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Class 438/33 - Substrate dicing


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process having a step of dividing the semiconductor substrate
No. of patents: 439
Last issue date: 02/07/2012


1                      
NumberTitleIssue Date
8110422Manufacturing method of semiconductor laser element
Starting point regions for cutting 8a, 8b extending along lines to cut 5a, 5b are initially formed in an object to be processed 1. The starting point regions for cutting 8b have modified re...
02/07/2012
8110423Method of manufacturing semiconductor light-emitting device
A method of manufacturing a semiconductor light-emitting device which includes the steps of forming a plurality of light-emitting device sections (40), having an approximately rectangular shape in plan view, on a substrate (10) in a matrix shape, formi...
02/07/2012
8105857Method of fabricating group-III nitride semiconductor laser device
A method for fabricating a III-nitride semiconductor laser device includes: forming a substrate product having a laser structure; scribing a first surface of the substrate product to form a scribed mark, which extends along a reference line indicative of a direction...
01/31/2012
8105856Method of manufacturing semiconductor device with wiring on side surface thereof
Cost is reduced and reliability is improved with a BGA (Ball Grid Array) type semiconductor device which has ball-shaped conductive terminals. A first wiring is formed on an insulation film which is formed on a surface of a semiconductor die. A glass substrate is bo...
01/31/2012
8076167Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device
Provided are a group-III nitride semiconductor laser device with a laser cavity to enable a low threshold current on a semipolar surface of a hexagonal group-III nitride, and a method for fabricating the group-III nitride semiconductor laser device on a stable basis...
12/13/2011
8071405Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device
Provided is a group-III nitride semiconductor laser device with a laser cavity enabling a low threshold current, on a semipolar surface of a support base the c-axis of a hexagonal group-III nitride of which tilts toward the m-axis. In a laser structure 13, a ...
12/06/2011
8067256Method of making microelectronic package using integrated heat spreader stiffener panel and microelectronic package formed according to the method
A method of making a microelectronic package, and a microelectronic package made according to the method. The method includes: bonding and thermally coupling a plurality of IC dies to an IHS panel to yield a die-carrying IHS panel; mounting the die-carrying IHS pane...
11/29/2011
8062916Series connected flip chip LEDs with growth substrate removed
LED layers are grown over a sapphire substrate. Individual flip chip LEDs are formed by trenching or masked ion implantation. Modules containing a plurality of LEDs are diced and mounted on a submount wafer. A submount metal pattern or a metal pattern formed on the ...
11/22/2011
8043878Method for manufacturing high efficiency light-emitting diodes
A method for manufacturing a light-emitting device comprising the steps of cutting a light-emitting unit by a laser beam, and cleaning the light-emitting unit by an acid solution to remove by-products resulted from the laser cutting. ...
10/25/2011
8017421Method of manufacturing semiconductor light emitting device
Provided is a method of manufacturing semiconductor light emitting devices including: forming light emitting structures by sequentially depositing a first material layer, an active layer and a second material layer; forming the roughness pattern on a region of the b...
09/13/2011
7951630Method of fabricating light emitting diode chip
The present invention provides a method of fabricating a light emitting diode chip having an active layer between an N type semiconductor layer and a P type semiconductor layer. The method comprises the steps of preparing a substrate; laminating the semiconductor la...
05/31/2011
7932111Substrate removal process for high light extraction LEDs
A method for fabricating light emitting diode (LEDs) comprises providing a plurality of LEDs on a substrate wafer, each of which has an n-type and p-type layer of Group-III nitride material formed on a SiC substrate with the n-type layer sandwiched between the subst...
04/26/2011
7901967Dicing method for semiconductor substrate
A method for dicing a semiconductor substrate includes: forming a reforming layer in the substrate by irradiating a laser beam on the substrate; forming a groove on the substrate along with a cutting line; and applying a force to the substrate in order to cutting th...
03/08/2011
7858414Nitride semiconductor device and manufacturing method thereof
A method of manufacturing a nitride semiconductor device includes the steps of forming a groove on a surface of a first substrate by scribing, and forming a nitride semiconductor layer on the surface where the groove is formed. In addition, the method includes the s...
12/28/2010
7851241Method for severing brittle material substrate and severing apparatus using the method
There are provided a scribing step of performing scribing in a state in which a protective material is applied on at least one surface of a brittle material substrate, and a first scribing device that performs this scribing step. Accordingly, it is possible to form ...
12/14/2010
7842529Method of manufacturing nitride semiconductor light emitting element including forming scribe lines sandwiching and removing high density dislocation sections
In a method for manufacturing a III-V nitride compound semiconductor light emitting element, light emitting element regions (21) are formed in a low dislocation region on the III-V nitride compound semiconductor substrate wherein high density dislocation sect...
11/30/2010
7829360Vertical indent production repair
A method of nanomachining is provided. The method includes plunging a nanometer-scaled tip into a surface of a substrate at a first location in a first direction that is substantially perpendicular to the surface, thereby displacing a first portion of the substrate ...
11/09/2010
7824941Method for producing an LED light source comprising a luminescence conversion element
The invention describes a method for producing a light-emitting-diode (LED) light source, particularly comprising mixed-color LEDs, wherein at least a portion of primary radiation emitted by a chip is transformed by luminescence conversion. Said chip comprises a fro...
11/02/2010
7811845Method for manufacturing high efficiency light-emitting diodes
A method for manufacturing a light-emitting device comprising the steps of cutting a light-emitting unit by a laser beam, and cleaning the light-emitting unit by an acid solution to remove by-products resulted from the laser cutting. ...
10/12/2010
7795060Lead cutter and method of fabricating semiconductor device
Aimed at stably forming sheared surfaces of leads of semiconductor devices, and at raising ratio of formation of plated layers onto the sheared surfaces of the leads, a lead cutter has a die 106, and a cutting punch 110 having a cutting edge at least o...
09/14/2010
7795059Method of fabricating a semiconductor light-emitting device
A semiconductor light-emitting element has a laminated section which has an active layer made of a semiconductor, and first and second clad layers each being disposed to sandwich the active layer and made of a semiconductor, a pair of first high-reflection layers ea...
09/14/2010
7754511Laser lift-off method
The present invention discloses a laser lift-off method, which applies to lift off a transient substrate from an epitaxial layer grown on the transient substrate after a support substrate having an adhesion metal layer is bonded to the epitaxial layer. Firstly, the ...
07/13/2010
7745244Pin substrate and package
A semiconductor die package. Embodiments of the package can include a substrate with solid conductive pins disposed throughout. A semiconductor die can be attached to a surface of the substrate. Electrical connection to the semiconductor die can be provided by the s...
06/29/2010
7741137Method of manufacturing electro-optical device
A method of manufacturing a plurality of electro-optical devices by notching, dicing, and cutting a composite substrate obtained by adhering a first substrate and a second substrate which faces the first substrate with an electro-optical layer interposed therebetwee...
06/22/2010
7727790Method for fabricating light emitting diodes
The invention is method for fabricating light emitting diodes. A layered semiconductor structure is provided on a growth substrate. The method includes using a pulsed laser to form an interfacial layer between the layered semiconductor structure and the growth subst...
06/01/2010
7709283Method of manufacturing a semiconductor device having an insulating protective film covering at least a portion of a tile-shaped element
The invention provides a semiconductor device, a method of manufacturing the same, an electro-optic device and an electronic apparatus which are capable of addressing or solving a problem of mechanical mounting of a semiconductor element chip on a substrate. A semic...
05/04/2010
7704769Optical device manufacturing method
An optical device manufacturing method including the steps of: forming a groove with a depth corresponding to a finish thickness of the heat sink in a heat sink material at a position corresponding to an associated one of the streets sectioning the plurality of opti...
04/27/2010
7700392Manufacturing method of semiconductor laser devices and manufacturing apparatus of the same
The present invention is to provide a semiconductor laser device manufacturing method for realizing highly reliable semiconductor laser devices. The semiconductor laser device manufacturing method includes: cutting a wafer into bar-shaped wafers by scanning an elect...
04/20/2010
7687292Light emitting diode package with metal reflective layer and method of manufacturing the same
The invention relates to an LED package having a metal reflective layer for focusing and emitting light through a side of the package, and a manufacturing method of the same. The LED package includes a substrate with an electrode formed thereon, a light emitting dio...
03/30/2010
7687291Laser facet passivation
Methods of preparing front and back facets of a diode laser include controlling an atmosphere within a first chamber, such that an oxygen content and a water vapor content are controlled to within predetermined levels and cleaving the diode laser from a wafer within...
03/30/2010
7682858Wafer processing method including formation of a deteriorated layer
A wafer processing method for dividing a wafer having function elements in area sectioned by dividing lines formed on the front surface in a lattice pattern into individual chips along the dividing lines, comprising a deteriorated layer forming step for forming a de...
03/23/2010
7648850Method for producing semiconductor chip
A method for producing many semiconductor chips, each having a semiconductor circuit disposed on the face thereof and a die bonding film stuck to the back thereof, from a semiconductor wafer in which many rectangular regions are defined on its face by streets arrang...
01/19/2010
7642113Semiconductor wafer dividing method
An element is formed on the major surface of a semiconductor wafer, and a groove is formed in the back surface of the semiconductor wafer along a dicing line or chip dividing line by a mechanical or chemical method. A modified layer is formed by irradiating the groo...
01/05/2010
7642112Method of manufacturing bonded substrate stack
A method of manufacturing a bonded substrate stack includes a bonding surface processing step of processing at least one of first and second substrates each containing silicon and having a bonding surface, and a bonding step of bonding the bonding surface of the fir...
01/05/2010
7632696Semiconductor chip with a porous single crystal layer and manufacturing method of the same
A semiconductor chip including a semiconductor substrate provided with a semiconductor device region and a porous single crystal layer, where the semiconductor device region is formed on the main surface portion of the semiconductor substrate, and the porous single ...
12/15/2009
7585689Method for manufacturing semiconductor laser device and method for inspecting semiconductor laser bar
A method for manufacturing a semiconductor laser device in which a first conductivity type cladding layer, and active layer, a second conductivity type first cladding layer, and a second conductivity type second cladding layer are laminated in this order on a semico...
09/08/2009
7579202Method for fabricating light emitting diode element
The present invention discloses a method for fabricating a light emitting diode element, which incorporates an epitaxial process with an etching process to etch LED epitaxial layers bottom up and form side-protrudent structures, whereby the LED epitaxial layers have...
08/25/2009
7572657Method for fabrication of semiconductor light-emitting device and the device fabricated by the method
A method for producing a semiconductor light-emitting device includes stacking at least a first conductive type semiconductor layer (2), an active layer (3) and a second conductive type semiconductor layer (4) on a substrate (1) to form a...
08/11/2009
7569409Isolation structures for CMOS image sensor chip scale packages
Isolation structure for CMOS image sensor device chip scale packages and fabrication methods thereof. A CMOS image sensor chip scale package includes a transparent substrate configured as a support structure for the package. The transparent substrate includes a firs...
08/04/2009
7479399System and method for providing automated sample preparation for plan view transmission electron microscopy
A system and method is described for providing automated sample preparation for plan view transmission electron microscopy. A sample wafer is microcleaved from a semiconductor wafer and mounted on a first support stub. Then the sample wafer is cut with an automated ...
01/20/2009
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