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| Number | Title | Issue Date |
| 8039373 | Pattern film forming method and pattern film forming apparatus A pattern film forming method includes a step of producing a transfer sheet in which a thin film is formed on a surface of a sheet-shaped material and a step of pressing the thin film against a pattern film formation surface of the substrate with a pressing member h... | 10/18/2011 |
| 7569462 | Directional crystallization of silicon sheets using rapid thermal processing The present invention provides a method of recrystallizing a silicon sheet, and in particular recrystallizing a small grained silicon sheet to improve material properties such as grain size and orientation. According to one aspect, the method includes using rapid th... | 08/04/2009 |
| 7179727 | Formation of lattice-tuning semiconductor substrates A method of forming a lattice-tuning semiconductor substrate comprises the steps of defining parallel strips of a Si surface by the provision of spaced parallel oxide walls (2) on the surface, selectively growing a first SiGe layer on the strips such that fir... | 02/20/2007 |
| 7144827 | Poly(organosiloxane) materials and methods for hybrid organic-inorganic dielectrics for integrated circuit applications A method for making an integrated circuit is disclosed as comprising depositing alternating regions of electrically conductive and dielectric materials on a substrate, wherein an area of dielectric material is formed by: a silane precursor having a fully or partiall... | 12/05/2006 |
| 7015079 | Semiconductor film, semiconductor device, and method of manufacturing the same including adding metallic element to the amorphous semiconductor film and introducing oxygen after crystallization By adding a novel improvement to the technique disclosed in JP 8-78329 A, a manufacturing method in which film characteristics of a semiconductor film having a crystalline structure are improved is provided. In addition, a TFT having superior TFT characteristics, su... | 03/21/2006 |
| 6973710 | Method and apparatus for making devices A method and an apparatus for manufacturing a device are provided. The method and the apparatus can form micro wiring without undesired wetting and spreading using an inexpensive functional-liquid supplying method. A method for forming a device, such as a radiofrequ... | 12/13/2005 |
| 6946029 | Sheet manufacturing method, sheet, sheet manufacturing apparatus, and solar cell An inexpensive sheet with excellent evenness and a desired uniform thickness can be obtained by cooling a base having protrusions, dipping the surfaces of the protrusions of the cooled base into a melt material containing at least one of a metal material and a semic... | 09/20/2005 |
| 6916509 | Conveyor device and film formation apparatus for a flexible substrate With a conventional cylindrical can method, a region used as a film formation ground electrode is a portion of the cylindrical can, and an apparatus becomes larger in size in proportion to the surface area of the electrode. A conveyor device and a film formation app... | 07/12/2005 |
| 6830993 | Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method Systems and methods for reducing a surface roughness of a polycrystalline or single crystal thin film produced by the sequential lateral solidification process are disclosed. In one arrangement, the system includes an excimer laser (110) for generating a plur... | 12/14/2004 |
| 6706545 | Method of fabricating a liquid crystal display The present invention relates to a method of fabricating a liquid crystal display panel that involves patterning a silicon film crystallized by sequential lateral solidification. The method comprises the steps of preparing a silicon film, crystallizing the silicon f... | 03/16/2004 |
| 6509275 | Method of manufacturing thin film and pretreating method thereof In pre-treating a surface of a substrate in a process of forming a narrowed thin film pattern on the surface of the substrate from a solution such as a plating liquid, a mask with an opening corresponding to the thin film pattern to be formed later is for... | 01/21/2003 |
| 6488995 | Method of forming microcrystalline silicon film, method of fabricating photovoltaic cell using said method, and photovoltaic device fabricated thereby Disclosed herein is a method of forming a microcrystalline silicon film by using a raw gas containing at least a silicon compound by a high-frequency plasma CVD method, wherein the formation of the film is conducted in such a manner that the residence tim... | 12/03/2002 |
| 6306728 | Stable high voltage semiconductor device structure A power integrated circuit device with multiple guard rings and field plates overlying regions between each of the guard rings. Each of the field plates form overlying a dielectric layer also between each of the guard rings. Multiple field plates can exis... | 10/23/2001 |
| 6255200 | Polysilicon structure and process for improving CMOS device performance A process for depositing polycrystalline silicon, including exposing a semiconductor substrate on which the polycrystalline silicon is to be deposited to a silicon containing gas and a temperature of about 680° C. to about 800° C.... | 07/03/2001 |
| 6185472 | Semiconductor device manufacturing method, manufacturing apparatus, simulation method and simulator A semiconductor device manufacturing method capable of proceeding semiconductor device manufacturing processes according to predetermined schedules or while correcting them without testpieces is provided. The method includes the steps of collecting actual... | 02/06/2001 |
| 5712199 | Method for making semiconductor body and photovoltaic device A method of making a semiconductor body includes the steps of preparing a sheet-like substrate having an insulating film and holes which pass through the insulating film, the holes being disposed at a uniform density, preparing a solution in which a semic... | 01/27/1998 |
| 5571749 | Method and apparatus for forming deposited film A plasma CVD method adapted to a roll-to-roll process or the like wherein the change rate of the temperature of the substrate before and after an i-type semiconductor layer is deposited is made rapid so as to prevent diffusion of impurities occurring due ... | 11/05/1996 |
| 5563095 | Method for manufacturing semiconductor devices A method of continuous manufacture of semiconductor integrated circuits, said method and apparatus adapted to contain the semiconductor substrate, semiconductor deposition coating processes, and etching processes within a substantially collocated series o... | 10/08/1996 |
| 5510151 | Continuous film-forming process using microwave energy in a moving substrate web functioning as a substrate and plasma generating space A microwave plasma CVD method for continuously forming a large area and length functional deposited film, the method comprises: continuously moving a substrate web in the longitudinal direction by paying out it by a pay-out mechanism and taking it up by a... | 04/23/1996 |
| 5496416 | Columnar-grained polycrystalline solar cell and process of manufacture The invention relates to techniques for manufacturing columnar-grained polycrystalline sheets which have particular utility as substrates or wafers for solar cells. The sheet is made by applying granular silicon to a setter material which supports the gra... | 03/05/1996 |
| 5491113 | Method of manufacturing semiconductor device having a planarized surface In a method of manufacturing a semiconductor device, an interlayer insulating film is formed along a surface of a semiconductor substrate having a stepped surface. A stopper surface is formed at least at a recess in the interlayer insulating film. The int... | 02/13/1996 |
| 5491114 | Method of making large-area semiconductor thin films formed at low temperature using nanocrystal presursors A continuous semiconductor thin film is formed by providing a sheet of a substrate material and applying a continuous layer of nanocrystals of the semiconductor material onto the substrate. The layer of nanocrystals is melted at a temperature below that o... | 02/13/1996 |
| 5466636 | Method of forming borderless contacts using a removable mandrel A semiconductor fabrication process for forming borderless contacts (130, 170, 172) using a removable mandrel (110). The process involves depositing a mandrel on an underlying barrier layer (100) designed to protect underlying structures (40) formed on a ... | 11/14/1995 |
| 5273911 | Method of producing a thin-film solar cell A method for producing a thin-film solar cell having a thin-film active layer on a graphite sheet substrate includes the steps of adhering two sheets of graphite together, forming semi-conductor thin films serving as active layers on second main surfaces ... | 12/28/1993 |
| 5053355 | Method and means for producing a layered system of semiconductors A method and means for producing a layered semiconductor system are proposed wherein the required semiconductor layers are deposited on a carrier layer (10) through interaction with a melt (42). The carrier layer (10) itself may have a basic layer consist... | 10/01/1991 |
| 4773964 | Process for the production of an oriented monocrystalline silicon film with localized defects on an insulating support This process consists of producing in the insulating support a periodic configuration which, in the form of regularly spaced parallel insulating strips, has overhanging and recessed parts, the width of the overhanging parts being smaller than that of the ... | 09/27/1988 |
| 4735909 | Method for forming a polycrystalline monolayer Improved techniques are provided for forming a very thin polycrystalline layer of a semiconductor material on a glass substrate. The film material may be formed from a slurry of a semiconductor powder and a liquid carrier, and the slurry economically appl... | 04/05/1988 |
| 4695480 | Method and apparatus for drawing a tape constituted by a support coated in a layer of semiconductor material, said tape being drawn from a liquid bath of said material The method consists in clamping the edges of the tape between two jaws of a clamp and in displacing the clamp vertically upwardly. The apparatus includes two vertical columns (10, 11) along which two carriages (12, 13) are capable of moving, with each car... | 09/22/1987 |
| 4664745 | Method and apparatus for manufacturing tape-shaped silicon crystals with a threaded carrier A method for horizontal silicon tape drawing is provided which can be practiced at a high drawing speed. The carrier member uses parallel threads of a material having a higher emission factor &3xb5; than the emission factor of molten silicon and such thre... | 05/12/1987 |
| 4661200 | String stabilized ribbon growth A method and apparatus for stabilizing the edge positions of a ribbon drawn from a melt includes the use of wettable strings drawn in parallel up through the melt surface, the ribbon being grown between the strings. In one embodiment, the string stabilize... | 04/28/1987 |
| 4604791 | Method for producing multi-layer, thin-film, flexible silicon alloy photovoltaic cells Method and apparatus for producing multi-layer, thin-film flexible photovoltaic cells with front and rear junction regions electrically in series and formed of ceramic glass semi-conductor alloys of silicon laminated with an intervening semi-conducting la... | 08/12/1986 |
| 4599245 | Method for making large-surface silicon crystal bodies Starting plate-like silicon bodies matched to the dimensions desired in a product silicon crystal bodies are melted and then crystallized on a horizontal carrier member having a net structure using a heater arrangement. The carrier member is substantially... | 07/08/1986 |
| 4599244 | Method large-area silicon bodies A method and an apparatus is provided for the manufacture of large-area silicon crystal bodies useful for solar cells. A carrier member consisting of a net-like graphite fabric or quartz fabric is moved horizontally through a heater arrangement carrying s... | 07/08/1986 |
| 4555303 | Oxidation of material in high pressure oxygen plasma A process is disclosed for removing carbonaceous material from a surface in a high pressure oxygen plasma. A surface, such as a surface of a silicon ribbon, having a layer of carbonaceous material thereon is positioned in a high pressure plasma reaction v... | 11/26/1985 |
| 4547256 | Method for thermally treating a semiconductor substrate Apparatus and method are provided for thermally treating a semiconductor substrate. According to the method, the substrate is isothermally heated to an elevated temperature near the thermal treatment temperature and then is further heated to a higher temp... | 10/15/1985 |
| 4533428 | Method and device for asymmetrically coating a tape-shaped carrier body with silicon for further processing into solar cells A method for continuously manufacturing silicon tapes which are predominantly coated on one side of the carrier, for solar cells. In an exemplary embodiment, a carrier body consisting of a graphite network is conducted vertically upwards through a guide c... | 08/06/1985 |
| 4526809 | Process and apparatus for formation of photovoltaic compounds The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Znx Cd1-x S compound having a preselected fixed ratio of cadmium to zin... | 07/02/1985 |
| 4525223 | Method of manufacturing a thin ribbon wafer of semiconductor material A novel thin ribbon wafer of semiconductor having a polycrystalline structure composed of more than 50% of a grain having a grain size of more than 5 μm, a thickness of 5 to 200 μm, sufficient flexibility to be windable on a pipe having a diameter of 34... | 06/25/1985 |
| 4523966 | Process of producing silicon ribbon with p-n junction The disclosed process produces a silicon ribbon wafer with a p-n junction, by melting a raw silicon material, ejecting the molten silicon material onto a rotary cooling member so as to produce a silicon ribbon wafer through super-rapid cooling, and applyi... | 06/18/1985 |
| 4497675 | Process for the manufacture of substrates from carbon-coated silicon dioxide fabric that can be used for large-surface silicon bodies The invention concerns a process for the manufacture of substrates from carbon-coated SiO2 fabric that can be used for large-surface silicon bodies, in which mineral materials or waste containing SiO2 are used as starting materials a... | 02/05/1985 |
