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Class 438/49 - Chemically responsive


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a semiconductor device responsive to
No. of patents: 208
Last issue date: 01/24/2012


1            
NumberTitleIssue Date
8101448Manufacturing method of a gas sensor integrated on a semiconductor substrate
A method manufactures a gas sensor integrated on a semiconductor substrate. The method includes: realizing a first plurality of openings in the semiconductor substrate; realizing a crystalline silicon membrane suspended on the semiconductor substrate, forming an ins...
01/24/2012
7955883Polymer replicated interdigitated electrode array for (bio) sensing applications
Interdigitated electrode arrays are very promising devices for multi-parameter (bio)sensing, for example the label-free detection of nucleic acid hybridization for diagnostic applications. The current disclosure provides an innovative method for the affordable manuf...
06/07/2011
7829362Field-effect transistor, sensor using it, and production method thereof
A sensor which has high measuring sensitivity and is excellent in response is provided by forming a porous film in a sensitive section of a field-effect transistor. It comprises a porous body, which is formed on a sensitive section (here, a gate insulating film) of ...
11/09/2010
7749791Sensor and method of manufacturing the same
A sensor comprising a semiconductor film having a plurality of mesopores and containing an oxide, and electrodes electrically connected to the semiconductor film, wherein at least part of surfaces in the mesopores is coated with an organic material. ...
07/06/2010
7741142Method of fabricating a biosensor
The present invention provides a method of fabricating a biosensor. The method includes providing a substrate which has a surface coating. The surface coating is deformable and the substrate includes a layered structure which has at least two electrically conductive...
06/22/2010
7695993Matrix nanocomposite sensing film for SAW/BAW based hydrogen sulphide sensor and method for making same
A method can be adapted for design and preparation of a matrix nanocomposite sensing film for hydrogen sulphide SAW/BAW detection at room temperature. A matrix nanocomposite can be synthesized by incorporating both single-wall and multi-wall thiolated carbon nanotub...
04/13/2010
7674645Diode energy converter for chemical kinetic electron energy transfer
An improved diode energy converter for chemical kinetic electron energy transfer is formed using nanostructures and includes identifiable regions associated with chemical reactions isolated chemically from other regions in the converter, a region associated with an ...
03/09/2010
7662652Chemical sensor using semiconducting metal oxide nanowires
Indium oxide nanowires are used for determining information about different chemicals or Biologics. Chemicals are absorbed to the surface of the nanowires, and cause the semiconducting characteristics of the Nanowires to change. These changed characteristics are sen...
02/16/2010
7632697Nitride semiconductor thin film and method for growing the same
The present invention relates to a nitride semiconductor thin film and a method for growing the same. The present invention has an advantage in that a plurality of grooves are formed on a substrate by partially etching the substrate, and leg portions for preventing ...
12/15/2009
7592195Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement
In a method for producing a sensor arrangement and the resulting sensor arrangement, a sensor is provided on or in a chip and the chip is covered with a protective cover, the cover being an interface between the sensor and the environment. An adhesive layer is provi...
09/22/2009
7582500Reference pH sensor, preparation and application thereof
A reference pH sensor, the preparation and application thereof. The reference pH sensor is an extended gate field effect transistor (EGFET) structure and comprises a metal oxide semiconductor field effect transistor (MOSFET) on a semiconductor substrate, a sensing u...
09/01/2009
7550310Techniques and systems for analyte detection
Techniques are used to detect and identify analytes. Techniques are used to fabricate and manufacture sensors to detect analytes. An analyte (810) is sensed by sensors (820) that output electrical signals in response to the analyte. The electrical sign...
06/23/2009
7501301Low cost fabrication of microelectrode arrays for cell-based biosensors and drug discovery methods
A method for making a plurality of low-cost microelectrode arrays (MEAs) on one substrate utilizing certain unmodified printed circuit board (PCB) fabrication processes and selected materials. In some embodiments, a MEA device is composed of a thin polymer substrate...
03/10/2009
7439562Process for modifying at least one electrical property of a nanotube or a nanowire and a transistor incorporating it
The present invention concerns a method for modyfing at least an electronic property of a carbon nanotube or nanowire comprising exposing said nanotube or nanowire to an acid having the formula (I) wherein R1, R2 and R3 are chosen in...
10/21/2008
7435610Fabrication of array pH sensitive EGFET and its readout circuit
A method for fabricating an array pH sensor and a readout circuit device of such array pH sensor are implemented by utilizing an extended ion sensitive field effect transistor to construct the array pH sensor and related readout circuit. The structure of the array s...
10/14/2008
7427526Deposited thin films and their use in separation and sacrificial layer applications
This invention uses large surface to volume ratio materials for separation, release layer, and sacrificial material applications. The invention outlines the material concept, application designs, and fabrication methodologies. The invention is demonstrated using dep...
09/23/2008
7416699Carbon nanotube devices
Nanotubes and nanotube-based devices are implemented in a variety of applications. According to an example embodiment of the present invention, a nanotube is adapted to pass current between two conductive elements. In one implementation, each conductive element incl...
08/26/2008
7416911Electrochemical method for attaching molecular and biomolecular structures to semiconductor microstructures and nanostructures
A method by which silicon nanostructures may be selectively coated with molecules or biomolecules using an electrochemical process. This chemical process may be employed as a method for coating many different nanostructures within a circuit, each with a different mo...
08/26/2008
7387952Semiconductor substrate for solid-state image pickup device and producing method therefor
A semiconductor substrate for forming a pixel area provided surfacially with a plurality of pixels for photoelectric conversion, the semiconductor substrate, including a polysilicon film of a thickness of 0.5-2.0, on a rear surface of the pixel area-bearing surface,...
06/17/2008
7361313Methods for uniform metal impregnation into a nanoporous material
The methods, systems 400 and apparatus disclosed herein concern metal 150 impregnated porous substrates 110, 210. Certain embodiments of the invention concern methods for producing metal-coated porous silicon substrates 110, 210 that exhi...
04/22/2008
7356913Process for manufacturing a microsystem
A process for making microswitches or microvalves, composed of a substrate and used for shifting between a first state of functioning and a second state of functioning by means of a bimetal-effect thermal sensor. The sensor includes a deformable element attached, at...
04/15/2008
7354785Electroluminescent light emitting device
An electroluminescent device having a light emitting layer (25) containing phosphor particles (31, 32), wherein the phosphor particles protrude from the light emitting layer to cause the surrounding layers to conform to the protrusions, thus increasing...
04/08/2008
7335526Sensing system
A ChemFET Sensing system is Described. ...
02/26/2008
7329387Field-effect transistor, sensor using it, and production method thereof
A sensor which has high measuring sensitivity and is excellent in response is provided by forming a porous film in a sensitive section of a field-effect transistor. It comprises a porous body, which is formed on a sensitive section (here, a gate insulating film) of ...
02/12/2008
7323355Method of forming a microelectronic device
A method of forming a microelectronic device (300) including the steps of forming a sensor component (100) and a capping component (200). The sensor component (100) includes a sensor structure (150, 152) and a conductive trace (...
01/29/2008
7319046Integrated optoelectronic silicon biosensor for the detection of biomolecules labeled with chromophore groups or nanoparticles
An integrated optoelectronic silicon biosensor that can detect biomolecules by the change of the optical coupling between the integrated light source and the integrated detector that is caused by the binding of the appropriately labeled analytes onto the recognition...
01/15/2008
7314801Semiconductor device having a surface conducting channel and method of forming
A semiconductor device including a metal oxide layer, a channel area of the metal oxide layer, a preservation layer formed on the channel area of the metal oxide layer, and at least two channel contacts coupled to the channel area of the metal oxide layer, and a met...
01/01/2008
7312095Modification of selectivity for sensing for nanostructure sensing device arrays
An electronic system for selectively detecting and identifying a plurality of chemical species, which comprises an array of nanostructure sensing devices, is disclosed. Within the array, there are at least two different selectivities for sensing among the nanostruct...
12/25/2007
7309621Method to fabricate a nanowire CHEMFET sensor device using selective nanowire deposition
A method of fabricating a nanowire CHEMFET sensor mechanism includes preparing a silicon substrate; depositing a polycrystalline ZnO seed layer on the silicon substrate; patterning and etching the polycrystalline ZnO seed layer; depositing an insulating layer over t...
12/18/2007
7306965Oxygen ion conductor device, method for fabricating oxygen ion conductor device, and oxygen concentration control system
A first electrode thin film is formed on an upper surface of the oxygen ion conductive thin film so as to have a through hole. A resistor is formed on part of the upper surface of the oxygen conductive thin film located in the through hole. Thus, the oxygen ion cond...
12/11/2007
7294899Nanowire Filament
A method of manufacturing a nanowire filament includes forming and fusing actions. In a forming action, close proximity conductors are formed. In another forming action, a junction oxide is formed between the close proximity conductors. In a fusing action, a nanowir...
11/13/2007
7288873Device for emission of high frequency signals
A device for emission of high frequency signals is provided. The emission device is capable of emission of signals in the Gigahertz (GHz) and Terahertz (THz) range. The device may utilize, for example, a cantilever comprising a material that is capable of altering i...
10/30/2007
7287412Method and apparatus for sensing hydrogen gas
A hydrogen sensor and/or switch fabricated from an array of nanowires or a nanoparticle thick film composed of metal or metal alloys. The sensor and/or switch demonstrates a wide operating temperature range and shortened response time due to fabrication materials an...
10/30/2007
7289230Wireless substrate-like sensor
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the se...
10/30/2007
7283255Wireless substrate-like sensor
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the se...
10/16/2007
7264778Carbon monoxide sensor and method of use thereof
Carbon monoxide sensors suitable for use in hydrogen feed streams and methods of use thereof are disclosed. The sensors are palladium metal/insulator/semiconductor (Pd-MIS) sensors which may possess a gate metal layer having uniform, Type 1, or non-uniform, Type 2, ...
09/04/2007
7262991Nanotube- and nanocrystal-based non-volatile memory
An embodiment is a transistor for non-volatile memory that combines nanocrystal and nanotube paradigm shifts. In particular an embodiment is a transistor-based non-volatile memory element that utilizes a carbon nanotube channel region and nanocrystal charge storage ...
08/28/2007
7242241Reference circuit
A reference circuit comprising first and second field effect transistors connected to form a first current mirror, and third and fourth field effect transistors connected to form a second current mirror, wherein a property of the first transistor is mismatched relat...
07/10/2007
7237429Continuous-range hydrogen sensors
The present invention provides for novel hydrogen sensors and methods for making same. In some embodiments, such novel hydrogen sensors are continuous-range hydrogen sensors comprising Pd—Ag nanoparticles arrayed as nanowires or two-dimensional shapes on a resisti...
07/03/2007
7238534Capillary active test element having an intermediate layer situated between the support and the covering
The invention concerns a device for withdrawing samples of liquid samples for analytical elements. The capillary-device channel is essentially formed by a carrier, a cover and optionally an intermediate layer between the cover and carrier. A notch is located in one ...
07/03/2007
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