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Class 438/505 - Doping of semiconductor


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process wherein a semiconductive region of the substrate
No. of patents: 84
Last issue date: 01/03/2012


1      
NumberTitleIssue Date
8088677Method of manufacturing semiconductor device, and semiconductor device
A method of manufacturing a semiconductor device including implanting an element selected from fluorine and nitrogen, over the entire region of a semiconductor substrate; oxidizing the semiconductor substrate to thereby form a first oxide film over the surface of th...
01/03/2012
RE43045Multi-chamber MOCVD growth apparatus for high performance/high throughput
In one embodiment the present invention is a method of conducting multiple step multiple chamber chemical vapor deposition while avoiding reactant memory in the relevant reaction chambers. The method includes depositing a layer of semiconductor material on a substra...
12/27/2011
7897495Formation of epitaxial layer containing silicon and carbon
Methods for formation of epitaxial layers containing silicon are disclosed. Specific embodiments pertain to the formation and treatment of epitaxial layers in semiconductor devices, for example, Metal Oxide Semiconductor Field Effect Transistor (MOSFET) devices. In ...
03/01/2011
7772097Methods of selectively depositing silicon-containing films
An embodiment provides a method for selectively depositing a single crystalline film. The method includes providing a substrate, which includes a first surface having a first surface morphology and a second surface having a second surface morphology different from t...
08/10/2010
7682953Method of forming p-type compound semiconductor layer
A method of forming a p-type compound semiconductor layer includes increasing a temperature of a substrate loaded into a reaction chamber to a first temperature. A source gas of a Group III element, a source gas of a p-type impurity, and a source gas of nitrogen con...
03/23/2010
7648895Vertical CVD apparatus for forming silicon-germanium film
A vertical CVD apparatus is arranged to process a plurality of target substrates all together to form a silicon germanium film. The apparatus includes a reaction container having a process field configured to accommodate the target substrates, and a common supply sy...
01/19/2010
7642178Semiconductor device, method for manufacturing the same and method for evaluating the same
A method for manufacturing a semiconductor device includes steps of: forming a first epitaxial film on a silicon substrate; forming a trench in the first epitaxial film; and forming a second epitaxial film on the first epitaxial film and in the trench. The step of f...
01/05/2010
7368368Multi-chamber MOCVD growth apparatus for high performance/high throughput
In one embodiment the present invention is a method of conducting multiple step multiple chamber chemical vapor deposition while avoiding reactant memory in the relevant reaction chambers. The method includes depositing a layer of semiconductor material on a substra...
05/06/2008
7358171Method to chemically remove metal impurities from polycide gate sidewalls
An embodiment includes a process of forming a gate stack that acts to resist the redeposition to the semiconductive substrate of mobilized metal such as from a metal gate electrode. An embodiment also relates to a system that achieves the process. An embodiment also...
04/15/2008
7271467Multiple oxide thicknesses for merged memory and logic applications
Structures are provided for multiple oxide thicknesses on a single silicon wafer. In particular, structures are provided for multiple gate oxide thicknesses on a single chip. The chip can include circuitry including but not limited to the memory and logic technologi...
09/18/2007
7268052Method for reducing soft error rates of memory cells
In one embodiment, a method of fabricating a transistor for a memory cell includes the steps of performing a counter doping implant before or after a source/drain implant. The counter doping implant may comprise one or more implant steps that move a metallurgical ju...
09/11/2007
7256110Crystal manufacturing method
A method of growing a crystal (for example, a GaN system compound semiconductor crystal) on a substrate at least includes forming a first crystalline layer (a GaN system buffer layer), forming a second crystalline layer (a GaN system intermediate layer) and forming ...
08/14/2007
7208396Permanent adherence of the back end of a wafer to an electrical component or sub-assembly
A plurality of successive layers are firmly adhered to one another and to a wafer surface and an electrical component or sub-assembly even when the wafer surface is not even and the layers are bent. The wafer surface is initially cleaned by an ion bombardment of an ...
04/24/2007
7208338Method of manufacturing semiconductor light emitting device
A method of manufacturing a ridge type semiconductor light emitting device includes: a process of epitaxially growing a multi-layered semiconductor layer having at least a first conductive type cladding layer, an active layer, a second conductive type first cladding...
04/24/2007
7198992Method of manufacturing a semiconductor device comprising doping steps using gate electrodes and resists as masks
The present invention is characterized in that a semiconductor film containing a rare gas element is formed on a crystalline semiconductor film obtained by using a catalytic element via a barrier layer, and the catalytic element is moved from the crystalline semicon...
04/03/2007
7199397AMOLED circuit layout
In an active matrix organic light emitting diode (AMOLED) display panel having an improved OLED circuit layout in the TFT back panel, the AMOLED pixels in the AMOLED pixel array are arranged to have the TFT circuit portions of the AMOLED pixels in clustered regions ...
04/03/2007
7195986Microfluidic device with controlled substrate conductivity
A method to achieve controlled conductivity in microfluidic devices, and a device formed thereby. The method comprises forming a microchannel or a well in an insulating material, and ion implanting at least one region of the insulating material at or adjacent the mi...
03/27/2007
7166523Silicon carbide and method of manufacturing the same
In a method of manufacturing a silicon carbide substance, such as a film, a layer, a semiconductor, which is doped with an impurity, a carbonization process is executed after formation of a doped silicon substance which is obtained by carrying out a silicon depositi...
01/23/2007
7157314Vertically stacked field programmable nonvolatile memory and method of fabrication
A very high density field programmable memory is disclosed. An array is formed vertically above a substrate using several layers, each layer of which includes vertically fabricated memory cells. The cell in an N level array may be formed with N+1 masking steps plus ...
01/02/2007
7147718Device and method for the deposition of, in particular, crystalline layers on, in particular, crystalline substrates
The invention relates to a device and method for the deposition of in particular, crystalline layers on one or several, in particular, equally crystalline substrates in a process chamber, by means of reaction gases which are fed to the process chamber where they rea...
12/12/2006
7122449Methods of fabricating semiconductor structures having epitaxially grown source and drain elements
Methods for fabricating facetless semiconductor structures using commercially available chemical vapor deposition systems are disclosed herein. A key aspect of the invention includes selectively depositing an epitaxial layer of at least one semiconductor material on...
10/17/2006
7061021System and method for fabricating diodes
This invention is directed to a system and method of fabricating PN and PiN diodes by diffusing an acceptor impurity into a substrate. This invention is particularly advantageous for fabricating SiC diodes having linearly graded, deep pn junctions. One method that t...
06/13/2006
7045880Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction
Improved methods and structures are provided that are lateral to surfaces with a (110) crystal plane orientation such that an electrical current of such structures is conducted in the direction. Advantageously, improvements in hole carrier mobility of approxim...
05/16/2006
7033921Method and device for depositing crystalline layers on crystalline substrates
The invention relates to a method and device for depositing several crystalline semiconductor layers on at least one semiconductor crystalline substrate. According to said method, gaseous parent substances are introduced into a process chamber of a reactor by means ...
04/25/2006
7018856Calibration standards for dopants/impurities in silicon and preparation method
A multi-point calibration standards and a method of fabricating calibration standards which are used to quantify the dose or concentration of a dopant or impurity in a silicon matrix. The calibration standards include a set of calibration standard wafers for each do...
03/28/2006
7015511Gallium nitride-based light emitting device and method for manufacturing the same
For a light emitting device using gallium nitride (GaN), on a substrate are sequentially formed a GaN-based layer, an AlGaN-based layer, and a light emitting layer. To prevent cracks in the AGaN-based layer, the AlGaN-based layer is formed before planarization of th...
03/21/2006
6960821Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction
Improved methods and structures are provided that are lateral to surfaces with a (110) crystal plane orientation such that an electrical current of such structures is conducted in the direction. Advantageously, improvements in hole carrier mobility of approxim...
11/01/2005
6938668Manufacturing medical devices by vapor deposition
A method of forming a medical device, the method including the steps of providing a substrate, depositing a metallic layer on the substrate by a vapor deposition process, and removing the metallic layer from the substrate. The metallic layer thus removed is the medi...
09/06/2005
6921678Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device
The method for fabricating a nitride semiconductor of the present invention includes the steps of: (1) growing a first semiconductor layer made of a first group III nitride over a substrate by supplying a first group III source and a group V source containing nitrog...
07/26/2005
6887736Method of forming a p-type group II-VI semiconductor crystal layer on a substrate
A method of depositing a p-type magnesium-, cadmium- and/or zinc-oxide-based II-VI Group compound semiconductor crystal layer over a substrate by a metalorganic chemical vapor deposition technique. A reaction gas is supplied to a surface of a heated substrate in a d...
05/03/2005
6797571Method of manufacturing semiconductor device
The present invention provides a method of manufacturing a semiconductor device, in which while a conductive layer is formed on an oxide film formed as an insulating layer by using a CVD method, oxygen deficiency of the oxide film can be avoided without any drop in ...
09/28/2004
6784002Method to make wafer laser marks visable after bumping process
A wafer bumping method comprising the following steps of. A wafer having fields is provided. The wafer having at least one wafer identification character formed thereon within one or more of the fields. A dry film resist is formed over the wafer. Portions of the dry...
08/31/2004
6746941Semiconductor wafer and production method therefor
It is an object of the invention to provide a semiconductor wafer obtained by forming a semiconductor thin film with uniform resistivity on a main surface of a semiconductor single crystal substrate of 300 mm or more in diameter. When a process gas is supplie...
06/08/2004
6743702Nitride-based semiconductor laser device and method of forming the same
A highly reliable semiconductor laser device having a low operating voltage is obtained by increasing adhesive force of the overall electrode layer to a nitride-based semiconductor layer without deteriorating a low contact property. This nitride-based semiconductor ...
06/01/2004
6559038Method for growing p-n heterojunction-based structures utilizing HVPE techniques
A method for fabricating p-type, i-type, and n-type III-V compound materials using HVPE techniques is provided. If desired, these materials can be grown directly onto the surface of a substrate without the inclusion of a low temperature buffer layer. By g...
05/06/2003
6531072Phosphor
A phosphor in the form of a columnar powder capable of exhibiting enhanced luminous efficiency, providing various luminous colors by electron excitation depending on the selection of elements added thereto and having improved life characteristics. The pho...
03/11/2003
6479313Method of manufacturing GaN-based p-type compound semiconductors and light emitting diodes
Compound semiconductor material is irradiated with x-ray radiation to activate a dopant material. Active carrier concentration efficiency may be improved over known methods, including conventional thermal annealing. The method may be employed for III-V gr...
11/12/2002
6475825Process for preparing zinc oxide films containing p-type dopant
A p-type zinc oxide film and a process for preparing the film is disclosed. In a preferred embodiment, the p-type zinc oxide film contains arsenic and is grown on a gallium arsenide substrate. The p-type zinc oxide film has a net acceptor concentration of...
11/05/2002
6454854Semiconductor wafer and production method therefor
It is an object of the invention to provide a semiconductor wafer obtained by forming a semiconductor thin film with uniform resistivity on a main surface of a semiconductor single crystal substrate of 300 mm or more in diameter. When a process gas is sup...
09/24/2002
6379990Method of fabricating a micromechanical semiconductor configuration
A membrane of the micromechanical semiconductor configuration is formed within a cavity. The membrane is formed by a crystalline layer within the substrate or within an epitaxial sequence of layers of the semiconductor configuration arranged on a substrat...
04/30/2002
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