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Class 438/586 - Combined with formation of ohmic contact to semiconductor region


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Processes having combined therewith the formation of an
No. of patents: 1227
Last issue date: 05/29/2012


1                      
NumberTitleIssue Date
8187962Self aligned silicided contacts
Structures and methods of forming self aligned silicided contacts are disclosed. The structure includes a gate electrode disposed over an active area, a liner disposed over the gate electrode and at least a portion of the active area, an insulating layer disposed ov...
05/29/2012
8187963Method of forming back contact to a cadmium telluride solar cell
A method of forming an ohmic contact to a surface of a Cd and Te containing compound film as may be found, for example in a photovoltaic cell. The method comprises forming a Te-rich layer on the surface of the Cd and Te containing compound film; depositing an interf...
05/29/2012
8183139Reduced defectivity in contacts of a semiconductor device comprising replacement gate electrode structures by using an intermediate cap layer
Superior contact elements may be formed in semiconductor devices in which sophisticated replacement gate approaches may be applied. To this end, a dielectric cap layer is provided prior to patterning the interlayer dielectric material so that any previously created ...
05/22/2012
8143152Manufacturing method of semiconductor device having self-aligned contact connected to silicide layer on substrate surface
A semiconductor device 100 includes: a silicon substrate 102; a first gate 114a including a gate electrode 108 formed on the silicon substrate 102 and sidewalls 112 formed on the sidewalls of the gate electrode 108...
03/27/2012
8138074ICs with end gates having adjacent electrically connected field poly
A method of forming an IC includes forming a first and a second gate portion using a poly mask. The first portion includes a first active poly gate having a line width W1 over an end of a first active area framed by a first active area edge and a first ad...
03/20/2012
8088678Semiconductor manufacturing apparatus and method
A first aspect of the present invention provides a semiconductor manufacturing apparatus including: a load lock chamber; a transfer chamber; and a treatment chamber 1 and a treatment chamber 2 which carry out treatment using plasma, wherein, in the tre...
01/03/2012
8084344Methods of fabricating a semiconductor device
A method of fabricating a contact plug of a semiconductor device is provided, the method includes forming a gate pattern on a substrate, forming a capping pattern to cover an upper surface and sidewalls of the gate pattern, forming an interlayer insulation layer on ...
12/27/2011
8080468Methods for fabricating passivated silicon nanowires and devices thus obtained
Methods for fabricating passivated silicon nanowires and an electronic arrangement thus obtained are described. Such arrangements may comprise a metal-oxide-semiconductor (MOS) structure such that the arrangements may be utilized for MOS field-effect transistors (MO...
12/20/2011
8076230Method of forming self-aligned contacts and local interconnects
A method for simultaneous formation of a self-aligned contact of a core region and a local interconnect of a peripheral region of an integrated circuit includes etching a cap dielectric layer to simultaneously form a hole in the core region and a trench in the perip...
12/13/2011
8003505Image sensor and method of fabricating the same
A method of fabricating an image sensor. A method of fabricating an image sensor may include preparing a substrate including a pixel region and/or a logic region having transistors and/or gates. A method of fabricating an image sensor may include forming a first int...
08/23/2011
7932166Field effect transistor having a stressed contact etch stop layer with reduced conformality
By forming a highly non-conformal stressed overlayer, such as a contact etch stop layer, the efficiency of the stress transfer into the respective channel region of a field effect transistor may be significantly increased. For instance, non-conformal PECVD technique...
04/26/2011
7897499Method for fabricating a semiconductor device with self-aligned contact
A method for fabricating a semiconductor device includes forming electrode patterns over a substrate, wherein the electrode patterns include a hard mask, forming a passivation layer on the electrode patterns, forming an insulation layer on the passivation layer, fil...
03/01/2011
7888252Self-aligned contact
A method of forming contacts for semiconductor devices, the method including depositing an inter-level dielectric (ILD) over a plurality of gate stacks, in which the divots within the inter-level dielectric layer are defined by the spaces between the gate stacks, fi...
02/15/2011
7884004Maskless process for suspending and thinning nanowires
Semiconductor-based electronic devices and techniques for fabrication thereof are provided. In one aspect, a device is provided comprising a first pad; a second pad and a plurality of nanowires connecting the first pad and the second pad in a ladder-like configurati...
02/08/2011
7884005Method of manufacturing a semiconductor device
Embodiments relate to a method of manufacturing a semiconductor device that may simplify a manufacturing process and may reduce process costs. According to embodiments, the method may include simultaneously forming a first gate of a first device area and a second ga...
02/08/2011
7879707Semiconductor integrated circuit device and related method
Embodiments of the invention provide a semiconductor integrated circuit device and a method for fabricating the device. In one embodiment, the method comprises forming a plurality of preliminary gate electrode structures in a cell array region and a peripheral circu...
02/01/2011
7846825Method of forming a contact hole and method of manufacturing a semiconductor device having the same
In a method of forming a contact hole and a method of manufacturing a semiconductor device having the same, a first insulation interlayer is formed on a substrate. A dummy pattern is formed on the first insulation interlayer. A second insulation interlayer is formed...
12/07/2010
7842593Semiconductor device and method for fabricating the same
A method for fabricating a semiconductor device includes forming a recess gate over a semiconductor substrate. A gate spacer is formed on a sidewall of the recess gate. The semiconductor substrate in a landing plug contact region is soft-etched to form a recess havi...
11/30/2010
7767566Flash memory device and method of forming the device
Cell gate patterns including first portions separated from each other with a first distance and second portions separated from each other with a second distance less than the first distance, and spacers are formed both sidewalls of the pair of cell gate patterns. Th...
08/03/2010
7737015Formation of fully silicided gate with oxide barrier on the source/drain silicide regions
A simple and cost effective method of forming a fully silicided (FUSI) gate of a MOS transistor is disclosed. In one example, the method comprises forming a nitride hardmask overlying a polysilicon gate, forming an S/D silicide in source/drain regions of the transis...
06/15/2010
7718520Semiconductor integrated circuit device and related method
Embodiments of the invention provide a semiconductor integrated circuit device and a method for fabricating the device. In one embodiment, the method comprises forming a plurality of preliminary gate electrode structures in a cell array region and a peripheral circu...
05/18/2010
7713855Method for forming bit-line contact plug and transistor structure
A method for forming a bit-line contact plug includes providing a substrate including a transistor which includes a gate structure and a source/drain at both sides of the gate structure; forming a conductive layer, a bit-line contact material layer and a hard mask l...
05/11/2010
7709366Semiconductor device and method of manufacturing the same
A semiconductor device has a pair of impurity regions in a semiconductor substrate. A silicon layer is formed on the impurity region. A gate insulating film is formed between the impurity regions. A gate electrode is formed on the gate insulating film. A first silic...
05/04/2010
7696074Method of manufacturing NAND flash memory device
A method of manufacturing a NAND flash memory device, including the steps of forming gates over a semiconductor substrate; forming a junction region over the semiconductor substrate between the gates; forming a buffer oxide film on the gates and the semiconductor su...
04/13/2010
7655548Programmable power management using a nanotube structure
Programmable power management using a nanotube structure is disclosed. In one embodiment, a method includes coupling a nanotube structure of an integrated circuit to a conductive surface when a command is processed, and enabling a group of transistors of the integra...
02/02/2010
7615475Method for fabricating landing polysilicon contact structures for semiconductor devices
A method for forming an integrated circuit device, e.g., memory, logic. The method includes providing a semiconductor substrate (e.g., silicon wafer) comprising a surface region and forming a polysilicon layer overlying the surface region. Preferably, the polysilico...
11/10/2009
7575990Method of forming self-aligned contacts and local interconnects
A method of forming a plurality of self-aligned contacts of a core region and local interconnect openings of a peripheral region of a semiconductor device is disclosed. A plurality of gate-structures are formed on the core and peripheral regions of a semiconductor s...
08/18/2009
7572721Method of forming a semiconductor device having an etch stop layer and related device
In one embodiment, a lower interlayer dielectric layer, and first and second landing pads penetrating the lower interlayer dielectric layer are formed on a substrate. Interconnection patterns covering the second landing pads are formed on the lower interlayer dielec...
08/11/2009
7553748Semiconductor device and method of manufacturing the same
According to one embodiment, a gate structure including a gate insulation pattern, a gate pattern and a gate mask is formed on a channel region of a substrate to form a semiconductor device. A spacer is formed on a surface of the gate structure. An insulating interl...
06/30/2009
RE40790Method for making electrical contact with an active area through sub-micron contact openings and a semiconductor device
A semiconducting processing method for making electrical contacts with an active area in sub-micron geometries includes: (a) providing a pair of conductive runners on a semiconductor wafer; (b) providing insulative spacers on the sides of the conductive runners wher...
06/23/2009
7538017Method of manufacturing a thin film transistor, a thin film transistor manufactured by the method, a method of manufacturing flat panel display device, and a flat panel display device manufactured by the method
Provided are a method of manufacturing a plastic substrate having a TFT, a substrate manufactured thereby, a method of manufacturing a flat panel display device, and a flat display device manufactured thereby, which can be used for a flexible flat display device. Th...
05/26/2009
7528059Method for reducing polish-induced damage in a contact structure by forming a capping layer
By forming a capping layer after a CMP process for planarizing the surface topography of an ILD layer, any surface irregularities may be efficiently sealed, thereby reducing the risk for forming conductive surface irregularities during the further processing. Conseq...
05/05/2009
7432182Semiconductor device and method for manufacturing the same
An exemplary method for manufacturing a semiconductor device includes: forming an insulating layer over a semiconductor substrate having a gate insulating layer, a gate, and a spacer, respectively formed thereabove and one or more junction regions formed therein so ...
10/07/2008
7427546Transistor device and method for manufacturing the same
A transistor device includes a recess in a surface of semiconductor substrate, a gate insulation layer formed over an inner side of the recess, a gate conductor filling the recess in which the gate insulation layer is formed, and source and drain regions located ove...
09/23/2008
7422942Method for fabricating a semiconductor device having an insulation film with reduced water content
A semiconductor device having a self-aligned contact hole is formed by providing a side wall oxide film on a gate electrode, covering the gate electrode and the side wall oxide film by an oxide film and further covering the oxide film by a nitride film, wherein the ...
09/09/2008
7419896Method for forming landing plug contact in semiconductor device
A method for forming a landing contact plug in a semiconductor device is provided. The method includes the steps of: forming a plurality of gate structures on a substrate, each gate structure including a gate hard mask; forming an inter-layer insulation layer over t...
09/02/2008
7419895NAND memory arrays
Methods and apparatus are provided. A source slot and a drain contact region are formed at opposite ends of a NAND string disposed on a substrate of a NAND memory array using a single mask. The drain contact region is self-aligned to a drain select gate. The NAND st...
09/02/2008
7411251Self protecting NLDMOS, DMOS and extended voltage NMOS devices
In an NLDMOS, DMOS or NMOS active device the ability to withstand snapback under stress conditions is provided by moving the hot spot away from the drain contact region. This is achieved by moving the drain contact region further away from the gate and including an ...
08/12/2008
7387919Methods of fabricating a semiconductor device having a node contact structure of a CMOS inverter
In one embodiment, an intrinsic single crystalline semiconductor plug is formed to pass through a lower insulating layer using a selective epitaxial growth process employing a node impurity region as a seed layer, and a single crystalline semiconductor body pattern ...
06/17/2008
7381617Method of fabricating flash memory device
A method of fabricating flash memory devices includes the steps of forming a stop nitride film and an oxide film on a semiconductor substrate having a predetermined structure formed therein, forming trenches in the oxide film and the stop nitride film, forming barri...
06/03/2008
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