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Class 438/313 - Complementary bipolar transistors


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a structure which comprises plural bipolar
No. of patents: 109
Last issue date: 05/08/2012


1      
NumberTitleIssue Date
8173511Method of manufacturing a semiconductor device and semiconductor device obtained with such a method
The invention relates to a method of manufacturing a semiconductor device (10) with a substrate (11) and a semiconductor body (12) which is provided with at least one bipolar transistor having an emitter region (1), a base region (2
05/08/2012
7713829Incorporation of carbon in silicon/silicon germanium epitaxial layer to enhance yield for Si-Ge bipolar technology
A SiGe bipolar transistor containing substantially no dislocation defects present between the emitter and collector region and a method of forming the same are provided. The SiGe bipolar transistor includes a collector region of a first conductivity type; a SiGe bas...
05/11/2010
7422951Method of fabricating self-aligned bipolar transistor
The present invention provides a method of fabricating a self-aligned bipolar transistor, by which the fabricating method can be simplified by forming P+ and N+ junctions by self-alignment and by which device reliability can be enhanced. The present invention includ...
09/09/2008
7390720Local collector implant structure for heterojunction bipolar transistors and method of forming the same
A bipolar transistor structure includes an intrinsic base layer formed over a collector layer, an emitter formed over the intrinsic base layer, and an extrinsic base layer formed over the intrinsic layer and adjacent the emitter. A ring shaped collector implant stru...
06/24/2008
7368822Copper metalized ohmic contact electrode of compound device
The present invention provides an ohmic contact for a copper metallization whose heat diffusion is improved and cost is reduced. Therein, the ohmic contact is formed through a depositing and an annealing of three metal layers of Pd, Ge and Cu; and, the contact resis...
05/06/2008
7347228Method of making semiconductor devices
A method for fabricating semiconductor device is provided. A high stress layer formed on, under or on both sides of the transistors of the semiconductor device is employed as a cap layer. A specific region is then defined through photo resistor mask, and the stress ...
03/25/2008
7342276Method and apparatus utilizing monocrystalline insulator
A semiconductor device, including: a semiconductor material; a conductive element; and a substantially monocrystalline insulator disposed between the semiconductor material and the conductive eleme...
03/11/2008
7329941Creating increased mobility in a bipolar device
The mobility of charge carriers in a bipolar (BJT) device is increased by creating compressive strain in the device to increase mobility of electrons in the device, and creating tensile strain in the device to increase mobility of holes in the device. The compressiv...
02/12/2008
7314791Bipolar transistor for an integrated circuit having variable value emitter ballast resistors
An integrated circuit including a bipolar transistor with improved forward second breakdown is disclosed. In one embodiment, the bipolar transistor includes a base, a collector, a plurality of emitter sections coupled to a common emitter and a ballast emitter for ea...
01/01/2008
7309905Bipolar-based SCR for electrostatic discharge protection
A system and method is disclosed for implementing a new bipolar-based silicon controlled rectifier (SCR) circuit for an electrostatic discharge (ESD) protection. The SCR circuit comprises a bipolar device to be formed on a semiconductor substrate. The bipolar device...
12/18/2007
7300883Method for patterning sub-lithographic features in semiconductor manufacturing
A method of forming a gate electrode (24′) for a metal-oxide-semiconductor (MOS) integrated circuit is disclosed. A hardmask layer (26), for example formed of silicon-rich nitride, is deposited over a polysilicon layer (24) from which the gate...
11/27/2007
7282803Integrated electronic circuit comprising a capacitor and a planar interference inhibiting metallic screen
An electronic circuit includes a substrate. A capacitor and at least one semiconductor component are supported by a surface of the substrate. A substantially planar screen, oriented parallel to the surface of the substrate and made of metallic material, is placed be...
10/16/2007
7271046Method of making a semiconductor device in which a bipolar transistor and a metal silicide layer are formed on a substrate
A semiconductor device includes a bipolar transistor formed on a semiconductor substrate 1, in which a collector region 13 is formed on the semiconductor substrate 1; a first insulating layer 31 having a first opening 51 formed in ...
09/18/2007
7271434Capacitor with insulating nanostructure
The present invention discloses a method including providing a substrate; forming a lower conductor over the substrate; forming a conducting nanostructure over the lower conductor; forming a thin dielectric over the conducting nanostructure; and forming an upper con...
09/18/2007
7262137Dry etching process for compound semiconductors
Accordingly, this invention relates to an dry etching process for semiconductor wafers. More particularly, the present invention discloses a dry etching process including a halogen etchant (24) and a nitrogen gas (28) that selectively etches a compound...
08/28/2007
7226844Method of manufacturing a bipolar transistor with a single-crystal base contact
A method forms a bipolar transistor in a semiconductor substrate of a first conductivity type. The method includes: forming on the substrate a single-crystal silicon-germanium layer; forming a heavily-doped single-crystal silicon layer of a second conductivity type;...
06/05/2007
7220647Method of cleaning wafer and method of manufacturing gate structure
A method of cleaning a wafer, adapted for a patterned gate structure. The gate structures comprise a gate dielectric layer, a nitrogen-containing barrier layer and a silicon-containing gate layer sequentially stacked over the substrate. The method includes cleaning ...
05/22/2007
7205604Ultra scalable high speed heterojunction vertical n-channel MISFETs and methods thereof
A method for forming and the structure of a strained vertical channel of a field effect transistor, a field effect transistor and CMOS circuitry is described incorporating a drain, body and source region on a sidewall of a vertical single crystal semiconductor struc...
04/17/2007
7192838Method of producing complementary SiGe bipolar transistors
Method of producing complementary SiGe bipolar transistors. In a method of producing complementary SiGe bipolar transistors, interface oxide layers (38, 58) for NPN and PNP emitters (44, 64), are separately formed and emitter polysilicon (40, 60...
03/20/2007
7190046Bipolar transistor having reduced collector-base capacitance
Structure and method are provided for forming a bipolar transistor. As disclosed, an intrinsic base layer is provided overlying a collector layer. A low-capacitance region is disposed laterally adjacent the collector layer. The low-capacitance region includes at lea...
03/13/2007
7183627Independent control of polycrystalline silicon-germanium in an HBT and related structure
In one embodiment a precursor gas for growing a polycrystalline silicon-germanium region and a single crystal silicon-germanium region is supplied. The precursor gas can be, for example, GeH4. The polycrystalline silicon-germanium region can be, for examp...
02/27/2007
7166517Semiconductor device and method of manufacture thereof
The present invention provides a method of manufacturing a semiconductor device which includes an amorphous semiconductor film forming treatment of supplying a starting material gas containing germanium to a semiconductor substrate, thereby forming an amorphous semi...
01/23/2007
7144788Method for manufacturing a transmitting optical sub-assembly with a thermo-electric cooler therein
The present invention relates to a method for manufacturing an optical transceiver that installs an optical transmitting assembly and an optical receiving assembly both are compact, inexpensive, and capable of operating at a high speed. The optical transmitting asse...
12/05/2006
7144789Method of fabricating complementary bipolar transistors with SiGe base regions
In a method of fabricating complementary bipolar transistors with SiGe base regions the base regions of the NPN and PNP transistors are formed one after the other over two collector regions 20, 14 by epitaxial deposition of crystalline silicon-germanium layer...
12/05/2006
7141478Multi-stage EPI process for forming semiconductor devices, and resulting device
The present invention is generally directed to a multi-stage epi process for forming semiconductor devices, and the resulting device. In one illustrative embodiment, the method comprises forming a first layer of epitaxial silicon above a surface of a semiconducting ...
11/28/2006
7135721Heterojunction bipolar transistor having reduced driving voltage requirements
The bipolar transistor of the present invention includes a Si collector buried layer, a first base region made of a SiGeC layer having a high C content, a second base region made of a SiGeC layer having a low C content or a SiGe layer, and a Si cap layer 14 i...
11/14/2006
7135756Array of cells including a selection bipolar transistor and fabrication method thereof
A cell array is formed by a plurality of cells each including a selection bipolar transistor and a storage component. The cell array is formed in a body including a common collector region of P type; a plurality of base regions of N type, overlying the common collec...
11/14/2006
7135349Photodiode and method of fabricating the same
Photodiodes and methods of fabricating photodiodes are provided. For example, a method of fabricating a photodiode includes forming a buried layer of a first conductive type on a semiconductor substrate and forming a first intrinsic capping epitaxial layer on the bu...
11/14/2006
7132344Super self-aligned BJT with base shorted field plate and method of fabricating
A bipolar junction transistor (BJT) structure and fabrication method are provided in which a doped polysilicon filled trench is utilized to form both the extrinsic base contact region and a vertical field plate. A sacrificial mandrel of dielectric material is formed...
11/07/2006
7109567Semiconductor device and method of manufacturing such device
The invention relates to a semiconductor device with a heterojunction bipolar, in particular npn, transistor with an emitter region (1), a base region (2), and a collector region (3), which are provided with respectively a first, a second, and a...
09/19/2006
7091100Polysilicon bipolar transistor and method of manufacturing it
In the inventive method of producing a base terminal structure for a bipolar transistor, an etch stop layer is applied on a single-crystal semiconductor substrate, a poly-crystal base terminal layer is produced on the etch stop layer and an emitter window is etched ...
08/15/2006
7071536Semiconductor device and manufacturing method thereof
A high voltage semiconductor device having a high current gain hFE is formed with a collector region (20) of a first conduction type, an emitter region (40) of the first conduction type, and a base region (30) of a second conduction type opposit...
07/04/2006
7060632Methods for fabricating strained layers on semiconductor substrates
Methods for fabricating multi-layer semiconductor structures including strained material layers using a minimum number of process tools and under conditions optimized for each layer. Certain regions of the strained material layers are kept free of impurities that ca...
06/13/2006
7033899Method of making semiconductor devices
A method for fabricating semiconductor device is provided. A high stress layer formed on, under or on both sides of the transistors of the semiconductor device is employed as a cap layer. A specific region is then defined through photo resistor mask, and the stress ...
04/25/2006
7026666Self-aligned NPN transistor with raised extrinsic base
A self-aligned bipolar transistor and a method of formation thereof are provided. The bipolar transistor has a raised extrinsic base such that the link base resistance is reduced by providing an extrinsic base which is thicker than the intrinsic base. The increase i...
04/11/2006
7022248Method for patterning a self-aligned coil using a damascene process
A method for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Coppe...
04/04/2006
7015085Super self-aligned collector device for mono-and hetero bipolar junction transistors and method of making same
The invention relates to a process of forming a compact bipolar junction transistor (BJT) that includes forming a self-aligned collector tap adjacent the emitter stack and an isolation structure. A base layer is formed from epitaxial silicon that is disposed in the ...
03/21/2006
7008852Discontinuous dielectric interface for bipolar transistors
A process for forming at least one interface region between two regions of semiconductor material. At least one region of dielectric material comprising nitrogen is formed in the vicinity of at least a portion of a boundary between the two regions of semiconductor m...
03/07/2006
7001806Semiconductor structure with increased breakdown voltage and method for producing the semiconductor structure
A semiconductor structure comprises a buried first semiconductor layer of a first doping type, a second semiconductor layer of the first doping type on the buried semiconductor layer, which is less doped than the buried first semiconductor layer, a semiconductor are...
02/21/2006
6992338CMOS transistor spacers formed in a BiCMOS process
According to an exemplary method in one embodiment, a transistor gate is fabricated on a substrate. Next, an etch stop layer may be deposited on the substrate. The etch stop layer may, for example, be TEOS silicon dioxide. Thereafter, a conformal layer is deposited ...
01/31/2006
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