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Class 438/531 - Using shadow mask


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process involving the use of a spaced templet positioned
No. of patents: 80
Last issue date: 05/08/2012


1    
NumberTitleIssue Date
8173527Stepped masking for patterned implantation
An improved method of moving a mask to perform a pattern implant of a substrate is disclosed. The mask has a plurality of apertures, and is placed between the ion source and the substrate. After the substrate is exposed to the ion beam, the mask is indexed to a new ...
05/08/2012
8008176Masked ion implant with fast-slow scan
An improved method of producing solar cells utilizes a mask which is fixed relative to an ion beam in an ion implanter. The ion beam is directed through a plurality of apertures in the mask toward a substrate. The substrate is moved at different speeds such that the...
08/30/2011
7884001Image sensor and method for manufacturing the same
Embodiments relate to an image sensor and a method of manufacturing an image sensor. According to embodiments, an image sensor may include a gate over a semiconductor substrate, a first impurity region over the semiconductor substrate, a second impurity region over ...
02/08/2011
7871908Method of manufacturing semiconductor device
The method of manufacturing a semiconductor device comprising: forming a first hard mask layer and a second hard mask layer on the layer to be etched (S11); a first groove-forming mask pattern forming process for forming a groove-forming mask pattern which ha...
01/18/2011
7541266Covert transformation of transistor properties as a circuit protection method
A technique for and structures for camouflaging an integrated circuit structure. The technique includes the use of a light density dopant (LDD) region of opposite type from the active regions resulting in a transistor that is always off when standard voltages are ap...
06/02/2009
7432179Controlling gate formation by removing dummy gate structures
A method of forming semiconductor structures comprises following steps. A gate dielectric layer is formed over a substrate in an active region. A gate electrode layer is formed over the gate dielectric layer. A first photo resist is formed over the gate electrode la...
10/07/2008
7381607Method of forming a spiral inductor in a semiconductor substrate
An inductor formed on a semiconductor substrate, comprising active device regions. The inductor comprises conductive lines formed on a dielectric layer overlying the semiconductor substrate. The conductive lines are patterned and etched into the desired shape, in on...
06/03/2008
7375012Method of forming multilayer film
This disclosure describes system(s) and/or method(s) enabling contacts for individual nanometer-scale-thickness layers of a multilayer film. ...
05/20/2008
7314803Method for producing a semiconductor structure
In a method for producing a semiconductor structure a semiconductor a substrate with a top surface is provided. A gate dielectric layer is provided on the top surface and on the gate dielectric layer is provided a memory cell array region with a first plurality of g...
01/01/2008
7297581SRAM formation using shadow implantation
A method of doping fins of a semiconductor device that includes a substrate includes forming multiple fin structures on the substrate, each of the fin structures including a cap formed on a fin. The method further includes performing a first tilt angle implant proce...
11/20/2007
7285468Methods of forming semiconductor constructions
The invention includes a semiconductor construction having a pair of channel regions that have sub-regions doped with indium and surrounded by boron. A pair of transistor constructions are located over the channel regions and are separated by an isolation region. Th...
10/23/2007
7268065Methods of manufacturing metal-silicide features
A method of manufacturing a microelectronic device including forming an opening in a dielectric layer located over a substrate, forming a semi-conductive layer substantially conforming to the opening, and forming a conductive layer substantially conforming to the se...
09/11/2007
7256094Method for changing threshold voltage of device in resist asher
A method for forming a dopant in a substrate, by accumulating at least one dopant species in an asher chamber and forming the accumulated dopant species on an exposed portion of the substrate. A target concentration for the plasma chamber dopant species is determine...
08/14/2007
7250331Mask for crystallizing and method of crystallizing amorphous silicon using the same
A method of crystallizing amorphous silicon using a mask having a transmitting portion including a plurality of stripes, wherein end lines of at least two stripes are not collinear; and a blocking portion enclosing the plurality of stripes includes the steps of sett...
07/31/2007
7244655Method of manufacturing semiconductor device capable of suppressing impurity concentration reduction in doped channel region arising from formation of gate insulating film
A method of manufacturing a semiconductor device is provided that can suppress impurity concentration reduction in a doped channel region arising from formation of a gate insulating film. With a silicon oxide film (20) and a silicon nitride film (21) b...
07/17/2007
7217656Structure and method for bond pads of copper-metallized integrated circuits
A metal structure for a contact pad of a wafer or substrate (101), which have copper interconnecting traces (102) surrounded by a barrier metal layer (103). The wafer or substrate is protected by an insulating overcoat (104). In the struc...
05/15/2007
7195998Compound semiconductor device and manufacturing method thereof
A compound semiconductor device including: an isolated mesa section on which an upper surface having two pairs of parallel sides is formed by mesa etching a compound semiconductor wafer, wherein the mesa section is formed from at least a forward mesa surface which i...
03/27/2007
7189623Semiconductor processing method and field effect transistor
A method of forming a transistor gate includes forming a gate oxide layer over a semiconductive substrate. Chlorine is provided within the gate oxide layer. A gate is formed proximate the gate oxide layer. In another method, a gate and a gate oxide layer are formed ...
03/13/2007
7125777Asymmetric hetero-doped high-voltage MOSFET (AHMOS)
An asymmetric hetero-doped metal oxide (AH2MOS) semiconductor device includes a substrate and an insulated gate on the top of the substrate disposed between a source region and a drain region. On one side of the gate, heterodoped tub and source regions ar...
10/24/2006
7122453Methods of patterning radiation, methods of forming radiation-patterning tools, and radiation-patterning tools
The invention includes a method of patterning radiation. The radiation is simultaneously passed through a structure and through a subresolution assist feature that is transmissive of at least a portion of the radiation. The subresolution assist feature alters a patt...
10/17/2006
7101739Method for forming a schottky diode on a silicon carbide substrate
A method for manufacturing a vertical Schottky diode with a guard ring on a lightly-doped N-type silicon carbide layer, including forming a P-type epitaxial layer on the N-type layer; implanting N-type dopants in areas of the P-type epitaxial layer to neutralize in ...
09/05/2006
7064048Method of forming a semi-insulating region
A semiconductor substrate is provided, and at least one first mask is formed above the semiconductor substrate. The first mask blocks at least one semi-insulating region. A second mask is thereafter formed on a surface of the semiconductor substrate. The second mask...
06/20/2006
6996892Circuit board embedded inductor
A circuit board having an embedded inductor and a process for making the circuit board is provided. In general, the process begins by providing a core structure including a dielectric core layer and a first metal layer on a top surface of the dielectric core layer. ...
02/14/2006
6998319Method of manufacturing semiconductor device capable of suppressing impurity concentration reduction in doped channel region arising from formation of gate insulating film
A method of manufacturing a semiconductor device is provided that can suppress impurity concentration reduction in a doped channel region arising from formation of a gate insulating film. With a silicon oxide film (20) and a silicon nitride film (21) b...
02/14/2006
6967147Nitrogen implantation using a shadow effect to control gate oxide thickness in DRAM semiconductor
Process for forming dual gate oxides for DRAMS by incorporating different thicknesses of gate oxides by using nitrogen implantation. Either angled nitrogen implantation or nitride spacers is used to create a “shadow effect” or area, which limits the nitrogen dos...
11/22/2005
6955726Mask and mask frame assembly for evaporation
A mask frame assembly includes a frame having an opening and a mask having at least two unit mask elements. Both ends of each unit mask element are fixed to the frame in a state of tension. The unit mask elements include a unit masking pattern, and overlap each othe...
10/18/2005
6951823Plasma ashing process
A substantially oxygen-free and nitrogen-free plasma ashing process for removing photoresist in the presence of a low k material from a semiconductor substrate includes forming reactive species by exposing a plasma gas composition to an energy source to form plasma....
10/04/2005
6949389Encapsulation for organic light emitting diodes devices
An embodiment of an encapsulated OLED device is described. This embodiment of the encapsulated OLED device is formed by: fabricating multiple OLED devices on a substrate; depositing at least one planarization layer on the OLED devices; hardening the at least one pla...
09/27/2005
6913979Method of manufacturing a metal oxide semiconductor transistor
Disclosed is a method of manufacturing a MOS transistor having an enhanced reliability. A passivation layer is formed on a gate electrode and on a substrate to prevent a generation of a recess on the substrate. After a mask pattern is formed on the substrate for mas...
07/05/2005
6884632Ion beam definition of magnetoresistive field sensors
A magnetoresistive (MR) sensor can be shaped using ion beam irradiation and/or implantation through a mask introduced between a MR structure and an ion source. The mask covers selected portions of the MR structure to define the track width of the sensor. Ion irradia...
04/26/2005
6884703Manufacturing of a low-noise mos device
At the surface of a substrate a gate oxide layer is produced and is given a dual thickness. A first oxide layer is produced over the surface of a substrate by thermal oxidation and is covered by a mask layer defining suitably located openings. A material acceleratin...
04/26/2005
6852610Semiconductor device and method for manufacturing the same
A semiconductor device includes a gate electrode formed on a semiconductor region via a gate insulative film and an extension high concentration diffusion layer of a first conductivity type formed in the semiconductor region beside the gate electrode. A dislocation ...
02/08/2005
6828202Semiconductor region self-aligned with ion implant shadowing
A semiconductor device includes doped regions of a substrate spaced at selected distances from features at an upper surface of the substrate. According to an example embodiment of the present invention, the doped regions are implanted and spaced apart from the featu...
12/07/2004
6815317Method to perform deep implants without scattering to adjacent areas
A method of fabricating an integrated circuit in and on a semiconductor substrate with deep implantations by applying a scattered ion capturing layer in the resist mask opening to capture any implanted ions scattered in the resist and deflected out of the resist int...
11/09/2004
6815318Manufacturing method of semiconductor device
When an opening diameter of a top end of a substantially column-shaped contact hole is S1, an opening diameter of a top end of a substantially column-shaped contact hole is T1, and a thickness of a silicon insulating layer is h, then contact holes are formed so as t...
11/09/2004
6797596Sacrificial deposition layer as screening material for implants into a wafer during the manufacture of a semiconductor device
A method used during the formation of a semiconductor device reduces ion channeling during implantation of the wafer. The method comprises providing a semiconductor wafer and an unetched transistor gate stack assembly over the wafer. The unetched transistor gate sta...
09/28/2004
6787406Systems and methods for forming dense n-channel and p-channel fins using shadow implanting
A method facilitates the doping of fins of a semiconductor device that includes a substrate. The method includes forming fin structures on the substrate, where each of the fin structures includes a cap formed on a fin. The method further includes performing a first ...
09/07/2004
6780781Method for manufacturing an electronic device
A method for manufacturing an electronic device is provided. In one example of the method, the method prevents deformation of a resist mask caused by the irradiation of exposure light. The resist mask has a resist as an opaque element, and can afford mask patterns u...
08/24/2004
6774006Microelectronic device fabricating method, and method of forming a pair of field effect transistor gate lines of different base widths from a common deposited conductive layer
A microelectronic device fabricating method includes providing a substrate having a mean global outer surface extending along a plane. A first portion is formed over the substrate comprising a straight linear segment which is angled from the plane and forming a seco...
08/10/2004
6716729Stable bisphenolic compositions
There is provided a stable single-phase composition of bisphenolic stillbottoms and methods for making such compositions. There is also provided a resole and a novolac composition that includes in the manufacture of the resins the use of a stable solution of bisphen...
04/06/2004
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