magnetoresistive device, a magnetoresistive stack, such as a giant m...
02/27/2007
7182979High efficiency method for performing a chemical vapordeposition utilizing a nonvolatile precursor
A method directed to the use of a nonvolatile precursor, either a solid or liquid precursor, suitable for CVD, including liquid source CVD (LSCVD). Using the method of the invention the nonvolatile precursor is dissolved in a solvent. Choice of solvent is typically ...
02/27/2007
7084000Solid-state imaging device and method for manufacturing the same
A solid-state imaging device according to the present invention includes a semiconductor substrate; a photoelectric conversion portion formed on the semiconductor substrate; a gate insulating film formed on the semiconductor substrate and covering the photoelectric ...
08/01/2006
7056760On chip CMOS optical element
CMOS optical receiver and optical transmitters are described. The optical receiver is formed from a CMOS CCD which is modified to immediately output all information indicative of incoming light, i.e., with no transfer gate. The optical transmitter is formed of a mod...
06/06/2006
7053411Method for treating semiconductor processing components and components formed thereby
A method for treating a semiconductor processing component, including: exposing the component to a halogen gas at an elevated temperature, oxidizing the component to form an oxide layer, and removing the oxide layer. ...
05/30/2006
7033849Method of adjusting or locally modifying a magnetization in a layer of a magnetoresistive layer system, heat stamp for heating the magnetoresistive layer system, and use of same
A method of adjusting or locally modifying the direction of magnetization of a ferromagnetic layer in a magnetoresistive layer system using a heat stamp is described, the ferromagnetic layer being stabilized over an antiferromagnetic layer. The antiferromagnetic lay...
04/25/2006
6967112Three-dimensional quantum dot structure for infrared photodetection
A 3D quantum dot optical path structure is provided, along with a method for selectively forming a 3D quantum dot optical path. The method comprises: forming a single crystal Si substrate with a surface; forming a Si feature in the substrate, such as a via, trench, ...
11/22/2005
6949399Method of reducing contamination-induced process variations during ion implantation
When changing a dopant species in an implantation tool, typically a clean process is performed to reduce cross-contamination, which is considered a major issue in implant cycles applied in advanced CMOS processes. Especially, the employment of an implanter previousl...
09/27/2005
6949400Ultrasonic slitting of photovoltaic cells and modules
An ultrasonic slitting device cuts and seals the edges of photovoltaic cells and modules to encapsulate the photoactive components in an environment substantially impervious to the atmosphere. ...
09/27/2005
6902948Method of producing photovoltaic element
A method of producing a photovoltaic element is provided which comprises the steps of immersing in an electrolytic solution a photovoltaic element including a back surface reflecting layer, a semiconductor layer and a transparent electrode layer successively stacked...
06/07/2005
6893893Method of preventing short circuits in magnetic film stacks
A method for preventing electrical short circuits in a multi-layer magnetic film stack comprises providing a film stack that includes a layer of magnetic material having an exposed surface. A protective layer is deposited on the exposed surface of the magnetic layer...
05/17/2005
6875623Method for fabricating semiconductor device
In the step of thermally processing a semiconductor substrate by irradiating the semiconductor substrate with lamp light, a free carrier absorption layer for absorbing the irradiated lamp light is provided in advance in the semiconductor substrate. Thus, it is possi...
04/05/2005
6818491Set of three level concurrent word line bias conditions for a NOR type flash memory array
In the present invention a method is shown that uses three concurrent word line voltages in memory cell operations of an a NOR type EEPROM flash memory array. A first concurrent word line voltage controls the operation on a selected word line within a selected memor...
11/16/2004
6777292Set of three level concurrent word line bias conditions for a NOR type flash memory array
In the present invention a method is shown that uses three concurrent word line voltages in memory cell operations of an a NOR type EEPROM flash memory array. A first concurrent word line voltage controls the operation on a selected word line within a selected memor...
08/17/2004
6734037Method and device for producing solar cells
The present invention concerns a process for fabricating a solar cell, wherein material is deposited on a multicrystalline silicon substrate and passivation is performed by means of hydrogen plasma. It is proposed that the material be deposited by low-pressure CVD a...
05/11/2004
6652904Methods to manufacture single cell and multi-cell regenerative photoelectrochemical devices
The present invention relates to manufacturing of regenerative photovolatic photoelectrochemical (RPEC) devices. The invention describes a method for manufacturing RPEC devices in a production line. The method comprises the steps of: dispensing a protecti...
11/25/2003
6620682Set of three level concurrent word line bias conditions for a nor type flash memory array
In the present invention a method is shown that uses three concurrent word line voltages in memory cell operations of an a NOR type EEPROM flash memory array. A first concurrent word line voltage controls the operation on a selected word line within a sel...
09/16/2003
6495423Electronic power device monolithically integrated on a semiconductor and comprising edge protection structures having a limited planar dimension
An electronic power device is integrated monolithically in a semiconductor substrate. The device includes a power region, itself having at least one P/N junction provided therein which comprises a first semiconductor region with a first type of conductivi...
12/17/2002
6399411Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
A method for forming a non-single-crystal semiconductor thin film and a photovoltaic device using an apparatus, which has a film deposition chamber with a film-forming space surrounded by a film deposition chamber wall and a belt-like substrate. An extern...
06/04/2002
6362020Process of forming deposited film, process of producing semiconductor element substrate, and process of producing photovoltaic element
The present invention provides a process of forming a deposited film on a belt-like substrate by a roll-to-roll system, the process comprising the step of eliminating a curl deformation of the belt-like substrate resulting from application of a deformatio...
03/26/2002
6338872Film forming method
A film forming method is described using an apparatus with a plurality of vacuum chambers which communicate with each other via a connection, where the apparatus has one or more detachable treatment rooms and where the method includes continuously forming...
01/15/2002
6265242Solar cell module and a process for producing said solar cell module
A process for producing a solar cell module comprising at least a photovoltaic element module is provided. The photovoltaic element module is formed by electrically connecting a plurality of photovoltaic elements with each other, after the individual phot...
07/24/2001
6261862Process for producing photovoltaic element
A process is provided for producing a photovoltaic element which has at least one pin junction, and a buffering semiconductor layer constituted of plural sublayers between an n-type layer and an i-type layer and/or between an i-type layer and a p-type lay...
07/17/2001
6242687Amorphous silicon photovoltaic devices and method of making same
A process for producing a thin film semiconductor solar cell, said solar cell at least comprising: a p-type layer, and an n-type layer, which are deposited on carrier material, wherein the composition of the p-type layer, especially the optical band gap a...
06/05/2001
6239352Substrate and collector grid structures for electrically interconnecting photovoltaic arrays and process of manufacture of such arrays
This invention comprises deposition of thin film photovoltaic junctions on metal substrates which can be heat treated following deposition in a continuous fashion without deterioration of the metal support structure. In a separate operation, an interconne...
05/29/2001
6204197Semiconductor device, manufacturing method, and system
An improved semiconductor device manufacturing system and method is shown. In the system, undesirable sputtering effect can be averted by virtue of a combination of an ECR system and at CVD system. Prior to the deposition according to the above combinatio...
03/20/2001
6184057Method of manufacturing a photovoltaic foil
The invention pertains to a method of manufacturing a photovoltaic foil supported by a carrier and comprising a plurality of photovoltaic layers which together have the ability of generating electric current from incident light, a back-electrode layer on ...
02/06/2001
6140146Automated RFID transponder manufacturing on flexible tape substrates
Processes and apparatus for manufacturing radio frequency transponders having substrates formed from a flexible tape or film are disclosed. The RF transponders are formed on the tape so that their longest dimension (e.g., their length ("L")) is oriented p...
10/31/2000
6054336Method of manufacturing an electronic device
It may be necessary to provide conductors at very small distances from one another when electronic circuits, for example integrated circuits, are manufactured on an insulating substrate. A multilayer wiring system is often used in that case. The invention...
04/25/2000
5986205Stainless steel sheet and a substrate for a solar cell and manufacturing method thereof
The stainless steel sheet useful as a substrate for non-single crystalline semiconductor solar cells has minute ripples with undulations along a rolling direction, and its surface roughness is controlled in the range of Rz 0.3-1.4 μm and R
11/16/1999
5897332Method for manufacturing photoelectric conversion element
A method for manufacturing a photoelectric conversion element containing at least one pin junction, wherein a diffusion preventing layer is provided between an n-type layer and an i-type layer and/or between an i-type layer and a p-type layer, and the dif...
04/27/1999
5795355Integrated micro-environment container loader apparatus having a semipermeable barrier
An integrated wafer loader is provided for use with a vacuum process chamber. At least one semipermeable membrane provided in the separator between upper and lower chambers of a load lock permits air flow while preventing particulate matter transfer. A mi...
08/18/1998
5780313Method of fabricating semiconductor device
An improved semiconductor device manufacturing system and method is shown. In the system, undesirable sputtering effect can be averted by virtue of a combination of an ECR system and a CVD system. Prior to the deposition according to the above combination...
07/14/1998
5753531Method for continuously making a semiconductor device
A method of continuous manufacture of semiconductor integrated circuits, said method and apparatus adapted to contain the semiconductor substrate, semiconductor deposition coating processes, and etching processes within a substantially collocated series o...
05/19/1998
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