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Class 438/540 - Including plural controlled heating or cooling steps or nonuniform heating


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Processes including regulated multiple cooling or heating
No. of patents: 97
Last issue date: 09/11/2007


1      
NumberTitleIssue Date
7268065Methods of manufacturing metal-silicide features
A method of manufacturing a microelectronic device including forming an opening in a dielectric layer located over a substrate, forming a semi-conductive layer substantially conforming to the opening, and forming a conductive layer substantially conforming to the se...
09/11/2007
7241672Method and apparatus for rapid cooldown of annealed wafer
A method for annealing a semiconductor substrate. The method includes turning on at least one heat source, heating a semiconductor substrate in a chamber, turning off the at least one heat source, and cooling the semiconductor substrate in the chamber. The heating a...
07/10/2007
7235430Substrates having increased thermal conductivity for semiconductor structures
Substrates having increased thermal conductivity are provided, comprising a body having opposed surfaces and a cavity that opens on at least one surface, the cavity containing at least one material having a greater thermal conductivity than the body. Devices are pro...
06/26/2007
7169696Method for making a system for selecting one wire from a plurality of wires
A system and method for selecting nanometer-scaled devices. The method includes a plurality of semiconductor wires. Two adjacent semiconductor wires of the plurality of semiconductor wires are associated with a separation smaller than or equal to 100 nm. Additionall...
01/30/2007
7135387Method of manufacturing semiconductor element
A method for stably activating pn-successive layers in a semiconductor element in a short time is disclosed. Pulsed beams, each of which has a pulse shape that is approximately rectangular, are projected from respective laser irradiation devices and successively com...
11/14/2006
7022553Compact system module with built-in thermoelectric cooling
An improved integrated circuit package for providing built-in heating or cooling to a semiconductor chip is provided. The improved integrated circuit package provides increased operational bandwidth between different circuit devices, e.g. logic and memory chips. The...
04/04/2006
6962858Method for reducing free surface roughness of a semiconductor wafer
The invention provides a method of reducing the roughness of the free surface of a wafer of semiconductor material by applying a rapid thermal annealing process under a pure argon atmosphere for a time sufficient to uniformly heat and smooth the free surface of the ...
11/08/2005
6946379Insulative cap for laser fusing
A semiconductor device having at least one fuse and an alignment mark formed therein. An etch resistant layer over the surface of the fuse and alignment mark, which provides a uniform passivation thickness for use in conjunction with laser fuse deletion processes.
09/20/2005
6900130Method for locally heating a region in a semiconductor substrate
A method is proposed for locally heating a region that is disposed in a substrate. A substrate is provided and at least one region is produced in the substrate with a lower specific resistance than the surrounding substrate. The region is then locally heated by indu...
05/31/2005
6858887BJT device configuration and fabrication method with reduced emitter width
A BJT device configuration includes an emitter finger and via arrangement which reduces emitter finger width, and is particularly suitable for use with compound semiconductor-based devices. Each emitter finger includes a cross-shaped metal contact which provides an ...
02/22/2005
6858508SOI annealing method
A method for annealing an SOI in which two annealing steps are followed by a cooling step. During the second annealing step, the annealing temperature is from 993° C. to the melting point of silicon. During the cooling step, the cooling rate is not less than 0.12°...
02/22/2005
6809015Method for heat treatment of silicon wafers and silicon wafer
According to the present invention, there are provided a method for heat treatment of silicon wafers wherein a silicon wafer is subjected to a heat treatment at a temperature of from 1000° C. to the melting point of silicon in an inert gas atmosphere, and temperatu...
10/26/2004
6767809Method of forming ultra shallow junctions
The present invention relates to a method of fabricating a semiconductor device. In specific embodiments, the method comprises providing a semiconductor substrate, and ion implanting dopant impurities over a time period into the semiconductor device by varying an io...
07/27/2004
6734081Shallow trench isolation structure for laser thermal processing
Provided are methods and composition for forming an isolation structure on an integrated circuit substrate. A trench is etched in the integrated circuit substrate. A light barrier layer is then formed in the trench such that the light barrier layer at least partiall...
05/11/2004
6695903Dopant pastes for the production of p, p+, and n, n+ regions in semiconductors
The invention relates to novel boron, phosphorus or boron-aluminium dopant pastes for the production of p, p+ and n, n+ regions in monocrystalline and polycrystalline Si wafers, and of corresponding pastes for use as masking pastes in semiconductor fabric...
02/24/2004
6673704Semiconductor device and method of manufacturing the same
A method of manufacturing semiconductor device which comprises the steps of forming an insulating film on an Si substrate provided with a wiring layer, forming a contact hole connected to the wiring layer and a wiring groove in the insulating film, fillin...
01/06/2004
6656749In-situ monitoring during laser thermal annealing
A method of manufacturing a semiconductor device includes thermal annealing source/drain regions with a laser, measuring a depth of the source/drain regions, and adjusting a parameter of the laser used in the thermal annealing process. After the laser is ...
12/02/2003
6582998Method for fabricating nonvolatile semiconductor memory device
Ions of arsenic are selectively implanted at a high concentration into a substrate through a first passivation film of silicon dioxide to obtain a shallow junction, thereby forming a source region with a low resistivity and a first drain region. Then, aft...
06/24/2003
6573159Method for thermally annealing silicon wafer and silicon wafer
According to the present invention, there are provided a method for heat treatment of silicon wafers wherein a silicon wafer is subjected to a heat treatment at a temperature of from 1000° C. to the melting point of silicon in an inert gas atmosphere, an...
06/03/2003
6500741Method for making high voltage device
An electrical device such as a diode usable in high voltage applications wherein the electrical device is fabricated from a method which yields a plurality of high voltage electrical devices, the present method including providing a substrate of a semicon...
12/31/2002
6479885High voltage device and method
An electrical device such as a diode usable in high voltage applications wherein the electrical device is fabricated from a method which yields a plurality of high voltage electrical devices, the present method including providing a substrate of a semicon...
11/12/2002
6376346High voltage device and method for making the same
An electrical device such as a diode usable in high voltage applications wherein the electrical device is fabricated from a method which yields a plurality of high voltage electrical devices, the present method including providing a substrate of a semicon...
04/23/2002
6268270Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization
Methods of optimizing a preheat recipe for rapid thermal processing workpieces are provided. In one aspect, a method of manufacturing is provided that includes preheating a rapid thermal processing chamber according to a preheating recipe and processing a...
07/31/2001
6159812Reduced boron diffusion by use of a pre-anneal
A method for slowing the diffusion of boron ions in a CMOS structure includes a preanneal step which can be incorporated as part of a step in which silane is deposited across the surface of the wafer. After the last implant on a CMOS device, silane (SiH
12/12/2000
5976921Method for manufacturing electrostatic discharge protection (ESD) and BiCMOS
A semiconductor device having an electrostatic discharge protection device and at least one accompanying device selected from the group comprising of a N or P channel MOS transistor, CMOS, bipolar transistor and BiCMOS, in which the electrostatic discharg...
11/02/1999
5834343Method of manufacturing thin film transistor
The method of manufacturing a thin film transistor, including the steps of: a first step, after a poly-crystal silicon film has been formed on a substrate (1), for forming a layer to be formed as an conductive layer (2a) for the thin film transistor by pa...
11/10/1998
5773337Method for forming ultra-shallow junction of semiconductor device
There is disclosed a method for forming an ultra-shallow junction of a semiconductor device, comprising a four-stage RTA process following the ion implantation of dopants for source/drain junction, the RTA process being carried out with high temperature-e...
06/30/1998
5760453Moisture barrier layers for integrated circuit applications
The structure and method is provided which prevents moisture and contamination from diffusing through openings (e.g., fuse windows) in insulating layers to product devices. Three moisture barrier layers form a moisture impervious boundary system to preven...
06/02/1998
5733801Method of making a semiconductor device with alignment marks
A first trench is formed in an element-separating region on the surface of a semiconductor substrate, and a second trench is formed in an alignment mark region thereof. When a first insulating substance is deposited on the substrate surface so as to bury ...
03/31/1998
5525541Method of making an electronic and/or photonic component
A method of making a component presenting at least one integrated electro-optical and/or photonic function, in which at least one dielectric layer of doped SiOx is deposited on a quantum well layer based on III/V materials, and in which the res...
06/11/1996
5447871Electrically conductive interconnection through a body of semiconductor material
Methods and structures of an etched-back thermomigrated interconnection which provides means for electrically connecting coplanar surfaces of a body of semiconductor material while concurrently providing means of making mechanical, electrical, and thermal...
09/05/1995
5223453Controlled metal-semiconductor sintering/alloying by one-directional reverse illumination
Metal strips deposited on a top surface of a semiconductor substrate are sintered at one temperature simultaneously with alloying a metal layer on the bottom surface at a second, higher temperature. This simultaneous sintering of metal strips and alloying...
06/29/1993
5183780Method of fabricating semiconductor device
In a method of fabricating a semiconductor device according to the present invention, a semiconductor film is formed on a substrate, and an insulator film is formed so as to cover the semiconductor film. Then, a dopant source is arranged on the insulator ...
02/02/1993
4720308Method for producing high-aspect ratio hollow diffused regions in a semiconductor body and diode produced thereby
A semiconductor device and a method for its preparation are disclosed, wherein a body of semiconducting material has at least one bore extending completely therethrough, this bore having a substantially constant diameter of less than about 1.5 mils and an...
01/19/1988
4595428Method for producing high-aspect ratio hollow diffused regions in a semiconductor body
A semiconductor device and a method for its preparation are disclosed, wherein a body of semiconducting material has at least one bore extending completely therethrough, this bore having a substantially constant diameter of less than about 1.5 mils and an...
06/17/1986
4523067Temperature gradient zone melting apparatus
An apparatus is provided for fabricating a semiconductor device by thermal gradient zone melting, whereby metal-rich droplets such as aluminum migrate through a semiconductor wafer such as silicon to create conductive paths. One surface of the wafer is pl...
06/11/1985
4519850Process for the thermo-migration of liquid phases
In a process for the thermo-migration of liquid phases in a temperature gradient, which process starts from a metal coating (2) on a semiconducting substrate (1), the metal coating (2) is applied to a plane substrate surface (11), the temperature gradient...
05/28/1985
4398974Temperature gradient zone melting process employing a buffer layer
A process is provided for fabricating a semiconductor device by thermal gradient zone melting, whereby metal-rich droplets such as aluminum migrate through a semiconductor wafer such as silicon to create conductive paths. One surface of the wafer in provi...
08/16/1983
4335362Semiconductor device and a method of contacting a partial region of a semiconductor surface
A semiconductor device comprising, a plurality of semiconductor layers having an outer semiconductor layer, and a contact layer uniformly and entirely covering said outer semiconductive layer and having over its entire surface the same material compositio...
06/15/1982
4257824Photo-induced temperature gradient zone melting
A temperature gradient zone melting process is disclosed wherein the temperature gradient is established substantially across only the molten zone by preferentially heating the molten zone. In a specific embodiment, the mechanism for inputting heat to the...
03/24/1981
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